CN215464149U - Grinding fluid batching liquid feeding device - Google Patents
Grinding fluid batching liquid feeding device Download PDFInfo
- Publication number
- CN215464149U CN215464149U CN202121508417.0U CN202121508417U CN215464149U CN 215464149 U CN215464149 U CN 215464149U CN 202121508417 U CN202121508417 U CN 202121508417U CN 215464149 U CN215464149 U CN 215464149U
- Authority
- CN
- China
- Prior art keywords
- shaft
- liquid
- gear
- gear pump
- feeding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model relates to grinding fluid, in particular to a grinding fluid batching and feeding device. The utility model provides a lapping liquid batching liquid feeding device, includes liquid case, gear pump, agitator and transmission portion, the base liquid of lapping liquid is stored to the liquid incasement, and the liquid incasement is equipped with the pipeline No. one, and gear pump internal rotation connects driving gear and driven gear, and the gear pump is equipped with inlet and liquid outlet. The utility model has the beneficial effects that: provided is a device capable of replenishing a base liquid to a polishing liquid agitator and adjusting the relationship between the base liquid feed rate of a gear pump and the rotational speed of an agitating shaft.
Description
Technical Field
The utility model relates to grinding fluid, in particular to a grinding fluid batching and feeding device.
Background
One of the main components of the silicon wafer processing device is the lapping liquid configuration device, while the lapping liquid configuration device of the prior art generally adopts the manual addition of the base liquid, and the efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of overcoming the defects in the prior art and provides a grinding fluid batching and feeding device.
The utility model is realized by the following technical scheme:
a grinding fluid batching and feeding device comprises a fluid tank, a gear pump, a stirrer and a transmission part, wherein base fluid of grinding fluid is stored in the fluid tank, a first pipeline is arranged in the fluid tank, the interior of the gear pump is rotatably connected with a driving gear and a driven gear, the gear pump is provided with a fluid inlet and a fluid outlet, the first pipeline is communicated with the fluid inlet of the gear pump, the fluid outlet of the gear pump is communicated with a second pipeline, the second pipeline is communicated with the interior of the stirrer, a stirring shaft is arranged in the stirrer and provided with a plurality of stirring blades, the transmission part comprises a shell, a first shaft, a second shaft, a lead screw and a guide rail, the first shaft, the second shaft, the lead screw and the guide rail are mutually parallel, the first shaft is connected with the shell through a bearing, the two ends of the first shaft are respectively connected with a motor and the driving gear, the first shaft is provided with a plurality of driving transmission gears with different diameters, the second shaft is connected with the shell through a bearing, the second shaft is connected with the stirring shaft through a pair of bevel gears, a second shaft is slidably connected with a sliding sleeve, the sliding sleeve is provided with a plurality of driven transmission gears with different diameters, the driven transmission gears are matched with the driving transmission gears, the lead screw is connected with the shell through a bearing, the lead screw is connected with a sliding block through threads, the sliding block is provided with a guide through groove, the guide rail penetrates through the guide through groove, and the sliding block is fixedly connected with the sliding sleeve.
According to the above technical solution, preferably, the driving gear and the driven gear are engaged.
According to the above technical solution, preferably, the lead screw is provided with a rocking handle.
According to the technical scheme, preferably, a sliding key is arranged on the second shaft, and a corresponding key groove is formed in the sliding key.
According to the technical scheme, preferably, the sliding sleeve is provided with the clamping ring, and the clamping ring is fixedly connected with the sliding block through the connecting rod.
The utility model has the beneficial effects that: provided is a device capable of replenishing a base liquid to a polishing liquid agitator and adjusting the relationship between the base liquid feed rate of a gear pump and the rotational speed of an agitating shaft. The liquid box stores base liquid of the grinding liquid. The motor drives the first shaft to rotate, the first shaft drives the driving gear in the gear pump to rotate, the driving gear drives the driven gear to rotate, the base liquid in the liquid tank is sucked into the gear pump through the first pipeline and is discharged into the stirrer through the second pipeline. Meanwhile, a driving transmission gear of the first shaft is meshed with a driven transmission gear of the second shaft, the motor drives the second shaft to rotate through the first shaft, the second shaft drives a stirring shaft to rotate through a bevel gear, and the stirring shaft drives stirring blades to rotate so as to uniformly stir and mix the base liquid and the grinding liquid. The user can drive the slider and slide along the guide rail through rotating the lead screw, and the slider drives the sliding sleeve and removes along No. two axles to make different initiative drive gear and driven drive gear mesh, change the drive ratio of a axle and No. two axles.
Drawings
Fig. 1 shows a schematic view of a transmission part according to an embodiment of the present invention.
Fig. 2 shows a schematic view of a tank and gear pump configuration of an embodiment of the present invention.
Fig. 3 shows a schematic diagram of the stirrer structure of the embodiment of the present invention.
In the figure: 1. the automatic stirring device comprises a liquid box, a gear pump 2, a stirrer 3, a pipeline 4, a driving gear 5, a driven gear 6, a liquid inlet 7, a liquid outlet 8, a pipeline 9, a stirring shaft 10, a stirring blade 11, a shell 12, a shaft 13, a shaft 14, a shaft 15, a lead screw 16, a guide rail 17, a driving transmission gear 18, a bevel gear 19, a sliding sleeve 20, a driven transmission gear 21, a sliding block 21, a rocking handle 22, a sliding key 23, a clamping ring 24 and a connecting rod 25.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
As shown in the figure, the grinding fluid proportioning and feeding device comprises a fluid tank 1, a gear pump 2, a stirrer 3 and a transmission part, wherein a first pipeline 4 is arranged in the fluid tank, the interior of the gear pump is rotatably connected with a driving gear 5 and a driven gear 6, the gear pump is provided with a liquid inlet 7 and a liquid outlet 8, the first pipeline is communicated with the liquid inlet of the gear pump, the liquid outlet of the gear pump is communicated with a second pipeline 9, the second pipeline is communicated with the interior of the stirrer, a stirring shaft 10 is arranged in the stirrer and is provided with a plurality of stirring blades 11, the transmission part comprises a shell 12, a first shaft 13, a second shaft 14, a lead screw 15 and a guide rail 16, the first shaft, the second shaft, the lead screw and the guide rail are mutually parallel, the first shaft is connected with the shell through a bearing, two ends of the first shaft are respectively connected with a motor and the driving gear, a plurality of driving transmission gears 17 with different diameters are arranged on the first shaft, and the second shaft is connected with the shell through a bearing, the second shaft and the stirring shaft are connected through a pair of bevel gears 18, the second shaft is in sliding connection with a sliding sleeve 19, the sliding sleeve is provided with a plurality of driven transmission gears 20 with different diameters, the driven transmission gears are matched with the driving transmission gears, the lead screw is connected with the shell through a bearing, the lead screw is in threaded connection with a sliding block 21, the sliding block is provided with a guiding through groove, the guide rail penetrates through the guiding through groove, and the sliding block is fixedly connected with the sliding sleeve.
According to the above embodiment, preferably, the driving gear and the driven gear are engaged.
According to the above described embodiment, the lead screw is preferably provided with a rocking handle 22.
According to the above embodiment, preferably, the second shaft is provided with a sliding key 23, and the sliding key is provided with a corresponding key slot. The sliding sleeve can slide along the sliding key and transmit torque with the second shaft.
According to the above embodiment, preferably, the sliding sleeve is provided with a snap ring 24, and the snap ring and the sliding block are fixedly connected through a connecting rod 25.
The working principle of the embodiment is as follows: the liquid box stores base liquid of the grinding liquid. The motor drives the first shaft to rotate, the first shaft drives the driving gear in the gear pump to rotate, the driving gear drives the driven gear to rotate, the base liquid in the liquid tank is sucked into the gear pump through the first pipeline and is discharged into the stirrer through the second pipeline. Meanwhile, a driving transmission gear of the first shaft is meshed with a driven transmission gear of the second shaft, the motor drives the second shaft to rotate through the first shaft, the second shaft drives a stirring shaft to rotate through a bevel gear, and the stirring shaft drives stirring blades to rotate so as to uniformly stir and mix the base liquid and the grinding liquid. The user can drive the slider through rotating the lead screw and slide along the guide rail, and the slider drives the sliding sleeve and removes along No. two axles to make different initiative drive gear and driven drive gear mesh, change the drive ratio of No. one axle and No. two axles, adjust the base fluid conveying speed of gear pump and the slew velocity relation of (mixing) shaft.
The utility model has the beneficial effects that: provided is a device capable of replenishing a base liquid to a polishing liquid agitator and adjusting the relationship between the base liquid feed rate of a gear pump and the rotational speed of an agitating shaft.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. The utility model provides a lapping liquid batching liquid feeding device which characterized in that: the grinding fluid mixing device comprises a fluid tank, a gear pump, a stirrer and a transmission part, wherein base fluid of grinding fluid is stored in the fluid tank, a first pipeline is arranged in the fluid tank, the interior of the gear pump is rotatably connected with a driving gear and a driven gear, the gear pump is provided with a liquid inlet and a liquid outlet, the first pipeline is communicated with the liquid inlet of the gear pump, the liquid outlet of the gear pump is communicated with a second pipeline, the second pipeline is communicated with the interior of the stirrer, a stirring shaft is arranged in the stirrer and provided with a plurality of stirring blades, the transmission part comprises a shell, a first shaft, a second shaft, a lead screw and a guide rail, the first shaft, the second shaft, the lead screw and the guide rail are mutually parallel, the first shaft is connected with the shell through a bearing, two ends of the first shaft are respectively connected with a motor and the driving gear, the first shaft is provided with a plurality of driving transmission gears with different diameters, the second shaft is connected with the shell through a bearing, the second shaft is connected with the stirring shaft through a pair of bevel gears, and is slidably connected with a sliding sleeve, the sliding sleeve is provided with a plurality of driven transmission gears with different diameters, the driven transmission gears are matched with the driving transmission gears, the lead screw is connected with the shell through a bearing, the lead screw is connected with the sliding block through threads, the sliding block is provided with a guide through groove, the guide rail penetrates through the guide through groove, and the sliding block is fixedly connected with the sliding sleeve.
2. The grinding fluid batching and feeding device of claim 1, characterized in that: the driving gear is meshed with the driven gear.
3. The grinding fluid batching and feeding device of claim 1, characterized in that: the lead screw is provided with a rocking handle.
4. The grinding fluid batching and feeding device of claim 1, characterized in that: a sliding key is arranged on the second shaft, and a corresponding key groove is arranged on the sliding sleeve.
5. The grinding fluid batching and feeding device of claim 1, characterized in that: the sliding sleeve is provided with a snap ring, and the snap ring is fixedly connected with the sliding block through a connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121508417.0U CN215464149U (en) | 2021-07-05 | 2021-07-05 | Grinding fluid batching liquid feeding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121508417.0U CN215464149U (en) | 2021-07-05 | 2021-07-05 | Grinding fluid batching liquid feeding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215464149U true CN215464149U (en) | 2022-01-11 |
Family
ID=79724505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121508417.0U Active CN215464149U (en) | 2021-07-05 | 2021-07-05 | Grinding fluid batching liquid feeding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215464149U (en) |
-
2021
- 2021-07-05 CN CN202121508417.0U patent/CN215464149U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN215654916U (en) | Liquid medicine mixing arrangement | |
| CN218047375U (en) | Pipeline is used in lubricant production with mixing action | |
| CN205630983U (en) | Mixer for building | |
| CN211216303U (en) | Mixing stirring device for lubricating oil processing | |
| CN215464149U (en) | Grinding fluid batching liquid feeding device | |
| CN114149066A (en) | Dosing device for acid wastewater treatment and using method thereof | |
| CN215842677U (en) | Mixing stirring device for production of abrasive grinding tools | |
| CN216321693U (en) | Full-automatic food additive preparation equipment for biochemical production | |
| CN215463669U (en) | Printing ink standard color matching device | |
| CN213966270U (en) | Mixing and stirring equipment for powdery metallurgical materials | |
| CN213171621U (en) | Silver nitrate wastewater treatment device | |
| CN208244600U (en) | A kind of V-Mixer | |
| CN209362411U (en) | A kind of composite glue agitating device | |
| CN111764653A (en) | Multi-floor cement conveying device | |
| CN106179100A (en) | A kind of double-speed mixing actuating device | |
| CN111359494A (en) | Efficient centrifugal mixer | |
| CN212669576U (en) | Fermentation mixer is used in microbial fertilizer production | |
| CN216224077U (en) | Automatic fluid brewing equipment | |
| CN117695897B (en) | Chemical auxiliary agent allotment equipment | |
| CN218077388U (en) | Blending kettle for emulsifier production | |
| CN219816006U (en) | Feeding mechanism for grape wine hooking | |
| CN214552898U (en) | Additive agitating unit for fracturing operation | |
| CN213434062U (en) | Mixing device for blending natural rubber | |
| CN219519879U (en) | Flushing device | |
| CN219784418U (en) | Material mixing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230921 Address after: Room 401-04-24, Building G, Haitai Green Industry Base, No. 6 Haitai Development Sixth Road, Huayuan Industrial Zone, Xiqing District, Tianjin, 300384 Patentee after: TIANJIN XIMEI SEMICONDUCTOR MATERIALS CO.,LTD. Address before: 300000 No.83, Qiwei Road, Dawangzhuang, Hedong District, Tianjin (room 212, area B, second floor) Patentee before: TIANJIN XIMEI TECHNOLOGY Corp.,Ltd. |
|
| TR01 | Transfer of patent right |