CN215496634U

CN215496634U - Etching device for chip processing

Info

Publication number: CN215496634U
Application number: CN202120777904.0U
Authority: CN
Inventors: 胡天武
Original assignee: Shaoxing Yuli Semiconductor Co ltd
Current assignee: Shaoxing Yuli Semiconductor Co ltd
Priority date: 2021-04-16
Filing date: 2021-04-16
Publication date: 2022-01-11
Anticipated expiration: 2031-04-16

Abstract

The utility model discloses an etching device for chip processing, which comprises an etching box body, a cleaning groove arranged in the etching box body, an etching part fixed at the bottom of the etching box body and used for etching a workpiece, a water storage tank fixed on the etching box body and a spray head fixed in the cleaning groove, wherein a water suction pump is fixed on the inner wall of the water storage tank and is connected with the spray head through a pipeline, a rotating block is arranged in the cleaning groove in a rotating manner, a main motor is fixed on the inner wall of the cleaning groove, and an output shaft of the main motor can drive the rotating block fixedly matched with the output shaft to rotate when rotating, so that the rotating block drives the workpiece to rotate, the rotating workpiece can transmit water to the workpiece through the spray head to clean the workpiece, and the cleaning groove is connected with the storage tank through a pipeline and can automatically clean the chip.

Description

Etching device for chip processing

[ technical field ] A method for producing a semiconductor device

The utility model relates to the technical field of chip processing equipment, in particular to an etching device for chip processing.

[ background of the utility model ]

A Chipset (english: Chipset) is a group of integrated circuit "chips" that work together and are sold as one product. It is responsible for connecting the core of the computer, the microprocessor, to the rest of the machine, and is an important component that determines the motherboard level. In the past, a chip set was composed of a plurality of chips, and was gradually simplified to two chips.

The general chip all need utilize etching device to etch the chip at the in-process of processing, but current etching device accomplishes the back to the chip processing, needs personnel to take out the chip and wash the chip, because the chip generally etches the chip through acid in the course of working to when personnel follow-up when going out the chip carelessly contact acid, can lead to personnel to receive the damage.

[ Utility model ] content

The utility model aims to solve the problems in the prior art and provides an etching device for chip processing, which can automatically clean a chip.

In order to achieve the purpose, the utility model provides an etching device for chip processing, which comprises an etching box body, a cleaning groove arranged in the etching box body, an etching part fixed at the bottom of the etching box body and used for etching a workpiece, a water storage tank fixed on the etching box body, and a spray head fixed in the cleaning groove, wherein a water suction pump is fixed on the inner wall of the water storage tank and is connected with the spray head through a pipeline, a rotating block is arranged in the cleaning groove in a rotating manner, a main motor is fixed on the inner wall of the cleaning groove, and an output shaft of the main motor can drive the rotating block fixedly matched with the output shaft to rotate when rotating, the rotating block is rotated to drive the workpiece to rotate, the rotating workpiece can transmit water to the workpiece through the spray head to clean the workpiece, and the cleaning groove is connected with the storage tank through a pipeline.

Preferably, a supporting plate is arranged in the etching box body in a sliding mode, a clamping manipulator is arranged at the bottom of the supporting plate, the clamping manipulator is connected with an electric push rod and arranged at the bottom of the supporting plate in a sliding mode, and an output shaft of the electric push rod stretches out and draws back to enable the clamping manipulator to move to a certain position to clamp the workpiece.

Preferably, the etching box body is provided with a lead screw, the lead screw is connected with a secondary motor and is rotatably arranged on the inner wall of the etching box body, and an output shaft of the secondary motor is rotated to enable the support plate to move on the lead screw.

As preferred, the etching piece is including offering the etching groove on the etching case body and fixing the bin in etching case body bottom, be fixed with the drawing pump in the bin and its pass through the pipe connection with the etching groove, drawing pump transferable bin liquid enters into in the etching groove, the etching groove passes through output tube with the bin and is connected, output tube transferable etching inslot liquid enters into in the bin, be fixed with the solenoid valve on the lateral wall of output tube.

Preferably, a control panel is fixed to a side wall of the etching chamber body.

Preferably, a support leg is fixed to the bottom of the etching box body.

[ description of the drawings ]

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view from another perspective of the present invention;

in the figure: 1. etching the box body; 2. cleaning the tank; 3. etching the workpiece; 4. a water storage tank; 5. a spray head; 6. a water pump; 7. rotating the block; 8. a main motor; 9. a support plate; 10. clamping the manipulator; 11. an electric push rod; 12. a lead screw; 13. a secondary motor; 14. etching a groove; 15. a storage tank; 16. a liquid pump; 17. an output pipe; 18. an electromagnetic valve; 19. a control panel; 20. and (3) a support leg.

[ detailed description ] embodiments

Referring to fig. 1 to 2, an etching apparatus for chip processing comprises an etching box body 1, a cleaning tank 2 arranged in the etching box body 1, an etching member 3 fixed at the bottom of the etching box body 1 for etching a workpiece, a water storage tank 4 fixed on the etching box body 1, and a spray head 5 fixed in the cleaning tank 2, a water pump 6 is fixed on the inner wall of the water storage tank 4 and is connected with a spray head 5 through a pipeline, a rotating block 7 is rotationally arranged in the cleaning groove 2, be fixed with main motor 8 on the inner wall of clearance groove 2 and its output shaft can drive when rotating rather than the fixed complex rotatory piece 7 of output shaft and rotate rotatory piece 7 so that rotatory piece 7 drive work piece rotates, and the work piece accessible in the rotation is cleared up it on transmitting the work piece with water to shower nozzle 5, clearance groove 2 passes through the pipe connection with bin 15.

The etching box comprises an etching box body 1, and is characterized in that a supporting plate 9 is arranged in the etching box body 1 in a sliding mode, a clamping manipulator 10 is arranged at the bottom of the supporting plate 9, the clamping manipulator 10 is connected with an electric push rod 11 and arranged at the bottom of the supporting plate in a sliding mode, and an output shaft of the electric push rod 11 stretches out and draws back to enable the clamping manipulator 10 to move to a certain position to clamp a workpiece.

A lead screw 12 is arranged on the etching box body 1, the lead screw 12 is connected with a secondary motor 13 and is rotatably arranged on the inner wall of the etching box body 1, and an output shaft of the secondary motor 13 is rotated to enable the support plate 9 to move on the lead screw 12.

Etching 3 is including offering the etching groove 14 on etching case body 1 and fixing the bin 15 in etching case body 1 bottom, the bin 15 internal fixation has drawing liquid pump 16 and it and etching groove 14 to pass through the pipe connection, drawing liquid pump 16 can transmit bin 15 liquid and enter into etching groove 14 in, etching groove 14 and bin 15 are connected through output tube 17, output tube 17 can transmit in the etching groove 14 liquid and enter into bin 15, be fixed with solenoid valve 18 on the lateral wall of output tube 17, be fixed with control panel 19 on the lateral wall of etching case body 1, the bottom of etching case body 1 is fixed with stabilizer blade 20.

In order to etch the workpiece, a person can place the workpiece on the etching box body 1, the clamping mechanical arm 10 is started, the clamping mechanical arm 10 can clamp the workpiece, after the workpiece is clamped, the secondary motor 13 can drive the screw rod 12 to move the supporting plate 9 to a required position, the clamping mechanical arm 10 is pushed by the electric push rod 11 to move into the etching groove 14, the clamping mechanical arm 10 drives the workpiece to move into the etching groove 14, when the workpiece moves into the etching groove 14, the clamping mechanical arm 10 is loosened, acid liquor in the storage box 15 is transferred into the etching groove 14 by using the liquid pumping pump 16, so that the acid liquor etches the workpiece, when the acid liquor etches the workpiece, the electromagnetic valve 18 is opened, the acid liquor enters the storage box 15 through the output pipe 17, so that the acid liquor in the storage box 15 circulates, and after the workpiece is etched, the clamping mechanical arm 10 clamps the workpiece again, after the work piece centre gripping was accomplished, backup pad 9 removes the position that needs in the lead screw 12 secondary drive, electric putter 11 starts, electric putter 11 removes centre gripping manipulator 10 in clearance groove 2, centre gripping manipulator 10 loosens, main motor 8 starts, main motor 8 drive rotatory piece 7 rotates, rotatory piece 7 can drive the work piece rotation at the rotation in-process, and simultaneously, suction pump 6 starts, water in suction pump 6 extraction storage tank 15 enters into on shower nozzle 5, water accessible shower nozzle 5 clears up the work piece, after water was accomplished the work piece clearance, water gets back to in storage tank 15 through the pipeline, realize the circulation of water.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.

Claims

1. The utility model provides an etching device is used in chip processing, includes etching case body (1), sets up clearance groove (2) in etching case body (1) and fixes etching piece (3) that are used for carrying out the etching to the work piece bottom etching case body (1), its characterized in that: still including fixing storage water tank (4) on etching case body (1) and fixing shower nozzle (5) in clearance groove (2), be fixed with suction pump (6) on the inner wall of storage water tank (4) and it passes through the pipe connection with shower nozzle (5), clearance groove (2) internal rotation is provided with rotatory piece (7), be fixed with main motor (8) on the inner wall of clearance groove (2) and its output shaft and can drive when rotating rather than the fixed complex rotatory piece (7) of output shaft and rotate rotatory piece (7) are so that rotatory piece (7) drive work piece rotates, and the work piece accessible in the rotation shower nozzle (5) are cleared up it on transmitting the work piece with water, clearance groove (2) pass through the pipe connection with storage tank (15).

2. The etching apparatus for chip processing according to claim 1, wherein: the etching box is characterized in that a supporting plate (9) is arranged in the etching box body (1) in a sliding mode, a clamping mechanical arm (10) is arranged at the bottom of the supporting plate (9) in a sliding mode, the clamping mechanical arm (10) is connected with an electric push rod (11) and arranged at the bottom of the supporting plate (9) in a sliding mode, and the electric push rod (11) is telescopic to enable an output shaft of the electric push rod (11) to move to a certain position to clamp a workpiece.

3. The etching apparatus for chip processing according to claim 1, wherein: the etching box is characterized in that a lead screw (12) is arranged on the etching box body (1), the lead screw (12) is connected with a secondary motor (13) and rotationally arranged on the inner wall of the etching box body (1), the lead screw (12) is in threaded fit with the supporting plate (9), and an output shaft of the secondary motor (13) is rotated to enable the supporting plate (9) to move on the lead screw (12).

4. The etching apparatus for chip processing according to claim 1, wherein: etching piece (3) are including offering etching groove (14) on etching case body (1) and fixing bin (15) in etching case body (1) bottom, bin (15) internal fixation has drawing liquid pump (16) and its and etching groove (14) to pass through the pipe connection, drawing liquid pump (16) transferable bin (15) liquid enters into etching groove (14) in, etching groove (14) are connected through output tube (17) with bin (15), liquid enters into bin (15) in output tube (17) transferable etching groove (14), be fixed with solenoid valve (18) on the lateral wall of output tube (17).

5. The etching apparatus for chip processing according to claim 1, wherein: and a control panel (19) is fixed on the side wall of the etching box body (1).

6. The etching apparatus for chip processing according to claim 5, wherein: and a support leg (20) is fixed at the bottom of the etching box body (1).