CN215451345U - Semiconductor process equipment and integrated gas supply system thereof - Google Patents

Abstract

The embodiment of the application provides semiconductor process equipment and an integrated gas supply system thereof. This integrated gas supply system includes: the device comprises a bottom plate, a gas path conveying assembly, a pivoting assembly and a locking assembly; the bottom plate is vertically arranged in a cabinet body of the semiconductor process equipment; the top end of the air path conveying assembly is pivotally connected with the bottom plate through a pivoting assembly, and the air path conveying assembly can rotate relative to the pivoting assembly so as to switch between a first position and a second position; the locking assembly is arranged on one side, facing the bottom plate, of the gas circuit conveying assembly and used for locking the bottom end of the gas circuit conveying assembly and the bottom plate when the gas circuit conveying assembly is located at the first position and also used for releasing the bottom end of the gas circuit conveying assembly and the bottom plate so that the gas circuit conveying assembly can be switched to the second position. The embodiment of the application provides space for debugging and maintenance, so that the debugging and maintenance efficiency can be greatly improved. In addition, the gas path conveying assembly is located at the second position, and reading of the meter on the gas path conveying assembly is facilitated.

Description

Semiconductor process equipment and integrated gas supply system thereof

Technical Field

The application relates to the technical field of semiconductor processing, in particular to semiconductor process equipment and an integrated gas supply system thereof.

Background

Currently, Integrated Gas Systems (IGS) are disposed between a Gas source and a process chamber of a semiconductor processing tool. The integrated gas supply system may specifically include: the bottom plate and the plurality of independently detachable gas path conveying modules can change the flow direction of gas in different matching modes; the gas path conveying module can be provided with valve components for controlling the on-off and pressure of gas and a mass flow controller for controlling the flow of the gas. Semiconductor processing equipment generally needs several gases during operation, has specific requirements on the pressure and temperature of the gases, and needs to control the flow and make-and-break of the gases in real time. The gas path conveying modules can be combined at will to be suitable for different types of semiconductor process equipment, so that gas can enter a process chamber according to process requirements.

In the prior art, an integrated gas supply system is vertically arranged in a cabinet body at the bottommost end of semiconductor process equipment for convenient connection with a gas source of a factory, but the mounting position is too low and is positioned at the inner side of the cabinet body, so that a great deal of inconvenience is brought to field worker operation in debugging and maintenance stages, and the debugging and maintenance are extremely inconvenient because the integrated gas supply system cannot be disassembled due to too large weight. Particularly, a valve switch knob on the gas path conveying module needs to be adjusted repeatedly in a debugging stage, and great difficulty is brought to field operation due to space limitation; components on the gas path conveying module need to be fixed by fasteners, so that the components are easy to fall off when being maintained, and the maintenance efficiency is low; because the gas circuit conveying module is provided with various instruments, the reading of the instruments cannot be conveniently read due to space limitation, and the normal execution of the process is influenced.

SUMMERY OF THE UTILITY MODEL

The application provides semiconductor process equipment and an integrated gas supply system thereof aiming at the defects of the prior art, and aims to solve the technical problem that the operation, maintenance and debugging of the integrated gas supply system are inconvenient in the prior art.

In a first aspect, embodiments of the present application provide an integrated gas supply system for a semiconductor processing tool for delivering gas into a process chamber of the semiconductor processing tool, comprising: the device comprises a bottom plate, a gas path conveying assembly, a pivoting assembly and a locking assembly; the bottom plate is vertically arranged in a cabinet body of the semiconductor process equipment; the top end of the air path conveying assembly is pivotally connected with the bottom plate through the pivoting assembly, and the air path conveying assembly can rotate relative to the pivoting assembly so as to switch the air path conveying assembly between a first position and a second position; the locking assembly is arranged on one side, facing the bottom plate, of the gas path conveying assembly and used for locking the gas path conveying assembly with the bottom plate when the gas path conveying assembly is located at the first position and releasing the bottom end of the gas path conveying assembly with the bottom plate so that the gas path conveying assembly can be switched to the second position.

In an embodiment of the present application, the gas path conveying assembly is located at a first position, and an extending direction of the gas path conveying assembly is parallel to an extending direction of the bottom plate; the gas circuit conveying assembly is located at the second position, a preset included angle is formed between the extending direction of the gas circuit conveying assembly and the extending direction of the bottom plate, and the numerical range of the preset included angle is 60-90 degrees.

In an embodiment of the application, integrated gas supply system still includes the supporting component, the one end of supporting component with bottom plate pivotal connection, the other end with gas circuit conveying component pivotal connection to be close to the top position of gas circuit conveying component is used for when gas circuit conveying component switches between primary importance and second place, and is right gas circuit conveying component provides holding power or damping force.

In an embodiment of the application, the supporting component includes elastic expansion piece and mount pad, elastic expansion piece is located one side of gas circuit conveying component, and elastic expansion piece's one end with gas circuit conveying component pivotal connection, the other end passes through the mount pad with bottom plate pivotal connection.

In an embodiment of the application, the gas circuit conveying assembly includes a plurality of gas circuit conveying modules arranged in parallel, the extending direction of the gas circuit conveying modules is parallel to the extending direction of the bottom plate, and any two adjacent gas circuit conveying modules can be selectively connected or disconnected.

In an embodiment of the application, the locking assembly includes a supporting plate and a locking structure, the supporting plate is connected with one side of the gas path conveying assembly facing the bottom plate, and the locking structure is arranged at least one end of the supporting plate; the bottom plate is provided with a limiting notch for accommodating the supporting plate, when the gas circuit conveying assembly is located at the first position and the supporting plate is accommodated in the limiting notch, the locking structure is matched with the limiting notch to lock the supporting plate, so that the extending direction of the gas circuit conveying assembly is parallel to the extending direction of the bottom plate.

In an embodiment of the application, the locking structure includes a first fixing block and a lock tongue, the first fixing block is disposed on the back surface of the supporting plate, and the lock tongue is telescopically disposed in the first fixing block and can selectively protrude out of the edge of the supporting plate to be engaged with the limiting notch.

In an embodiment of the application, the locking structure further includes a second fixed block and a pressing pin, the second fixed block and the first fixed block are correspondingly arranged on the front face of the supporting plate, the pressing pin is arranged on the second fixed block and is connected with the lock tongue in a transmission mode, and the locking pin is used for controlling the lock tongue to stretch out and draw back.

In an embodiment of this application, the gas circuit conveying assembly still include with a plurality of the spacing support of module one-to-one is carried to the gas circuit, the first side of spacing support with the module is carried to the gas circuit is connected, the second side of spacing support with the backup pad is connected, and the second side still be used for with the front laminating of bottom plate is in order to right the backup pad carries on spacingly.

In an embodiment of the application, the pivot assembly includes a connecting bracket, a pivot shaft, and a supporting seat, and the connecting brackets are respectively disposed at the ends of the plurality of gas path conveying modules; the pivot shaft sequentially penetrates through the connecting brackets, and two ends of the pivot shaft are pivotally connected with the bottom plate through the supporting seats.

In a second aspect, embodiments of the present application provide a semiconductor processing apparatus comprising a process chamber and an integrated gas supply system as provided in the first aspect.

The technical scheme provided by the embodiment of the application has the following beneficial technical effects:

this application embodiment is through the top and the bottom plate pivotal connection with gas circuit conveying assembly to be provided with locking Assembly on gas circuit conveying assembly, locking Assembly can selectively lock gas circuit conveying assembly on the bottom plate. When the process chamber is required to be conveyed with gas, the gas path conveying assembly is located at the first position, and the locking assembly locks the gas path conveying assembly on the bottom plate, so that the gas path conveying assembly can stably convey gas to the process chamber. When debugging or maintenance is needed, the air path conveying assembly can be rotated to the second position, so that the air path conveying assembly is more in line with human engineering, a space is provided for debugging and maintenance, and the debugging and maintenance efficiency can be greatly improved. In addition, the gas path conveying assembly is located at the second position, and reading of the meter on the gas path conveying assembly is facilitated.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1A is a schematic structural diagram of a gas path conveying assembly of an integrated gas supply system in a first position according to an embodiment of the present disclosure;

fig. 1B is a schematic structural diagram of an air path conveying assembly of an integrated air supply system in a second position according to an embodiment of the present disclosure;

fig. 2A is a schematic side view of an air path delivery module according to an embodiment of the present disclosure;

fig. 2B is a schematic top view of a gas path conveying module according to an embodiment of the present disclosure;

FIG. 2C is an enlarged top schematic view of an integrated gas supply system according to an embodiment of the present disclosure;

fig. 2D is an enlarged schematic bottom view of an integrated gas supply system according to an embodiment of the present disclosure;

FIG. 3A is an enlarged partial view of a locking assembly engaged with a base plate according to an embodiment of the present disclosure;

FIG. 3B is an enlarged partial view of a locking assembly according to an embodiment of the present application;

FIG. 3C is an enlarged partial view of a locking assembly of the present application from another perspective of engagement with a base plate;

fig. 4A is a partially enlarged schematic view illustrating a spacing bracket according to an embodiment of the present application;

fig. 4B is a partially enlarged schematic view illustrating another view of the spacing bracket according to the embodiment of the present application;

FIG. 5A is an enlarged, fragmentary view of an alternative perspective of a connecting bracket according to an embodiment of the present application;

fig. 5B is a schematic structural diagram of a connection bracket according to an embodiment of the present application.

Detailed Description

Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.

An embodiment of the present application provides an integrated gas supply system of a semiconductor processing apparatus, configured to deliver gas into a process chamber of the semiconductor processing apparatus, and a schematic structural diagram of the integrated gas supply system is shown in fig. 1A and 1B, and the integrated gas supply system includes: the device comprises a bottom plate 1, an air path conveying assembly 2, a pivoting assembly 3 and a locking assembly 4; the bottom plate 1 is vertically arranged in a cabinet body (not shown in the figure) of the semiconductor process equipment; the top end of the air path conveying assembly 2 is pivotally connected with the bottom plate 1 through a pivoting assembly 3, and the air path conveying assembly 2 can rotate relative to the pivoting assembly 3 so as to enable the air path conveying assembly 2 to be switched between a first position and a second position; locking assembly 4 sets up in one side of gas circuit conveyor assembly 2 towards bottom plate 1 for when gas circuit conveyor assembly 2 was located the primary importance, with the bottom and the locking of bottom plate 1 of gas circuit conveyor assembly 2, and still be used for releasing gas circuit conveyor assembly 2's bottom and bottom plate 1, so that gas circuit conveyor assembly 2 can switch to the second place.

As shown in fig. 1A and fig. 1B, the bottom plate 1 may be made of a metal material, the back surface of the bottom plate 1 may have an integrally formed edge plate for connecting with a cabinet of a semiconductor processing apparatus, and the front surface of the bottom plate 1 has a planar structure for mounting the air path conveying assembly 2. The bottom plate 1 may be vertically disposed in a cabinet of the semiconductor process equipment, but the embodiment of the present application is not limited thereto, and the bottom plate 1 may also have a certain angle with an inner wall of the cabinet. The gas circuit delivery assembly 2 may include a plurality of gas circuit delivery modules 21 for cooperatively delivering gases into a process chamber (not shown). The top end of the air path conveying assembly 2 can be connected with the top of the bottom plate 1 through the pivoting assembly 3, so that the air path conveying assembly 2 can rotate relative to the pivoting assembly 3, and the air path conveying assembly 2 can be switched between the first position and the second position. Locking Assembly 4 can set up in the bottom of gas circuit conveyor assembly 2 to be located one side of gas circuit conveyor assembly 2 towards the bottom plate, when gas circuit conveyor assembly 2 was located the primary importance, locking Assembly 4 can lock gas circuit conveyor assembly 2 on bottom plate 1, so that gas circuit conveyor assembly 2 can be fixed in on bottom plate 1, thereby make gas circuit conveyor assembly 2 can stabilize the transport gas. And when needs test and maintain gas circuit transport assembly 2, release locking Assembly 4 at first to release between making gas circuit transport assembly 2 and the bottom plate 1, gas circuit transport assembly 2 can switch to the second position under the exogenic action this moment, for example this second position is that gas circuit transport assembly 2 and bottom plate 1 between have the angle of predetermineeing, so that debug and maintain gas circuit transport assembly 2, perhaps carry out the reading to the instrument on the gas circuit transport assembly 2.

This application embodiment is through the top and the bottom plate pivotal connection with gas circuit conveying assembly to be provided with locking Assembly on gas circuit conveying assembly, locking Assembly can selectively lock gas circuit conveying assembly on the bottom plate. When the process chamber is required to be conveyed with gas, the gas path conveying assembly is located at the first position, and the locking assembly locks the gas path conveying assembly on the bottom plate, so that the gas path conveying assembly can stably convey gas to the process chamber. When debugging or maintenance is needed, the air path conveying assembly can be rotated to the second position, so that the air path conveying assembly is more in line with human engineering, a space is provided for debugging and maintenance, and the debugging and maintenance efficiency can be greatly improved. In addition, the gas path conveying assembly is located at the second position, and reading of the meter on the gas path conveying assembly is facilitated.

It should be noted that the embodiment of the present application is not limited to the specific structure and the arrangement position of the bottom plate 1, for example, the bottom plate 1 may directly adopt a plate-shaped structure and be arranged at other positions of the semiconductor processing equipment. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to the actual situation.

In an embodiment of the present application, as shown in fig. 1A and 1B, the gas path conveying assembly 2 is located at the first position, and the extending direction of the gas path conveying assembly 2 is parallel to the extending direction of the bottom plate 1; the gas circuit conveying assembly 2 is located at the second position, a preset included angle is formed between the extending direction of the gas circuit conveying assembly 2 and the extending direction of the bottom plate 1, and the numerical range of the preset included angle is 60-90 degrees. Particularly, when gas circuit conveying assembly 2 was located the primary importance, gas circuit conveying assembly 2's the back can with the front parallel arrangement of bottom plate 1, the extending direction of gas circuit conveying assembly 2 and the extending direction parallel arrangement of bottom plate 1 promptly, adopt above-mentioned design to make the subassembly such as the inlet line of this application embodiment be convenient for connect the air supply. When the gas circuit conveying assembly 2 is switched to the second position, a preset included angle is formed between the bottom surface of the gas circuit conveying assembly 2 and the front surface of the bottom plate 1, and the preset included angle can be any value from 60 degrees to 90 degrees. By adopting the design, the gas path conveying assembly 2 can rotate to an almost horizontal state, so that the embodiment of the application is more in line with ergonomics, an operation space is provided for field operators in an actual debugging and maintenance state, and the debugging and maintenance efficiency is greatly improved.

It should be noted that, in the embodiment of the present application, the position relationship between the air path conveying assembly 2 and the bottom plate 1 in the first position is not limited, for example, an included angle may also be formed between the air path conveying assembly 2 and the bottom plate 1, for example, the included angle between the air path conveying assembly 2 and the bottom plate 1 may be set to be less than 30 degrees, so as to save the space in the cabinet body. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to the actual situation.

In an embodiment of the present application, as shown in fig. 1A and 1B, the integrated gas supply system further includes a supporting component 5, one end of the supporting component 5 is pivotally connected to the bottom plate 1, and the other end of the supporting component 5 is pivotally connected to the gas path conveying component 2 and is close to a top end position of the gas path conveying component 2, and is configured to provide a supporting force or a damping force to the gas path conveying component 2 when the gas path conveying component 2 is switched between the first position and the second position.

As shown in fig. 1A and 1B, the supporting component 5 may be disposed between the bottom plate 1 and the air path conveying component 2, and one end of the supporting component 5 is pivotally connected to the front surface of the bottom plate 1, and the other end is pivotally connected to the bottom surface of the top end of the air path conveying component 2, for example, connected to any one or more air path conveying modules 21, but the embodiment of the present application is not limited thereto. When the locking component 4 releases the gas path conveying component 2 and the bottom plate 1, the supporting component 5 can provide a supporting force to drive the gas path conveying component 2 to be switched from the first position to the second position, so that not only can the labor be saved, but also the gas path conveying component 2 is supported to be convenient to debug and maintain; and when gas circuit conveyor components 2 need switch to first position, operating personnel can press gas circuit conveyor components 2, and supporting component 5 can provide a damping force for gas circuit conveyor components 2 this moment, because gas circuit conveyor components 2 self dead weight is great, adopts this design to make the switching process can the steady operation to improve the stability of this application embodiment, thereby improve the life of this application embodiment. Further, owing to be provided with supporting component 5 and can also improve reaction force for gas circuit conveying component 2 when being in the primary importance for the locking between gas circuit conveying component 2 and the bottom plate 1 is more stable, thereby avoids taking place to rock and influences life.

It should be noted that the present embodiment does not limit the arrangement manner of the supporting component 5, for example, the arrangement positions of the two ends of the supporting component 5 may be interchanged. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to the actual situation.

In an embodiment of the present application, as shown in fig. 1A and 1B, the supporting assembly 5 includes an elastic expansion member 51 and a mounting seat 52, the elastic expansion member 51 is disposed at one side of the air channel conveying assembly 2, and one end of the elastic expansion member 51 is pivotally connected to the air channel conveying assembly 2, and the other end is pivotally connected to the bottom plate 1 through the mounting seat 52.

As shown in fig. 1A and 1B, the elastic expansion member 51 may be a nitrogen spring, but the embodiment of the present invention is not limited thereto, for example, the elastic expansion member 51 may also be a hydraulic expansion rod or a pneumatic expansion rod, and the application and maintenance costs can be greatly reduced by adopting the above design. The elastic expansion piece 51 may be located on the left side of the air path conveying assembly 2 as a whole, and the extending direction may be parallel to the extending direction of the air path conveying assembly 2. The cylinder body of the elastic expansion piece 51 can be pivotally connected with the bottom surface of the air channel conveying assembly 2, and the end part of the expansion rod of the elastic expansion piece 51 can be pivotally connected with the bottom plate 1 through a mounting seat 52. Specifically, the mounting seat 52 may be disposed on the bottom plate 1 by welding or bolting, and may be connected by a rotating shaft to pivotally connect with the support assembly 5. By adopting the design, the space occupation can be reduced due to the supporting component 5 arranged on one side of the gas path conveying component 2, and the weight of the embodiment of the application is reduced, so that the application and maintenance cost is greatly reduced.

It should be noted that, the number and the positions of the supporting assemblies 5 are not limited in the embodiment of the present application, for example, two supporting assemblies 5 are respectively disposed on the left and right sides of the air path conveying assembly 2, so that the air path conveying assembly 2 operates more stably. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to the actual situation.

In an embodiment of the present application, as shown in fig. 1A to fig. 2B, the air path conveying assembly 2 includes a plurality of air path conveying modules 21 arranged in parallel, an extending direction of the plurality of air path conveying modules 21 is parallel to an extending direction of the bottom plate 1, and any two adjacent air path conveying modules 21 can be selectively connected or disconnected.

As shown in fig. 1A to 2D, the air path conveying assembly 2 may include 8 air path conveying modules 21 arranged in parallel, and the extending direction of each air path conveying module 21 is parallel to the extending direction of the bottom plate 1, but the embodiment of the present application does not limit the specific number of the air path conveying modules 21, and a person skilled in the art may adjust the arrangement according to the type of the semiconductor processing equipment. Each gas circuit conveying module 21 can be composed of four base blocks, and the base blocks are located at the same horizontal position and connected through hexagon socket head cap screws. Wherein, the two first base blocks 211 are respectively positioned at two ends and can be provided with pneumatic diaphragm valves thereon; the plurality of second base blocks 212 may be two-way base blocks, the bottom of which may be provided with a pipe, and the top of which is provided with a pressure gauge, a pressure regulating valve, and a filter, respectively; the third base block 213 is a three-way base block, the bottom of which can be provided with a pipeline, and the top of which can be provided with a pneumatic diaphragm valve; on top of the two fourth base blocks 214 are mounted gas mass flow controllers. As shown in fig. 2A, the left side of the air path delivery module 21 is an air inlet 215, and when the pneumatic diaphragm valve above the first base block 211 is opened, air can enter the air path delivery module 21, and finally enter a process chamber or a pump body (neither shown) through an air outlet 216 on the right side. The connecting pipeline 217 can realize gas transmission between any two gas circuit conveying modules 21. By adopting the design, the structure of the embodiment of the application is simple, so that the gas path conveying modules 21 can convey gas to the process chamber independently or in combination. However, the embodiment of the present application does not limit the types of components mounted on the base blocks, and those skilled in the art can adjust the settings according to actual situations. Optionally, as shown in fig. 1A and fig. 2D in combination, the bottom of the air path delivery module 21 is provided with an air inlet end 215, for example, the air inlet end 215 of the air source may be provided as a female end so as to be matched with a male end of the air inlet pipeline of the air source. The top of the gas path conveying module 21 is provided with a gas outlet end 216, and the gas outlet end 216 is used for being connected with a process chamber. However, the positions of the outlet end 216 and the inlet end 215 are not limited in the embodiments of the present application, and for example, the positions of the two may be interchanged.

In an embodiment of the present application, as shown in fig. 1B and fig. 3A to fig. 3C, the locking assembly 4 includes a supporting plate 41 and a locking structure 42, the supporting plate 41 is connected to one side of the air channel conveying module 21 facing the bottom plate 1, and the locking structure 42 is disposed at least one end of the supporting plate 41; the bottom plate 1 is provided with a limiting notch 11 for accommodating the support plate 41, when the gas circuit conveying assembly 2 is located at the first position and the support plate 41 is accommodated in the limiting notch 11, the locking structure 42 is matched with the limiting notch 11 to lock the support plate 41, so that the extending direction of the gas circuit conveying assembly 2 is parallel to the extending direction of the bottom plate 1.

As shown in fig. 1B and 3A to 3C, the support plate 41 may have a rectangular plate-like structure made of a metal material. The supporting plate 41 is connected with the ends of the plurality of air path conveying modules 21 and is positioned on one side of the plurality of air path conveying modules 21 facing the bottom plate 1, and the supporting plate 41 can fixedly connect the plurality of air path conveying modules 21. The locking structure 42 may be disposed at the left end of the supporting plate 41 and near the bottom edge of the supporting plate 41, but the embodiment of the present application does not limit the specific position of the locking structure 42, and the setting can be adjusted by one skilled in the art. The bottom of the bottom plate 1 is provided with a limiting notch 11 at a position corresponding to the supporting plate 41, and the size of the limiting notch 11 is larger than that of the supporting plate 41 to accommodate the supporting plate 41. When the gas circuit conveying assembly 2 is located at the first position, the supporting plate 41 may be located in the limiting notch 11, and the locking structure 42 may be matched with the edge of the limiting notch 11 to lock the gas circuit conveying assembly 2 and the bottom plate 1, so that the extending direction of the gas circuit conveying assembly 2 is parallel to the extending direction of the bottom plate 1. By adopting the above design, the supporting plate 41 is connected with the plurality of gas path conveying modules 21, so that the motion process of the gas path conveying assembly 2 is stable, and the locking structure 42 is matched with the limiting notch 11, so that the structure of the embodiment of the application is simple, and the application and maintenance cost can be greatly reduced.

It should be noted that the number and the arrangement positions of the locking structures 42 are not limited in the embodiments of the present application, for example, two locking structures 42 are respectively arranged at two ends of the supporting plate 41. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

In an embodiment of the present application, as shown in fig. 1B and fig. 3A to fig. 3C, the locking structure 42 includes a first fixing block 421 and a locking tongue 422, the first fixing block 421 is disposed on the back surface of the supporting plate 41, and the locking tongue 422 is telescopically disposed in the first fixing block 421 and can selectively protrude outside the edge of the supporting plate 41 to be engaged with the limiting notch 11. Particularly, first fixed block 421 can set up in the back of backup pad 41, lie in backup pad 41 towards the side of bottom plate 1 promptly, spring bolt 422 can set up in first fixed block 421, and spring bolt 422's flexible direction can with the longer limit parallel arrangement of backup pad 41, spring bolt 422 can stretch out the tip edge of backup pad 41 for first fixed block 421, with the edge that is used for the block at spacing breach 11, so that backup pad 41 block in spacing breach 11, thereby realize locking gas circuit transport assembly 2 and bottom plate 1. By adopting the design, the device is simple in structure and easy to operate, and therefore maintenance efficiency is improved.

In an embodiment of the present application, as shown in fig. 1B and fig. 3A to fig. 3C, the locking structure 42 further includes a second fixing block 423 and a pressing pin 424, the second fixing block 423 is disposed on the front surface of the supporting plate 41, and the pressing pin 424 is disposed on the second fixing block 423 and is in transmission connection with the latch 422 for controlling the latch 422 to extend and retract. Specifically, the second fixing block 423 is disposed on the front surface of the supporting plate 41 and is disposed corresponding to the first fixing block 421, and the pressing pin 424 is disposed in the second fixing block 423 and is in transmission connection with the latch 422 for controlling the extension and retraction of the latch 422. With the above design, the second fixing block 423 and the pressing pin 424 are both located on the front surface of the supporting plate 41, so as to facilitate the operation thereof, thereby further improving the usability and the maintenance efficiency of the embodiment of the present application. It should be noted that the embodiment of the present application does not limit the specific structure of the locking structure 42, and those skilled in the art can adjust the setting according to the actual situation.

In an embodiment of the present application, as shown in fig. 4A and 4B, the air path conveying assembly 2 further includes a limiting bracket 22 corresponding to the plurality of air path conveying modules 21 one to one, a first side surface of the limiting bracket 22 is connected with the air path conveying modules 21, a second side surface of the limiting bracket 22 is connected with the supporting plate 41, and the second side surface is further used for being attached to the front surface of the bottom plate 1 to limit the supporting plate 41. The limiting support 22 may be an L-shaped support made of metal, the top of the vertical rod 221 of the limiting support 22 is a first side surface for connecting with the bottom surface of the air path conveying module 21, and the bottom of the cross rod 222 of the limiting support 22 is a second side surface for connecting with the supporting plate 41. Specifically, the second side portion is connected to the support plate 41 by a bolt, and the other portion is partially in contact with the bottom plate 1, so that the support plate 41 is flush with the front surface of the bottom plate 1, thereby defining the position of the support plate 41 and further defining the position of the air path conveying assembly 2. Adopt above-mentioned design for this application embodiment is rational in infrastructure, avoids gas circuit conveying assembly 2 to collide with bottom plate 1 when switching to first position by the second position, thereby reduces the fault rate and increase of service life. However, the embodiment of the present application does not limit the specific structure of the position limiting bracket 22, and the setting can be adjusted by a person skilled in the art according to practical situations.

In an embodiment of the present application, as shown in fig. 1A, fig. 5A and fig. 5B, the pivot assembly 3 includes a connecting bracket 31, a pivot shaft 32 and a supporting seat 33, wherein the connecting brackets 31 are respectively disposed at the ends of the plurality of air channel conveying modules 21; the pivot shaft 32 passes through the plurality of connecting brackets 31 in sequence, and both ends of the pivot shaft 32 are pivotally connected to the base plate 1 through the support seats 33.

As shown in fig. 1A, 5A and 5B, the connecting bracket 31 may be a frame structure made of metal. One end of the connecting bracket 31 is an open structure 311, which can be nested on both sides of the end of the air channel conveying module 21 and connected by bolts, but the embodiment of the present application is not limited thereto. The other end of the connecting bracket 31 is a closed structure 312, the end may have a through hole, the pivot shaft 32 may sequentially pass through the through holes of the plurality of connecting brackets 31, and the pivot shaft 32 and the connecting brackets 31 may be fixedly connected, but the embodiment of the present invention is not limited thereto. The pivot shaft 32 may be connected to the base plate 1 at both ends through a support 33, and the support 33 may be, for example, a bearing seat and is fixedly connected to the base plate 1. Because each air path conveying module 21 is provided with the connecting support 31, each air path conveying module 21 is uniformly stressed, the failure rate is reduced, and the service life is prolonged. In addition, the pivot assembly 3 adopts the design, so that the structure of the embodiment of the application is simple and easy to use, and the application and maintenance cost can be greatly reduced. However, the embodiment of the present application is not limited thereto, for example, the pivot shaft 32 is fixedly connected to the support seat 33, and each of the connecting brackets 31 is movably connected to the pivot shaft 32, that is, the connecting bracket 31 can rotate relative to the pivot shaft 32, so that the embodiment of the present application has a flexible structure, thereby reducing the application and maintenance costs.

Based on the same concept, the embodiment of the application provides semiconductor processing equipment which comprises a process chamber and an integrated gas supply system provided by the embodiments.

By applying the embodiment of the application, at least the following beneficial effects can be realized:

this application embodiment is through the top and the bottom plate pivotal connection with gas circuit conveying assembly to be provided with locking Assembly on gas circuit conveying assembly, locking Assembly can selectively lock gas circuit conveying assembly on the bottom plate. When the process chamber is required to be conveyed with gas, the gas path conveying assembly is located at the first position, and the locking assembly locks the gas path conveying assembly on the bottom plate, so that the gas path conveying assembly can stably convey gas to the process chamber. When debugging or maintenance is needed, the air path conveying assembly can be rotated to the second position, so that the air path conveying assembly is more in line with human engineering, a space is provided for debugging and maintenance, and the debugging and maintenance efficiency can be greatly improved. In addition, the gas path conveying assembly is located at the second position, and reading of the meter on the gas path conveying assembly is facilitated.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the utility model, and these modifications and improvements are also considered to be within the scope of the utility model.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.

The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims (11)

1. An integrated gas supply system for a semiconductor processing tool for delivering gas into a process chamber of the semiconductor processing tool, comprising: the device comprises a bottom plate, a gas path conveying assembly, a pivoting assembly and a locking assembly;

the bottom plate is vertically arranged in a cabinet body of the semiconductor process equipment; the top end of the air path conveying assembly is pivotally connected with the bottom plate through the pivoting assembly, and the air path conveying assembly can rotate relative to the pivoting assembly so as to switch the air path conveying assembly between a first position and a second position;

the locking assembly is arranged on one side, facing the bottom plate, of the gas path conveying assembly and used for locking the gas path conveying assembly with the bottom plate when the gas path conveying assembly is located at the first position and releasing the bottom end of the gas path conveying assembly with the bottom plate so that the gas path conveying assembly can be switched to the second position.

2. The integrated gas supply system according to claim 1, wherein the gas path delivery assembly is located in a first position, and an extension direction of the gas path delivery assembly is parallel to an extension direction of the base plate; the gas circuit conveying assembly is located at the second position, a preset included angle is formed between the extending direction of the gas circuit conveying assembly and the extending direction of the bottom plate, and the numerical range of the preset included angle is 60-90 degrees.

3. The integrated gas supply system according to claim 1, further comprising a support assembly having one end pivotally connected to the base plate and another end pivotally connected to the gas path delivery assembly and located near a top end of the gas path delivery assembly for providing a supporting or damping force to the gas path delivery assembly when the gas path delivery assembly is switched between the first and second positions.

4. The integrated gas supply system according to claim 3, wherein the support assembly comprises an elastic expansion piece and a mounting seat, the elastic expansion piece is positioned on one side of the gas path conveying assembly, one end of the elastic expansion piece is pivotally connected with the gas path conveying assembly, and the other end of the elastic expansion piece is pivotally connected with the bottom plate through the mounting seat.

5. The integrated gas supply system according to claim 1, wherein the gas path delivery assembly comprises a plurality of gas path delivery modules arranged in parallel, the extension direction of the plurality of gas path delivery modules is parallel to the extension direction of the base plate, and any two adjacent gas path delivery modules can be selectively connected or disconnected.

6. The integrated gas supply system according to claim 5, wherein the locking assembly comprises a support plate and a locking structure, the support plate is connected with one side of the gas path conveying assembly facing the bottom plate, and the locking structure is arranged at least one end of the support plate; the bottom plate is provided with a limiting notch for accommodating the supporting plate, when the gas circuit conveying assembly is located at the first position and the supporting plate is accommodated in the limiting notch, the locking structure is matched with the limiting notch to lock the supporting plate, so that the extending direction of the gas circuit conveying assembly is parallel to the extending direction of the bottom plate.

7. The integrated gas supply system of claim 6, wherein the locking structure comprises a first fixing block and a locking tongue, the first fixing block is disposed on the back of the supporting plate, and the locking tongue is telescopically disposed in the first fixing block and can selectively protrude outside the edge of the supporting plate to be engaged with the limiting notch.

8. The integrated gas supply system of claim 7, wherein the locking structure further comprises a second fixed block and a pressing pin, the second fixed block and the first fixed block are correspondingly arranged on the front surface of the supporting plate, and the pressing pin is arranged on the second fixed block, is in transmission connection with the lock tongue and is used for controlling the lock tongue to stretch and retract.

9. The integrated gas supply system of claim 6, wherein the gas path transport assembly further comprises a limiting bracket in one-to-one correspondence with the plurality of gas path transport modules, a first side of the limiting bracket is connected with the gas path transport modules, a second side of the limiting bracket is connected with the support plate, and the second side is further adapted to be attached to the front face of the base plate to limit the support plate.

10. The integrated gas supply system according to claim 5, wherein the pivot assembly comprises a connecting bracket, a pivot shaft and a supporting seat, and the connecting brackets are respectively arranged at the ends of the gas path conveying modules; the pivot shaft sequentially penetrates through the connecting brackets, and two ends of the pivot shaft are pivotally connected with the bottom plate through the supporting seats.

11. A semiconductor processing apparatus comprising a process chamber and an integrated gas supply system according to any one of claims 1 to 10.

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