CN215370906U - Mechanical lead screw lubricating tool and semiconductor device - Google Patents
Mechanical lead screw lubricating tool and semiconductor device Download PDFInfo
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- CN215370906U CN215370906U CN202121097640.0U CN202121097640U CN215370906U CN 215370906 U CN215370906 U CN 215370906U CN 202121097640 U CN202121097640 U CN 202121097640U CN 215370906 U CN215370906 U CN 215370906U
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- lead screw
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- extension rod
- mechanical lead
- conveying pipeline
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Abstract
The utility model provides a mechanical lead screw lubricating tool and semiconductor equipment, wherein the mechanical lead screw lubricating tool comprises an extension rod, a clamping piece and a conveying pipeline, one end of the extension rod is connected with the clamping piece, and the conveying pipeline is arranged in the extension rod and the clamping piece; the extension rod is provided with a liquid feeding port communicated with the conveying pipeline, and the clamping piece is provided with a liquid outlet communicated with the conveying pipeline; the clamping piece is used for abutting against the mechanical lead screw, so that the lubricant added through the liquid filling opening can flow out of the liquid outlet onto the mechanical lead screw through the conveying pipeline. The mechanical lead screw lubricating tool provided by the utility model can effectively add the lubricant to the mechanical lead screw for maintenance, and can uniformly coat the lubricant on the mechanical lead screw, so that some hidden mechanical lead screws in semiconductor equipment can be better maintained, the normal operation of the equipment is ensured, and the production maximization is achieved.
Description
Technical Field
The utility model relates to the technical field of semiconductor equipment, in particular to a mechanical screw lubricating tool and semiconductor equipment.
Background
The semiconductor equipment used in chip manufacturing is generally provided with a mechanical lead screw, the mechanical lead screw is not smooth along with the increase of the service life of the equipment, if the mechanical lead screw cannot be well maintained, the resistance of the mechanical lead screw is too large after the equipment runs for a certain time, the mechanical lead screw is easy to damage, the equipment is easy to crash, and the production is affected.
However, many mechanical lead screws are hidden, which causes great trouble to the equipment engineer during maintenance, and therefore, it is necessary to design a mechanical lead screw lubrication tool capable of effectively maintaining the hidden mechanical lead screws.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a mechanical lead screw lubricating tool and semiconductor equipment, and aims to solve the problems that in the prior art, the positions of part of mechanical lead screws are hidden and are not beneficial to maintenance.
In order to solve the technical problem, the utility model provides a mechanical screw lubricating tool which comprises an extension rod, a clamping piece and a conveying pipeline, wherein one end of the extension rod is connected with the clamping piece, and the conveying pipeline is arranged in the extension rod and the clamping piece;
the extension rod is provided with a liquid feeding port communicated with the conveying pipeline, and the clamping piece is provided with a liquid outlet communicated with the conveying pipeline;
the clamping piece is used for abutting against the mechanical lead screw, so that the lubricant added through the liquid filling opening can flow out of the liquid outlet onto the mechanical lead screw through the conveying pipeline.
Optionally, the extension rod is of a telescopic structure and comprises a first connecting rod and a second connecting rod which are sleeved, the first connecting rod is sleeved outside the second connecting rod, and the second connecting rod can move axially and reciprocally along the first connecting rod.
Optionally, a liquid storage tank for storing the lubricant is further arranged in the extension rod, and the liquid storage tank is communicated with the liquid filling port and the conveying pipeline.
Optionally, the mechanical screw lubrication tool further includes a piston disposed in the liquid storage tank and a push rod connected to the piston, and at least a portion of the push rod extends out of the extension rod.
Optionally, a delivery pipe is arranged in the extension rod and the clamping piece, and an inner cavity of the delivery pipe forms the delivery pipeline.
Optionally, the clamping member includes a first clamping portion and a second clamping portion, the first clamping portion and the second clamping portion are respectively connected to the extension rod, and the first clamping portion and the second clamping portion can be close to and away from each other.
Optionally, one end of the first clamping portion, which is close to the second clamping portion, is provided with a first arc opening, and one end of the second clamping portion, which is close to the first clamping portion, is provided with a second arc opening, which is opposite to the first arc opening.
Optionally, the liquid outlet includes a plurality of first liquid outlets and a plurality of second liquid outlets, a plurality of first liquid outlets are located on the first arc mouth, a plurality of second liquid outlets are located on the second arc mouth.
Optionally, the first liquid outlet and the second liquid outlet are a plurality of, and a plurality of the first liquid outlets are arranged on the first arc mouth at equal intervals, and a plurality of the second liquid outlets are arranged on the second arc mouth at equal intervals.
The utility model also provides a semiconductor device comprising the mechanical lead screw lubricating tool.
Compared with the prior art, the mechanical screw lubricating tool provided by the utility model comprises an extension rod, a clamping piece and a conveying pipeline, wherein one end of the extension rod is connected with the clamping piece, and the conveying pipeline is arranged in the extension rod and the clamping piece; the extension rod is provided with a liquid feeding port communicated with the conveying pipeline, and the clamping piece is provided with a liquid outlet communicated with the conveying pipeline; the clamping piece is used for abutting against the mechanical lead screw, so that the lubricant added through the liquid filling port can flow out from the liquid outlet to the mechanical lead screw through the conveying pipeline, therefore, when the mechanical lead screw lubricating tool is used for maintaining the mechanical lead screw, the clamping piece abuts against the mechanical lead screw and clamps the mechanical lead screw, and the lubricant added through the liquid filling port in advance can flow out from the liquid outlet on the clamping piece to the mechanical lead screw, so that the lubricant added to the mechanical lead screw can be effectively maintained. In addition, the clamping piece can be controlled to axially reciprocate along the mechanical lead screw through the extension rod, so that the overall maintenance of the mechanical lead screw is facilitated, the lubricant can be uniformly coated, and the waste is reduced. The semiconductor equipment provided by the utility model comprises the mechanical lead screw lubricating tool, so that the semiconductor equipment provided by the utility model comprises all the advantages of the mechanical lead screw lubricating tool, and therefore, the concealed mechanical lead screw in the semiconductor equipment can be maintained better, the normal operation of the equipment is ensured, and the production maximization is achieved.
Drawings
Fig. 1 is a schematic structural diagram of a mechanical screw lubrication tool according to an embodiment of the present invention;
fig. 2 is a schematic structural view of an extension pole according to an embodiment of the present invention;
FIG. 3 is a schematic view of a fluid reservoir according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a clamping member according to an embodiment of the present invention.
Wherein the reference numbers are as follows:
100-extension rod, 110-first connecting rod, 120-second connecting rod, 210-first clamping part, 211-first liquid outlet, 220-second clamping part, 221-second liquid outlet, 300-conveying pipeline, 400-liquid storage tank, 410-liquid filling port, 420-piston and 430-push rod.
Detailed Description
To make the objects, advantages and features of the present invention more apparent, the mechanical screw lubrication tool and the semiconductor device according to the present invention will be described in further detail with reference to fig. 1 to 4. It should be noted that the drawings are simplified in form and not to precise scale, are only used for convenience and clarity to aid in describing the embodiments of the present invention, and are not used for limiting the implementation of the present invention, so that the present invention has no technical significance, and any structural modification, change of proportion relation or adjustment of size should still fall within the scope of the technical content disclosed by the present invention without affecting the function and the achievable purpose of the present invention.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood as appropriate by those of ordinary skill in the art.
The core idea of the utility model is to provide a mechanical lead screw lubricating tool and semiconductor equipment so as to achieve the purpose of conveniently and quickly maintaining a concealed mechanical lead screw by adding a lubricant.
Referring to fig. 1, a schematic structural diagram of a mechanical screw lubrication tool according to an embodiment of the present invention is schematically shown. As shown in fig. 1, the mechanical screw lubricating tool includes an extension rod 100, a clamping member, and a conveying pipeline 300, wherein one end of the extension rod 100 is connected to the clamping member, and the conveying pipeline 300 is disposed in the extension rod 100 and the clamping member; a liquid filling port 410 communicated with the conveying pipeline 300 is arranged on the extension rod 100, and a liquid outlet communicated with the conveying pipeline 300 is arranged on the clamping piece; the clamping member is configured to abut against a mechanical lead screw, so that the lubricant added through the filling opening 410 can flow out from the liquid outlet to the mechanical lead screw through the conveying pipeline 300. Therefore, when the mechanical screw is maintained by using the mechanical screw lubrication tool, the mechanical screw is clamped by abutting the clamp on the mechanical screw, and the lubricant previously added through the liquid inlet 410 can flow out from the liquid outlet on the clamp onto the mechanical screw, so that the lubricant can be effectively added to the mechanical screw for maintenance. In addition, the extension rod 100 can control the clamping piece to axially reciprocate along the mechanical lead screw, so that the overall maintenance of the mechanical lead screw is facilitated, the lubricant can be uniformly coated, and the waste is reduced.
Fig. 2 is a schematic structural view of an extension rod according to an embodiment of the present invention, as shown in fig. 2, the extension rod 100 is a telescopic structure, and further, the extension rod 100 is a telescopic pipe made of stainless steel material, and maintenance of a relatively concealed mechanical lead screw is facilitated by the extension rod 100 of the telescopic structure. Specifically, the extension rod 100 includes a first connecting rod 110 and a second connecting rod 120, the first connecting rod 110 is coaxially connected to the second connecting rod 120, the first connecting rod 110 is sleeved outside the second connecting rod 120, and the second connecting rod 120 can reciprocate along the axial direction of the first connecting rod 110, so as to achieve the telescopic function of the extension rod 100 by controlling the length of the second connecting rod 120 extending into the first connecting rod 110. Specifically, the diameter D1 of the first connecting rod 110 is 10-20 mm, the diameter D2 of the second connecting rod 120 is slightly smaller than the diameter D1 of the first connecting rod 110, the outer diameter D2 of the second connecting rod 120 is 10-15 mm, the length L1 of the first connecting rod 110 is 400-600 mm, the length L2 of the second connecting rod 120 is 200-400 mm, the diameter and the length of the first connecting rod 110 and the diameter and the length of the second connecting rod 120 can be set according to specific conditions, for example, the first connecting rod 110 with the diameter of 15mm and the length of 500mm and the second connecting rod 120 with the outer diameter of 13mm and the length of 300mm can be selected.
Referring to fig. 3, which schematically illustrates a structure of a liquid storage tank according to an embodiment of the present invention, as shown in fig. 3, a liquid storage tank 400 for storing the lubricant is further disposed in the extension rod 100, and the liquid storage tank 400 is communicated with the liquid filling port 410 and the conveying pipeline 300. Therefore, the liquid storage tank 400 can effectively store the lubricant added from the liquid adding port 410, and the time for the lubricant to flow out from the liquid outlet can be controlled through the liquid storage tank. Specifically, the diameter D3 of the liquid storage tank 400 can be 8-15 mm, the length L3 of the liquid storage tank 400 can be 100-200 mm, and the specific values of D3 and L3 can be set according to specific conditions, for example, the liquid storage tank 400 with the length of 150mm and the diameter of 12mm can be selected. One end 410 of filling opening is located outside extension rod 100, just the other end of filling opening 410 extend to in the extension rod 100 in order to be linked together with liquid storage pot 400, filling opening 410 is preferably the quad slit, and its limit D4 is 2 ~ 6mm, preferably, filling opening 410 is 4 mm's quad slit.
Further, the mechanical screw lubrication tool further includes a piston 420 disposed in the reservoir 400 and a push rod 430 connected to the piston 420, wherein at least a portion of the push rod 430 extends to the outside of the extension rod 100. Therefore, when the clamping member clamps the mechanical lead screw, the pushing rod 430 is manually pushed, so that the piston 420 can be effectively driven to squeeze the lubricant, and the lubricant flows out from the liquid outlet to the mechanical lead screw along the conveying pipeline 300. It should be noted that a slide rail for moving the push rod 430 is disposed on the extension rod 100, and a width L4 of the slide rail is 0-2 mm, preferably 1 mm.
Preferably, a delivery tube is disposed inside the extension pole 100 and the clamping member, and an inner cavity of the delivery tube constitutes the delivery pipeline 300. Thereby, the transport of the lubricant through the transport pipe both avoids the risk of leakage of the lubricant and effectively increases the utilization of the lubricant. The conveying pipe can be a PVC pipe with the inner diameter of 4-10 mm, and preferably a PVC pipe with the inner diameter of 6 mm.
Referring to fig. 4, a schematic structural view of the clamping member according to an embodiment of the present invention is shown, as shown in fig. 4, the clamping member includes a first clamping portion 210 and a second clamping portion 220, the first clamping portion 210 and the second clamping portion 220 are respectively connected to the extension rod 100, and the first clamping portion 210 and the second clamping portion 220 can move toward and away from each other. Therefore, the first clamping part 210 and the second clamping part are matched in structure, the mechanical lead screw with different diameters can be effectively adapted, the clamping piece can be clamped on the periphery of the mechanical lead screw, the mechanical lead screw can be attached to the periphery of the mechanical lead screw more effectively, and a lubricant can be coated on the periphery of the whole mechanical lead screw. The clamping piece is preferably made of ABS plastic, and in the process of clamping the mechanical lead screw by the clamping piece, the maximum distance L5 between the first clamping portion 210 and the second clamping portion 220 is 5-30 mm, preferably 10-30 mm.
Preferably, a first arc opening is formed at one end of the first clamping portion 210 close to the second clamping portion 220, and a second arc opening opposite to the first arc opening is formed at one end of the second clamping portion 220 close to the first clamping portion 210. Therefore, the first arc-shaped opening and the second arc-shaped opening are arranged, so that the first clamping portion 210 and the second clamping portion 220 can be attached to the mechanical lead screw more effectively. In addition, structures for conveniently smearing lubricating agents, such as foam layers and the like, can be arranged on the first arc opening and the second arc opening.
Preferably, the liquid outlet includes a plurality of first liquid outlets 211 and a plurality of second liquid outlets 221, the plurality of first liquid outlets 211 are located on the first arc, and the plurality of second liquid outlets 221 are located on the second arc. Therefore, the arrangement enables the first liquid outlet 211 and the second liquid outlet 221 to be directly attached to the periphery of the mechanical lead screw, and lubricant can flow onto the mechanical lead screw more conveniently. Preferably, the lubricant is a lubricating oil, the first liquid outlet 211 and the second liquid outlet 221 are both pinhole outlets, and the inner diameter D5 of the liquid outlets is 0-2 mm, preferably 1 mm.
Furthermore, the first liquid outlet 211 and the second liquid outlet 221 are both plural, the first liquid outlet 211 is disposed on the first arc opening at equal intervals, and the second liquid outlet 221 is disposed on the second arc opening at equal intervals. Therefore, the arrangement is beneficial to enabling the lubricant to be smeared on the mechanical lead screw more uniformly, and is more beneficial to maintaining the mechanical lead screw.
Based on the same utility model concept, the utility model also provides semiconductor equipment, which comprises the mechanical lead screw lubricating tool. Therefore, the semiconductor equipment provided by the utility model comprises all the advantages of the mechanical lead screw lubricating tool, so that some concealed mechanical lead screws in the semiconductor equipment can be better maintained, the normal operation of the equipment is ensured, and the production maximization is achieved.
In summary, compared with the prior art, the mechanical screw lubricating tool and the semiconductor device provided by the utility model have the following advantages:
the utility model provides a mechanical screw lubricating tool which comprises an extension rod, a clamping piece and a conveying pipeline, wherein one end of the extension rod is connected with the clamping piece, and the conveying pipeline is arranged in the extension rod and the clamping piece; the extension rod is provided with a liquid feeding port communicated with the conveying pipeline, and the clamping piece is provided with a liquid outlet communicated with the conveying pipeline; the clamping piece is used for abutting against the mechanical lead screw, so that the lubricant added through the liquid filling port can flow out from the liquid outlet to the mechanical lead screw through the conveying pipeline, therefore, when the mechanical lead screw lubricating tool is used for maintaining the mechanical lead screw, the clamping piece abuts against the mechanical lead screw and clamps the mechanical lead screw, and the lubricant added through the liquid filling port in advance can flow out from the liquid outlet on the clamping piece to the mechanical lead screw, so that the lubricant added to the mechanical lead screw can be effectively maintained. In addition, the clamping piece can be controlled to axially reciprocate along the mechanical lead screw through the extension rod, so that the overall maintenance of the mechanical lead screw is facilitated, the lubricant can be uniformly coated, and the waste is reduced. The semiconductor equipment provided by the utility model comprises the mechanical lead screw lubricating tool, so that the semiconductor equipment provided by the utility model comprises all the advantages of the mechanical lead screw lubricating tool, and therefore, the concealed mechanical lead screw in the semiconductor equipment can be better maintained, the normal operation of the equipment is ensured, and the production maximization is achieved.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. The mechanical screw lubricating tool is characterized by comprising an extension rod, a clamping piece and a conveying pipeline, wherein one end of the extension rod is connected with the clamping piece, and the conveying pipeline is arranged in the extension rod and the clamping piece;
the extension rod is provided with a liquid feeding port communicated with the conveying pipeline, and the clamping piece is provided with a liquid outlet communicated with the conveying pipeline;
the clamping piece is used for abutting against the mechanical lead screw, so that the lubricant added through the liquid filling opening can flow out of the liquid outlet onto the mechanical lead screw through the conveying pipeline.
2. The mechanical screw lubrication tool of claim 1, wherein the extension rod is of a telescopic structure, and comprises a first connection rod and a second connection rod which are sleeved with each other, the first connection rod is sleeved outside the second connection rod, and the second connection rod can move back and forth along the axial direction of the first connection rod.
3. The mechanical lead screw lubricating tool of claim 1, wherein a liquid storage tank for storing the lubricant is further disposed in the extension rod, and the liquid storage tank is communicated with the liquid filling port and the conveying pipeline.
4. The mechanical screw lubrication tool of claim 3, further comprising a piston disposed within said reservoir and a pushrod coupled to said piston, at least a portion of said pushrod extending outside of said extension rod.
5. The mechanical lead screw lubrication tool of claim 1, wherein a delivery tube is disposed within the extension rod and the clamp, an inner cavity of the delivery tube constituting the delivery conduit.
6. The mechanical screw lubrication tool of claim 1, wherein the clamping member includes a first clamping portion and a second clamping portion, the first clamping portion and the second clamping portion are respectively connected to the extension rod, and the first clamping portion and the second clamping portion are capable of moving toward and away from each other.
7. The mechanical lead screw lubrication tool of claim 6, wherein a first arc port is formed at an end of the first clamping portion adjacent to the second clamping portion, and a second arc port is formed at an end of the second clamping portion adjacent to the first clamping portion and is opposite to the first arc port.
8. The mechanical lead screw lubrication tool of claim 7, wherein said fluid outlets include a plurality of first fluid outlets and a plurality of second fluid outlets, said plurality of first fluid outlets being located on said first arc and said plurality of second fluid outlets being located on said second arc.
9. The mechanical screw lubrication tool of claim 8, wherein the first liquid outlet and the second liquid outlet are both plural, the plural first liquid outlets are disposed on the first arc port at equal intervals, and the plural second liquid outlets are disposed on the second arc port at equal intervals.
10. A semiconductor device comprising the mechanical lead screw lubricating tool according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121097640.0U CN215370906U (en) | 2021-05-20 | 2021-05-20 | Mechanical lead screw lubricating tool and semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121097640.0U CN215370906U (en) | 2021-05-20 | 2021-05-20 | Mechanical lead screw lubricating tool and semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215370906U true CN215370906U (en) | 2021-12-31 |
Family
ID=79631256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121097640.0U Active CN215370906U (en) | 2021-05-20 | 2021-05-20 | Mechanical lead screw lubricating tool and semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215370906U (en) |
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2021
- 2021-05-20 CN CN202121097640.0U patent/CN215370906U/en active Active
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Address after: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee after: Yuexin Semiconductor Technology Co.,Ltd. Address before: 510000 No. 28, Fenghuang fifth road, Huangpu District, Guangzhou, Guangdong Patentee before: Guangzhou Yuexin Semiconductor Technology Co.,Ltd. |