CN215507430U - Rotary clamp for spraying side surface of electrostatic chuck - Google Patents
Rotary clamp for spraying side surface of electrostatic chuck Download PDFInfo
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- CN215507430U CN215507430U CN202122087493.5U CN202122087493U CN215507430U CN 215507430 U CN215507430 U CN 215507430U CN 202122087493 U CN202122087493 U CN 202122087493U CN 215507430 U CN215507430 U CN 215507430U
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- electrostatic chuck
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Abstract
The utility model discloses a rotary clamp for spraying the side surface of an electrostatic chuck, which comprises a working platform, a motor, a clamping jaw and a width adjusting mechanism, wherein the motor, the clamping jaw and the width adjusting mechanism are positioned below the working platform; the motor rotation axis runs through work platform and drives the rotary platform of work platform up end rotates, the last three-jaw chuck that is provided with of rotary platform, every equal vertical centre gripping stand that is provided with on the jack catch, through the position of centre gripping stand on every jack catch of width adjustment mechanism adjustment, be provided with the supporting shoe that is used for supporting electrostatic chuck on the centre gripping stand, just the supporting shoe passes through the position of height adjustment mechanism adjustment on the centre gripping stand, the support post top is provided with rotatory buckle, just rotatory buckle is corresponding with the supporting shoe position. The utility model improves the side surface spraying efficiency, is suitable for electrostatic chucks of different sizes, and effectively avoids the over-safety problem caused by the flying-out of the electrostatic chucks in the rotating process.
Description
Technical Field
The utility model relates to the technical field of electrostatic chuck spraying, in particular to a rotary clamp for spraying the side surface of an electrostatic chuck.
Background
An electrostatic chuck is a tool widely used in chip processing, and one of the main functions of the electrostatic chuck is to electrostatically chuck a wafer during the processing process to prevent the wafer from moving. Since many steps in the processing of chips are performed in a plasma environment (e.g., dry etching, ion implantation, chemical vapor deposition, physical vapor deposition, etc.), and the plasma is very aggressive, a chemically stable ceramic coating is often required to be applied to the metal substrate of the electrostatic chuck by plasma spraying. Both the electrostatic chuck suction side and the side require ceramic coatings. When the adsorption surface is sprayed, the metal matrix is flatly placed on the workbench, and the plasma spraying equipment is enabled to sweep the whole adsorption surface at a certain speed, so that the ceramic coating with uniform thickness can be formed. However, the scanning spray cannot form a coating layer with uniform thickness on the side surface because the electrostatic chuck is circular.
The ceramic coating with uniform thickness is coated on the side surface of the electrostatic chuck through plasma spraying, the electrostatic chuck can be fixed, the position of a nozzle of plasma spraying equipment is adjusted at regular intervals, spraying is carried out at multiple angles, or the position of the nozzle of the plasma spraying equipment is fixed, and the angle of the electrostatic chuck is adjusted at regular intervals, so that the ceramic coating can be formed on the side surface of the whole electrostatic chuck, and the ceramic coating on the side surface is ground to be uniform in thickness through subsequent machining. This method is inefficient because adjusting the position of either the nozzle or the electrostatic chuck requires pausing the plasma apparatus to prevent operator burns. In addition, the burden of subsequent machining is also increased. Therefore, it is desirable to provide a rotary clamp for electrostatic chuck side painting that solves the above problems.
SUMMERY OF THE UTILITY MODEL
In order to overcome the above disadvantages, an object of the present invention is to provide a rotary clamp for spraying the side surface of an electrostatic chuck, which is capable of spraying the side surface of the electrostatic chuck during the rotation process of the electrostatic chuck, thereby improving the spraying efficiency, and is suitable for electrostatic chucks of different sizes, and effectively avoiding the over-safety problem caused by the flying-off of the electrostatic chuck during the rotation process.
In order to achieve the above purposes, the utility model adopts the technical scheme that: a rotary clamp for spraying the side surface of an electrostatic chuck comprises a working platform, a motor, a clamping jaw and a width adjusting mechanism, wherein the motor, the clamping jaw and the width adjusting mechanism are positioned below the working platform; the motor rotation axis runs through work platform and drives the rotary platform of work platform up end rotates, the last three-jaw chuck that is provided with of rotary platform, every equal vertical centre gripping stand that is provided with on the jack catch, through the position of centre gripping stand on every jack catch of width adjustment mechanism adjustment, be provided with the supporting shoe that is used for supporting electrostatic chuck on the centre gripping stand, just the supporting shoe passes through the position of height adjustment mechanism adjustment on the centre gripping stand, centre gripping stand top is provided with rotatory buckle, just rotatory buckle is corresponding with the supporting shoe position.
Preferably, the centre gripping stand is L shape, width guiding mechanism is located the L shape minor face of centre gripping stand, width guiding mechanism includes screw one, is located spout on the L shape minor face of centre gripping stand and is fixed in direction slider in the spout, the one end that the spout was kept away from to the direction slider is located logical inslot on the jack catch, the logical groove on direction slider and the jack catch passes through screw one lock and attaches.
Preferably, the height adjusting mechanism comprises a strip-shaped groove vertically arranged on the clamping upright post, and the supporting block is adjustably fixed on the clamping upright post through a second screw.
Preferably, the rotary buckle is movably connected with the clamping upright post through a bearing seat.
Preferably, be provided with a elevating system in the middle of the jack catch chuck, elevating system specifically is the cylinder, just elevating system cylinder outside is provided with a protection casing.
Preferably, the lower end surface of the workbench is provided with a working box, and the motor is positioned in the working box.
The utility model has the beneficial effects that:
through mutual matching, the utility model carries out plasma spraying on the side surface of the electrostatic chuck in a rotating mode, so that a ceramic coating with uniform thickness is quickly formed on the surface of the electrostatic chuck. The clamping upright column can be adjusted in the horizontal plane and the longitudinal range, so that the electrostatic chuck can be suitable for electrostatic chucks with different diameters and heights; through increase rotatory buckle at the top of centre gripping stand, can prevent that electrostatic chuck from flying out and causing the safety problem at rotatory in-process.
Drawings
FIG. 1 is a front view of the overall structure of a preferred embodiment of the present invention;
FIG. 2 is an enlarged schematic view of A in FIG. 1;
in the figure: 1. a working platform; 2. a work box; 3. a motor; 4. rotating the platform; 5. a three-jaw chuck; 6. A claw; 7. clamping the upright column; 8. a width adjustment mechanism; 81. a guide slider; 82. a first screw; 9. a support block; 10. rotating the buckle; 11. a bearing seat; 12. a lifting mechanism; 13. a protective cover; 14. a height adjustment mechanism; 141. a strip-shaped groove; 142. and a second screw.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the utility model easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the utility model.
Referring to fig. 1 to 2, the rotary clamp for electrostatic chuck side painting in the present embodiment includes a working platform 1, a motor 3 located below the working platform 1, a jaw 6, and a width adjusting mechanism 8; the rotating shaft of the motor 3 penetrates through the working platform 1 and drives the rotating platform 4 on the upper end face of the working platform 1 to rotate, the rotating platform 4 is driven to rotate through the rotation of the motor 3, and the electrostatic chuck is fixed on the rotating platform 4, so that the side face of the electrostatic chuck can be sprayed in the rotating process of the electrostatic chuck to form a ceramic coating with uniform thickness; the rotary platform 4 is provided with a three-jaw chuck 5, each jaw 6 is vertically provided with a clamping upright post 7, the position of the clamping upright post 7 on each jaw is adjusted through the width adjusting mechanism 8, the clamping upright post 7 is provided with a supporting block 9 for supporting an electrostatic chuck, the position of the supporting block 9 on the clamping upright post 7 is adjusted through the height adjusting mechanism 14, and the clamp is suitable for electrostatic chucks with different sizes and heights to clamp through the width adjusting mechanism 8 and the height adjusting mechanism 14; the top of the clamping upright post is provided with a rotary buckle 10, the rotary buckle 10 corresponds to the supporting block 9, the electrostatic chuck is clamped between the rotary buckle 10 and the supporting block 9, and the electrostatic chuck can be prevented from flying out in the rotating process to cause safety problems.
The centre gripping stand 7 is L shape, width adjustment mechanism 8 is located the L shape minor face of centre gripping stand 7, width adjustment mechanism 8 includes screw 82, is located the spout on the 7L shape minor face of centre gripping stand and is located direction slider 81 in the spout, the one end that the spout was kept away from to direction slider 81 is located logical inslot on the jack catch, lead to the groove on slider 81 and the jack catch and lock through screw 82 and attach, along the length direction adjustment centre gripping stand 7's of spout position.
The height adjusting mechanism 14 comprises a strip-shaped groove 141 vertically arranged on the clamping upright post 7, and the supporting block 9 is adjustably fixed on the clamping upright post 7 through a second screw 142.
The rotary buckle 10 is movably connected with the clamping upright post 7 through a bearing seat 11, the rotary buckle 10 rotates to the position consistent with the length direction of the supporting block 9 when the electrostatic chuck is required to be clamped, and can rotate to be away from the supporting block 9 when the electrostatic chuck is required to be taken down, so that the electrostatic chuck is convenient to take down.
The middle of the jaw chuck is provided with a lifting mechanism 12, the lifting mechanism 12 is specifically an air cylinder, a protective cover 13 is arranged outside the lifting air cylinder, the electrostatic chuck is placed between a supporting block 9 and a rotating buckle 10 at the top of the clamping column 7, the supporting block 9 supports the electrostatic chuck, an air cylinder piston rod extends out to press the electrostatic chuck to the rotating buckle 10, the height of the supporting block 9 is adjusted afterwards, the rotating buckle 10 and the supporting block 9 clamp the electrostatic chuck tightly, a worker does not need to manually support the electrostatic chuck for positioning, the supported electrostatic chuck is locked and attached through a screw II 142, and the labor intensity of the worker is reduced.
The lower end face of the workbench is provided with a working box 2, and the motor 3 is positioned in the working box 2.
The working principle is as follows: when the electrostatic chuck is used, the three-jaw chuck 5 is opened, and then the position of the clamping upright post 7 on the clamping jaw 6 of the three-jaw chuck 5 is adjusted to be slightly larger than the diameter of the electrostatic chuck to be processed. Then, the electrostatic chuck is placed between a supporting block 9 and a rotating buckle 10 at the top of the clamping upright post 7, the supporting block 9 supports the electrostatic chuck, a cylinder piston rod extends out to press the electrostatic chuck to the rotating buckle 10, then the height of the supporting block 9 is adjusted to enable the rotating buckle 10 and the supporting block 9 to clamp the electrostatic chuck, and after the electrostatic chuck is clamped, the cylinder piston rod retracts to the original position. And finally, the distance between the clamping claws 6 of the three-jaw chuck 5 is reduced, so that the clamping upright post 7 can clamp the electrostatic chuck. The motor 3 is turned on to adjust the rotating speed of the rotating platform 4 to 200 rpm, and then the ceramic coating can be sprayed on the side surface of the electrostatic chuck.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (6)
1. The utility model provides a rotary fixture for electrostatic chuck side spraying which characterized in that: comprises a working platform (1), a motor (3) positioned below the working platform (1), a clamping jaw (6) and a width adjusting mechanism (8); the electric tool is characterized in that a rotating shaft of the motor (3) penetrates through the working platform (1) and drives the rotating platform (4) on the upper end face of the working platform (1) to rotate, a three-jaw chuck (5) is arranged on the rotating platform (4), each jaw (6) is vertically provided with a clamping column (7), the position of the clamping column (7) on each jaw is adjusted by the width adjusting mechanism (8), a supporting block (9) used for supporting an electrostatic chuck is arranged on each clamping column (7), the position of each supporting block (9) on each clamping column (7) is adjusted by the height adjusting mechanism (14), a rotating buckle (10) is arranged at the top of each clamping column, and the rotating buckle (10) corresponds to the position of each supporting block (9).
2. A rotary clamp for electrostatic chuck side painting according to claim 1, wherein: the utility model discloses a clamping column, including clamping column (7), width guiding slide block (81) and clamping column (6), clamping column (7) are the L shape, width guiding slide block (8) are located the L shape minor face of clamping column (7) on the spout and are fixed in on the spout of screw (82), width guiding slide block (8) include screw (82), be located the spout on the L shape minor face of clamping column (7) and be fixed in guide slide block (81) in the spout, guide slide block (81) pass through screw (82) lock with logical groove on jaw (6) and attach.
3. A rotary clamp for electrostatic chuck side painting according to claim 1, wherein: the height adjusting mechanism (14) comprises a strip-shaped groove (141) vertically arranged on the clamping upright post (7), and the supporting block (9) is adjustably fixed on the clamping upright post (7) through a second screw (142).
4. A rotary clamp for electrostatic chuck side painting according to claim 1, wherein: the rotary buckle (10) is movably connected with the clamping upright post (7) through a bearing seat (11).
5. A rotary clamp for electrostatic chuck side painting according to claim 1, wherein: the middle of the claw chuck is provided with a lifting mechanism (12), the lifting mechanism (12) is a lifting cylinder, and a protective cover (13) is arranged outside the lifting cylinder.
6. A rotary clamp for electrostatic chuck side painting according to claim 1, wherein: the lower end face of the workbench is provided with a working box (2), and the motor (3) is located in the working box (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122087493.5U CN215507430U (en) | 2021-08-31 | 2021-08-31 | Rotary clamp for spraying side surface of electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122087493.5U CN215507430U (en) | 2021-08-31 | 2021-08-31 | Rotary clamp for spraying side surface of electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215507430U true CN215507430U (en) | 2022-01-14 |
Family
ID=79794934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122087493.5U Active CN215507430U (en) | 2021-08-31 | 2021-08-31 | Rotary clamp for spraying side surface of electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215507430U (en) |
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2021
- 2021-08-31 CN CN202122087493.5U patent/CN215507430U/en active Active
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