CN215486576U - Multistage roots vacuum pump - Google Patents
Multistage roots vacuum pump Download PDFInfo
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- CN215486576U CN215486576U CN202121780925.4U CN202121780925U CN215486576U CN 215486576 U CN215486576 U CN 215486576U CN 202121780925 U CN202121780925 U CN 202121780925U CN 215486576 U CN215486576 U CN 215486576U
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Abstract
The utility model discloses a multi-stage Roots vacuum pump, and belongs to the technical field of Roots vacuum pumps. The multistage Roots vacuum pump comprises a pump body, a driving rotating shaft, a driven rotating shaft, a multistage driving rotor and a multistage driven rotor, wherein the pump body comprises a plurality of stages of pump cavities which are sequentially communicated; the driving rotating shaft and the driven rotating shaft penetrate through the pump body; each stage of pump cavity comprises a pair of driving rotors and driven rotors which are identical in shape and size and meshed with each other; along the axial direction of the pump body and towards the direction of the high-pressure side, the sizes of the driving rotor and the driven rotor in the multi-stage pump cavity along the axial direction of the pump body are gradually widened. This multistage roots vacuum pump temperature rise is little, has reduced the deformation of initiative pivot and driven spindle, guarantees the normal rotation of initiative pivot and driven spindle to and the meshing of initiative rotor and driven rotor.
Description
Technical Field
The utility model relates to the technical field of Roots vacuum pumps, in particular to a multistage Roots vacuum pump.
Background
The prior art of the domestic vacuum pump is that rotors at all stages are separated by intermediate walls to form pump chambers at all stages, an exhaust port at the upper stage is connected to an air inlet at the lower stage, and all stages are connected in series for application.
Traditional multistage roots vacuum pump is at the in-process to gas pressure boost, along with multistage roots vacuum pump to gaseous compression step by step, gaseous temperature rise is higher, and gaseous high temperature makes the pivot easily take place to warp to influence the rotation of pivot, and the meshing of rotor.
Therefore, a multistage roots vacuum pump with a small temperature rise is needed to solve the above technical problems in the prior art.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of this application is to provide a multistage roots vacuum pump, and this multistage roots vacuum pump temperature rise is little, has reduced the deformation of initiative pivot and driven spindle, guarantees the normal rotation of initiative pivot and driven spindle to and the meshing of initiative rotor and driven rotor.
To achieve the purpose, the embodiment of the application adopts the following technical scheme:
a multi-stage roots vacuum pump comprising:
the pump body comprises a plurality of stages of pump cavities which are communicated in sequence;
the driving rotating shaft and the driven rotating shaft penetrate through the pump body;
each stage of the pump cavity comprises a pair of driving rotors and driven rotors which are identical in shape and size and meshed with each other;
along the axial direction of the pump body and towards the direction of a high pressure side, the sizes of the driving rotor and the driven rotor in the multi-stage pump cavity along the axial direction of the pump body are gradually widened.
Make the area of the lateral wall of multistage roots vacuum pump's pump chamber increase step by step, heat transfer area increase promptly to change the problem that the temperature rise is higher and higher, reduced energy density, improve the work efficiency of pump, the temperature rise is little, has reduced the deformation of initiative pivot and driven spindle, guarantees the normal rotation of initiative pivot and driven spindle, and the meshing of initiative rotor and driven rotor.
As a preferred technical scheme of the multi-stage Roots vacuum pump, at least two rotors with different blade numbers are arranged in the multi-stage pump cavity. Compared with the rotor with fewer blades, the rotor with more blades has more air inflow, that is, under the condition of the same air inflow, the size of the rotor along the axial direction of the pump body can be reduced compared with the rotor with fewer blades, so that the total length of the rotating shaft is reduced, and according to the fact that the bending moment is equal to the product of the force and the moment arm, the moment arm is reduced, so that the bending moment is reduced, and the rigidity of the rotating shaft is improved; compared with a rotor with more blades, the rotor with less blades has smaller weight and lower cost, reduces the integral supporting weight of the rotating shaft, thereby improving the rotating speed of the rotating shaft, and under the condition of equal air inflow, because the rotor with less blades has larger size along the axial direction of the pump body, the heat dissipation area of the pump cavity of the rotor with less blades is increased, thereby causing small temperature rise; the rotors with different blade numbers are arranged in the pump cavity, so that the multistage roots vacuum pump has the advantages of the rotors with small blade numbers and the rotors with large blade numbers.
As a preferred technical scheme of the multi-stage roots vacuum pump, the driving rotor and the driven rotor in a part of the pump cavity are both trilobal rotors; the other part of the driving rotor and the driven rotor in the pump cavity are both two-blade-shaped rotors.
The driving rotor and the driven rotor in one part of the pump cavity of the multistage roots vacuum pump provided by the embodiment of the application are both trilobal rotors, and compared with the two trilobal rotors, the size of the trilobal rotor along the axial direction of the pump body is shorter than that of the two trilobal rotors along the axial direction of the pump body under the condition of equal air inflow, so that the total length of the rotating shaft is reduced, and the rigidity of the rotating shaft is improved; the driving rotor and the driven rotor in the other part of the pump cavity are both two-lobed rotors, the two-lobed rotors are lighter than three-lobed rotors, the cost is lower, and the rotating speed of the rotating shaft is improved.
As a preferred technical scheme of the multi-stage roots vacuum pump, the driving rotor and the driven rotor in the pump cavities at two ends are both trilobal rotors; the driving rotor and the driven rotor in the middle pump cavity are both two-blade-shaped rotors. Under the condition that the axial sizes of the rotors along the pump body are the same, the gas handling capacity of the multistage roots vacuum pump per unit time is improved because the air intake amount of the three-lobe rotor is larger than that of the two-lobe rotor.
As a preferred technical scheme of the multi-stage roots vacuum pump, the driving rotor and the driven rotor in the pump cavities at two ends are two-blade-shaped rotors; the driving rotor and the driven rotor in the middle pump cavity are both trilobal rotors. For guaranteeing the unit time handling capacity of the multistage roots vacuum pump, compared with the three-lobed rotor adopted in the pump cavity at the pump body inlet side, the axial size of the two-lobed rotor in the pump cavity at the pump body inlet side along the pump body is increased, so that the heat dissipation area is increased, the temperature rise of the pump cavity where the two-lobed rotor is located is small, and the temperature rise of the whole multistage roots vacuum pump is controlled conveniently.
As a preferable technical solution of the multi-stage roots vacuum pump, the driving rotor and the driven rotor in one of the pump chambers adjacent to each other are both three-lobed rotors, the driving rotor and the driven rotor in the other pump chamber are both two-lobed rotors, and the driving rotor and the driven rotor in the pump chamber of one stage are both three-lobed rotors. Compared with the two-bladed rotor, the three-bladed rotor adopted by the driving rotor and the driven rotor in the primary pump cavity can reduce the length of the driving rotating shaft and the driven rotating shaft under the condition of equal efficiency and equal flow, and the moment arm is reduced according to the fact that the moment is equal to the product of the force and the moment arm, so that the moment is reduced, and the rigidity of the rotating shaft is improved; and the multistage pump cavity adopts the mode of alternately arranging the three-lobed rotor and the two-lobed rotor, so that the stress of the rotating shaft can be balanced, the condition that the rotating shaft is damaged due to the fact that the local stress of the rotating shaft is large is avoided, and the service life of the multistage Roots vacuum pump is prolonged.
As a preferable technical solution of the multi-stage roots vacuum pump, the driving rotor and the driven rotor in one of the pump chambers adjacent to each other are both three-lobed rotors, the driving rotor and the driven rotor in the other pump chamber are both two-lobed rotors, and the driving rotor and the driven rotor in the pump chamber of one stage are both two-lobed rotors. Compared with a three-lobed rotor, the two-lobed rotor adopted by the driving rotor and the driven rotor in the primary pump cavity has the advantages that the heat dissipation area is increased under the conditions of equal efficiency and equal flow, so that the temperature rise is small, the deformation of the driving rotating shaft and the driven rotating shaft is reduced, and the normal rotation of the driving rotating shaft and the driven rotating shaft and the meshing of the driving rotor and the driven rotor are ensured; and the multistage pump cavity adopts the mode of alternately arranging the three-lobed rotor and the two-lobed rotor, so that the stress of the rotating shaft can be balanced, the condition that the rotating shaft is damaged due to the fact that the local stress of the rotating shaft is large is avoided, and the service life of the multistage Roots vacuum pump is prolonged.
As a preferred technical scheme of the multi-stage Roots vacuum pump, the trilobal rotor is an envelope-shaped trilobal rotor. The rotor with the shape has a large capacity utilization coefficient, reduces the volume of the pump under the condition of the same pumping speed, is simple to process and can easily meet the requirement.
As a preferred technical scheme of the multistage Roots vacuum pump, the two-lobe rotor is an envelope-shaped two-lobe rotor. The rotor with the shape has a large capacity utilization coefficient, reduces the volume of the pump under the condition of the same pumping speed, is simple to process and can easily meet the requirement.
Drawings
Fig. 1 is a partial structural schematic view of a multistage roots vacuum pump provided in an embodiment of the present invention.
Reference numerals:
1. a partition plate; 2. a driving rotating shaft; 3. a driven rotating shaft; 4. a driving rotor; 5. a driven rotor.
Detailed Description
In order to make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present embodiment clearer, the technical solutions of the present embodiment are further described below by referring to the drawings and through a specific implementation manner.
In the description of the present embodiments, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present embodiment can be understood in specific cases by those of ordinary skill in the art.
In this embodiment, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present embodiment. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
As shown in fig. 1, the present embodiment provides a multi-stage roots vacuum pump, which includes a pump body, a driving rotary shaft 2, a driven rotary shaft 3, a multi-stage driving rotor 4 and a multi-stage driven rotor 5, wherein the pump body includes multiple stages of pump cavities communicated in sequence; the driving rotating shaft 2 and the driven rotating shaft 3 penetrate through the pump body; each stage of pump cavity comprises a pair of driving rotor 4 and driven rotor 5 which are identical in shape and size and meshed with each other; the multi-stage driving rotors 4 are all connected to the driving rotating shaft 2; the multistage driven rotors 5 are connected to the driven rotating shaft 3; along the axial direction of the pump body and towards the direction of a high-pressure side, the sizes of the driving rotor 4 and the driven rotor 5 in the multi-stage pump cavity along the axial direction of the pump body are gradually widened. The size of the entrance point to the exit end initiative rotor 4 and the driven rotor 5 of the pump body widens in proper order promptly to make the area of the lateral wall of multistage roots vacuum pump's pump chamber increase step by step, heat transfer area increases promptly, thereby change the problem that the temperature rise is higher and higher, energy density is reduced, the work efficiency of improvement pump, the temperature rise is little, the deformation of initiative pivot 2 and driven pivot 3 has been reduced, guarantee the normal rotation of initiative pivot 2 and driven pivot 3, and the meshing of initiative rotor 4 and driven rotor 5.
The multistage pump chamber comprises at least two rotors with different blade numbers. Compared with the rotor with fewer blades, the rotor with more blades has more air inflow, that is, under the condition of the same air inflow, the size of the rotor along the axial direction of the pump body can be reduced compared with the rotor with fewer blades, so that the total length of the rotating shaft is reduced, and according to the fact that the bending moment is equal to the product of the force and the moment arm, the moment arm is reduced, so that the bending moment is reduced, and the rigidity of the rotating shaft is improved; compared with a rotor with more blades, the rotor with less blades has smaller weight and lower cost, reduces the integral supporting weight of the rotating shaft, thereby improving the rotating speed of the rotating shaft, and under the condition of equal air inflow, because the rotor with less blades has larger size along the axial direction of the pump body, the heat dissipation area of the pump cavity of the rotor with less blades is increased, thereby causing small temperature rise; the rotors with different blade numbers are arranged in the pump cavity, so that the multistage roots vacuum pump has the advantages of the rotors with small blade numbers and the rotors with large blade numbers.
Preferably, the driving rotor 4 and the driven rotor 5 in a part of the pump cavity are both trilobal rotors; and the driving rotor 4 and the driven rotor 5 in the other part of the pump cavity are both two-blade-shaped rotors. Compared with the two-lobed rotor, under the condition of equal air inflow, the three-lobed rotor has shorter axial dimension along the pump body than the two-lobed rotor, so that the total length of the rotating shaft is reduced, and the rigidity of the rotating shaft is improved; the driving rotor 4 and the driven rotor 5 in the other part of the pump cavity are both two-lobed rotors, the two-lobed rotors are lighter than three-lobed rotors, the cost is lower, and the rotating speed of the rotating shaft is improved.
In the embodiment, the driving rotor 4 and the driven rotor 5 in the pump cavities at the two ends are both trilobal rotors; the driving rotor 4 and the driven rotor 5 in the middle pump cavity are both two-blade-shaped rotors, so that the multistage Roots vacuum pump has the advantages of small weight, low cost, high rotating speed and strong rigidity of a rotating shaft; and under the condition that the axial sizes of the rotors along the pump body are the same, the gas handling capacity of the multistage roots vacuum pump per unit time is improved because the air intake amount of the three-lobed rotor is larger than that of the two-lobed rotor. In other embodiments, the driving rotor 4 and the driven rotor 5 in the pump cavity at two ends can be selected to be two-bladed rotors; the driving rotor 4 and the driven rotor 5 in the middle pump cavity are both trilobal rotors, and for ensuring the unit time treatment capacity of the multistage roots vacuum pump, compared with the trilobal rotors adopted in the pump cavity at the pump body inlet side, the size of the two lobate rotors in the pump cavity at the pump body inlet side along the axial direction of the pump body is increased, so that the heat dissipation area is increased, the temperature rise of the pump cavity where the two lobate rotors are located is small, and the temperature rise of the whole multistage roots vacuum pump is controlled conveniently.
In another embodiment, the driving rotor 4 and the driven rotor 5 in one of the adjacent pump chambers are both tri-lobed rotors, and the driving rotor 4 and the driven rotor 5 in the other pump chamber are both two-lobed rotors, in such a manner that the tri-lobed rotors and the two-lobed rotors are alternately arranged. The driving rotor 4 and the driven rotor 5 in the first-stage pump cavity can be selected to be trilobal rotors; or, the driving rotor 4 and the driven rotor 5 in the primary pump cavity are both two-blade-shaped rotors. When the driving rotor 4 and the driven rotor 5 in the primary pump cavity are both three-lobed rotors, compared with the two-lobed rotors, the length of the driving rotating shaft 2 and the length of the driven rotating shaft 3 can be reduced under the condition of equal efficiency and equal flow, and the moment arm is reduced according to the fact that the moment is equal to the product of force and the moment arm, so that the moment arm is reduced, and the rigidity of the rotating shaft is improved; and the multistage pump cavity adopts the mode of alternately arranging the three-lobed rotor and the two-lobed rotor, so that the stress of the rotating shaft can be balanced, the condition that the rotating shaft is damaged due to the fact that the local stress of the rotating shaft is large is avoided, and the service life of the multistage Roots vacuum pump is prolonged. When the driving rotor 4 and the driven rotor 5 in the primary pump cavity are both two-lobed rotors, compared with a three-lobed rotor, under the condition of equal efficiency and equal flow, the length of the driving rotating shaft 2 and the driven rotating shaft 3 is increased, and the heat dissipation area is increased, so that the temperature rise is small, the deformation of the driving rotating shaft 2 and the driven rotating shaft 3 is reduced, and the normal rotation of the driving rotating shaft 2 and the driven rotating shaft 3 and the meshing of the driving rotor 4 and the driven rotor 5 are ensured; and the multistage pump cavity adopts the mode of alternately arranging the three-lobed rotor and the two-lobed rotor, so that the stress of the rotating shaft can be balanced, the condition that the rotating shaft is damaged due to the fact that the local stress of the rotating shaft is large is avoided, and the service life of the multistage Roots vacuum pump is prolonged.
In the embodiment, the trilobal rotor is an envelope-shaped trilobal rotor, the capacity utilization coefficient of the rotor with the shape is large, the volume of the pump is reduced under the condition of the same pumping speed, the processing is simple, and the requirement is easy to meet. The two-blade rotor is an envelope two-blade rotor, the capacity utilization coefficient of the rotor in the shape is large, the volume of the pump is reduced under the condition that the pumping speed is the same, the processing is simple, and the requirement is easy to achieve.
In the present embodiment, the pump body includes a pump casing and a plurality of partition plates 1, and the plurality of partition plates 1 are connected in the pump casing in an axial direction of the pump casing to partition an interior of the pump casing into a plurality of pump chambers. The axial two ends of the pump shell are respectively provided with an air inlet and an air outlet. Set up the gas circulation passageway in baffle 1, all seted up the air vent on two curb plates of the relative setting of baffle 1, and two air vents all are linked together with gas circulation passageway and adjacent pump chamber.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, there may be variations in the specific implementation and application range according to the idea of the present embodiment, and the present description should not be construed as limiting the present embodiment.
Claims (9)
1. A multistage roots vacuum pump characterized in that includes:
the pump body comprises a plurality of stages of pump cavities which are communicated in sequence;
the pump comprises a driving rotating shaft (2) and a driven rotating shaft (3), wherein the driving rotating shaft (2) and the driven rotating shaft (3) penetrate through the pump body;
each stage of the pump cavity comprises a pair of driving rotors (4) and driven rotors (5) which are identical in shape and size and meshed with each other;
along the axial direction of the pump body and towards the direction of a high-pressure side, the sizes of the driving rotor (4) and the driven rotor (5) in the pump cavity in multiple stages are gradually widened along the axial direction of the pump body.
2. A multi-stage roots vacuum pump as claimed in claim 1, wherein at least two rotors of different lobe count are included in the multi-stage pump chamber.
3. A multi-stage roots vacuum pump according to claim 2, wherein the driving rotor (4) and the driven rotor (5) within a portion of the pump chamber are both tri-lobed rotors; the other part of the driving rotor (4) and the driven rotor (5) in the pump cavity are both two-blade-shaped rotors.
4. A multi-stage roots vacuum pump according to claim 3, wherein the driving rotor (4) and the driven rotor (5) in the pump chambers at both ends are tri-lobed rotors; the driving rotor (4) and the driven rotor (5) in the middle pump cavity are both two-blade-shaped rotors.
5. A multi-stage roots vacuum pump according to claim 3, wherein the driving rotor (4) and the driven rotor (5) in the pump chambers at both ends are two lobed rotors; the driving rotor (4) and the driven rotor (5) in the middle pump cavity are both trilobal rotors.
6. A multi-stage roots vacuum pump according to claim 3, wherein the driving rotor (4) and the driven rotor (5) in one of the pump chambers adjacent thereto are both tri-lobed rotors, the driving rotor (4) and the driven rotor (5) in the other pump chamber are both two-lobed rotors, and the driving rotor (4) and the driven rotor (5) in one pump chamber are both tri-lobed rotors.
7. A multi-stage roots vacuum pump according to claim 3, wherein the driving rotor (4) and the driven rotor (5) in one of the pump chambers adjacent thereto are both tri-lobed rotors, the driving rotor (4) and the driven rotor (5) in the other pump chamber are both two-lobed rotors, and the driving rotor (4) and the driven rotor (5) in one pump chamber are both two-lobed rotors.
8. A multi-stage roots vacuum pump as claimed in claim 3, wherein the tri-lobed rotor is an envelope shaped tri-lobed rotor.
9. A multi-stage roots vacuum pump as claimed in claim 3, wherein the two-lobed rotor is an envelope two-lobed rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121780925.4U CN215486576U (en) | 2021-08-02 | 2021-08-02 | Multistage roots vacuum pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121780925.4U CN215486576U (en) | 2021-08-02 | 2021-08-02 | Multistage roots vacuum pump |
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| Publication Number | Publication Date |
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| CN215486576U true CN215486576U (en) | 2022-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121780925.4U Active CN215486576U (en) | 2021-08-02 | 2021-08-02 | Multistage roots vacuum pump |
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| CN (1) | CN215486576U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116538089A (en) * | 2023-06-08 | 2023-08-04 | 北京通嘉宏瑞科技有限公司 | Rotor structure and vacuum pump |
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2021
- 2021-08-02 CN CN202121780925.4U patent/CN215486576U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116538089A (en) * | 2023-06-08 | 2023-08-04 | 北京通嘉宏瑞科技有限公司 | Rotor structure and vacuum pump |
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Effective date of registration: 20220617 Address after: 201000 room j11226, building 4, zone B, No. 925, Yecheng Road, Jiading Industrial Zone, Jiading District, Shanghai Patentee after: Shanghai Shengjian Semiconductor Technology Co.,Ltd. Address before: 201821 room 210, 2 / F, building 2, No. 2229, Yongsheng Road, Jiading Industrial Zone, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENTAL SYSTEM TECHNOLOGY Co.,Ltd. |