CN215439951U - Linear cutting cooling liquid recovery system - Google Patents
Linear cutting cooling liquid recovery system Download PDFInfo
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- CN215439951U CN215439951U CN202120723882.XU CN202120723882U CN215439951U CN 215439951 U CN215439951 U CN 215439951U CN 202120723882 U CN202120723882 U CN 202120723882U CN 215439951 U CN215439951 U CN 215439951U
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Abstract
The utility model provides a line cutting cooling liquid recovery system, comprising: a first-stage separation unit: separating silicon powder in the waste cooling liquid to obtain a compound containing the silicon powder and desiliconized cooling liquid; a secondary processing unit: for treating the desilication cooling liquid into a usable regeneration cooling liquid; a secondary separation unit: separating the silicon powder in the compound to finally obtain silicon powder mud; and the output end of the primary separation unit is respectively communicated with the input ends of the secondary processing unit and the secondary separation unit. The device is particularly suitable for large-flux regeneration treatment of the cooling liquid for slicing the ultrathin silicon single crystal diamond wire and high-yield recovery of the superfine silicon powder, has reasonable structural design and easy control, can quickly, efficiently and continuously treat the waste cooling liquid to obtain the regenerated cooling liquid with qualified conductivity and the high-purity superfine silicon powder, and has high recovery rate, good recovery effect and low production cost.
Description
Technical Field
The utility model belongs to the technical field of silicon single crystal wire cutting, and particularly relates to a wire cutting cooling liquid recovery system.
Background
In the production process, with the acceleration of the line thinning process and the continuous improvement of the productivity, the superfine silicon powder (d) entering the line cutting cooling liquid circulating system500.8 μm) to cause the silicon wafer to be stained more, which causes the production cost of the working procedure after cutting to be increased; and the silicon-containing waste liquid has high organic content, and can bring huge damage to the environment when being randomly discharged. Therefore, how to design a recovery system of the line-cutting cooling liquid to realize the regeneration of the cooling liquid and the recovery of the superfine silicon powder has great economic and environmental benefits.
SUMMERY OF THE UTILITY MODEL
The utility model provides a line cutting cooling liquid recovery system, which is particularly suitable for recovering cooling liquid for cutting ultrathin silicon single crystals and solves the technical problem that the cooling liquid regeneration and the superfine silicon powder recovery cannot be simultaneously obtained in the prior art.
In order to solve the technical problems, the utility model adopts the technical scheme that:
a wire-cut coolant recovery system, comprising:
a first-stage separation unit: separating silicon powder in the waste cooling liquid to obtain a compound containing the silicon powder and desiliconized cooling liquid;
a secondary processing unit: for treating the desilication cooling liquid into a usable regeneration cooling liquid;
a secondary separation unit: separating the silicon powder in the compound to finally obtain silicon powder mud;
and the output end of the primary separation unit is respectively communicated with the input ends of the secondary processing unit and the secondary separation unit.
Further, the primary separation unit includes:
a stock solution tank for holding the waste coolant;
a configuration groove for placing the adsorption material;
and a tempering tank;
the output ends of the raw liquid tank and the configuration tank are communicated with the tempering tank;
the quenching and tempering tank is configured for quenching and tempering and mixing the waste cooling liquid and the adsorbing material, the adsorbing material is enabled to adsorb silicon powder in the waste cooling liquid to form desiliconized cooling liquid with adsorbing material-silicon powder compound, and after separation, the output end of the quenching and tempering tank is respectively connected with the output end of the quenching and tempering tank
A first cooling groove used for bearing the desiliconization cooling liquid in the secondary treatment unit is communicated with a second cooling groove;
and the secondary separation unit is communicated with a composite groove for bearing the adsorbing material-silicon powder compound.
Further, the secondary processing unit further comprises:
the first resin tank is communicated with an input port of the first cooling tank;
a second cooling tank and a second resin tank which are both communicated with the output end of the first cooling tank;
after the ion exchange resin in the resin tank I is mixed with the desiliconization cooling liquid in the cooling tank I, the ion exchange resin adsorbs chloride ions in the desiliconization cooling liquid, and after separation,
the regenerated cooling liquid output from the cooling tank I enters the cooling tank II;
and the adsorbed ion exchange resin output from the first cooling tank enters the second resin tank.
Further, in the above-mentioned case,
the input end and the output end of the second resin tank are respectively connected with
The first liquid medicine tank for placing alkali liquor is communicated;
the resin tank III is communicated with a resin tank III for placing regenerated ion exchange resin;
and the alkali liquor output from the first liquid medicine tank can carry out regeneration treatment on the ion exchange resin adsorbed in the second resin tank so as to obtain the regenerated ion exchange resin.
Further, the output end of the resin tank III is communicated with the input end of the quenching and tempering tank;
the regenerated ion exchange resin and the adsorbing material output from the resin tank III are both anion exchange resins, and can return to the quenching and tempering tank to adsorb and discharge the silicon powder in the waste cooling liquid from the raw liquid tank, so as to form the compound with the adsorbing material and the silicon powder.
Further, the secondary separation unit further comprises:
a second liquid medicine groove;
the separation groove I and the separation groove II are communicated with the output end of the composite groove;
the liquid medicine groove II is the same as the liquid medicine loaded in the liquid medicine groove I;
stirring, tempering and mixing the alkali liquor in the liquor tank II and the compound in the compound tank, desorbing the silicon powder and the adsorption material to obtain a mixture formed by the desorbed solid adsorption material and the solid silicon powder, separating,
the alkali liquor solid silicon powder output from the composite tank is placed in the first separation tank;
and the lye solid adsorption material output from the composite tank is placed in the second separation tank.
Further, a silica powder groove and a sewage groove are also formed in the outer side of the separation groove I;
after the alkali liquor solid silicon powder in the first separation tank is subjected to filter pressing and dehydration,
placing the obtained superfine silicon powder in the silicon powder groove;
the obtained waste water is discharged to the sewage tank for treatment.
Further, a liquid medicine groove II for storing acid liquor is also included and is communicated with the separation groove II;
and mixing the acid liquor in the liquid medicine tank II with the alkali liquor solid adsorption material in the separation tank II to obtain a regenerated adsorption material.
Further, the output end of the second separation groove is communicated with the input end of the quenching and tempering groove;
and returning the regenerated adsorbing material output from the second separation tank to the quenching and tempering tank, and continuously adsorbing the silicon powder in the waste cooling liquid output from the raw liquid tank to form the adsorbing material-silicon powder compound.
Further, the tempering tank, the cooling tank I, the resin tank II, the composite tank, the separation tank I and the separation tank II are all provided with circulating stirring pumps;
and each tank in the primary separation unit, the secondary treatment unit and the secondary separation unit is provided with a feed pump and a control valve.
By adopting the recovery system designed by the utility model, the adsorption material and the superfine silicon powder in the waste cooling liquid are fully mixed and stirred to generate induced adsorption effect on the silicon powder, so as to obtain an adsorption material-superfine silicon powder compound; and then the waste cooling liquid with the adsorbing material-superfine silicon powder compound can be rapidly subjected to solid/liquid separation to obtain the cooling liquid without silicon powder after separation and the adsorbing material-superfine silicon powder compound solid, so that the silicon powder in the waste cooling liquid is separated.
And then the separated cooling liquid passes through an anion exchange bed resin bed to remove ions, so that the conductivity of the deionized cooling liquid is reduced to the recycling standard, high-quality regenerated cooling liquid is obtained, the regenerated cooling liquid can be reused in the line cutting production, and the conductivity of the finally obtained regenerated cooling liquid is high.
Then the adsorption material-superfine silicon powder compound solid is desorbed and solid/solid separated in sequence to finally obtain the adsorption material and superfine silicon powder respectively, the adsorption material can be mixed with new non-cooling liquid for reuse, and the obtained superfine silicon powder can be reused in other occasions.
The recovery system provided by the utility model has the advantages of simple structure, easiness in control, capability of quickly, efficiently and continuously treating the waste cooling liquid to obtain the regenerated cooling liquid with qualified conductivity and the high-purity superfine silicon powder, high recovery utilization rate, good recovery effect and low production cost.
The technical scheme of the utility model is particularly suitable for the large-flux regeneration treatment of the cooling liquid for slicing the ultrathin silicon single crystal diamond wire and the high-yield recovery of the superfine silicon powder, has large treatment capacity and good recovery effect, can continuously recycle the obtained regenerated cooling liquid, the superfine silicon powder and the adsorbing material with high efficiency and low efficiency, has low integral operation cost, and is only 1/4-1/5 of the method in the prior art. The recovery rate of the whole silicon powder is over 84 percent, the conductivity of the obtained regenerated cooling liquid is 17.7-19.4 mu S/cm, the surface tension is 31.8-33.1mN/m, and the recovery effect is good.
Drawings
Fig. 1 is a schematic structural diagram of a wire-cut coolant recovery system according to an embodiment of the present invention.
In the figure:
10. a first-stage separation unit 11, a stock solution tank 12 and a configuration tank
13. A tempering tank 20, a secondary processing unit 21 and a cooling tank I
22. Resin tank I23, cooling tank II 24 and resin tank II
25. A first liquid medicine groove 26, a third resin groove 30 and a second-stage separation unit
31. A composite tank 32, a second liquid medicine tank 33 and a first separation tank
34. Second separating tank 35, silicon powder tank 36 and sewage tank
37. Liquid medicine groove III
Detailed Description
The utility model is described in detail below with reference to the figures and specific embodiments.
This embodiment proposes a wire-cut coolant recovery system, as shown in fig. 1, including:
the device comprises a primary separation unit 10 for separating silicon powder in the waste cooling liquid to obtain a compound containing the silicon powder and the desiliconized cooling liquid, a secondary treatment unit 20 for treating the desiliconized cooling liquid into usable regenerated cooling liquid, and a secondary separation unit 30 for separating the silicon powder in the compound to finally obtain silicon powder mud, wherein the output end of the primary separation unit 10 is respectively communicated with the input ends of the secondary treatment unit 20 and the secondary separation unit 30.
Specifically, the primary separation unit 10 includes:
a stock solution tank 11 for holding waste coolant, a disposition tank 12 for holding an adsorbent, and a conditioning tank 13; the output ends of the raw liquid tank 11 and the configuration tank 12 are both communicated with the tempering tank 13. The quenching and tempering tank 12 is used for mixing, quenching, tempering and stirring the waste cooling liquid and the adsorbing material, so that the adsorbing material adsorbs and induces the silicon powder in the waste cooling liquid, and the superfine silicon powder in the waste cooling liquid is promoted to rapidly agglomerate and settle to form the cooling liquid with the adsorbing material-silicon powder compound. And separating the desiliconized cooling liquid with the adsorbing material-silicon powder compound into the desiliconized cooling liquid and the adsorbing material-silicon powder compound after solid/liquid separation. The output end of the quenching and tempering tank 13 is respectively communicated with a cooling tank I21 for carrying desiliconization cooling liquid in the secondary treatment unit 20 and a composite tank 31 for carrying the adsorbing material-silicon powder composite in the secondary separation unit 30.
In the process, the adsorbing material is added into the waste cooling liquid for mixing and stirring, the adsorbing material is anion exchange resin with the particle size of 150-1200 mu m and the self weight specific gravity of 0.5-5.3g/cm3. The surface of the adsorbing material is provided with a certain amount of positive charges, and only chloride ions with corresponding charge amount are released when the adsorbing material is adsorbed with the superfine silicon powder in the waste cooling liquid, but no other substances are released. After mixing and stirring, the silicon powder in the waste cooling liquid is promoted to rapidly agglomerate and settle, and the adsorbing material adsorbs the silicon powder in the waste cooling liquid to form the waste cooling liquid with the adsorbing material-silicon powder compound solid.
And then carrying out solid/liquid separation on the stirred waste cooling liquid with the adsorbing material-silicon powder compound solid so as to respectively obtain the adsorbing material-silicon powder compound solid and the desiliconization cooling liquid. Preferably, the solid/liquid separation of the stirred waste cooling fluid includes centrifugal separation or filtration separation, although other separation methods may be used and are within the scope of the present disclosure.
Further, the secondary processing unit 20 further includes:
the resin tank I22 is communicated with the input port of the cooling tank I21, and the cooling tank II 23 and the resin tank II 24 are both communicated with the output end of the cooling tank I21; after the ion exchange resin in the first resin tank 22 is mixed with the desiliconization cooling liquid in the first cooling tank 21, the ion exchange resin adsorbs chloride ions in the desiliconization cooling liquid, and after separation, the regenerated cooling liquid output from the first cooling tank 21 enters a second cooling tank 23; the adsorbed ion exchange resin output from the first cooling tank 21 enters a second resin tank 24.
The input end and the output end of the second resin tank 24 are respectively communicated with a first liquid medicine tank 25 for placing alkali liquor and a third resin tank 26 for placing regenerated ion exchange resin. The alkali liquor output from the first liquor tank 25 can regenerate the ion exchange resin adsorbed in the second resin tank 24 to obtain regenerated ion exchange resin.
The output end of the third resin tank 26 is communicated with the input end of the quenching and tempering tank 13; the regenerated ion exchange resin and the adsorbent both output from the third resin tank 26 are anion exchange resin, and can be returned to the quenching and tempering tank 13 for reuse, and the regenerated ion exchange resin and the adsorbent adsorb the silicon powder in the waste cooling liquid output from the stock solution tank 11 to form a composite with the adsorbent and the silicon powder.
In the process, the ion exchange resin in the first resin tank 22 is anion exchange resin in a bed layer structure, and after the anion exchange resin is mixed and stirred with the desiliconization cooling liquid, chloride ions in the desiliconization cooling liquid can be adsorbed, and the regeneration cooling liquid is obtained. After chloride ions in the desiliconized cooling liquid are removed by the anion exchange resin with the bed layer structure, the conductivity of the cooling liquid can be reduced to the recycling standard, and the high-quality regenerated cooling liquid is obtained.
And mixing the anion exchange resin in the bed layer structure after adsorption with alkali liquor with the mass fraction of 4-6 wt.% for treatment to obtain regenerated anion exchange resin, wherein the regenerated anion exchange resin can be used as an adsorption material and added into the waste cooling liquid again for reuse.
Further, the secondary separation unit 30 further includes:
the second liquid medicine groove 32, the first separation groove 33 and the second separation groove 34 are communicated with the output end of the composite groove 31; the components of the liquid medicine carried in the liquid medicine groove II 32 and the liquid medicine carried in the liquid medicine groove I25 are the same, and are respectively alkali liquor with the mass fraction of 4-6 wt.%.
And stirring, tempering and mixing the alkali liquor in the second liquid medicine tank 32 and the adsorption material-silicon powder compound in the composite tank 31, and desorbing the silicon powder and the adsorption material to obtain a mixture formed by the desorbed solid adsorption material and the solid silicon powder. After solid/solid separation, the alkali liquor solid silicon powder output from the composite tank 31 is placed in a first separation tank 33; the lye solid adsorption material output from the composite tank 31 is placed in the second separation tank 34.
A silica powder groove 35 and a sewage groove 36 are also arranged on the outer side of the first separation groove 33; performing filter pressing and dehydration on the alkali liquor solid silicon powder in the first separation tank 33 to obtain superfine silicon powder, and placing the superfine silicon powder in a silicon powder tank 35; the obtained waste water is discharged to a sewage tank 36 for treatment.
The secondary separation unit 30 also comprises a second liquid medicine groove 32 for storing acid liquor, and the second liquid medicine groove is communicated with a second separation groove 34; and mixing the acid liquor in the second liquid medicine tank 32 with the alkali liquor solid adsorption material in the second separation tank 34 to obtain the regenerated adsorption material.
The output end of the second separation groove 34 is communicated with the input end of the quenching and tempering groove 13; the regenerated adsorbent discharged from the second separation tank 34 is returned to the quenching and tempering tank 13, and continues to adsorb the silicon powder in the waste coolant discharged from the raw liquid tank 11, thereby forming a composite of the adsorbent and the silicon powder.
In the process, the adsorbing material-silicon powder composite solid is added into alkali liquor with the mass fraction of 4-6 wt.%, and the mixture is stirred and tempered, so that the adsorbing material and the silicon powder are desorbed, and the desorbed mixture formed by the solid adsorbing material and the solid silicon powder is obtained. And then carrying out solid/solid separation on the desorbed mixture to respectively obtain an alkali liquor adsorption material and alkali liquor silicon powder.
And adding the separated alkali liquor adsorption material into acid liquor with the mass fraction of 4-6 wt.% and stirring to obtain the regenerated adsorption material. The regenerated adsorbing material is returned and added into the waste cooling liquid again for reuse.
And carrying out filter pressing dehydration on the separated alkali liquor silicon powder to obtain recyclable silicon powder mud, and discharging other waste liquid wastes into a sewage treatment system for treatment.
In the embodiment, the tempering tank 13, the cooling tank I21, the resin tank II 24, the composite tank 31, the separation tank I33 and the separation tank II 34 are all provided with circulating stirring pumps; and each tank of the primary separating unit 10, the secondary treating unit 20 and the secondary separating unit 30 is provided with a feed pump and a control valve.
The recovery system provided by the utility model has the advantages of simple structure, easiness in control, capability of quickly, efficiently and continuously treating the waste cooling liquid to obtain the regenerated cooling liquid with qualified conductivity and the high-purity superfine silicon powder, high recovery utilization rate, good recovery effect and low production cost.
The technical scheme of the utility model is particularly suitable for the large-flux regeneration treatment of the cooling liquid for slicing the ultrathin silicon single crystal diamond wire and the high-yield recovery of the superfine silicon powder, has large treatment capacity and good recovery effect, can continuously recycle the obtained regenerated cooling liquid, the superfine silicon powder and the adsorbing material with high efficiency and low efficiency, has low integral operation cost, and is only 1/4-1/5 of the method in the prior art. The recovery rate of the whole silicon powder is over 84 percent, the conductivity of the obtained regenerated cooling liquid is 17.7-19.4 mu S/cm, the surface tension is 31.8-33.1mN/m, and the recovery effect is good.
The embodiments of the present invention have been described in detail, and the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Claims (10)
1. A wire-cut coolant recovery system, comprising:
a first-stage separation unit: separating silicon powder in the waste cooling liquid to obtain a compound containing the silicon powder and desiliconized cooling liquid;
a secondary processing unit: for treating the desilication cooling liquid into a usable regeneration cooling liquid;
a secondary separation unit: separating the silicon powder in the compound to finally obtain silicon powder mud;
and the output end of the primary separation unit is respectively communicated with the input ends of the secondary processing unit and the secondary separation unit.
2. The inline cooling fluid recovery system of claim 1, wherein the primary separation unit comprises:
a stock solution tank for holding the waste coolant;
a configuration groove for placing the adsorption material;
and a tempering tank;
the output ends of the raw liquid tank and the configuration tank are communicated with the tempering tank;
the quenching and tempering tank is configured for quenching and tempering and mixing the waste cooling liquid and the adsorbing material, the adsorbing material is enabled to adsorb silicon powder in the waste cooling liquid to form desiliconized cooling liquid with adsorbing material-silicon powder compound, and after separation, the output end of the quenching and tempering tank is respectively connected with the output end of the quenching and tempering tank
A first cooling groove used for bearing the desiliconization cooling liquid in the secondary treatment unit is communicated with a second cooling groove;
and the secondary separation unit is communicated with a composite groove for bearing the adsorbing material-silicon powder compound.
3. The inline cooling fluid recovery system of claim 2, wherein the secondary treatment unit further comprises:
the first resin tank is communicated with an input port of the first cooling tank;
a second cooling tank and a second resin tank which are both communicated with the output end of the first cooling tank;
after the ion exchange resin in the resin tank I is mixed with the desiliconization cooling liquid in the cooling tank I, the ion exchange resin adsorbs chloride ions in the desiliconization cooling liquid, and after separation,
the regenerated cooling liquid output from the cooling tank I enters the cooling tank II;
and the adsorbed ion exchange resin output from the first cooling tank enters the second resin tank.
4. A wire-cut coolant recovery system as set forth in claim 3,
the input end and the output end of the second resin tank are respectively connected with
The first liquid medicine tank for placing alkali liquor is communicated;
the resin tank III is communicated with a resin tank III for placing regenerated ion exchange resin;
and the alkali liquor output from the first liquid medicine tank can carry out regeneration treatment on the ion exchange resin adsorbed in the second resin tank so as to obtain the regenerated ion exchange resin.
5. The line-cutting cooling liquid recovery system of claim 4, wherein the output end of the resin tank III is communicated with the input end of the tempering tank;
the regenerated ion exchange resin and the adsorbing material output from the resin tank III are both anion exchange resins, and can return to the quenching and tempering tank to adsorb and discharge the silicon powder in the waste cooling liquid from the raw liquid tank, so as to form the compound with the adsorbing material and the silicon powder.
6. A line-cut coolant recovery system as set forth in any one of claims 3-5 wherein said secondary separation unit further includes:
a second liquid medicine groove;
the separation groove I and the separation groove II are communicated with the output end of the composite groove;
the liquid medicine groove II is the same as the liquid medicine loaded in the liquid medicine groove I;
stirring, tempering and mixing the alkali liquor in the liquor tank II and the compound in the compound tank, desorbing the silicon powder and the adsorption material to obtain a mixture formed by the desorbed solid adsorption material and the solid silicon powder, separating,
the alkali liquor solid silicon powder output from the composite tank is placed in the first separation tank;
and the lye solid adsorption material output from the composite tank is placed in the second separation tank.
7. The system for recycling the line-cut cooling liquid as claimed in claim 6, wherein a silica powder tank and a sewage tank are further provided outside the separation tank;
after the alkali liquor solid silicon powder in the first separation tank is subjected to filter pressing and dehydration,
placing the obtained superfine silicon powder in the silicon powder groove;
the obtained waste water is discharged to the sewage tank for treatment.
8. The wire-cut cooling liquid recovery system of claim 6, further comprising a second liquid medicine tank for storing acid liquid, and the second liquid medicine tank is communicated with the second separation tank;
and mixing the acid liquor in the liquid medicine tank II with the alkali liquor solid adsorption material in the separation tank II to obtain a regenerated adsorption material.
9. The line-cutting cooling liquid recovery system of claim 8, wherein the output end of the second separation tank is communicated with the input end of the tempering tank;
and returning the regenerated adsorbing material output from the second separation tank to the quenching and tempering tank, and continuously adsorbing the silicon powder in the waste cooling liquid output from the raw liquid tank to form the adsorbing material-silicon powder compound.
10. The wire-cut coolant recovery system according to any one of claims 7 to 9, wherein the tempering tank, the first cooling tank, the second resin tank, the composite tank, the first separation tank and the second separation tank are provided with a circulation stirring pump;
and each tank in the primary separation unit, the secondary treatment unit and the secondary separation unit is provided with a feed pump and a control valve.
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| CN202120723882.XU CN215439951U (en) | 2021-04-09 | 2021-04-09 | Linear cutting cooling liquid recovery system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120723882.XU CN215439951U (en) | 2021-04-09 | 2021-04-09 | Linear cutting cooling liquid recovery system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024060845A1 (en) * | 2022-09-22 | 2024-03-28 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Method for removing silicon powder in coolant for monocrystalline silicon slicing with diamond wire |
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2021
- 2021-04-09 CN CN202120723882.XU patent/CN215439951U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024060845A1 (en) * | 2022-09-22 | 2024-03-28 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Method for removing silicon powder in coolant for monocrystalline silicon slicing with diamond wire |
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Effective date of registration: 20220721 Address after: No.32, Kangxiang Road, Tanggu marine science and Technology Park, Binhai New Area, Tianjin 300450 Patentee after: Tianjin Huanzhi New Energy Technology Co.,Ltd. Address before: Zhai Shan, south suburb of Xuzhou City, Jiangsu Province Patentee before: CHINA University OF MINING AND TECHNOLOGY Patentee before: Tianjin Huanzhi New Energy Technology Co.,Ltd. |
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