CN215437910U

CN215437910U - Device for drying and storing high-purity quartz products

Info

Publication number: CN215437910U
Application number: CN202121272687.6U
Authority: CN
Inventors: 陈瑜; 张峰; 黄小华; 陈龙
Original assignee: Shaanxi Yinjie Semiconductor Co ltd
Current assignee: Shaanxi Yinjie Semiconductor Co ltd
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2022-01-07
Anticipated expiration: 2031-06-08

Abstract

The utility model discloses a device for drying and storing high-purity quartz products, which belongs to the field of drying and storing of quartz products, and comprises a storage box, a hinge and a box door, wherein the storage box is movably connected with the box door through the hinge, a high-temperature radiation lamp is arranged, so that the high temperature of 150 plus 400 ℃ can be conveniently generated in the storage box in the drying process of the high-purity quartz products, and an induced draft fan, an air guide channel, an air guide pipe, a through hole, a convection motor, convection fan blades, air exhaust blades and an exhaust fan are arranged, so that the air in the storage box can rapidly flow, the moisture on the surface of the quartz products can be conveniently taken away by utilizing flowing gas, the drying purpose is achieved, the quartz products can be rapidly and uniformly heated, the drying effect of the quartz products is improved, in addition, after the high-temperature drying is carried out and reduced to a certain temperature, constant heat is provided by utilizing the high-temperature radiation lamp (the heating power is controlled by a temperature control program, realizing constant temperature preservation at 40-70 ℃).

Description

Device for drying and storing high-purity quartz products

Technical Field

The utility model belongs to the technical field of drying and storing of quartz products and other inorganic materials, and particularly relates to a device for drying and storing high-purity quartz products.

Background

After the quartz product is cleaned, in order to enable the quartz product to reach the production environment standard of high cleanliness in the semiconductor industry, the cleaned quartz product is usually dried by using a drying and storing device; however, most of the existing high purity quartz product drying and storing devices are difficult to perform rapid temperature rise and uniform drying in a sufficiently clean environment during use, and are inconvenient to perform low temperature clean dry storage without taking out a sample, and therefore, a device for drying and storing high purity quartz products is proposed.

SUMMERY OF THE UTILITY MODEL

It is an object of the present invention to provide an apparatus for drying and storing a high purity quartz product which solves the problems set forth in the background art described above.

In order to achieve the purpose, the utility model provides the following technical scheme: a device for drying and storing high-purity quartz products comprises a storage box, a hinge and a box door, wherein the storage box is movably connected with the box door through the hinge, an air guide air passage is formed in the storage box, a hundred-grade air purifier is fixedly sleeved on the top of the storage box, an induced draft fan is fixedly installed at the top of the hundred-grade air purifier, an air guide pipe is fixedly connected to the inner side of the storage box, a through hole is formed in the bottom of an inner cavity of the storage box, a convection motor is fixedly installed in the middle of the bottom end of the inner cavity of the storage box, convection blades are fixedly installed on an output shaft of the convection motor, a bearing plate is fixedly connected in the storage box, a sealing column is fixedly connected between the middle of the bearing plate and the middle of the top end of the inner cavity of the storage box, a high-temperature radiation lamp is fixedly installed at the top of the inner cavity of the storage box, a separation block is fixedly connected to one side of the inner cavity of the storage box, the top of the separation block is provided with a placing plate, the top of the bearing plate is provided with a support trolley, and the back of the storage box is provided with an air exhaust mechanism.

As a preferred embodiment, the hundred-grade air purifier comprises a shell, wherein a filter screen layer, a gauze layer and an activated carbon layer are sequentially laid inside the shell from top to bottom.

In a preferred embodiment, the sealing column is located in the middle of the inner cavity of the storage tank, and the sealing column is matched with the inner cavity of the storage tank.

In a preferred embodiment, the number of the high temperature radiation lamps is two, and the two groups of high temperature radiation lamps are equal in size, and the two groups of high temperature radiation lamps are symmetrically distributed on two sides of the top of the inner cavity of the storage tank.

As a preferred embodiment, the support cart comprises a base, the bottom fixed mounting of base has the high temperature resistant gyro wheel of metal, and the board is put to the top fixedly connected with of base, the positive fixedly connected with direction card strip of putting the board, and put the inside fixedly connected with baffle of board, the screw has been seted up at the top of putting the board, and put the top of board and placed the baffle, the baffle with put through bolt fixed connection between the board, and one side fixedly connected with high temperature resistant elastic block of baffle.

As a preferred embodiment, exhaust mechanism is including the blade of airing exhaust, the blade fixed mounting of airing exhaust is at the back of storage box inner chamber, and one side fixedly connected with exhaust hood of the blade of airing exhaust, the inside fixed mounting of exhaust hood has the exhaust fan, and one side of exhaust hood is fixed to have cup jointed the exhaust pipe, the outside fixed mounting of exhaust pipe has the check valve, and the filter pulp stratum reticulare has been laid to the inside of exhaust pipe one end.

Compared with the prior art, the utility model has the beneficial effects that:

the device for drying and storing the high-purity quartz product can be used for quickly raising the temperature and uniformly drying in a sufficiently clean environment, can be used for low-temperature clean dry storage without taking out a sample, is filled with high-temperature-resistant dry hygroscopic silica gel in the storage box, can be used for regenerating my dry silica gel during high-temperature drying, and can be used for normal drying in the temperature range for auxiliary use during low-temperature clean storage;

according to the device for drying and storing the high-purity quartz product, the high-temperature radiation lamp is arranged, so that the high temperature of 150-400 ℃ can be conveniently generated in the storage box in the drying process of the high-purity quartz product, and the air in the storage box can rapidly flow by arranging the draught fan, the air guide air passage, the air guide pipe, the through hole, the convection motor, the convection fan blade, the air exhaust blade and the exhaust fan, so that the moisture on the surface of the quartz product can be conveniently taken away by utilizing the flowing gas, the drying purpose is achieved, the quartz product can be rapidly and uniformly heated, and the drying effect of the quartz product is improved;

the device for drying and storing the high-purity quartz product can be used for conveniently purifying the entering external air in the drying process of the high-purity quartz product by arranging the hundred-grade air purifier, effectively removing impurities mixed with the external air, thereby ensuring the cleanness of the inside of the storage box, and can avoid the problem that the external atmospheric environment has adverse effect on the quartz product in the box body under the condition of slow ventilation by arranging the check valve and the filter cotton net layer, thereby bringing convenience for the drying and storage of the quartz product;

according to the device for drying and storing the high-purity quartz products, the plurality of separating blocks are arranged, so that the size of the space between the placing plates can be conveniently adjusted according to the height of the high-purity quartz products in the process of placing the quartz products, the problem of waste of the space in the storage box is avoided, and the utilization rate of the space in the storage box is improved;

this a device for drying and storage high-purity quartz products, through setting up the base, put the board, the baffle, the screw, the baffle, bolt and high temperature resistant elastic block, can be at the in-process that tubulose or shaft-like high-purity quartz products placed, be convenient for adjust fixedly according to the position that tubulose or shaft-like high-purity quartz products put, and through setting up the direction card strip, can put into to the storage box when inside at the support shallow, be convenient for carry out the chucking to the position of support shallow, the problem of rocking has been avoided taking place in the inside of storage box to the support shallow, thereby the stability that the support shallow was placed has been improved.

Drawings

FIG. 1 is a schematic front view of the structure of the present invention;

FIG. 2 is a partial cross-sectional view of the structure of the present invention;

FIG. 3 is a side partial cross-sectional view of the structure of the present invention;

fig. 4 is a top view of the rack cart in the configuration of the present invention.

In the figure: 1. a storage box; 2. a hinge; 3. a box door; 4. an air guide air passage; 5. a hundred-grade air purifier; 51. a housing; 52. a filter screen layer; 53. a gauze layer; 54. an activated carbon layer; 6. an induced draft fan; 7. an air guide pipe; 8. a through hole; 9. a convection motor; 10. a convection fan blade; 11. a bearing plate; 12. sealing the column; 13. a high temperature radiation lamp; 14. a separation block; 15. placing the plate; 16. a base; 17. placing the plate; 18. a guide clamping strip; 19. a partition plate; 20. a screw hole; 21. a baffle plate; 22. a bolt; 23. a high temperature resistant elastic block; 24. an air exhaust blade; 25. an exhaust hood; 26. an exhaust fan; 27. an exhaust duct; 28. a one-way valve; 29. a filter cotton net layer.

Detailed Description

The present invention will be further described with reference to the following examples.

The following examples are intended to illustrate the utility model but are not intended to limit the scope of the utility model. The conditions in the embodiments can be further adjusted according to specific conditions, and simple modifications of the method of the present invention based on the concept of the present invention are within the scope of the claimed invention.

Referring to fig. 1 and 2, the present invention provides a device for drying and storing high purity quartz products, including a storage box 1, a hinge 2 and a box door 3, in order to facilitate the purification of air entering the storage box 1, the storage box 1 is movably connected with the box door 3 through the hinge 2, an air guide airway 4 is arranged in the storage box 1, a hundred-grade air purifier 5 is fixedly sleeved on the top of the storage box 1, the hundred-grade air purifier 5 includes a housing 51, a filter screen layer 52, a gauze layer 53 and an active carbon layer 54 are sequentially laid in the housing 51 from top to bottom, and a draught fan 6 is fixedly installed on the top of the hundred-grade air purifier 5; when the induced draft fan 6 is started, the outside air enters the shell 51 under the action of the induced draft fan 6, and the air is enabled to sequentially pass through the filter screen layer 52, the gauze layer 53 and the activated carbon layer 54, so that the air is conveniently subjected to multistage filtration treatment, the air entering the storage box 1 can be purified, and the cleanness of the air inside the storage box 1 is ensured.

Referring to fig. 2, in order to facilitate dividing the storage space inside the storage box 1, an air duct 7 may be fixedly connected to the inner side of the storage box 1, a through hole 8 is formed at the bottom of an inner cavity of the storage box 1, a convection motor 9 is fixedly installed in the middle of the bottom end of the inner cavity of the storage box 1, a convection fan blade 10 is fixedly installed on an output shaft of the convection motor 9, a bearing plate 11 is fixedly connected to the inside of the storage box 1, a grid is arranged in the middle of the bearing plate 11, a sealing column 12 is fixedly connected between the middle of the bearing plate 11 and the middle of the top end of the inner cavity of the storage box 1, the sealing column 12 is located in the middle of the inner cavity of the storage box 1, and the sealing column 12 is adapted to the inner cavity of the storage box 1; after the air that 6 draught fans led in purifies through hundred grades of air purifier 5, can circulate along wind-guiding air flue 4, and the air can enter into the inside of storage box 1 from guide duct 7, open convection current motor 9 simultaneously, make convection current flabellum 10 take place high-speed the rotation, the air that external entering this moment can enter into the inside of storage box 1 from through-hole 8 and bearing plate 11, and sealed post 12 can be cut apart into two parts with the storage space of storage box 1 inside, thereby be convenient for separately deposit different kind high-purity quartz products.

Referring to fig. 2, in order to facilitate the drying treatment of the high purity quartz product stored in the storage box 1, the high temperature radiation lamps 13 may be fixedly installed at the top of the inner cavity of the storage box 1, the number of the high temperature radiation lamps 13 is two, the two high temperature radiation lamps 13 are equal in size, the two high temperature radiation lamps 13 are symmetrically distributed at two sides of the inner cavity of the storage box 1, when the high purity quartz product is placed into the storage box 1, the circuit of the high temperature radiation lamps 13 is connected, so that the high temperature radiation lamps 13 operate due to energization, and at this time, the high temperature radiation lamps 13 generate a temperature of 150-.

Referring to fig. 2 and 4, in order to facilitate the placement of tubular or rod-shaped high purity quartz products, a partition block 14 may be fixedly connected to one side of an inner cavity of the storage box 1, a placement plate 15 is disposed on the top of the partition block 14, the placement plate 15 is made of a metal material, and micropores are formed on the surface of the placement plate 15, by disposing a plurality of partition blocks 14, the space between the placement plates 15 may be conveniently adjusted according to the height of the high purity quartz products during the placement of the high purity quartz products, thereby avoiding the problem of waste of the space inside the storage box 1, improving the utilization rate of the space inside the storage box 1, a support cart may be disposed on the top of the bearing plate 11, the support cart includes a base 16, metal high temperature resistant rollers are fixedly mounted on the bottom of the base 16, a placement plate 17 is fixedly connected to the top of the base 16, a guide strip 18 is fixedly connected to the front of the placement plate 17, the inside of the placing plate 17 is fixedly connected with a partition plate 19, the top of the placing plate 17 is provided with a screw hole 20, the top of the placing plate 17 is provided with a baffle plate 21, the baffle plate 21 is fixedly connected with the placing plate 17 through a bolt 22, one side of the baffle plate 21 is fixedly connected with a high-temperature resistant elastic block 23, the bolt 22 is rotated reversely to separate the baffle plate from the screw hole 20, the baffle plate 21 is taken away from the top of the placing plate 17, tubular or rod-shaped high-purity quartz products can be vertically and sequentially placed between two adjacent partition plates 19, after the tubular or rod-shaped high-purity quartz products are placed, the baffle plate 21 is placed at the top of the placing plate 17, the baffle plate 21 is horizontally pushed, the baffle plate 21 is made to be close to the tubular or rod-shaped high-purity quartz products, the high-temperature resistant elastic block 23 is made to be in tight contact with the tubular or rod-shaped high-purity quartz products, and the bolt 22 is rotated forwardly to be in threaded connection with the screw hole 20, the position of the baffle plate 21 can be fixed conveniently, so that the tubular or rod-shaped high-purity quartz products can be placed conveniently.

Referring to fig. 2 and 3, in order to facilitate air exhaust in the storage tank 1, an air exhaust mechanism may be disposed on the back of the storage tank 1, the air exhaust mechanism includes air exhaust blades 24, the air exhaust blades 24 are fixedly mounted on the back of the inner cavity of the storage tank 1, an air exhaust cover 25 is fixedly connected to one side of the air exhaust blades 24, an air exhaust fan 26 is fixedly mounted inside the air exhaust cover 25, an air exhaust pipe 27 is fixedly connected to one side of the air exhaust cover 25, a check valve 28 is fixedly mounted outside the air exhaust pipe 27, and a filter cotton net layer 29 is laid inside one end of the air exhaust pipe 27; when needs carry out the exhaust, start exhaust fan 26, the inside air of storage box 1 can be because of the effect of suction enters into the inside of exhaust hood 25 from the blade 24 of airing exhaust, and the inside air of exhaust hood 25 can pass through check valve 28, air exhaust in to the outside air along exhaust pipe 27, if exhaust fan 26 is out of work, through setting up filter pulp stratum reticulare 29, can filter the air of external world, the problem of the influence is caused to the high-purity quartz products of storage to the inside of having avoided particulate matter among the outside air to get into storage box 1, thereby dry storage for high-purity quartz products has brought the facility.

In the above scheme, it should be noted that: after drying for a certain time, gradually cooling to about 75 ℃, reducing the power of the draught fan 6, slowly ventilating the inside of the storage box 1, keeping the micro-positive pressure inside the storage box 1, continuously operating the bottom turbulence fan, opening the cabinet door, putting a temperature-resistant drying agent into the corresponding storage box, closing the cabinet door, cooling to 45-60 ℃, and preserving at a constant temperature.

The working principle and the using process of the utility model are as follows: firstly, the bolt 22 is rotated reversely to be separated from the screw hole 20, the baffle plate 21 is taken away from the top of the placing plate 17, the tubular or rod-shaped high-purity quartz product can be vertically and sequentially placed between two adjacent partition plates 19, after the tubular or rod-shaped high-purity quartz product is placed, the baffle plate 21 is placed at the top of the placing plate 17, the baffle plate 21 is horizontally pushed, the baffle plate 21 is enabled to be close to the tubular or rod-shaped high-purity quartz product, the high-temperature resistant elastic block 23 is enabled to be tightly contacted with the tubular or rod-shaped high-purity quartz product, meanwhile, the bolt 22 is rotated forwardly to be in threaded connection with the screw hole 20, the position of the baffle plate 21 is convenient to fix, and the tubular or rod-shaped high-purity quartz product is convenient to be placed;

then, the box door 3 is opened, the support trolley placed with the tubular or rod-shaped high-purity quartz products is placed into the storage box 1, the space between the placing plates 15 is adjusted according to the height of the high-purity quartz products, the problem of waste of the space in the storage box 1 is avoided, and therefore the utilization rate of the space in the storage box 1 is improved;

after the air introduced by the draught fan 6 is purified by the hundred-grade air purifier 5, the air can circulate along the air guide air passage 4, the air can enter the storage box 1 from the air guide pipe 7, the convection motor 9 is turned on at the same time, so that the convection fan blades 10 rotate at a high speed, the air entering from the outside can enter the storage box 1 from the through holes 8 and the bearing plates 11, the exhaust fan 26 is started at the same time, the air in the storage box 1 can enter the exhaust hood 25 from the exhaust blades 24 due to the action of suction force, the air in the exhaust hood 25 can pass through the one-way valve 28 and is exhausted to the outside air along the exhaust pipe 27, and the air in the storage box 1 flows;

finally, a circuit of the high-temperature radiation lamp 13 is switched on, so that the high-temperature radiation lamp 13 operates due to electrification, at the moment, the high-temperature radiation lamp 13 generates a temperature of 150-400 ℃, and the heat generated by the high-temperature radiation lamp 13 can be rapidly diffused in the storage box 1 by matching with the flow of air, so that the surface moisture of the quartz product can be conveniently taken away by utilizing flowing gas, the drying purpose is achieved, the quartz product can be rapidly and uniformly heated, the drying effect of the quartz product is improved, if the exhaust fan 26 does not work, the outside air can be filtered by arranging the filter cotton net layer 29, the problem that the stored high-purity quartz product is influenced by the particles in the outside air entering the storage box 1 is avoided, and convenience is brought to the drying storage of the high-purity quartz product.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An apparatus for drying and storing high purity quartz products comprising a storage box (1), a hinge (2) and a box door (3), characterized in that: the air guide box is characterized in that the storage box (1) is movably connected with the box door (3) through a hinge (2), an air guide air passage (4) is formed in the storage box (1), a hundred-grade air purifier (5) is fixedly sleeved at the top of the storage box (1), an induced draft fan (6) is fixedly installed at the top of the hundred-grade air purifier (5), an air guide pipe (7) is fixedly connected to the inner side of the storage box (1), a through hole (8) is formed in the bottom of an inner cavity of the storage box (1), a convection motor (9) is fixedly installed in the middle of the bottom end of the inner cavity of the storage box (1), a convection fan blade (10) is fixedly installed on an output shaft of the convection motor (9), a bearing plate (11) is fixedly connected to the inside of the storage box (1), a sealing column (12) is fixedly connected between the middle of the bearing plate (11) and the middle of the top end of the inner cavity of the storage box (1), the high-temperature radiation lamp storage box is characterized in that a high-temperature radiation lamp (13) is fixedly mounted at the top of an inner cavity of the storage box (1), a separation block (14) is fixedly connected to one side of the inner cavity of the storage box (1), a placing plate (15) is arranged at the top of the separation block (14), a support trolley is arranged at the top of the bearing plate (11), and an exhaust mechanism is arranged on the back of the storage box (1).

2. The apparatus for drying and storing high purity quartz products according to claim 1, wherein: the hundred-grade air purifier (5) comprises a shell (51), wherein a filter screen layer (52), a gauze layer (53) and an activated carbon layer (54) are sequentially paved in the shell (51) from top to bottom.

3. The apparatus for drying and storing high purity quartz products according to claim 1, wherein: the sealing column (12) is positioned in the middle of the inner cavity of the storage box (1), and the sealing column (12) is matched with the inner cavity of the storage box (1).

4. The apparatus for drying and storing high purity quartz products according to claim 1, wherein: the quantity of high temperature radiation lamps (13) is two sets of, and the size of two sets of high temperature radiation lamps (13) is equal, and two sets of high temperature radiation lamps (13) symmetric distribution is in the both sides at storage box (1) inner chamber top.

5. The apparatus for drying and storing high purity quartz products according to claim 1, wherein: the support cart comprises a base (16), the bottom fixed mounting of base (16) has metal high temperature resistant rollers, and the top fixedly connected with of base (16) puts board (17), the positive fixedly connected with direction card strip (18) of putting board (17), and put inside fixedly connected with baffle (19) of board (17), screw (20) have been seted up at the top of putting board (17), and put the top of board (17) and placed baffle (21), baffle (21) and put and pass through bolt (22) fixed connection between board (17), and one side fixedly connected with high temperature resistant elastic block (23) of baffle (21).

6. The apparatus for drying and storing high purity quartz products according to claim 1, wherein: exhaust mechanism is including the blade (24) of airing exhaust, the back at storage box (1) inner chamber is fixed to blade (24) of airing exhaust, and one side fixedly connected with exhaust hood (25) of blade (24) of airing exhaust, the inside fixed mounting of exhaust hood (25) has exhaust fan (26), and one side of exhaust hood (25) is fixed has cup jointed exhaust pipe (27), the outside fixed mounting of exhaust pipe (27) has check valve (28), and the inside of exhaust pipe (27) one end has laid filter pulp stratum reticulare (29).