CN215391469U - Mask plate fixing clamp - Google Patents

Mask plate fixing clamp Download PDF

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Publication number
CN215391469U
CN215391469U CN202121797956.0U CN202121797956U CN215391469U CN 215391469 U CN215391469 U CN 215391469U CN 202121797956 U CN202121797956 U CN 202121797956U CN 215391469 U CN215391469 U CN 215391469U
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China
Prior art keywords
frame
fixed
mask
structure support
outer frame
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Active
Application number
CN202121797956.0U
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Chinese (zh)
Inventor
胡家铭
罗雪春
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Tuowei Gaoke Chengdu New Material Co ltd
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Tuowei Gaoke Chengdu New Material Co ltd
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Priority to CN202121797956.0U priority Critical patent/CN215391469U/en
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Publication of CN215391469U publication Critical patent/CN215391469U/en
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  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model belongs to the technical field of mask plate cleaning equipment, and particularly relates to a mask plate fixing clamp. The technical scheme is as follows: the utility model provides a mask version mounting fixture, includes outer frame, is provided with a plurality of Sensor response portions in the outer frame, still is fixed with a plurality of structure support frames in the outer frame, installs the bearing bottom plate that is used for placing the mask version in the structure support frame, is provided with a plurality of removal framves on the structure support frame, removes to be connected with a plurality of fixed dogs on the frame, removes to be connected with between frame and the structure support frame and is used for locking the retaining member that removes the frame. The utility model provides a mask fixing clamp which can be used for cleaning masks with different sizes.

Description

Mask plate fixing clamp
Technical Field
The utility model belongs to the technical field of mask plate cleaning equipment, and particularly relates to a mask plate fixing clamp.
Background
The display panel can be classified into generation 6 (G6), generation 8.5 (G8.5), generation 10.5 (G10.5), and the like, depending on the size of the glass substrate, and further, a pilot line (G4.5) is provided. Currently, the AMOLED panel is mostly manufactured by a mainstream evaporation packaging process, and the organic material is precisely deposited on the glass substrate through a MASK (MASK). In order to ensure the quality of the product, the mask needs to be periodically and precisely regenerated (cleaned).
The existing cleaning equipment has only one specification, namely, the equipment can only adapt to the cleaning of a mask plate used by a certain generation line, such as a 6 generation line, but can not meet the cleaning requirements of a pilot plant line or a higher generation line panel manufacturer.
Disclosure of Invention
In order to solve the above problems in the prior art, an object of the present invention is to provide a mask fixing jig which can be used for cleaning masks of different sizes.
The technical scheme adopted by the utility model is as follows:
the utility model provides a mask version mounting fixture, includes outer frame, is provided with a plurality of Sensor response portions in the outer frame, still is fixed with a plurality of structure support frames in the outer frame, and the mid-mounting of structure support frame has the bottom plate that bears that is used for placing the mask version, is provided with a plurality of removal framves on the structure support frame, removes to be connected with a plurality of fixed dogs on the frame, removes to be connected with between frame and the structure support frame and is used for locking the retaining member that removes the frame.
And placing the whole fixing clamp on the auxiliary tool, and adjusting to a proper height. The mask is placed on the bearing bottom plate, the movable frame is moved to enable the fixed stop block to clamp the mask tightly, and then the mask is put into a cleaning production line. According to the size of the mask, the movable frame can be moved to a proper position, and the mask with different sizes can be fixed by the aid of the fixed baffles. After the movable frame is moved in place, the movable frame and the structure supporting frame are locked through the locking piece, and the mask is guaranteed to be reliably fixed.
As a preferable scheme of the utility model, the locking piece is a locking screw, the movable frame is provided with a long groove, and the locking screw locks the movable frame on the structural support frame through the long groove. After the position of the movable frame is adjusted, the long groove moves relative to the locking screw, and then the locking screw is screwed, so that the movable frame can be tightly pressed on the structural support frame by the locking screw.
As a preferable scheme of the utility model, the movable frame comprises a connecting rod, a plurality of fixed stop blocks are fixed on the connecting rod, movable rods are arranged at two ends of the connecting rod, and the long grooves are formed in the movable rods. The both ends of removing the frame all are through retaining member locking to improve the stability of removing the frame.
As a preferable scheme of the present invention, the number of the moving frames is two, and the two moving frames are respectively disposed on two sides of the load-bearing bottom plate. The movable frames on the two sides respectively clamp the mask from the two sides, so that the mask is guaranteed to be reliably fixed.
As a preferable scheme of the present invention, the number of the fixed stoppers connected to the moving frame is four, and the four fixed stoppers are uniformly distributed on the moving frame along a straight line. Four fixed dog on the removal frame can press from both sides the different positions of mask version tightly, further improve the stability behind the mask version clamping.
In a preferred embodiment of the present invention, the number of the Sensor sensing portions is four, and four Sensor sensing portions are provided inside four corners of the outer frame.
As a preferable scheme of the utility model, the fixed stop block comprises a stop block main body, the stop block main body is fixed on the movable frame, and a stop groove for accommodating the edge of the bearing bottom plate and the edge of the mask plate is arranged on one side of the stop block main body facing the bearing bottom plate. When the movable frame moves, the edge of the mask plate and the edge of the bearing bottom plate enter the blocking groove, so that the blocking groove limits the mask plate from the side surface and the top, and the mask plate is prevented from loosening.
As a preferable scheme of the present invention, the outer frame includes four positioning blocks, and a frame rod is fixed between adjacent positioning blocks.
The utility model has the beneficial effects that:
when the movable frame moves, the fixed stop block can clamp the mask plate. And putting the fixed clamp with the clamped mask plate into a cleaning production line for cleaning so as to realize regeneration of the mask plate. According to the size of the mask, the movable frame can be moved to a proper position, and the mask with different sizes can be fixed by the aid of the fixed baffles. After the movable frame is moved in place, the movable frame and the structure supporting frame are locked through the locking piece, and the mask is guaranteed to be reliably fixed.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
fig. 3 is a left side view of the present invention.
In the figure, 1-the outer frame; 2-Sensor sensing part; 3-a structural support frame; 4-a load floor; 5, moving a rack; 6-fixing a stop block; 7-a locking member; 8-mask plate; 11-positioning blocks; 12-frame bars; 51-long groove; 52-a connecting rod; 53-a moving rod; 61-a stopper body; 62-baffle groove.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the utility model and are not to be construed as limiting the utility model.
As shown in fig. 1 and fig. 2, the mask fixing clamp of the embodiment includes an outer frame 1, wherein a plurality of Sensor induction portions 2 are arranged in the outer frame 1, a plurality of structure supporting frames 3 are further fixed in the outer frame 1, a bearing bottom plate 4 for placing a mask 8 is arranged in the structure supporting frames 3, a plurality of movable frames 5 are arranged on the structure supporting frames 3, a plurality of fixed stoppers 6 are connected on the movable frames 5, and locking screws for locking the movable frames 5 are connected between the movable frames 5 and the structure supporting frames 3. The outer frame 1 comprises four positioning blocks 11, and frame rods 12 are fixed between the adjacent positioning blocks 11.
When the fixture is used, the whole fixture is placed on the auxiliary fixture and adjusted to a proper height. The movable frame 5 is removed, and the mask 8 is placed on the bearing bottom plate 4. And moving the movable frame 5 to enable the fixed stop 6 to clamp the mask 8, and putting the mask into a cleaning production line. According to the size of the mask 8, the movable frame 5 can be moved to a proper position, and the mask 8 with different sizes can be fixed by the fixed baffles. After the movable frame 5 is moved in place, the movable frame 5 and the structural support frame 3 are locked through the locking screws, and the mask 8 is guaranteed to be reliably fixed.
The bearing bottom plates 4 are two strip-shaped bottom plates, and the two bearing bottom plates 4 are respectively arranged at two sides of the space for accommodating the mask plate 8.
The movable frame 5 comprises a connecting rod 52, the fixed stoppers 6 are fixed on the connecting rod 52, the two ends of the connecting rod 52 are both provided with movable rods 53, the movable rods 53 are provided with elongated slots 51, and the movable frame 5 is locked on the structural support frame 3 through the elongated slots 51 by locking screws. The two ends of the movable frame 5 are locked by the locking pieces 7, so that the stability of the movable frame 5 is improved. After the position of the movable frame 5 is adjusted, the long groove 51 moves relative to the locking screw, and then the locking screw is screwed, so that the locking screw can press the movable frame 5 on the structural support frame 3.
The number of the moving frames 5 is two, and the two moving frames 5 are respectively arranged on two sides of the bearing bottom plate 4. The moving frames 5 on the two sides respectively clamp the mask 8 from the two sides, so that the mask 8 is guaranteed to be reliably fixed. The number of the fixed stop blocks 6 connected to the moving frame 5 is four, and the four fixed stop blocks 6 are uniformly distributed on the moving frame 5 along a straight line. Four fixed stop blocks 6 on the movable frame 5 can clamp different positions of the mask 8, so that the stability of the mask 8 after clamping is further improved.
The number of the Sensor induction parts 2 is four, and the four Sensor induction parts 2 are arranged at the inner sides of four corners of the outer frame 1.
Further, as shown in fig. 3, the fixed block 6 includes a block main body 61, the block main body 61 is fixed on the movable frame 5, and a side of the block main body 61 facing the carrier substrate 4 is provided with a blocking groove 62 for accommodating an edge of the carrier substrate 4 and an edge of the reticle 8. When the moving frame 5 moves, the edges of the mask plate 8 and the bearing bottom plate 4 enter the blocking groove 62, so that the blocking groove 62 limits the mask plate 8 from the side and the top, and the mask plate 8 is prevented from loosening.
The utility model is not limited to the above alternative embodiments, and any other various forms of products can be obtained by anyone in the light of the present invention, but any changes in shape or structure thereof, which fall within the scope of the present invention as defined in the claims, fall within the scope of the present invention.

Claims (8)

1. The utility model provides a mask version mounting fixture, a serial communication port, including outer frame (1), be provided with a plurality of Sensor response portions (2) in outer frame (1), still be fixed with a plurality of structure support frames (3) in outer frame (1), install bearing bottom plate (4) that are used for placing mask version (8) in structure support frame (3), be provided with a plurality of removal framves (5) on structure support frame (3), be connected with a plurality of fixed dog (6) on removing frame (5), be connected with retaining member (7) that are used for locking to remove frame (5) between removing frame (5) and structure support frame (3).
2. The reticle fixing jig according to claim 1, wherein the locking member (7) is a locking screw, the movable frame (5) is provided with a long groove (51), and the locking screw locks the movable frame (5) to the structural support frame (3) through the long groove (51).
3. The mask plate fixing clamp according to claim 2, wherein the moving frame (5) comprises a connecting rod (52), the plurality of fixed stoppers (6) are fixed on the connecting rod (52), moving rods (53) are arranged at both ends of the connecting rod (52), and the elongated slot (51) is arranged on the moving rods (53).
4. The mask plate fixing clamp according to claim 1, wherein the number of the moving frames (5) is two, and the two moving frames (5) are respectively arranged on two sides of the bearing bottom plate (4).
5. The mask plate fixing clamp according to claim 1, wherein the number of the fixed stop blocks (6) connected to the movable frame (5) is four, and the four fixed stop blocks (6) are linearly and uniformly distributed on the movable frame (5).
6. The reticle fixing jig according to claim 1, wherein the number of the Sensor sensing portions (2) is four, and four Sensor sensing portions (2) are respectively provided inside four corners of the outer frame (1).
7. The reticle fixing jig according to claim 1, wherein the fixing stopper (6) comprises a stopper body (61), the stopper body (61) is fixed on the movable frame (5), and a side of the stopper body (61) facing the carrying base plate (4) is provided with a stopper groove (62) for accommodating an edge of the carrying base plate (4) and an edge of the reticle (8).
8. The reticle fixing jig according to any one of claims 1 to 7, wherein the outer frame (1) includes four positioning blocks (11), and frame rods (12) are fixed between adjacent positioning blocks (11).
CN202121797956.0U 2021-08-03 2021-08-03 Mask plate fixing clamp Active CN215391469U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121797956.0U CN215391469U (en) 2021-08-03 2021-08-03 Mask plate fixing clamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121797956.0U CN215391469U (en) 2021-08-03 2021-08-03 Mask plate fixing clamp

Publications (1)

Publication Number Publication Date
CN215391469U true CN215391469U (en) 2022-01-04

Family

ID=79656528

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121797956.0U Active CN215391469U (en) 2021-08-03 2021-08-03 Mask plate fixing clamp

Country Status (1)

Country Link
CN (1) CN215391469U (en)

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