CN215404475U

CN215404475U - Universal plating pot of vacuum coating machine

Info

Publication number: CN215404475U
Application number: CN202121470997.9U
Authority: CN
Inventors: 薛蒙晓
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2021-06-30
Filing date: 2021-06-30
Publication date: 2022-01-04
Anticipated expiration: 2031-06-30

Abstract

The application provides a universal plating pot of a vacuum coating machine, the universal plating pot is positioned at the top of a chamber of the vacuum coating machine, the universal plating pot comprises a plating pot main body, a first through hole and a supporting ring, wherein the first through hole and the supporting ring are arranged on the plating pot main body, the plating pot main body is in an umbrella surface shape, a first concave part is arranged at the edge position of the first through hole of the plating pot main body, the shape of the first concave part corresponds to that of the first through hole, the supporting ring is in a hollow structure, the first sunken part is used for placing the supporting rings, three first through holes are uniformly distributed on the plating pot main body, the number of the first through holes is 12 inches, the number of the supporting rings is multiple, the supporting rings have multiple shapes or/and sizes, the center of each supporting ring is provided with a second through hole, or the supporting ring is provided with a plurality of uniformly distributed second through holes, the supporting ring is provided with a second concave part at the edge position of the second through holes, and the second concave part is used for placing the coated workpiece.

Description

Universal plating pot of vacuum coating machine

Technical Field

The utility model relates to the technical field of vacuum evaporation machines, in particular to a universal plating pot of a vacuum coating machine.

Background

The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied.

In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that evaporation coating material molecules are deposited on the coated workpiece to form a coated film. One or more plating pots in the vacuum evaporation plating machine can rotate for the uniformity of the plated film, the plating pot main body is provided with a plurality of through holes, a supporting ring is arranged on the through hole, the supporting ring is a hollow sheet, a coated workpiece is arranged on the supporting ring, the inner diameter of the supporting ring needs to be larger than the diameter of the coated workpiece, a gland and a pressing bar are arranged above the coated workpiece to fix the coated workpiece and the plating pot main body, the shape and the size of the coated workpiece determine the shape and the size of the through hole of the supporting ring and the plating pot main body, in the prior art, the sizes of the through holes of the common plating pot main body are 12 inches, 10 inches, 8 inches, 6 inches, 4 inches, 3 inches and 1 inch, in order to adapt to the coated workpieces with different sizes, the coating pots with various opening sizes are purchased or ordered, however, the use rate of some plating pots with openings is low, and the cost for purchasing the plating pots with various openings is obviously higher due to the high price of the plating pots.

In view of this, the present invention provides a general-purpose plating pot of a vacuum coater, in which one plating pot main body can be adapted to workpieces to be coated in various sizes, so as to reduce the cost.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a universal plating pot of a vacuum coating machine, wherein one plating pot main body can be suitable for workpieces to be coated with various sizes, and the cost is reduced.

The utility model provides a pot is plated to vacuum coating machine's general type, be provided with three and evenly distributed's through-hole in a plating pot main part, and the through-hole is 12 cun, the trunnion ring has a plurality ofly and the trunnion ring has multiple shape or/and size, replace the pot of plating of different trompil sizes with the trunnion ring of multiple trompil size, thereby reduce cost, make a plating pot main part just can be applicable to the not unidimensional by the coating film work piece, specifically, by the coating film work piece need 10 cun, 8 cun or 6 cun trompils, then the trunnion ring has a through-hole in center department, this through-hole is 10 cun, 8 cun or 6 cun's size, by the coating film work piece need 4, 3 cun or 1 cun trompil, then the trunnion ring has a plurality of evenly distributed's through-hole, this through-hole is 4 cun, 3 cun or 1 cun's size, thereby realize that a plating pot main part is applicable to 1-12 by the coating film work piece. The present applicant has completed the present application on this basis.

A general type plating pot of a vacuum coating machine is positioned at the top of a chamber of the vacuum coating machine and comprises a plating pot main body 1, a first through hole 2 and a supporting ring 3 which are arranged on the plating pot main body 1, wherein the plating pot main body 1 is in an umbrella surface shape, the plating pot main body 1 is provided with a first concave part 11 at the edge position of the first through hole 2, the shape of the first concave part 11 corresponds to the shape of the first through hole 2, the supporting ring 3 is in a hollow structure, the first concave part 11 is used for placing the supporting ring 3, the general type plating pot is characterized in that the first through hole 2 is provided with three through holes 31 which are uniformly distributed on the plating pot main body 1, the first through hole 2 is 12 inches, the supporting ring 3 is provided with a plurality of supporting rings, the supporting ring 3 is provided with a plurality of shapes or/and sizes, the center of the supporting ring 3 is provided with a second through hole 31, or the supporting ring 3 is provided with a plurality of second through holes 31 which are uniformly distributed, the supporting ring 3 is provided with a second concave part 32 at the edge position of the second through hole 31, the second concave part 32 is used for placing a workpiece to be coated.

In some embodiments, the shape of the workpiece to be coated is the same as the shape of the first through hole 2 and the second through hole 31, and the shape of the ring 3 corresponds to the shape of the workpiece to be coated.

Further, the shape of the first through hole 2 and the second through hole 31 is one of a circle, a square, a rectangle, an ellipse, a trapezoid and an irregular shape, the supporting ring 3 is one of a hollow circle, a square, a rectangle, an ellipse, a trapezoid and an irregular shape, and the hollow shape is the same as the shape of the edge of the supporting ring 3.

Further preferably, the first through hole 2 and the second through hole 31 are circular, the ring 3 is circular, the first through hole 2 and the second through hole 31 are square, the ring 3 is hollow square, and the hollow shape is also square.

Further, the shape of the first recess 11 and the second recess 32 is the same as that of the ring 3.

In some embodiments, the outer diameter of the ring 3 is larger than the inner diameter of the first recess 11 and smaller than the outer diameter of the first recess 11, and the outer diameter of the coated workpiece is larger than the inner diameter of the second recess 32 of the ring 3 and smaller than the outer diameter of the second recess 32.

Further, the width of the first concave part 11 is 3mm-15mm, and the width of the second concave part 32 is 3mm-10 mm.

In some embodiments, the size of the second through hole 31 of the ring 3 is 6 to 11 inches, the ring 3 has one second through hole 31 at the center, and the size of the second through hole 31 of the ring 3 is 1 to 5 inches, so that the ring 3 has a plurality of uniformly distributed second through holes 31.

In some embodiments, the universal plating pot further comprises a gland 4 and a pressing strip 5, the gland 4 covers the plated workpiece, and the pressing strip 5 presses the gland 4, so that the supporting ring 3, the plated workpiece and the gland 4 are fixed with the plating pot main body 1.

Furthermore, one gland 4 is provided with one or more pressing strips 5, one end of each pressing strip 5 is connected with the plating pot main body 1 through a screw, the pressing strips 5 can rotate, and the horizontal plane height of one end of each pressing strip 5 in screw connection is higher than that of the other end of each pressing strip 5, so that the other end of each pressing strip 5 can generate pressure on the gland 4 when placed on the gland 4.

Drawings

The above described and other features of the present disclosure will be more fully described when read in conjunction with the following drawings. It is appreciated that these drawings depict only several embodiments of the disclosure and are therefore not to be considered limiting of its scope. The present disclosure will be described more clearly and in detail by using the accompanying drawings.

Fig. 1 is a schematic structural diagram of a general plating pot of a vacuum coater according to embodiment 1 of the present application.

Fig. 2 is a schematic structural view of a pressing cover and a pressing bar of a general-purpose plating pot of the vacuum coater in embodiment 1 of the present application.

Fig. 3 is a schematic structural view of a general plating pot of the vacuum coater of embodiment 2 of the present application.

Fig. 4 is a schematic structural view of a pressing cover and a pressing bar of a general-purpose plating pot of the vacuum coater in embodiment 2 of the present application.

Description of the main element symbols:

the plating pot comprises a plating pot main body 1, a first through hole 2, a supporting ring 3, a gland 4, a pressing strip 5, a first concave part 11, a second through hole 31 and a second concave part 32.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).

Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.

In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

Example 1:

a general plating pot of a vacuum coating machine, as shown in figures 1-2, the general plating pot is positioned at the top of a chamber of the vacuum coating machine, the universal plating pot comprises a plating pot main body 1, a first through hole 2 and a supporting ring 3, wherein the first through hole 2 and the supporting ring 3 are arranged on the plating pot main body 1, the plating pot main body 1 is in an umbrella surface shape, a first concave part 11 is arranged at the edge position of the first through hole 2 of the plating pot main body 1, the shape of the first concave part 11 corresponds to the shape of the first through hole 2, the supporting ring 3 is in a hollow structure, be used for placing the filler ring 3 on the first depressed part 11, first through-hole 2 has three and evenly distributed on the pot main part 1 that plates, and first through-hole 2 is 12 cuns, and filler ring 3 has a plurality ofly, and filler ring 3 has multiple size, and the center department of filler ring 3 has a second through-hole 31, and filler ring 3 has second depressed part 32 in the border position of second through-hole 31, and second depressed part 32 is used for placing by the coating film work piece.

The shape of the workpiece to be coated is the same as that of the first through hole 2 and the second through hole 31, and the shape of the supporting ring 3 corresponds to that of the workpiece to be coated. The first through hole 2 and the second through hole 31 are circular, the ring 3 is hollow circular, the hollow shape is the same as the edge shape of the ring 3, and the first concave part 11 and the second concave part 32 are the same as the ring 3. The outer diameter of the ring 3 is larger than the inner diameter of the first concave part 11 and smaller than the outer diameter of the first concave part 11, and the outer diameter of the coated workpiece is larger than the inner diameter of the second concave part 32 of the ring 3 and smaller than the outer diameter of the second concave part 32. The width of the first recess 11 is 10mm, and the width of the second recess 32 is 5 mm. The size of the second through hole 31 of the ring 3 is 8 inches, and the ring 3 has a second through hole 31 at the center. The universal plating pot further comprises a pressing cover 4 and a pressing strip 5, the pressing cover 4 covers the plated workpiece, and the pressing strip 5 presses the pressing cover 4, so that the supporting ring 3, the plated workpiece and the pressing cover 4 are fixed with the plating pot main body 1. One gland 4 is provided with a pressing strip 5, one end of the pressing strip 5 is connected with the plating pot main body 1 through a screw, the pressing strip 5 can rotate, the horizontal plane height of one end of the pressing strip 5 in screw connection is higher than that of the other end, and therefore when the other end of the pressing strip 5 is placed on the gland 4, pressure can be generated on the gland 4.

Example 2:

a general plating pot of a vacuum coating machine, as shown in figures 3-4, the general plating pot is positioned at the top of a chamber of the vacuum coating machine, the universal plating pot comprises a plating pot main body 1, a first through hole 2 and a supporting ring 3, wherein the first through hole 2 and the supporting ring 3 are arranged on the plating pot main body 1, the plating pot main body 1 is in an umbrella surface shape, a first concave part 11 is arranged at the edge position of the first through hole 2 of the plating pot main body 1, the shape of the first concave part 11 corresponds to the shape of the first through hole 2, the supporting ring 3 is in a hollow structure, the supporting ring 3 is arranged on the first concave part 11, the electroplating pot is characterized in that the number of the first through holes 2 is three, the first through holes 2 are distributed on the plating pot main body 1 evenly, the size of the first through holes 2 is 12 inches, the number of the support rings 3 is multiple, the support rings 3 are provided with a plurality of second through holes 31 which are distributed evenly, the support rings 3 are provided with second concave parts 32 at the edge positions of the second through holes 31, and the second concave parts 32 are used for placing coated workpieces.

The shape of the workpiece to be coated is the same as that of the first through hole 2 and the second through hole 31, and the shape of the supporting ring 3 corresponds to that of the workpiece to be coated. The first through hole 2 and the second through hole 31 are circular, the supporting ring 3 is hollow and circular, and the hollow shape is the same as the shape of the edge of the supporting ring 3. The shapes of the first concave part 11 and the second concave part 32 are the same as the shape of the supporting ring 3, and the supporting ring is circular. The outer diameter of the ring 3 is larger than the inner diameter of the first concave part 11 and smaller than the outer diameter of the first concave part 11, and the outer diameter of the coated workpiece is larger than the inner diameter of the second concave part 32 of the ring 3 and smaller than the outer diameter of the second concave part 32. The width of the first recess 11 is 8mm, and the width of the second recess 32 is 4 mm. The size of the second through hole 31 of the ring 3 is 2 inches, and the ring 3 has 9 second through holes 31 which are uniformly distributed. The universal plating pot further comprises a pressing cover 4 and a pressing strip 5, the pressing cover 4 covers the plated workpiece, and the pressing strip 5 presses the pressing cover 4, so that the supporting ring 3, the plated workpiece and the pressing cover 4 are fixed with the plating pot main body 1. One gland 4 is provided with 3 layering 5, and the one end of layering 5 is passed through the screw and is connected with plating pot main part 1, and layering 5 can rotate, and the horizontal plane height of the one end of layering 5 screwed connection is higher than the other end for can produce pressure to gland 4 when the other end of layering 5 is put on gland 4.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.

Claims

1. A general type plating pot of a vacuum coating machine is positioned at the top of a chamber of the vacuum coating machine and comprises a plating pot main body (1), a first through hole (2) and a supporting ring (3) which are arranged on the plating pot main body (1), wherein the plating pot main body (1) is in an umbrella surface shape, the plating pot main body (1) is provided with a first concave part (11) at the edge position of the first through hole (2), the shape of the first concave part (11) corresponds to the shape of the first through hole (2), the supporting ring (3) is in a hollow structure, the first concave part (11) is used for placing the supporting ring (3), the general type plating pot is characterized in that the first through hole (2) is provided with three and evenly distributed on the plating pot main body (1), the first through hole (2) is 12, the supporting rings (3) are provided with a plurality of supporting rings, the supporting ring (3) has a plurality of shapes or/and sizes, the central position of the supporting ring (3) is provided with a second through hole (31 inch), or the supporting ring (3) is provided with a plurality of second through holes (31) which are uniformly distributed, the supporting ring (3) is provided with a second concave part (32) at the edge position of the second through holes (31), and the second concave part (32) is used for placing the coated workpiece.

2. The pan for coating vacuum coating machines of claim 1, wherein the workpiece to be coated has the same shape as the first through-hole (2) and the second through-hole (31), and the ring (3) has a shape corresponding to the shape of the workpiece to be coated.

3. The pan for coating vacuum coating machines of claim 2, wherein the first (2) and second (31) through holes are circular and the ring (3) is circular, and the first (2) and second (31) through holes are square and the ring (3) is hollow and square.

4. The pan for coating vacuum coater according to claim 3, wherein the first recess (11) and the second recess (32) have the same shape as the carrier ring (3).

5. Universal coating pan for vacuum coating machines according to claim 1, characterized in that the outer diameter of the carrier ring (3) is larger than the inner diameter of the first recess (11) and smaller than the outer diameter of the first recess (11), and the outer diameter of the workpiece to be coated is larger than the inner diameter of the second recess (32) of the carrier ring (3) and smaller than the outer diameter of the second recess (32).

6. The pan for coating vacuum coater according to claim 5, wherein the width of the first recess (11) is 3mm to 15mm, and the width of the second recess (32) is 3mm to 10 mm.

7. The pan for coating vacuum coater according to claim 1, wherein the size of the second through hole (31) of the ring (3) is 6-11 inches, the ring (3) has a second through hole (31) in the center, and the size of the second through hole (31) of the ring (3) is 1-5 inches, the ring (3) has a plurality of second through holes (31) distributed uniformly.

8. The universal plating pot of the vacuum coating machine according to claim 1, characterized in that the universal plating pot further comprises a pressing cover (4) and a pressing bar (5), the pressing cover (4) covers the workpiece to be coated, and the pressing bar (5) presses the pressing cover (4) to fix the supporting ring (3), the workpiece to be coated and the pressing cover (4) with the plating pot body (1).

9. The general-purpose coating pan of vacuum coating machine according to claim 8, characterized in that one of the press covers (4) is provided with one or more pressing bars (5), one end of the pressing bar (5) is connected with the coating pan main body (1) by a screw, the pressing bar (5) can rotate, and the horizontal level of the screwed end of the pressing bar (5) is higher than that of the other end, so that the other end of the pressing bar (5) can generate pressure on the press cover (4) when placed on the press cover (4).