CN215493961U

CN215493961U - Liquid nitrogen environment object carrying device and liquid nitrogen manual probe station applied to wafer test

Info

Publication number: CN215493961U
Application number: CN202120902179.5U
Authority: CN
Inventors: 田腾腾; 刘伟; 张海洋; 吕文波
Original assignee: Suzhou Eoulu System Integration Co ltd
Current assignee: Suzhou Eoulu System Integration Co ltd
Priority date: 2021-04-28
Filing date: 2021-04-28
Publication date: 2022-01-11
Anticipated expiration: 2031-04-28

Abstract

The utility model relates to the technical field of integrated circuit testing, in particular to a liquid nitrogen environment carrying device and a liquid nitrogen manual probe station applied to wafer testing. The wafer positioning device comprises a vacuum heat preservation layer, wherein a heat preservation cover is arranged at the upper end of the vacuum heat preservation layer, a heat preservation cavity is formed by the heat preservation cover and the inner side of the vacuum heat preservation layer, protective layers wrap the outer side and the bottom of the vacuum heat preservation layer, an objective table is arranged in the heat preservation cavity, a wafer fixing piece used for positioning and fixing a wafer is arranged on the upper surface of the objective table, and a plurality of sensor holes used for mounting sensors are formed in the periphery of the objective table; the heat preservation is covered and is opened and have the notes liquid mouth and cover through the upper cover plate, the inoxidizing coating outside and bottom parcel have the shell, the shell lower extreme is fixed with installation adapter plate. According to the utility model, the heat preservation cavity formed by the vacuum heat preservation layer and the heat preservation cover can effectively avoid the rapid volatilization of liquid nitrogen, ensure that the liquid nitrogen can rapidly enter a stable state after being injected, and facilitate the wafer test work in a liquid nitrogen environment.

Description

Liquid nitrogen environment object carrying device and liquid nitrogen manual probe station applied to wafer test

Technical Field

The utility model relates to the technical field of integrated circuit testing, in particular to a liquid nitrogen environment carrying device and a liquid nitrogen manual probe station applied to wafer testing.

Background

The probe station is a test device applied to the semiconductor industry, and particularly has wide application in the field of integrated circuit testing. Generally, an integrated circuit is tested for electrical performance on a probe station to determine whether the integrated circuit meets design requirements or meets operational requirements. With the progress and demand of technology, the integrated circuit has advanced and high performance, and the corresponding test requirements and test environment are more and more stringent. The environment of part of chip application needs to reach the temperature of liquid nitrogen, so the liquid nitrogen environment also needs to be simulated during test, and the method for establishing the liquid nitrogen environment of the manual probe station only enables the surface of the objective table to store the liquid nitrogen.

Traditional manual probe platform can't seal the test space because test mode's limitation, and the liquid nitrogen can boil and volatilize at the short time extremely on the objective table, not only can't prick needle and test, still can make the objective table volatilize and finish later frosting at the liquid nitrogen, can't satisfy the test demand.

The liquid nitrogen environment testing device that manual probe station built among the prior art mainly is that stainless steel or copper are put in the dewar bottle and are born the weight of the test wafer, builds probe fixed platform simultaneously and carry out the test of pricking the needle, because the unable fixed chucking of wafer can only be pushed down through the probe, pours into behind the liquid nitrogen probe and wafer shrinkage degree difference, and the position and the degree of depth of pricking the needle can change, produce great influence to the test result.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a method for solving the technical problem.

The technical scheme adopted by the utility model for solving the technical problems is as follows:

a liquid nitrogen environment carrying device comprises a vacuum heat-insulating layer, wherein a heat-insulating cover is arranged at the upper end of the vacuum heat-insulating layer, a heat-insulating cavity is formed by the heat-insulating cover and the inner side of the vacuum heat-insulating layer, protective layers wrap the outer side and the bottom of the vacuum heat-insulating layer, a carrying table is arranged in the heat-insulating cavity, a wafer fixing piece used for positioning and fixing a wafer is arranged on the upper surface of the carrying table, and a plurality of sensor holes used for mounting sensors are formed in the periphery of the carrying table; the heat preservation is covered and is opened and have the notes liquid mouth and cover through the upper cover plate, the inoxidizing coating outside and bottom parcel have the shell, the shell lower extreme is fixed with installation adapter plate.

Furthermore, the objective table is arranged in the heat preservation cavity in a suspension mode through an objective table support column and an objective table fixing chassis.

Further, a handle is further arranged on the upper cover plate.

Preferably, the protective layer is a polytetrafluoroethylene protective layer.

Furthermore, a water storage groove is formed on the upper surface of the mounting adapter plate around the shell.

Furthermore, an outer cover is covered on the heat preservation cover.

A manual probe station of liquid nitrogen for being applied to wafer test, including the work station and said liquid nitrogen environment objective device, the said liquid nitrogen environment objective device is installed on said work station through the fine tuning sliding table, still install microscope organization and manual probe station on the said work station, the said microscope organization is set up in the upper end of the said liquid nitrogen environment objective device through the microscope supporting arm, the said manual probe station is set up in the left and right sides of the said liquid nitrogen environment objective device; the workbench is provided with a storage pipe.

Further, finely tune the slip table and include X axle fine setting slip table and Y axle fine setting slip table, its front end is provided with the handle, liquid nitrogen environment thing device passes through the handle inserts fast and installs on the workstation with take out the workstation.

Further, the shock attenuation callus on the sole is installed to the workstation lower extreme.

Further, the side of the workbench is also provided with a switch assembly.

The utility model has the beneficial effects that:

1. the liquid nitrogen environment carries the heat preservation chamber that the thing device passes through vacuum insulation layer and heat preservation lid to constitute, can effectually avoid volatilizing fast of liquid nitrogen, ensures that the entering stable state that can be quick after the liquid nitrogen pours into, conveniently carries out the wafer test work under the liquid nitrogen environment. And wrap up polytetrafluoroethylene inoxidizing coating and shell in proper order in the vacuum insulation layer outside, on the one hand through the inside and outside difference in temperature of the outstanding performance of polytetrafluoroethylene effectual reduction heat preservation intracavity, improve the liquid nitrogen stability of heat preservation intracavity, can avoid the liquid nitrogen to volatilize fast on the one hand in addition and cause the low temperature to scald operating personnel.

2. Open on installation adapter plate has the aqua storage tank, can effectually avoid the drop of water that the difference in temperature formed to leave and form rivers, cause the potential safety hazard to laboratory and laboratory.

3. Be applied to manual probe platform of liquid nitrogen of wafer test through installing the fine setting slip table in liquid nitrogen environment year thing device below, can carry out the regulation of X axle and Y axle direction, make things convenient for tester's use, tester can carry out position control through the fine setting slip table of manual probe bench of manual regulation, also can carry out position control through the fine setting slip table of adjusting under the liquid nitrogen environment year thing device.

Drawings

FIG. 1 is a top view of the present invention;

FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1;

FIG. 3 is a perspective view of the present invention;

FIG. 4 is a perspective view of another embodiment of the present invention;

FIG. 5 is a perspective view of an embodiment of the present invention;

labeled as:

1. the device comprises a workbench, a microscope mechanism, a liquid nitrogen environment carrying device, a manual probe station, a receiving tube, a switch assembly, a fine adjustment sliding table and a control system, wherein the workbench comprises a workbench 2, a microscope mechanism 3, a liquid nitrogen environment carrying device 4, a manual probe station 5, a receiving tube 6, a switch assembly 7 and a fine adjustment sliding table;

101. the device comprises a foot pad, 301, a vacuum insulation layer, 3011, a insulation cavity, 302, an insulation cover, 3021, a liquid injection port, 3022, an upper cover plate, 3023, a handle, 303, a stage, 3031, a stage support column, 3032, a stage fixing chassis, 3033, a sensor hole, 3034, a wafer fixing piece, 304, a protective layer, 305, a shell, 306306, a mounting adapter plate, 3061, a water storage tank, 307 and an outer cover.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The utility model provides a liquid nitrogen environment carries thing device, as shown in fig. 1-3, including vacuum heat preservation layer 301, vacuum heat preservation layer is the column, vacuum heat preservation layer 301 upper end is provided with heat preservation lid 302, heat preservation lid 302 and the inboard heat preservation chamber 3011 that forms of vacuum heat preservation layer 301, trompil in the middle of the heat preservation lid 302, an insert for probe mechanism carries out test work, because heat preservation chamber 3011's lateral wall and bottom are the vacuum structure, heat-conducting medium reduces, effectively reduce the inside and outside difference in temperature, can effectually prevent that liquid nitrogen from volatilizing fast, the entering stable state that can be quick after ensureing into liquid nitrogen. Vacuum insulation layer 301 outside and bottom parcel have inoxidizing coating 304, and the inoxidizing coating possesses high low temperature resistance, in order to reduce the quick volatilization of liquid nitrogen on the one hand, in addition on the one hand in order to improve experimental security, avoids the low temperature scald operating personnel of liquid nitrogen. Be provided with objective table 303 in the heat preservation chamber 3011, objective table 303 upper surface is provided with wafer mounting 3034 that is used for location and fixed wafer, opens all around and has a plurality of sensor holes 3033 that are used for installing the sensor, and a plurality of temperature sensor can be installed in a plurality of sensor holes, can effectively improve the accuracy of gathering the temperature when later stage is used, improves experimental data's accuracy. The heat-insulating cover 302 is opened with a liquid injection port 3021 and covered by an upper cover plate 3022, and liquid nitrogen is injected into the heat-insulating cavity 3011 from the liquid injection port 3021. The outer side and the bottom of the protective layer 304 are wrapped by a shell 305, the lower end of the shell 305 is fixedly provided with an installation adapter board 306, the shell 305 further improves the heat preservation performance and the safety performance, the installation adapter board 305 is used for later-stage application, and the installation adapter board is installed on a probe station for testing work.

As shown in fig. 2, the object stage 303 is suspended in the thermal insulation cavity 3011 by the object stage support post 3031 and the object stage fixing chassis 3032. The upper cover plate 3022 is further provided with a handle 3023, liquid nitrogen can be injected into the heat preservation cavity 3011 by rapidly opening the upper cover plate through the handle 3023, and after the object stage can be completely immersed in the liquid nitrogen, the injection is stopped, and the upper cover plate is covered.

Preferably, the protective layer 304 is made of polytetrafluoroethylene, and the polytetrafluoroethylene has good high and low temperature resistance, so that volatilization of liquid nitrogen can be effectively prevented, and meanwhile, safety accidents such as scalding caused by low-temperature conduction to the shell are avoided.

During the test, because liquid nitrogen is slowly volatilized due to the influence of the room temperature, water drops are formed on the shell and are left behind, and therefore a water storage groove 3061 is formed on the upper surface of the installation adapter plate 306 and around the shell 305. As shown in FIG. 4, after the test is finished, in order to prevent the foreign matters and the ash layer from falling into the heat-insulating chamber, the heat-insulating cover 302 is covered with an outer cover 307.

As shown in fig. 5, an embodiment of the present invention:

the utility model provides a be applied to manual probe station of liquid nitrogen of wafer test, includes workstation 1 and liquid nitrogen environment object device 3, and liquid nitrogen environment object device 3 installs on workstation 1 through fine setting slip table 7, and fine setting slip table 7 is used for carrying out the regulation of X axle and Y axle direction. The workbench 1 is also provided with a microscope mechanism 2 and a manual probe station 4, the manual probe station 4 is used for placing the probe mechanism for testing, the microscope mechanism 2 is arranged at the upper end of the liquid nitrogen environment object carrying device 3 through a microscope support frame, and the manual probe station 4 is arranged at the left side and the right side of the liquid nitrogen environment object carrying device 3; be provided with on the workstation 1 and accomodate pipe 5, accomodate the pipe and can accomodate the arrangement to cable and pipeline, improve table surface's clean and tidy degree, can avoid cable and pipeline to be disorderly.

Fine setting slip table 7 includes X axle fine setting slip table and Y axle fine setting slip table, and its front end is provided with handle 701, and liquid nitrogen environment thing device 3 inserts fast through handle 701 and installs on workstation 1 and take out workstation 1, and it is simple and convenient to use. The fine adjustment sliding table 7 can be used by testing personnel conveniently, the testing personnel can adjust the probe mechanism on the manual probe table manually, and the position of the fine adjustment sliding table under the liquid nitrogen environment loading device can be adjusted.

In order to improve the test precision, the lower end of the workbench 1 is provided with a shock absorption foot pad 101, so that the influence of the shock on the test result is avoided. Meanwhile, the side of the workbench 1 is also provided with a switch assembly 6, so that the operation is convenient.

Application embodiments of the present invention are not limited to manual probe stations and may be integrated into automated probe stations as desired.

The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a liquid nitrogen environment thing device of carrying which characterized in that: the wafer-level sensor comprises a vacuum heat-insulating layer (301), wherein a heat-insulating cover (302) is arranged at the upper end of the vacuum heat-insulating layer (301), a heat-insulating cavity (3011) is formed by the heat-insulating cover (302) and the inner side of the vacuum heat-insulating layer (301), protective layers (304) wrap the outer side and the bottom of the vacuum heat-insulating layer (301), an objective table (303) is arranged in the heat-insulating cavity (3011), a wafer fixing piece (3034) used for positioning and fixing a wafer is arranged on the upper surface of the objective table (303), and a plurality of sensor holes (3033) used for installing sensors are formed in the periphery of the objective table (303); the liquid injection port (3021) is formed in the heat preservation cover (302) and is covered by the upper cover plate (3022), the outer side and the bottom of the protective layer (304) are wrapped by the outer shell (305), and the lower end of the outer shell (305) is fixedly provided with the mounting adapter plate (306).

2. The liquid nitrogen environmental cargo device of claim 1, characterized in that: the object stage (303) is suspended in the heat preservation cavity (3011) through an object stage support column (3031) and an object stage fixing chassis (3032).

3. The liquid nitrogen environmental cargo device of claim 1, characterized in that: the upper cover plate (3022) is also provided with a handle (3023).

4. The liquid nitrogen environmental cargo device of claim 1, characterized in that: the protective layer (304) is a polytetrafluoroethylene protective layer.

5. The liquid nitrogen environmental cargo device of claim 1, characterized in that: the upper surface of the mounting adapter plate (306) is provided with a water storage tank (3061) around the shell (305).

6. The liquid nitrogen environmental cargo device of claim 1, characterized in that: an outer cover (307) is covered on the heat preservation cover.

7. The utility model provides a be applied to manual probe station of liquid nitrogen of wafer test which characterized in that: the liquid nitrogen environment object carrying device comprises a workbench (1) and the liquid nitrogen environment object carrying device (3) as claimed in any one of claims 1 to 6, wherein the liquid nitrogen environment object carrying device (3) is installed on the workbench (1) through a fine adjustment sliding table (7), a microscope mechanism (2) and a manual probe platform (4) are further installed on the workbench (1), the microscope mechanism (2) is arranged at the upper end of the liquid nitrogen environment object carrying device (3) through a microscope supporting frame, and the manual probe platform (4) is arranged at the left side and the right side of the liquid nitrogen environment object carrying device (3); the workbench (1) is provided with a containing pipe (5).

8. The liquid nitrogen manual probe station applied to wafer testing as claimed in claim 7, wherein: fine setting slip table (7) are including X axle fine setting slip table and Y axle fine setting slip table, and its front end is provided with handle (701), liquid nitrogen environment thing device (3) are passed through handle (701) insert fast and install workstation (1) is gone up and is taken out workstation (1).

9. The liquid nitrogen manual probe station applied to wafer testing as claimed in claim 7, wherein: a shock absorption foot pad (101) is installed at the lower end of the workbench (1).

10. The liquid nitrogen manual probe station applied to wafer testing as claimed in claim 7, wherein: the side of the workbench (1) is also provided with a switch component (6).