CN215470602U - Fixture for semiconductor processing - Google Patents
Fixture for semiconductor processing Download PDFInfo
- Publication number
- CN215470602U CN215470602U CN202120417308.1U CN202120417308U CN215470602U CN 215470602 U CN215470602 U CN 215470602U CN 202120417308 U CN202120417308 U CN 202120417308U CN 215470602 U CN215470602 U CN 215470602U
- Authority
- CN
- China
- Prior art keywords
- bracket
- semiconductor processing
- clamping
- boss
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000013078 crystal Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the technical field of semiconductor processing, and particularly discloses a clamp for semiconductor processing, which comprises: a vertical support plate; the bracket is provided with a clamping groove for fixing a semiconductor to be processed and is movably connected with the supporting plate so as to realize the length adjustment of the bracket and the rotation of the bracket. Through setting up with backup pad swing joint's bracket, make the length of bracket adjustable and the rotation of bracket to realize the adaptable different length of fixture and the semiconductor machined part of different crystal orientations, in addition, through setting up the curb plate with supporting head swing joint, make the size of draw-in groove can be adjusted, and then adapt to the semiconductor machined part of different diameters, thereby solve the problem of changing different fixtures, improved work efficiency.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, and particularly discloses a clamp for semiconductor processing.
Background
The processing technology of the single crystal rod influences the processing efficiency and the product quality, the conventional vertical slicing machine has no specific fixture, so that the single crystal rods with different specifications need different fixtures, and in the processing process of a batch of single crystal rods, various different fixtures need to be replaced, so that the working efficiency is greatly reduced, and the service life of a processing device is shortened.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to solving, at least to some extent, the above-mentioned technical problems in the related art. Therefore, the utility model provides a clamp for processing a semiconductor, which solves at least one technical problem.
In order to achieve the above object, a first aspect of the present invention provides a jig for semiconductor processing, comprising:
a vertical support plate;
the bracket is provided with a clamping groove for fixing a semiconductor to be processed, and the bracket is movably connected with the supporting plate so as to realize the adjustable length of the bracket and the rotation of the bracket.
In addition, the fixture for processing the semiconductor according to the present invention may further have the following additional features:
according to an embodiment of the present invention, further comprising:
the bracket is provided with a connecting piece, the supporting plate is provided with a connecting hole matched with the connecting piece, and the connecting piece is fixed in the connecting hole by the fastening piece.
According to one embodiment of the utility model, the carrier comprises:
the clamping assembly is provided with a first side surface and a second side surface which are oppositely arranged, and the clamping groove is formed in the first side surface;
the boss is a regular quadrangular frustum pyramid, the bottom surface of the boss is fixed on the second side surface, the connecting piece is fixed on the top surface of the boss, a boss hole matched with the boss is formed in the supporting plate, and the boss hole is communicated with the connecting hole.
According to one embodiment of the utility model, the card slot is a dovetail card slot.
According to one embodiment of the utility model, the clamping assembly comprises:
the clamping head is provided with a first clamping tooth;
the side plate is provided with a second clamping tooth, the clamping groove is formed between the first clamping tooth and the second clamping tooth, and the side plate is movably connected with the clamping head to adjust the size of the clamping groove.
According to one embodiment of the utility model, the side plates are bolted to the gripping head.
According to one embodiment of the utility model, the side plate is provided with a screw hole, and the diameter of the screw hole is 6-9 mm.
According to one embodiment of the utility model, the fastening element is a nut, the connecting element is a bolt, and the diameter of the connecting hole is 12-15 mm.
According to one embodiment of the utility model, one end of the support plate, which is far away from the bracket, is provided with a fixing hole for connecting a machine tool, and the diameter of the fixing hole is 6-9 mm.
According to one embodiment of the utility model, the support plate is an aluminum support plate and the bracket is an aluminum bracket.
Compared with the prior art, the utility model has the following beneficial effects:
through setting up with backup pad swing joint's bracket, make the length of bracket adjustable and the rotation of bracket to realize the adaptable different length of fixture and the semiconductor machined part of different crystal orientations, in addition, through setting up the curb plate with supporting head swing joint, make the size of draw-in groove can be adjusted, and then adapt to the semiconductor machined part of different diameters, thereby solve the problem of changing different fixtures, improved work efficiency.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 is a cross-sectional view of a fixture in an embodiment of the utility model;
FIG. 2 is a cross-sectional view of a support plate in an embodiment of the present invention;
FIG. 3 is a front view of a support plate in an embodiment of the present invention;
FIG. 4 is a cross-sectional view of the bracket of the embodiment of the present invention shown in FIG. 1;
FIG. 5 is a cross-sectional view of a bracket according to an embodiment of the present invention, as shown in FIG. 2;
FIG. 6 is a cross-sectional view of a side panel of an embodiment of the present invention 1;
fig. 7 is a cross-sectional view of a side plate in an embodiment of the present invention 2.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a," "an," and "the" may be intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprising," "including," and "having" are inclusive and therefore specify the presence of stated features, elements, and/or components, but do not preclude the presence or addition of one or more other features, elements, components, and/or groups thereof.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a detachable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
For convenience of description, spatially relative terms, such as "bottom," "front," "upper," "oblique," "lower," "top," "inner," "horizontal," "outer," and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. This spatially relative relationship is intended to encompass different orientations of the mechanism in use or operation in addition to the orientation depicted in the figures. For example, if the mechanism in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" or "over" the other elements or features. Thus, the example term "below … …" can include both an orientation of above and below.
Referring to fig. 1 to 7, some embodiments of the present invention provide a jig 100 for semiconductor processing, and particularly, the jig 100 for semiconductor processing of the present embodiment is mainly used in a process of processing a single crystal rod, and includes a vertical support plate 10, a bracket and a fastener, wherein the bracket has a clamping groove 11 for fixing the single crystal rod to be processed, and the bracket is movably connected to the support plate 10 to enable the length of the bracket to be adjustable and the bracket to be rotated.
Specifically, in this embodiment, with continued reference to fig. 4-7, the bracket includes a clamping assembly and a boss 12, the clamping assembly includes a clamping head 13 and a side plate 14, wherein the clamping head 13 has a first side surface and a second side surface which are oppositely disposed, the clamping head 13 has a first latch 130, the first latch 130 is located on the first side surface, the side plate 14 has a second latch 140, a slot 11 is formed between the first latch 130 and the second latch 140, and the side plate 14 is movably connected to the clamping head 13 to adjust a size of the slot 11. Specifically, the size of the clamping groove 11 directly influences the diameter of the clamped single crystal rod, and the size of the clamping groove 11 can be adjusted so that the clamping groove 11 can adapt to single crystal rods with different diameters.
It should be noted that, with continued reference to fig. 4-7, the boss 12 is provided with a connecting member 15, the support plate 10 is provided with a connecting hole 101 adapted to the connecting member 15, and the connecting member 15 passes through the connecting hole 101 and is fixed by a fastener. Specifically, the connecting member 15 may be a bolt, the connecting hole 101 may be a screw hole having a diameter of 12-15mm, and the fastening member may be a nut, so that when the length of the carrier needs to be adjusted, the horizontal length of the carrier can be adjusted by loosening the nut, thereby adapting to single crystal rods having different lengths.
It should be noted that, with reference to fig. 2-5, the boss 12 is a regular quadrangular frustum pyramid, wherein the bottom surface of the boss 12 is in butt joint with the second side surface, the connecting member 15 is fixed on the top surface of the boss 12, the support plate 10 is provided with a boss hole 102 adapted to the boss 12, and the boss hole 102 is communicated with the connecting hole 101. Specifically, when the bracket is fixed on the support plate 10 by the fastener, the boss 12 is just located in the boss hole 102, when the bracket needs to be rotated, the nut can be loosened, the bracket can be rotated at this time, for example, in the present embodiment, the bracket can be rotated counterclockwise or clockwise by 90 °, when the bracket is not rotated by 90 ° or the rotated angle is greater than 90 °, the boss 12 cannot be matched with the boss hole 102, only when the bracket is rotated by 90 °, the boss 12 can be matched with the boss hole 102, thereby realizing the accurate control of the bracket rotation by 90 °, and avoiding the excessive or undersize angle of the bracket rotation.
In this embodiment, the clamping groove may be a dovetail-shaped clamping groove with a large inside and a small outside, and correspondingly, a dovetail protrusion adapted to the shape of the clamping groove is formed at a corresponding position of the single crystal rod, so as to fasten the single crystal rod by the clamping groove.
It should be noted that an included angle between the engaging surface of the first latch 130 and the first side surface is 45 °, and an included angle between the engaging surface of the second latch 140 and the side surface of the side plate 14 is 45 °.
It should be noted that, in this embodiment, the side plate 14 is connected to the clamping head 13 through a bolt, that is, the clamping head 13 is provided with a screw hole 131, the side plate 14 is provided with a screw hole 141, and the diameter of the screw hole 141 may be 6-9 mm.
In addition, with continued reference to fig. 2-3, the end of the support plate 10 away from the bracket is provided with a fixing hole 103 for connecting a machine tool, wherein the diameter of the fixing hole 103 is 6-9 mm.
In this embodiment, the supporting plate 10 and the bracket may be made of aluminum, which is greatly improved in weight and lower in production cost compared to the conventional steel.
Compared with the prior art, through setting up the bracket with backup pad swing joint, make the length of bracket adjustable and the rotation of bracket to realize the adaptable different length of fixture and the semiconductor machined part of different crystal orientations, in addition, through setting up the curb plate with holding head swing joint, make the size of draw-in groove can be adjusted, and then the semiconductor machined part of different diameters of adaptation, thereby solve the problem of changing different fixtures, improved work efficiency.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A jig for semiconductor processing, comprising:
a vertical support plate;
the bracket is provided with a clamping groove for fixing a semiconductor to be processed, and the bracket is movably connected with the supporting plate so as to realize the adjustable length of the bracket and the rotation of the bracket.
2. The chuck for semiconductor processing according to claim 1, further comprising:
the bracket is provided with a connecting piece, the supporting plate is provided with a connecting hole matched with the connecting piece, and the connecting piece is fixed in the connecting hole by the fastening piece.
3. The chuck for semiconductor processing according to claim 2, wherein the holder comprises:
the clamping assembly is provided with a first side surface and a second side surface which are oppositely arranged, and the clamping groove is formed in the first side surface;
the boss is a regular quadrangular frustum pyramid, the bottom surface of the boss is fixed on the second side surface, the connecting piece is fixed on the top surface of the boss, a boss hole matched with the boss is formed in the supporting plate, and the boss hole is communicated with the connecting hole.
4. The jig for semiconductor processing according to claim 3, wherein the notch is a dovetail notch.
5. The chuck for semiconductor processing according to claim 3, wherein the clamping assembly comprises:
the clamping head is provided with a first clamping tooth;
the side plate is provided with a second clamping tooth, the clamping groove is formed between the first clamping tooth and the second clamping tooth, and the side plate is movably connected with the clamping head to adjust the size of the clamping groove.
6. The jig for semiconductor processing according to claim 5, wherein the side plate and the clamping head are connected by a bolt.
7. The jig for processing semiconductors of claim 6, wherein the side plate is provided with a screw hole, and the diameter of the screw hole is 6-9 mm.
8. The jig for semiconductor processing according to claim 2, wherein the fastening member is a nut, the connecting member is a bolt, and the diameter of the connecting hole is 12 to 15 mm.
9. The jig for processing semiconductors as claimed in claim 8, wherein a fixing hole for connecting a machine tool is formed at one end of the support plate away from the bracket, and the diameter of the fixing hole is 6-9 mm.
10. The jig for semiconductor processing according to any one of claims 1 to 9, wherein the support plate is an aluminum support plate, and the bracket is an aluminum bracket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120417308.1U CN215470602U (en) | 2021-02-25 | 2021-02-25 | Fixture for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120417308.1U CN215470602U (en) | 2021-02-25 | 2021-02-25 | Fixture for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215470602U true CN215470602U (en) | 2022-01-11 |
Family
ID=79771270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120417308.1U Active CN215470602U (en) | 2021-02-25 | 2021-02-25 | Fixture for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215470602U (en) |
-
2021
- 2021-02-25 CN CN202120417308.1U patent/CN215470602U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102303142A (en) | Clamp for strengthening corner surface of fastener | |
| CN202438851U (en) | Drilling jig | |
| CN215470602U (en) | Fixture for semiconductor processing | |
| CN208556029U (en) | A kind of novel lathe fixture | |
| CN212705560U (en) | Vertical machining center milling fixture for machining special-shaped pieces | |
| CN209867594U (en) | Special thread turning clamp for oil inlet pipe joint | |
| CN213616172U (en) | Novel fixing equipment is used in machine parts production | |
| CN201792222U (en) | Jig | |
| CN211564940U (en) | Portable three-point positioning fixture tool | |
| CN210548452U (en) | Cutting clamp | |
| CN218110011U (en) | Machining clamp of numerical control machining center | |
| CN218110554U (en) | Work fixture | |
| CN220944996U (en) | Positioning device for stabilizer bar machining | |
| CN217776262U (en) | Multi freedom anchor clamps | |
| CN216028962U (en) | Rotary welding fixture | |
| CN220498949U (en) | Driving shaft tool clamp | |
| CN216179236U (en) | Automobile wrench mould | |
| CN211728391U (en) | Angle-adjustable multi-directional fixture tool | |
| CN209681679U (en) | Numerically-controlled machine tool knife platform casting clamping flat-nose pliers | |
| CN218891764U (en) | Automobile spare and accessory part machining clamp | |
| CN211248968U (en) | All-position welding device based on pipe and plate | |
| CN209737110U (en) | special-shaped clamp convenient to clamp | |
| CN215967495U (en) | Small-size spare part processing is with location frock that steps up fast | |
| CN203254326U (en) | Holding device for installation positioning of radome | |
| CN217394313U (en) | A car adds clamping apparatus for cylindric work piece |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220302 Address after: 065201 South Youyan Technology Group Co., Ltd. No.2, Xingdu village, Yanjiao, Sanhe City, Langfang City, Hebei Province Patentee after: GRINM GUOJING ADVANCED MATERIALS Co.,Ltd. Address before: 065001 No.4 Baihe Road, Langfang Development Zone, Langfang City, Hebei Province Patentee before: GRINM ELECTRO-OPTIC MATERIALS CO.,LTD. |