CN215510650U

CN215510650U - Fixing device is used in processing of metal plane target

Info

Publication number: CN215510650U
Application number: CN202120406209.3U
Authority: CN
Inventors: 邹硕华
Original assignee: Changsha Xinkang Advanced Material Corp ltd
Current assignee: Changsha Xinkang Advanced Material Corp ltd
Priority date: 2021-02-24
Filing date: 2021-02-24
Publication date: 2022-01-14
Anticipated expiration: 2031-02-24

Abstract

The utility model discloses a fixing device for processing a metal plane target, which comprises a base, wherein a first mounting plate and a second mounting plate are correspondingly arranged on two sides of the rear end of the top of the base, a first motor is arranged on the right side of the outer wall of the first mounting plate through a fixing plate, the output end of the first motor is connected with one end of a first threaded rod, one end of the first threaded rod, which is far away from the first mounting plate, is rotatably connected with the inner side of the second mounting plate, a sliding rod is arranged at the front end between the first mounting plate and the second mounting plate, a moving block is sleeved on the outer walls of the first threaded rod and the sliding rod, the top of the moving block is connected with the bottom of an upright post, and one side of the upright post is slidably connected with one end of a connecting rod, can effectively meet the use requirements of workers.

Description

Fixing device is used in processing of metal plane target

Technical Field

The utility model relates to the technical field of planar target processing equipment, in particular to a fixing device for processing a metal planar target.

Background

The sputtering target material can be divided into a plane target material, a multi-arc target material and a rotary target material according to the shape, wherein the plane target material mainly refers to a round target material and a rectangular target material with a certain thickness, the plane target material is connected with sputtering equipment in a mode of luwen and the like, a film layer is sputtered and attached to a substrate under the vacuum condition, and then the film is processed by various means (etching) so as to meet different requirements.

Need fix the target in the course of working to metal plane target, current fixing device is ideal inadequately to the fixed effect of target, and offset appears in the course of working easily, has reduced the machining effect to metal plane target, has reduced fixing device's work efficiency, can't satisfy staff's user demand.

Therefore, we propose a fixing device for processing a metal plane target to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a fixing device for processing a metal planar target, so as to solve the problems of the background art.

In order to achieve the purpose, the utility model provides the following technical scheme:

the utility model provides a fixing device is used in processing of metal plane target, the on-line screen storage device comprises a base, base top rear end both sides correspondence is equipped with first mounting panel and second mounting panel, first mounting panel outer wall right side is equipped with first motor through the fixed plate, first motor output end is connected with first threaded rod one end, first mounting panel one end is kept away from to first threaded rod and the inboard rotation of second mounting panel is connected, the front end is equipped with the slide bar between first mounting panel and the second mounting panel, first threaded rod and slide bar outer wall cover are equipped with the movable block, the movable block top is connected with the stand bottom, stand one side and connecting rod one end sliding connection, the stand one end is kept away from to the connecting rod is connected with the working plate, working plate top central point department of putting is equipped with telescopic cylinder, telescopic cylinder output is connected with the processing equipment top to target processing, base top front end is equipped with carries out spacing fixed establishment to the target.

As a further scheme of the utility model: one end, far away from the first mounting plate, of the first threaded rod is rotatably connected with the inner side of the second mounting plate through a coupler, and an inner thread is arranged on the inner wall of the joint of the moving block and the first threaded rod and is matched with the outer wall of the first threaded rod.

As a still further scheme of the utility model: stand inner wall bottom central point puts the department and is equipped with the second motor, and second motor output is connected bottom the second threaded rod, the second threaded rod top with stand inner wall top is rotated and is connected, and second threaded rod outer wall cover is equipped with the thread bush, thread bush one side with connecting rod one end is connected.

As a still further scheme of the utility model: the top of the second threaded rod is rotatably connected with the center of the top of the inner wall of the upright post through a bearing.

As a still further scheme of the utility model: the fixing mechanism is arranged on the machining plate at the front end of the top of the base, the two sides of the top of the machining plate are correspondingly provided with vertical plates, the tops of the vertical plates are fixedly connected with one sides of the transverse plates, the central positions of the transverse plates are provided with rotating rods in a penetrating mode, the tops of the rotating rods are connected with the bottoms of the rotating rods, and the bottoms of the rotating rods are connected with the tops of the positioning plates.

As a still further scheme of the utility model: the diaphragm central point department of putting is equipped with the through-hole, and the through-hole inner wall is equipped with the internal thread, the bull stick outer wall is equipped with the external screw thread, external screw thread and internal thread looks adaptation.

As a still further scheme of the utility model: and the outer wall of the positioning plate is sleeved with a wear-resistant rubber sleeve.

Compared with the prior art, the utility model has the beneficial effects that:

1. when the metal plane target needs to be machined, in order to avoid the target from being deviated, a worker places the target on the top of the machining plate, holds and rotates the rotating handle, the rotating handle can drive the rotating rod to rotate, the rotating rod can be driven to move downwards through the matching of the through hole and the rotating rod until the bottom of the positioning plate is attached to the top of the target, the target can be effectively fixed, the target can be prevented from being deviated in the machining process, and the fixing effect of the fixing device on the target can be improved.

2. When the target material is required to be processed, a worker starts the first motor, the first motor can drive the first threaded rod to rotate, the moving block sleeved on the outer wall of the first threaded rod can move along the first threaded rod and the sliding rod, so that the processing equipment can be conveniently moved to a proper position, simultaneously, a second motor is started, the second motor can drive a second threaded rod to rotate, a threaded sleeve sleeved on the outer wall of the second threaded rod can move upwards along the second threaded rod, thereby drive the working plate through the connection of connecting rod and carry out the rebound, start telescopic cylinder, telescopic cylinder can drive the processing equipment and process the target, easy operation, and convenient to use can improve the processing effect to the metal plane target, has effectively improved fixing device's work efficiency, can effectively satisfy staff's user demand.

Drawings

Fig. 1 is a three-dimensional view of a fixing device for processing a metal plane target.

Fig. 2 is a schematic structural diagram of a processing mechanism in a fixing device for processing a metal plane target.

Fig. 3 is a schematic structural diagram of a center pillar of a fixing device for processing a metal plane target.

Fig. 4 is a schematic structural diagram of a fixing mechanism in a fixing device for processing a metal plane target.

In the figure: 1-a base; 2-a first mounting plate; 201-fixing plate; 3-a second mounting plate; 4-a first motor; 5-a first threaded rod; 6-a slide bar; 7-a moving block; 8-upright column; 801-a second electric machine; 802-second threaded rod; 803-thread bush; 804-a bearing; 9-a connecting rod; 10-a working plate; 11-a telescopic cylinder; 12-processing equipment; 13-processing the plate; 14-a riser; 15-a transverse plate; 16-a rotating rod; 17-rotating handle; and 18, positioning the plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, in the embodiment of the present invention, a fixing device for processing a metal planar target includes a base 1, a first mounting plate 2 and a second mounting plate 3 are correspondingly disposed on two sides of a top rear end of the base 1, a first motor 4 is disposed on a right side of an outer wall of the first mounting plate 2 through a fixing plate 201, an output end of the first motor 4 is connected to one end of a first threaded rod 5, one end of the first threaded rod 5, which is far away from the first mounting plate 2, is rotatably connected to an inner side of the second mounting plate 3, a sliding rod 6 is disposed at a front end between the first mounting plate 2 and the second mounting plate 3, a moving block 7 is sleeved on outer walls of the first threaded rod 5 and the sliding rod 6, when a target needs to be processed, a worker starts the first motor 4, the first motor 4 can drive the first threaded rod 5 to rotate, the moving block 7 sleeved on an outer wall of the first threaded rod 5 can move along the first threaded rod 5 and the sliding rod 6, the processing device is convenient to move to a proper position, the top of the moving block 7 is connected with the bottom of the stand column 8, one side of the stand column 8 is connected with one end of the connecting rod 9 in a sliding mode, one end, far away from the stand column 8, of the connecting rod 9 is connected with the working plate 10, the telescopic cylinder 11 is arranged at the center of the top of the working plate 10, the output end of the telescopic cylinder 11 is connected with the top of the processing device 12 for processing the target, when the target needs to be processed, the telescopic cylinder 11 is started by a worker, the processing device 12 can be driven by the telescopic cylinder 11 to process the target, the operation is simple, the use is convenient, and the fixing mechanism for limiting the target is arranged at the front end of the top of the base 1.

One end, far away from the first mounting plate 2, of the first threaded rod 5 is rotatably connected with the inner side of the second mounting plate 3 through a coupler, an inner thread is arranged on the inner wall of the joint of the moving block 7 and the first threaded rod 5, and the inner thread is matched with the outer wall of the first threaded rod 5.

8 inner wall bottom central point of stand puts the department and is equipped with second motor 801, and second motor 801 output is connected bottom second threaded rod 802, second threaded rod 802 top with 8 inner wall tops of stand rotate to be connected, and second threaded rod 802 outer wall cover is equipped with thread bush 803, thread bush 803 one side with 9 one end of connecting rod is connected, and the staff starts second motor 801, and second motor 801 can drive second threaded rod 802 and rotate, and the thread bush 803 of establishing at second threaded rod 802 outer wall can carry out the rebound along second threaded rod 802 to drive working plate 10 through the connection of connecting rod 9 and carry out the rebound.

The top of the second threaded rod 802 is rotatably connected with the center of the top of the inner wall of the upright post 8 through a bearing 804.

The fixing mechanism comprises a processing plate 13 arranged at the front end of the top of the base 1, vertical plates 14 are correspondingly arranged on two sides of the top of the processing plate 13, the tops of the vertical plates 14 are fixedly connected with one side of a transverse plate 15, a rotating rod 16 penetrates through the central position of the transverse plate 15, the top of the rotating rod 16 is connected with the bottom of a rotating handle 17, the bottom of the rotating rod 16 is connected with the top of a positioning plate 18, a through hole is arranged at the central position of the transverse plate 15, internal threads are arranged on the inner wall of the through hole, external threads are arranged on the outer wall of the rotating rod 16 and are matched with the internal threads, when a metal plane target material needs to be processed, in order to avoid the target material from deviating, a worker places the target material on the top of the processing plate 13, holds and rotates the rotating handle 17, the rotating handle 17 can drive the rotating rod 16 to rotate, the rotating rod 16 can be driven to move downwards through the matching of the through hole and the rotating rod 16 until the bottom of the positioning plate 18 is attached to the top of the target material, the target can be effectively fixed, the target can be prevented from being displaced in the machining process, and the fixing effect of the fixing device on the target can be improved.

The outer wall cover of locating plate 18 is equipped with wear-resisting rubber sleeve, and the rubber sleeve that sets up can effectively reduce the degree of wear of locating plate 18, has prolonged the life of locating plate 18, and the practicality is stronger.

The working principle of the utility model is as follows: when a metal plane target needs to be machined, in order to avoid the target from deviating, a worker places the target on the top of the machining plate 13, holds and rotates the rotating handle 17, the rotating handle 17 can drive the rotating rod 16 to rotate, the rotating rod 16 can be driven to move downwards through the matching of the through hole and the rotating rod 16 until the bottom of the positioning plate 18 is attached to the top of the target, the target can be effectively fixed, the target can be prevented from deviating in the machining process, the fixing effect of the fixing device on the target can be improved, when the target needs to be machined, the worker starts the first motor 4, the first motor 4 can drive the first threaded rod 5 to rotate, the moving block 7 sleeved on the outer wall of the first threaded rod 5 can move along the first threaded rod 5 and the sliding rod 6, the machining equipment can be conveniently moved to a proper position, and the second motor 801 is started, second motor 801 can drive second threaded rod 802 and rotate, the thread bush 803 of establishing at second threaded rod 802 outer wall can carry out the rebound along second threaded rod 802, thereby drive working plate 10 through the connection of connecting rod 9 and carry out the rebound, start telescopic cylinder 11, telescopic cylinder 11 can drive processing equipment 12 and process the target, and the operation is simple, high durability and convenient use can improve the processing effect to the metal plane target, fixing device's work efficiency has effectively been improved, can effectively satisfy staff's user demand.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A fixing device for processing a metal plane target comprises a base (1) and is characterized in that a first mounting plate (2) and a second mounting plate (3) are correspondingly arranged on two sides of the rear end of the top of the base (1), a first motor (4) is arranged on the right side of the outer wall of the first mounting plate (2) through a fixing plate (201), the output end of the first motor (4) is connected with one end of a first threaded rod (5), one end, far away from the first mounting plate (2), of the first threaded rod (5) is rotatably connected with the inner side of the second mounting plate (3), a sliding rod (6) is arranged at the front end between the first mounting plate (2) and the second mounting plate (3), a moving block (7) is sleeved on the outer walls of the first threaded rod (5) and the sliding rod (6), the top of the moving block (7) is connected with the bottom of an upright post (8), one side of the upright post (8) is slidably connected with one end of a connecting rod (9), one end, far away from the upright post (8) of the connecting rod (9) is connected with a working plate (10), the center of the top of the working plate (10) is provided with a telescopic cylinder (11), the output end of the telescopic cylinder (11) is connected with the top of a processing device (12) for processing the target material, and the front end of the top of the base (1) is provided with a fixing mechanism for limiting the target material.

2. The fixing device for processing the metal plane target material as recited in claim 1, wherein one end of the first threaded rod (5) far away from the first mounting plate (2) is rotatably connected with the inner side of the second mounting plate (3) through a coupler, an inner wall of a joint of the moving block (7) and the first threaded rod (5) is provided with an inner thread, and the inner thread is matched with the outer wall of the first threaded rod (5).

3. The fixing device for processing the metal plane target according to claim 1, wherein a second motor (801) is disposed at a central position of a bottom portion of an inner wall of the upright column (8), an output end of the second motor (801) is connected to a bottom portion of a second threaded rod (802), a top portion of the second threaded rod (802) is rotatably connected to a top portion of the inner wall of the upright column (8), a threaded sleeve (803) is sleeved on an outer wall of the second threaded rod (802), and one side of the threaded sleeve (803) is connected to one end of the connecting rod (9).

4. The fixture for machining the metal plane target according to claim 3, wherein the top of the second threaded rod (802) is rotatably connected with the center of the top of the inner wall of the upright post (8) through a bearing (804).

5. The fixing device for processing the metal plane target according to claim 1, wherein the fixing mechanism comprises a processing plate (13) disposed at the front end of the top of the base (1), vertical plates (14) are correspondingly disposed on two sides of the top of the processing plate (13), tops of the vertical plates (14) are fixedly connected with one side of a transverse plate (15), a rotating rod (16) penetrates through a center position of the transverse plate (15), tops of the rotating rods (16) are connected with the bottom of a rotating handle (17), and bottoms of the rotating rods (16) are connected with the top of a positioning plate (18).

6. The fixing device for processing the metal plane target according to claim 5, wherein a through hole is formed at the center of the transverse plate (15), an internal thread is formed on the inner wall of the through hole, an external thread is formed on the outer wall of the rotating rod (16), and the external thread is matched with the internal thread.

7. The fixing device for processing the metal plane target material as claimed in claim 5, wherein a wear-resistant rubber sleeve is sleeved on the outer wall of the positioning plate (18).