CN215365976U

CN215365976U - MO source steel bottle with drain liquid effect

Info

Publication number: CN215365976U
Application number: CN202121754829.2U
Authority: CN
Inventors: 郑江; 薛亮
Original assignee: Changshu Pharmaceutical Machinery Co ltd
Current assignee: Changshu Pharmaceutical Machinery Co ltd
Priority date: 2021-07-30
Filing date: 2021-07-30
Publication date: 2021-12-31
Anticipated expiration: 2031-07-30

Abstract

The utility model discloses an MO source steel cylinder with a liquid discharge effect, which comprises a steel cylinder body with a steel cylinder inner cavity, wherein a liquid outlet pipe is fixedly arranged on one side of the steel cylinder body, a liquid outlet port of the liquid outlet pipe is communicated with the steel cylinder inner cavity, and a liquid discharge counter bore communicated with the liquid outlet port is arranged at the bottom of the steel cylinder body; the utility model can obviously improve the problem of liquid accumulation of the MO source steel cylinder, effectively discharge the waste liquid in the inner cavity of the steel cylinder, obviously reduce the influence of the residual liquid accumulation in the inner cavity of the steel cylinder on the repeated filling of the MO source steel cylinder, and finally effectively improve the purity of the supplied MO source.

Description

MO source steel bottle with drain liquid effect

Technical Field

The utility model belongs to the technical field of MO source packaging containers, and particularly relates to an MO source steel cylinder with a liquid discharge effect.

Background

The liquid MO source is applied to preparing metal oxide films, and can well avoid the complexity problem faced by multi-source delivery. The method comprises the steps of dissolving various MO sources (such as a liquid magnesium source, a liquid indium source, electronic grade trimethyl aluminum, a liquid phosphine source and the like) into an organic solvent to obtain a good MO source mixed solution, injecting the good MO source mixed solution into an MO source steel cylinder, then injecting inert gas into the mixed solution of the MO source steel cylinder to obtain gaseous MO source steam, and then controlling the flow to send the gaseous MO source steam into a reaction chamber.

Since the MO source mixed solution is consumed after a certain period of use, it is necessary to discharge its waste liquid from the MO source cylinder. However, the applicant finds that, due to the fact that the conventional drain pipe is installed on the side wall of the MO source steel cylinder, and the liquid outlet of the drain pipe is higher than the bottom of the inner cavity of the steel cylinder, accumulated liquids located above the bottom of the inner cavity of the steel cylinder and below the liquid outlet of the drain pipe cannot be discharged through the drain pipe, the MO source steel cylinder is prone to generating the accumulated liquids, and due to the existence of the accumulated liquids, when the MO source mixed solution is repeatedly filled, the previous waste liquid and the new MO source mixed solution are mixed together, and finally the purity of the MO source is reduced, and the supply quality of the MO source is affected.

Therefore, the applicant hopes to solve the above technical problem by creatively designing the structure of the MO source steel cylinder itself.

Disclosure of Invention

In view of this, the present invention provides an MO source steel cylinder with a liquid discharge effect, which can significantly improve the liquid discharge problem of the MO source steel cylinder, effectively discharge the waste liquid in the inner cavity of the steel cylinder, significantly reduce the influence of the residual liquid in the inner cavity of the steel cylinder on the refilling of the MO source steel cylinder, and finally effectively improve the purity of the MO source supplied by the MO source steel cylinder of the present invention.

The technical scheme adopted by the utility model is as follows:

the utility model provides a MO source steel bottle with drain liquid effect, is including the steel bottle body that has the steel bottle inner chamber, steel bottle body one side fixed mounting has the drain pipe, wherein, the drain port of drain pipe with steel bottle inner chamber intercommunication, and steel bottle body bottom be equipped with the drain liquid counter bore of drain port intercommunication.

Preferably, the depth of the drain counter bore is no greater than 1/2 thickness of the bottom of the cylinder body.

Preferably, the bottom of the liquid outlet port is flush with the bottom of the accumulated liquid discharge counter bore, and the top of the liquid outlet port is located above the bottom of the steel cylinder body.

Preferably, one side of the steel cylinder body is provided with a drain pipe mounting hole for hermetically mounting the drain pipe.

Preferably, the other side of the steel cylinder body is provided with a spare pipe, and a spare port of the spare pipe is positioned above the bottom of the steel cylinder body.

Preferably, the spare port has a distance from the bottom of the cylinder body, and the distance is in a range of 3-12 mm.

Preferably, the inner diameter of the liquid outlet pipe ranges from 4 mm to 10mm, and the wall thickness ranges from 1 mm to 3 mm.

Preferably, the drain pipe is fixedly installed on the steel cylinder body through a full-welding process, and the drain pipe is provided with a connector for being rapidly connected with an external pipeline.

Preferably, the upper end of steel bottle body installs level gauge and pressure gauge respectively, is used for monitoring respectively the liquid level and the pressure of steel bottle inner chamber.

Preferably, the upper end of the steel cylinder body is respectively provided with an inert gas inlet pipe and an MO source steam outlet pipe.

The applicant finds that the core factor of reducing the purity of the MO source supply caused by the fact that the waste liquid of the MO source steel cylinder cannot be completely discharged is that the waste liquid of the inner cavity of the steel cylinder cannot be completely discharged due to the fact that the installation position of the existing liquid outlet pipe is higher than the bottom of the inner cavity of the steel cylinder, therefore, the applicant particularly proposes to arrange a liquid discharge counter bore structure communicated with the liquid outlet port of the liquid outlet pipe at the bottom of the steel cylinder body, meanwhile, the liquid outlet port is ensured to be communicated with the inner cavity of the steel cylinder, so that the waste liquid in the inner cavity of the steel cylinder is discharged out of the inner cavity of the steel cylinder through the liquid outlet pipe in the process of discharging the waste liquid, because the bottom of the steel cylinder body is provided with the accumulated liquid discharge counter bore communicated with the liquid outlet port, the accumulated liquid at the bottom of the inner cavity of the steel cylinder can be discharged to the maximum extent, further, the problem of liquid accumulation of MO source waste liquid in the inner cavity of the steel cylinder can be effectively solved, and finally, the purity of the MO source supplied by the MO source steel cylinder is reliably ensured.

Drawings

FIG. 1 is a schematic structural view (with a partial sectional view) of an MO source steel cylinder according to an embodiment of the present application;

FIG. 2 is a top view of FIG. 1;

figure 3 is an enlarged view of a portion of the drain tube of figure 1.

Detailed Description

The embodiment discloses MO source steel bottle with drain liquid effect, including the steel bottle body that has the steel bottle inner chamber, steel bottle body one side fixed mounting has the drain pipe, and wherein, the liquid outlet port and the steel bottle inner chamber intercommunication of drain pipe, and steel bottle body bottom is equipped with the drain liquid counter bore with liquid outlet port intercommunication.

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, 2 and 3, an MO source steel cylinder 1 with liquid drainage effect includes a steel cylinder body 20 having a cylinder inner cavity 10, and preferably, in this embodiment, a liquid level gauge 31 and a pressure gauge 32 are respectively installed at an upper end portion of the steel cylinder body 20 for respectively monitoring a liquid level and a pressure of the cylinder inner cavity 10; an inert gas inlet pipe 33 and an MO source steam outlet pipe 34 are respectively installed at the upper end part of the steel cylinder body 20.

In this embodiment, a liquid outlet pipe 40 is fixedly installed at one side of the steel cylinder body 20, wherein a liquid outlet port 41 of the liquid outlet pipe 40 is communicated with the steel cylinder inner cavity 10, and a liquid discharge counter bore 22 communicated with the liquid outlet port 41 is arranged at the bottom 21 of the steel cylinder body; preferably, in order to further achieve the effusion discharging effect of the liquid outlet pipe 40, in this embodiment, the bottom of the liquid outlet port 41 is flush with the bottom of the effusion discharging counterbore 22, and the top of the liquid outlet port 41 is located above the bottom 21 of the steel cylinder body; preferably, in order to facilitate installation, in the present embodiment, a drain pipe installation hole for hermetically installing the drain pipe 40 is formed on one side of the steel cylinder body 20, and the drain pipe installation hole is hermetically installed and connected with the drain pipe 40;

preferably, in order to ensure the structural strength of the cylinder body bottom 21, in the present embodiment, the depth of the liquid discharge counterbore 22 is not greater than 1/2 thickness of the cylinder body bottom 21, and particularly preferably, in the present embodiment, the depth of the liquid discharge counterbore 22 is about 1/3 thickness of the cylinder body bottom 21;

preferably, in this embodiment, the other side of the cylinder body 20 is provided with a spare pipe 50, and a spare port 51 of the spare pipe 50 is located above the bottom 21 of the cylinder body, and can be used as a spare liquid inlet pipe or a spare liquid outlet pipe or other functions, which is not limited in this embodiment; further preferably, in the present embodiment, the spare port 51 has a distance from the cylinder body bottom 21, and the distance is in a range of 3 to 12 mm;

preferably, in the present embodiment, the inner diameter of the liquid outlet pipe 40 ranges from 4 to 10mm, and the wall thickness thereof ranges from 1 to 3 mm; when the liquid outlet pipe 40 is fixedly installed on the steel cylinder body 20 through a full-welding process, and the liquid outlet pipe 40 is installed with a connector 42 for quick connection with an external pipeline (not shown), the spare pipe 50 in this embodiment may refer to the structural design of the liquid outlet pipe.

The embodiment particularly provides a structure that the bottom 21 of the steel cylinder body is provided with the accumulated liquid discharge counter bore 22 communicated with the liquid outlet port 41 of the liquid outlet pipe 40, and meanwhile, the liquid outlet port 41 is ensured to be communicated with the inner cavity 10 of the steel cylinder, so that in the process of discharging the waste liquid, the waste liquid in the inner cavity 10 of the steel cylinder is discharged out of the inner cavity 10 of the steel cylinder through the liquid outlet pipe 40, and as the bottom 21 of the steel cylinder body is provided with the accumulated liquid discharge counter bore 22 communicated with the liquid outlet port 41, the accumulated liquid in the inner cavity 10 of the steel cylinder can be discharged to the greatest extent, the accumulated liquid problem of the MO source waste liquid in the inner cavity 10 of the steel cylinder can be effectively improved, and the purity of the MO source supplied by the MO source steel cylinder of the utility model is finally and reliably ensured.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a MO source steel bottle with drain liquid effect, includes the steel bottle body that has the steel bottle inner chamber, its characterized in that, steel bottle body one side fixed mounting has the drain pipe, wherein, the liquid outlet port of drain pipe with steel bottle inner chamber intercommunication, and steel bottle body bottom be equipped with the drain liquid counter bore of liquid outlet port intercommunication.

2. The MO source cylinder with liquid discharge effect of claim 1, wherein the depth of the liquid discharge counter bore is not more than 1/2 thickness of the bottom of the cylinder body.

3. The MO source steel cylinder with liquid discharge effect of claim 1, wherein the bottom of the liquid outlet port is flush with the bottom of the liquid discharge counter bore, and the top of the liquid outlet port is located above the bottom of the steel cylinder body.

4. The MO source steel cylinder with liquid discharging effect of claim 1, wherein one side of the steel cylinder body is provided with a liquid outlet pipe mounting hole for sealing and mounting the liquid outlet pipe.

5. The MO source steel cylinder with liquid discharging effect of claim 1, wherein a spare pipe is provided at the other side of the steel cylinder body, and a spare port of the spare pipe is located above the bottom of the steel cylinder body.

6. The cylinder for MO source with liquid discharge effect of claim 5, wherein the spare port has a distance with the bottom of the cylinder body, and the distance is in the range of 3-12 mm.

7. The cylinder for MO source with liquid discharge effect of claim 1, wherein the inner diameter of the liquid outlet pipe is in the range of 4-10mm, and the wall thickness is in the range of 1-3 mm.

8. The MO source steel cylinder with liquid discharging effect of claim 1, wherein the drain pipe is fixedly mounted on the steel cylinder body through a full-length welding process, and the drain pipe is mounted with a connector for quick connection with an external pipeline.

9. The MO source steel cylinder with liquid discharging effect of claim 1, wherein the upper end of the steel cylinder body is respectively provided with a liquid level meter and a pressure meter for respectively monitoring the liquid level and the pressure in the inner cavity of the steel cylinder.

10. The MO source steel cylinder with liquid discharging effect of claim 1, wherein the upper end portion of the cylinder body is respectively provided with an inert gas inlet pipe and an MO source steam outlet pipe.