CN215373521U - Sealing washer protection device - Google Patents
Sealing washer protection device Download PDFInfo
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- CN215373521U CN215373521U CN202020151902.6U CN202020151902U CN215373521U CN 215373521 U CN215373521 U CN 215373521U CN 202020151902 U CN202020151902 U CN 202020151902U CN 215373521 U CN215373521 U CN 215373521U
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- sealing ring
- heat insulation
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Abstract
The utility model discloses a sealing ring protection device which comprises a furnace door, a sealing ring, a heat insulation bag and a furnace body, wherein the heat insulation bag is arranged on one side of the furnace door close to the furnace body, and the sealing ring plays a role in sealing when the furnace door is matched with the furnace body; the utility model provides a sealing ring protection device which is simple in structure, reasonable in design and light in weight.
Description
Technical Field
The utility model relates to the field of semiconductor or photovoltaic material processing, in particular to a sealing ring protection device in semiconductor or photovoltaic material processing equipment.
Background
Semiconductor or photovoltaic materials are widely applied to industries such as electronics, new energy and the like, the semiconductor and photovoltaic materials can be applied to products generally through processing treatment, a CVD technology, a diffusion technology or an oxidation technology is one of the processing modes, wherein the CVD technology is chemical vapor deposition, the CVD technology is widely applied to semiconductor or photovoltaic material processing at present, common processing equipment includes PECVD, LPCVD, APCVD and the like, and besides the CVD technology, the diffusion technology includes phosphorus diffusion, boron diffusion and the like. At present, there are many related apparatuses in the industry, and a corresponding apparatus can be selected for processing according to specific processing requirements, and the processing of semiconductor or photovoltaic materials is usually realized by feeding sheet materials into a furnace to react under certain temperature and pressure conditions, and in the process of processing semiconductor or photovoltaic materials, some placing structures are usually adopted to load or move materials to be processed, processed or processed, and such a loading or moving device is usually called as a boat, a square boat, a graphite boat, a boat or a flower basket in the industry.
At present, the sealing of the furnace door of the corresponding equipment is realized by contacting a sealing ring on the furnace door with a flange of a furnace neck, and the sealing ring deforms under stress, so that the sealing of the furnace chamber is ensured. Therefore, the quality of the sealing ring directly influences the sealing performance of the furnace chamber and the quality of internal products. When the furnace door is opened, high-temperature airflow in the furnace cavity is quickly sprayed out from the furnace opening and directly impacts the surface of the O-shaped sealing ring, the conventional sealing ring can only bear the high temperature of about 400 plus 500 ℃ in the industry at most, the gas in the furnace in the photovoltaic industry generally reaches 800 ℃, the furnace door can be opened only when the high-temperature gas in the furnace is cooled to be below 500 ℃, the temperature in the furnace is slowly reduced in a vacuum state and needs to wait for a long time, the production capacity is greatly influenced, and even if the high-temperature airflow in the furnace cavity does not damage the O-shaped sealing ring, the high-temperature airflow in the furnace can be quickly sprayed out from the furnace opening and directly impacts the surface of the O-shaped sealing ring. The service life of the sealing ring can only be maintained for about two days. In the mass production process, often change the sealing washer, maintenance time is long, also wastes a large amount of manpower and materials, when sealed not well, very easily causes the interior product of stove to scrap, even the interior harmful gas of stove leaks. The sealing ring is O-shaped, the furnace body flange is a plane, and when the sealing ring and the furnace body flange are contacted, the outer diameter of the O-shaped sealing ring is subjected to linear stress, so that the stress area is small, the pressure is strong, and the sealing ring is easy to damage; how to protect the sealing ring from being burnt by internal high-temperature airflow is a design difficulty and a key point of industrial equipment.
Disclosure of Invention
The utility model overcomes the defects of the prior art and provides the sealing ring protection device which is simple in structure, reasonable in design and light in weight.
The technical scheme of the utility model is as follows:
a sealing ring protection device comprises a furnace door, a sealing ring, a heat insulation bag and a furnace body, wherein the heat insulation bag is arranged on one side of the furnace door close to the furnace body, and the sealing ring plays a role in sealing when the furnace door is matched with the furnace body.
Furthermore, the shape of the heat insulation bag is adapted to the furnace body.
Furthermore, the furnace body also comprises a flange, wherein the flange is arranged between the sealing ring and the furnace body and is butted by adopting a fillet.
Further, the flange sets up the recess of placing the sealing washer, and the width of this notch opening is less than the width of recess bottom.
Furthermore, the groove section is in an isosceles trapezoid shape, the parallel long edge of the isosceles trapezoid is closer to the furnace body than the short edge, the shape of the sealing ring is similar to that of the groove, and the flange and the sealing ring are installed in a taper reverse buckling mode.
Furthermore, one end of the flange close to the furnace body is provided with an air blocking part.
Furthermore, the section of the air blocking part is L-shaped.
Furthermore, the heat insulation bag has a certain distance with the inner wall of the furnace body, one end of the heat insulation bag is completely attached to the furnace door, the shell of the heat insulation bag is made of quartz materials, and the heat insulation bag internally comprises aluminum silicate heat insulation materials which are high temperature resistant and have the heat conductivity coefficient lower than 0.1W/m.K.
Furthermore, an annular boss is arranged on one side of the furnace door close to the furnace body in an extending mode, and when the furnace door is matched with the furnace body, the annular boss is in contact with the sealing ring.
Further, the furnace door support device further comprises a support plate and a product load, wherein the support plate is fixed with the furnace door, and the product load is placed on the support plate.
The utility model has the advantages that:
the scheme has simple structure and reasonable design; the shell of the heat insulation bag is made of quartz materials, and the interior of the heat insulation bag comprises aluminum silicate heat insulation materials which are high temperature resistant and have the heat conductivity coefficient lower than 0.1W/m.K. The heat insulation bag has a certain distance with the inner wall of the furnace body, and one end of the heat insulation bag is completely attached to the furnace door, so that heat when the furnace door is opened through the heat insulation bag is blocked to protect the sealing ring. The furnace door is provided with an annular boss along one side edge close to the furnace body, and when the furnace door is matched with the furnace body, the annular boss is contacted with the sealing ring so as to achieve the sealing effect and enable the furnace body to form a vacuum state.
This scheme flange adopts the fillet butt joint, and when the fillet butt joint main function can reduce furnace gate and furnace body assembly, can produce certain tolerance in the straightness that hangs down, even furnace gate, flange and sealing washer take place the small-angle rotation in the plane this moment, and it is sealed still to fine messenger's laminating of ability.
The gas blocking part of the flange arranged by the scheme adopts the hot gas flow small-diameter circuitous flow principle, at the moment of opening the furnace, the channel (d) is narrow and small, the viscous force (mu) of the process air is very large, the flow resistance is very large, the hot process air flow can only circuitously and slowly flow, and the flow speed (V) is very small. The reynolds coefficient Re is obtained from the flow theory, and it is found that the reynolds coefficient Re is very small, and therefore the amount of heat transferred to the seal ring plane at the moment of removing the oven door is very small. The air flow channel is arranged when the furnace door is opened, the surface heat flow received by the sealing strip is less than one tenth of the surface heat flow, and the thermal shock received by the sealing ring is very small. And as the left moving distance of the furnace door is increased, the outlet airflow is increased, and the hot airflow is kept away from the sealing ring as far as possible under the action of the flange, so that the sealing ring can not be impacted by the hot airflow in the opening and increasing process of the furnace door, and the service life of the sealing ring is greatly prolonged.
Drawings
FIG. 1 is an exploded view of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is an enlarged view of a portion of the present invention;
FIG. 4 is a schematic view of the door of the present invention after being moved a small distance to the left;
fig. 5 is a schematic view of the oven door of the present invention after moving left.
The labels in the figure are: the furnace comprises a furnace door 1, a sealing ring 2, a heat insulation bag 3, an aluminum silicate heat insulation material 31, a furnace body 4, a flange 5, an air blocking part 51, an annular boss 6, a product load 7 and a bending channel 8.
Detailed Description
The utility model is further described with reference to the following figures and detailed description. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and are not intended to limit the utility model.
Example (b):
as shown in fig. 1 to 5, a sealing ring protection device comprises a furnace door 1, a sealing ring 2, a heat insulation bag 3 and a furnace body 4, wherein the heat insulation bag 3 is arranged on one side of the furnace door 1 close to the furnace body 4, and the sealing ring 2 plays a role in sealing when the furnace door 1 is matched with the furnace body 4. Wherein, thermal-insulated 3 shapes and furnace body 4 suit, if furnace body 4 is cylindrical, thermal-insulated 3 equally adopt cylindrically, naturally, corresponding furnace gate 1 equally adopts circularly, helps promoting holistic cooperation convenience. The outer shell of the heat insulation bag 3 is made of quartz material, and the inside of the heat insulation bag comprises aluminum silicate heat insulation material 31 which is high temperature resistant and has the heat conductivity coefficient lower than 0.1W/m.K. The heat insulation bag 3 has a certain distance with the inner wall of the furnace body 4, and one end of the heat insulation bag 3 is completely attached to the furnace door 1, so that the heat when the furnace door 1 is opened through the heat insulation bag 3 is blocked to protect the sealing ring 2. The sealing ring 2 is made of high-temperature-resistant soft rubber material.
Specifically, an annular boss 6 is arranged on one side of the furnace door 1 close to the furnace body 4 in an extending mode, and when the furnace door 1 is matched with the furnace body 4, the annular boss 6 is in contact with the sealing ring 2 to achieve a sealing effect and enable the furnace body 4 to be in a vacuum state. Naturally, the device also comprises a supporting plate and a product load 7, wherein the supporting plate is fixed with the furnace door 1, and the product load 7 is placed on the supporting plate.
Preferably, the device further comprises a flange 5, the flange 5 is arranged between the sealing ring 2 and the furnace body 4, the flange 5 is in fillet butt joint, certain tolerance can be generated in the verticality when the fillet butt joint mainly has the effect of reducing the assembly of the furnace door 1 and the furnace body 4, and even if the furnace door 1, the flange 5 and the sealing ring 2 rotate at a small angle in a plane, the sealing ring can still be well attached and sealed. Specifically, the flange 5 is wholly circular, the size of the sealing ring 2 is slightly smaller than the flange 5, a groove for arranging the sealing ring 2 is formed in the flange 5, and the width of the groove opening is smaller than that of the bottom of the groove. The section of this recess adopts the isosceles trapezoid shape to be the preferred scheme, and the parallel long limit of isosceles trapezoid is close to furnace body 4 than the minor face, and the shape and the size and the recess of sealing washer 2 suit, if the recess is the isosceles trapezoid of preferred scheme, then sealing washer 2 also is the isosceles trapezoid, and sealing washer 2's size slightly is greater than the recess size, realizes adopting this tapering back-off formula installation between flange 5 and the sealing washer 2 to the certain interference fit of cooperation is in order to reach better firm effect.
One end of the flange 5 close to the furnace body 4 is provided with an air blocking part 51, so that the whole air outlet channel forms a bending channel 8, and the phenomenon that when the furnace door 1 and the furnace body 4 are opened, corresponding process gas carries a large amount of heat to impact the sealing ring 2 to damage the sealing effect is avoided. Specifically, the section of the air blocking portion 51 is preferably L-shaped, and naturally, a section of the air blocking portion may be rectangular, fan-shaped, or the like, and the L-shaped integral flange 5 is more convenient to process and the weight of the flange is not increased as much as possible. The local small space formed by the L shape can play a role in caching partial process gas, and further reduces the impact damage of heat carried by the process gas to the sealing ring 2. The design mainly conforms to the principle that hot air flow with small diameter flows in a roundabout way, the channel (d) is narrow and small at the moment of opening the furnace, the viscous force (mu) of process air is large, the flow resistance becomes large, hot process air flow only flows in a roundabout way and slowly, and the flow speed (V) is extremely small. From the flow theory, it is found that the reynolds coefficient Re is very small, and therefore, the amount of heat transferred to the plane of the gasket 2 at the moment of removing the oven door 1 is very small, and the damage to the gasket is greatly reduced. Therefore, the surface heat flow received by the sealing strip is less than one tenth of the surface heat flow due to the arrangement of the air flow channel when the furnace door 1 is opened, and the thermal shock received by the sealing ring 2 is very small. And along with the increase of the left moving distance of the furnace door 1, the outlet airflow is increased, and due to the action of the flange 5, the hot airflow is far away from the sealing ring 2 as far as possible, so that the sealing ring 2 can not be impacted by the hot airflow in the opening and increasing process of the furnace door 1, and the service life of the sealing ring 2 is greatly prolonged.
In conclusion, in the scheme, the supporting plate is fixed with the furnace door 1, the product load 7 is placed on the supporting plate, the furnace door 1 is closed with the furnace body 4, and the annular boss 6 of the furnace door 1 is in contact with the sealing ring 2 to reach a vacuum state. After the product load 7 is processed, the furnace door 1 is moved leftwards, and the bent gas flow channel is formed due to the arranged heat insulation bag 3 and the flange 5, so that direct impact of a large amount of heat gas is avoided, and the service life of the sealing ring 2 is greatly prolonged.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the spirit of the present invention, and these modifications and decorations should also be regarded as being within the scope of the present invention.
Claims (8)
1. A sealing washer protection device which characterized in that: the furnace comprises a furnace door, a sealing ring, a heat insulation bag and a furnace body, wherein the heat insulation bag is arranged on one side of the furnace door close to the furnace body, and the sealing ring plays a role in sealing when the furnace door is matched with the furnace body; the shape of the heat insulation bag is adapted to the furnace body; the heat insulation bag has a certain distance with the inner wall of the furnace body, one end of the heat insulation bag is completely attached to the furnace door, the shell of the heat insulation bag is made of quartz materials, and the heat insulation bag internally comprises aluminum silicate heat insulation materials which are high temperature resistant and have the heat conductivity coefficient lower than 0.1W/m.K.
2. A seal ring protector as claimed in claim 1, wherein: the furnace body is characterized by further comprising a flange, wherein the flange is arranged between the sealing ring and the furnace body and is butted by round corners.
3. A seal ring protector as claimed in claim 2, wherein: the flange is provided with a groove for placing the sealing ring, and the width of the groove opening is smaller than that of the bottom of the groove.
4. A seal ring protector as claimed in claim 3, wherein: the groove section adopts an isosceles trapezoid shape, the parallel long edge of the isosceles trapezoid is closer to the furnace body than the short edge, the shape of the sealing ring is similar to that of the groove, and the flange and the sealing ring are installed in a taper reverse buckling mode.
5. A seal ring protector as claimed in claim 2, wherein: one end of the flange close to the furnace body is provided with an air blocking part.
6. A seal ring protector as claimed in claim 5, wherein: the section of the air blocking part is L-shaped.
7. A seal ring protector as claimed in claim 1, wherein: the furnace door is provided with an annular boss along one side edge close to the furnace body, and the annular boss is contacted with the sealing ring when the furnace door is matched with the furnace body.
8. A seal ring protector as claimed in claim 1, wherein: the furnace door is characterized by further comprising a supporting plate and a product load, wherein the supporting plate is fixed with the furnace door, and the product load is placed on the supporting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020151902.6U CN215373521U (en) | 2020-02-04 | 2020-02-04 | Sealing washer protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020151902.6U CN215373521U (en) | 2020-02-04 | 2020-02-04 | Sealing washer protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215373521U true CN215373521U (en) | 2021-12-31 |
Family
ID=79598855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020151902.6U Active CN215373521U (en) | 2020-02-04 | 2020-02-04 | Sealing washer protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215373521U (en) |
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2020
- 2020-02-04 CN CN202020151902.6U patent/CN215373521U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |