CN215338393U - Optical head calibration adjustment mechanism - Google Patents
Optical head calibration adjustment mechanism Download PDFInfo
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- CN215338393U CN215338393U CN202121575697.7U CN202121575697U CN215338393U CN 215338393 U CN215338393 U CN 215338393U CN 202121575697 U CN202121575697 U CN 202121575697U CN 215338393 U CN215338393 U CN 215338393U
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- hole
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- optical head
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Abstract
The utility model discloses an optical head calibration adjusting mechanism, which comprises: the leveling plate comprises at least three leveling holes positioned at the end points of the right triangle; the base is arranged at intervals with the leveling plate, and a connecting hole corresponding to the leveling hole is formed in the base; the three fixing screws correspond to the leveling holes, and each fixing screw penetrates through the leveling hole and is at least partially fixed in the connecting hole; at least three adjusting screws which are arranged in the leveling holes and sleeved on the fixing screws, and the adjusting screws can move along the axial direction of the fixing screws; and the leveling plate is provided with a locking mechanism for locking the adjusting screw. The embodiment of the utility model solves the problem of mutual interference among multiple directions of the calibration and adjustment mechanism through a simple mechanism.
Description
Technical Field
The utility model belongs to the field of optical detection, and particularly relates to an optical head calibration adjusting mechanism.
Background
In high-precision equipment such as semiconductors, an optical detection system is generally used as a detection device. The optical detection system has high requirements on precision in practical application, so that the position and the angle of an optical head of the optical detection system need to be calibrated before detection. The optical detection system will be equipped with an alignment adjustment mechanism connected to the optical head. Referring to fig. 5, when the optical detection system is slightly moved by the external environment, high-precision adjustment in both Pitch and Yaw directions between the optical head and the object to be detected is required. In order to achieve high precision leveling in both directions, the optical head needs to be adjusted for calibration. The calibration adjustment of the optical head needs to ensure that the accuracy of the optical head in another direction is not affected when the optical head is adjusted in one direction while ensuring high adjustment accuracy. In the prior art, the multi-directional adjustment of the calibration adjustment structure of the optical head is easy to interfere with each other, and the adjustment precision is difficult to meet the requirement.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model provides an optical head calibration adjusting mechanism which is used for solving the problems that the optical head calibration adjusting mechanism in the related art is too complex in structure and is easy to influence each other when being used for calibrating and adjusting two directions.
In order to achieve the above object, the present invention adopts a technical solution to provide an optical pickup calibration adjustment mechanism, including: the leveling plate is provided with three leveling holes, connecting lines among the three leveling holes can form a right-angled triangle in a surrounding mode, and each leveling hole is located at the end point of the right-angled triangle; the base is arranged at intervals with the leveling plate, and a connecting hole corresponding to the leveling hole is formed in the base; the three fixing screws correspond to the leveling holes, and each fixing screw penetrates through the leveling hole and is at least partially fixed in the connecting hole; the three adjusting screws are arranged in the leveling holes, sleeved on the fixing screws and capable of moving along the axial direction of the fixing screws; and the leveling plate is provided with a locking mechanism for locking the adjusting screw.
In some embodiments, the leveling hole comprises: the adjusting device comprises a first adjusting hole, a second adjusting hole and a fixing hole positioned between the first adjusting hole and the second adjusting hole.
In some embodiments, the leveling plate is substantially a rectangular plate, the first adjusting hole, the second adjusting hole and the fixing hole are respectively located at corners of the rectangular plate, wherein the first adjusting hole and the second adjusting hole are respectively located at two corners of the rectangular plate, which are diagonally symmetrical, in some embodiments, the corner on the rectangular surface of the leveling plate, on which the leveling hole is located, extends outwards along a side edge of the rectangular surface to form a protrusion.
In some embodiments, the corners of the rectangular plate of the leveling plate extend outwards along the sides of the rectangular surface to form extension portions, and the extension portions are provided with leveling holes.
In some embodiments, the adjustment screw is a fine-thread screw.
In some embodiments, the locking mechanism is a locking screw disposed in the leveling plate, a central axis of the locking screw is perpendicular to a central axis of the fixing screw, and the locking screw can be used for pressing the leveling hole to lock the fine-thread screw.
In some embodiments, the leveling plate is provided with an elastic groove, and the leveling hole is positioned in the elastic groove; the locking screw can press the elastic groove so that the leveling hole presses the adjusting screw.
In some embodiments, a spherical gasket is sleeved on the fixing screw, and the spherical gasket is located between the leveling plate and the base.
In some embodiments, the leveling plate is provided with a mounting hole for mounting the measuring device.
In some embodiments, the leveling plate is provided with at least one second fixing hole for fixing the measuring device.
The embodiment of the utility model adopts a novel optical head calibration adjusting mechanism to solve the problems that the structure of the optical head calibration adjusting mechanism is too complex and the calibration adjusting mechanism is easy to influence each other when being used for calibrating and adjusting two directions. Compared with the related art, the embodiment of the utility model comprises the following steps:
(1) the embodiment of the utility model solves the problem that the calibration and adjustment errors of the optical head are caused by mutual influence of the calibration and adjustment mechanism when the calibration and adjustment mechanism is adjusted in two directions through a simple mechanism.
(2) A fine-thread screw is used as an adjusting tool, and the high-precision requirement of leveling is met.
(3) The embodiment of the utility model has fewer parts, lighter weight and convenient maintenance.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an optical head alignment adjustment mechanism according to an embodiment of the present invention;
FIG. 2 is a bottom view of an optical head alignment adjustment mechanism according to an embodiment of the present invention;
FIG. 3 is a front view of a leveling plate of an optical head alignment adjustment mechanism according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view taken along line A-A of FIG. 3;
FIG. 5 is a schematic diagram of an adjusting direction of an optical head calibration adjusting mechanism according to an embodiment of the present invention.
In the figure: 1. leveling; 2. leveling the hole; 21. a first adjustment hole; 22. a second adjustment hole; 23. a first fixing hole; 3. fixing screws; 4. adjusting screws; 5. locking screws; 6. a machine base; 61. connecting holes; 7. a spherical spacer; 8. mounting holes; 9. and a second fixing hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Referring to fig. 1, 2 and 4, the present invention provides an optical pickup alignment adjustment mechanism, which includes: the leveling plate 1 is provided with three leveling holes 2, connecting lines among the three leveling holes 2 can enclose a right-angled triangle, and each leveling hole 2 is positioned at the end point of the right-angled triangle; the base 6 is arranged at intervals with the leveling plate 1, and a connecting hole 61 corresponding to the leveling hole 2 is formed in the base 6; the three fixing screws 3 correspond to the leveling holes 2, and each fixing screw 3 penetrates through the leveling hole 2 and is at least partially fixed in the connecting hole 61; the three adjusting screws 4 are arranged in the leveling holes 2 and sleeved on the fixing screws 3, and the adjusting screws 4 can move axially along the fixing screws 3; and the leveling plate 1 is provided with a locking mechanism for locking the adjusting screw 4.
As mentioned above, the connecting lines between the three leveling holes 2 are arranged in a right triangle, and the purpose is to form at least two mutually perpendicular adjustment directions between the three leveling holes 2 for the adjustment of the leveling plate 1.
The embodiment of the utility model aims to achieve the aim of calibrating and adjusting the optical head by high-precision leveling between the leveling plate 1 and the base 6.
Specifically, as shown in fig. 1 and 3, the leveling hole 2 includes: a first adjustment hole 21, a second adjustment hole 22, and a first fixing hole 23 located between the first adjustment hole 21 and the second adjustment hole 22.
Preferably, as shown in fig. 1, the leveling plate 1 is a rectangular plate, and the first adjusting hole 21, the second adjusting hole 22 and the first fixing hole 23 are respectively located at the corners of the rectangular plate, wherein the first adjusting hole 21 and the second adjusting hole 22 are respectively located at two corners of the rectangular plate which are diagonally symmetrical.
It will be appreciated that the corners of the rectangular plate member of the leveling plate 1 extend outwardly along the sides of the rectangular surface to form extensions which are provided with leveling holes 2. The corner part of the leveling plate 1, which is provided with the first adjusting hole 21, extends outwards along the side edge of the rectangular surface to form a first extending part 11; the corner of the leveling plate 1, on which the second adjusting hole 22 is arranged, extends outwards along the side edge of the rectangular surface to form a second extending part 12; the corner of the leveling plate 1, on which the first fixing hole 23 is arranged, extends outwards along the side of the rectangular surface to form a third extending part 13.
Specifically, the locking mechanism is a locking screw 5 arranged in the leveling plate 1, a central axis of the locking screw 5 is perpendicular to a central axis of the fixing screw, and the locking screw 5 can be used for pressing the leveling hole 2 to lock the adjusting screw 4.
Referring to fig. 1, it can be understood that the leveling plate 1 is provided with an elastic groove; as shown in fig. 4, the slot is not internally visible. The leveling hole 2 is positioned in the elastic groove; the locking screw 5 can press the thinner side of the elastic groove to press the upper half of the leveling hole 2 downwards so that the adjusting screw 4 can not move any more. The elastic groove can also be regarded as a gap opened from the side surface of the leveling plate, and the locking screw 5 can be pressed tightly.
It should be noted that the fixing screw 3 is further sleeved with a spherical gasket 7, and the spherical gasket 7 is located between the leveling plate 1 and the base 6. The spherical gasket 7 enables the rotation to be smoother, and the spherical gasket 7 can eliminate the elastic deformation stress of the screw, so that the integral adjustment precision can be well maintained.
It can be understood that the leveling plate 1 is provided with a mounting hole 8 for mounting a measuring device and a second fixing hole 9 for fixing the measuring device. The measuring device may be an optical head or an altimeter or other device. The number of the second fixing holes 9 is generally 2, but may be more than one.
Preferably, the adjusting screw 4 is a fine-thread screw. The amount of movement of the fine thread screw in one turn around the thread is 0.5mm, and is 0.138um after being subdivided into 360 degrees, and the manual operation can be controlled to the precision of about 10 degrees, that is, 0.138 × 10 degrees is 1.38um, and 1.38um is the calibration precision which can be achieved by using the fine thread screw.
In the above embodiment, the x-axis is formed between the second adjusting hole 22 and the first fixing hole 23, and the y-axis is formed between the first adjusting hole 21 and the first fixing hole 23. When the x axis is adjusted, the y axis is fixed; the x-axis is fixed while the y-axis is adjusted.
When the embodiment of the utility model is used, the method comprises the following steps:
adjusting a pitch angle: the fixing screws 3 and the locking screws 5 at the first fixing holes 23 and the second adjusting holes 22 are kept in a fixed and locked state; then the locking screw 5 in the first adjusting hole 21 is unscrewed, and then the fixing screw 3 is unscrewed; then, the leveling plate 1 rotates around the x axis by adjusting the adjusting screws 4; after the adjustment is in place, the fixed screw 3 and the locking screw 5 are screwed up to complete the leveling of the pitch angle. I.e. the y-axis remains stationary, and the pitch angle of the levelling plate 1 is changed by rotation of the x-axis.
Adjusting a yaw angle: the fixing screws 3 and the locking screws 5 at the first fixing holes 23 and the first adjusting holes 21 are kept in a fixed and locked state; then the locking screw 5 in the second adjusting hole 22 is unscrewed, and then the fixing screw 3 is unscrewed; then, the leveling plate 1 rotates around the y axis by adjusting the adjusting screws 4; after the adjustment is in place, the fixing screws 3 and the locking screws 5 are screwed up to finish the yaw angle leveling. I.e. the x-axis remains stationary, and the pitch angle of the levelling plate 1 is changed by rotation of the y-axis.
In summary, in the embodiment of the present invention, the three leveling holes 2 distributed on the surface of the leveling plate 1 at right angles realize independent adjustment of the x axis and the y axis. The structure is simpler, and the used parts are fewer. Meanwhile, in order to achieve the leveling precision required by the optical system, a fine-thread screw is adopted as the adjusting screw 4 to enable the leveling plate to be adjusted in a rotating mode.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An optical head calibration adjustment mechanism, comprising:
the leveling plate (1) comprises at least three leveling holes (2) positioned at the end points of the right triangle;
the base (6) is arranged at intervals with the leveling plate (1), and a connecting hole (61) corresponding to the leveling hole (2) is formed in the base (6);
at least three fixing screws (3) which are matched with the leveling holes (2) in number, each fixing screw (3) penetrates through the leveling hole (2), and at least part of each fixing screw (3) is fixed in the connecting hole (61);
the adjusting device comprises at least three adjusting screws (4), wherein the adjusting screws (4) are arranged at the leveling holes (2) and are sleeved on the fixing screws (3), and the adjusting screws (4) can axially move along the fixing screws (3);
and the leveling plate (1) is provided with a locking mechanism for locking the adjusting screw (4).
2. The optical head alignment adjustment mechanism of claim 1, wherein the leveling hole (2) comprises:
a first adjustment hole (21), a second adjustment hole (22), and a first fixing hole (23) located between the first adjustment hole (21) and the second adjustment hole (22).
3. The optical head alignment adjustment mechanism of claim 2, wherein:
the leveling plate (1) is approximately a rectangular plate, and the first adjusting hole (21), the second adjusting hole (22) and the first fixing hole (23) are respectively located at three corners of the rectangular plate.
4. The optical head alignment adjustment mechanism of claim 3, wherein:
the corner part of the leveling plate (1) provided with the first adjusting hole (21) extends outwards along the side edge of the rectangular surface to form a first extending part (11);
the corner part of the leveling plate (1) provided with the second adjusting hole (22) extends outwards along the side edge of the rectangular surface to form a second extending part (12);
the corner of the first fixing hole (23) arranged on the leveling plate (1) extends outwards along the side edge of the rectangular surface to form a third extending part (13).
5. The optical head alignment adjustment mechanism of claim 1, wherein:
the adjusting screw (4) is a fine-tooth screw.
6. The optical head alignment adjustment mechanism of claim 1, wherein:
the locking mechanism comprises a locking screw (5) arranged in the leveling plate (1), the central shaft of the locking screw (5) is perpendicular to the central shaft of the fixing screw, and the locking screw (5) can be used for pressing the leveling hole (2) to lock the adjusting screw (4).
7. The optical head alignment adjustment mechanism of claim 6, wherein:
three elastic grooves are formed in the leveling plate (1), and each leveling hole (2) is positioned in each elastic groove;
the locking screw (5) can press the elastic groove to enable the leveling hole (2) to press the adjusting screw (4).
8. The optical head alignment adjustment mechanism of claim 1, wherein:
the fixed screw (3) is sleeved with a spherical gasket (7), and the spherical gasket (7) is located between the leveling plate (1) and the machine base (6).
9. The optical head alignment adjustment mechanism of claim 1, wherein:
the leveling plate (1) is provided with a mounting hole (8) for mounting measuring equipment.
10. The optical head alignment adjustment mechanism of claim 9, wherein:
the leveling plate (1) is provided with at least one second fixing hole (9) for fixing the measuring equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121575697.7U CN215338393U (en) | 2021-07-12 | 2021-07-12 | Optical head calibration adjustment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121575697.7U CN215338393U (en) | 2021-07-12 | 2021-07-12 | Optical head calibration adjustment mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215338393U true CN215338393U (en) | 2021-12-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121575697.7U Active CN215338393U (en) | 2021-07-12 | 2021-07-12 | Optical head calibration adjustment mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215338393U (en) |
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2021
- 2021-07-12 CN CN202121575697.7U patent/CN215338393U/en active Active
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