CN215333578U - System for preventing surge of centrifugal refrigerator when initial operation load of electronic factory building is low - Google Patents

Abstract

The utility model discloses a system for preventing surge of a centrifugal refrigerator when the initial operation load of an electronic factory building is low; the system comprises a low-temperature refrigerator, a low-temperature freezing water pump, a cooling water pump A, a medium-temperature refrigerator, a medium-temperature freezing water pump, a cooling water pump B and a plate heat exchanger; the low-temperature refrigerator, the low-temperature freezing water pump and the cooling water pump A are connected to form a branch, the medium-temperature refrigerator, the medium-temperature freezing water pump and the cooling water pump B are connected to form a branch, and the two branches are communicated through the plate heat exchanger. The utility model has the characteristics of simple construction, reasonable cost, energy saving of the system and improvement of the stability of the system operation and the water temperature, thereby meeting the operation requirement of the refrigerating machine under the condition of low load, preventing the surging phenomenon of the refrigerating machine and ensuring the stable water temperature requirement of low-temperature and medium-temperature refrigerating water.

Description

System for preventing surge of centrifugal refrigerator when initial operation load of electronic factory building is low

Technical Field

The utility model relates to the field of electronic factory building implementation, in particular to a system for preventing surge of a centrifugal refrigerator when the initial operation load of an electronic factory building is low.

Background

With the rapid development of electronic display products dominated by touch screen technologies such as smart phones and tablet computers and the national high-end manufacturing strategic layout with chips as the core, a large number of domestic electronic enterprises are rapidly expanding and building factories. The cold load in the electronic factory building is used as a main energy source and accounts for the highest proportion of the annual operation cost of the factory, and the MAU dehumidification coil pipe in a production area, the general air conditioners in an office area, the general air conditioners in a power station, the precooling coil pipe in the MAU production area, the dry coil pipe in a clean room, the air conditioners in a support area, the process cooling water heat exchanger, the aftercooler of an air compressor, the process vacuum pump, the ultra-pure water (UPW) and the like all need to consume the cold load, so that a cold load supply mode combining low-temperature chilled water and medium-temperature chilled water is formed by combining the characteristics of the electronic factory building. After the important node 'lighting' of the process equipment occurs in a plurality of projects due to the large size of the electronic plant, the limitation of new process knowledge, the matching of production capacity planning and orders, plant management modes and experiences, the attention degree and the like, the FAB plant needs low-temperature chilled water and medium-temperature chilled water at the same time, but the process capacity after the 'lighting' is not the initial stage and full production capacity of the design, so the requirements of process air exhaust and process heating are not large, the requirements of the low-temperature chilled water and the medium-temperature chilled water are far smaller than the design requirements, the FAB scale of the general electronic plant is large, the future investment cost and the operation cost are considered, a centrifugal water chilling unit is mostly adopted, and when the load is smaller than 15% of 1 centrifugal water chilling unit, a centrifugal machine surges, and the water temperatures of the low-medium-temperature chilled water cannot be controlled. Along with the understanding of the electronic industry on the stability of cold source equipment and the temperature fluctuation of chilled water, the scheme of the stability of cold load supply in a lighting period is more and more emphasized by people so as to ensure the operation requirement of an electronic factory building; meanwhile, with the feedback of the production process after various electronic plants are put into operation, the problems of surge of a centrifugal water chilling unit at the initial stage and fluctuation of low-temperature and medium-temperature chilled water temperatures are more and more important to the electronic industry.

Therefore, the problem that needs to be solved urgently in engineering is to develop a design method for solving the problems that the cold load needed in the initial stage of lighting of the electronic factory building process is low, the low-temperature centrifugal water chilling unit provides two different water temperatures, the surging of the low-temperature centrifugal water chilling unit and the surging of the medium-temperature centrifugal water chilling unit are prevented, and the water temperatures of the low-temperature chilled water and the medium-temperature chilled water are stabilized.

SUMMERY OF THE UTILITY MODEL

Therefore, in order to solve the above-mentioned deficiencies, the present invention provides a system for preventing surge of a centrifugal chiller when the initial operation load of an electronic factory building is low, which solves the problem that the required cold load is low in the initial lighting stage of the electronic factory building, and provides two different water temperatures through a low-temperature centrifugal chiller, thereby preventing surge of the low-temperature and medium-temperature centrifugal chiller and stabilizing the water temperatures of the low-temperature and medium-temperature chilled water; a method for transferring the loads of the low-temperature system and the medium-temperature system to the low-temperature system when the operation loads of the low-temperature refrigerator and the medium-temperature refrigerator are low, and providing the medium-temperature load after the low-temperature system exchanges heat through a heat exchanger; therefore, the centrifugal water chilling unit in the system at the initial stage of factory investment is not surged and the water temperature of the low-temperature and medium-temperature chilled water is stabilized. The design method has the characteristics of simple construction, reasonable construction cost, small occupied area and capability of effectively improving the operation stability, the energy saving property and the stability of the water supply temperature of the centrifugal water chilling unit, thereby preventing the surging of the low-temperature and medium-temperature centrifugal water chilling unit, stabilizing the water supply temperature of low-temperature and medium-temperature chilled water and ensuring the requirement of the production process of an electronic factory on the cold load.

The utility model is realized in such a way that a system for preventing surge of a centrifugal refrigerator when the initial operation load of an electronic factory building is low is constructed, and the system is characterized in that: the system comprises a low-temperature refrigerator, a low-temperature freezing water pump, a cooling water pump A, a medium-temperature refrigerator, a medium-temperature freezing water pump, a cooling water pump B and a plate heat exchanger; the low-temperature refrigerator, the low-temperature freezing water pump and the cooling water pump A are connected to form a branch, the medium-temperature refrigerator, the medium-temperature freezing water pump and the cooling water pump B are connected to form a branch, and the two branches are communicated through the plate heat exchanger.

The utility model has the following advantages: the utility model discloses a system for preventing surge of a centrifugal refrigerator when the initial operation load of an electronic factory building is low; the design method considers that the load of the medium-temperature chilled water is borne by the low-temperature centrifugal water chilling unit in the initial stage of factory investment and achieves the purpose of simultaneously providing the low-temperature chilled water and the medium-temperature chilled water in a plate heat exchange mode. The utility model has the characteristics of simple construction, reasonable construction cost, small occupied area and capability of effectively improving the operation stability, the energy saving property and the stability of the water supply temperature of the centrifugal water chilling unit, thereby preventing the surging of the low-temperature and medium-temperature centrifugal water chilling unit, stabilizing the water supply temperature of low-temperature and medium-temperature chilled water and ensuring the requirement of the production process of an electronic factory on the cold load.

Drawings

Fig. 1 is a schematic diagram of a corresponding implementation system framework of the utility model.

Wherein: a low-temperature refrigerator 1, a low-temperature freezing water pump 2, a cooling water pump A3, a medium-temperature refrigerator 4, a medium-temperature freezing water pump 5, a cooling water pump B6, and a plate heat exchanger 7.

Detailed Description

The present invention will be described in detail with reference to fig. 1, and the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The utility model provides a system for preventing surge of a centrifugal refrigerator when an initial operation load of an electronic factory building is low, which is characterized in that: the system comprises a low-temperature refrigerator 1, a low-temperature freezing water pump 2, a cooling water pump A3, a medium-temperature refrigerator 4, a medium-temperature freezing water pump 5, a cooling water pump B6 and a plate heat exchanger 7; the low-temperature refrigerator 1, the low-temperature freezing water pump 2 and the cooling water pump A3 are connected to form a branch, the medium-temperature refrigerator 4, the medium-temperature freezing water pump 5 and the cooling water pump B6 are connected to form a branch, and the two branches are communicated through the plate heat exchanger 7.

The design method solves the problems that the required cold load is low in the initial stage of lighting of the electronic factory building, the low-temperature centrifugal chiller unit and the medium-temperature centrifugal chiller unit are used for providing two different water temperatures, the surging of the low-temperature centrifugal chiller unit and the surging of the medium-temperature centrifugal chiller unit are prevented, and the water temperatures of low-temperature chilled water and medium-temperature chilled water are stabilized, and as shown in figure 1, when the medium-temperature chiller 4 is closed in the initial stage of lighting of the electronic factory building, the low-temperature chiller 1, the low-temperature chilled water pump 2, the medium-temperature chilled water pump 5 and the plate heat exchanger 7 are started to respectively supply the low-temperature chilled water and the medium-temperature chilled water; and (3) closing the plate heat exchanger 7 along with the stability of the production order and the rise of the production process load, and opening the low-temperature refrigerator 1, the low-temperature freezing water pump 2 and the medium-temperature refrigerator 4 medium-temperature freezing water pump 5 to respectively supply low-temperature and medium-temperature freezing water.

The utility model provides a form of equipment arrangement of a low-temperature and medium-temperature chilled water supply system of an electronic factory building through improvement, as shown in figure 1, and particularly provides a design method which solves the problems that the required cold load is low at the lighting initial stage of the electronic factory building, two different water temperatures are provided through a low-temperature centrifugal water chiller, the surging of the low-temperature and medium-temperature centrifugal water chiller is prevented, and the water temperatures of the low-temperature and medium-temperature chilled water are stabilized; this can be implemented as follows: when the load is produced in the initial stage, an intermediate plate exchanger is arranged between the low-temperature chilled water system and the medium-temperature chilled water system, the medium-temperature chilled water load is borne by the low-temperature centrifugal water chilling unit, and the purpose of simultaneously providing low-temperature chilled water and medium-temperature chilled water is achieved through the plate heat exchange mode; after the production load is increased, the valves between the low temperature and the medium temperature are switched by the closing plate under the condition of comprehensively considering the stability and the energy conservation of the unit, and the low temperature centrifugal refrigerating machine and the medium temperature centrifugal refrigerating machine are respectively operated, so that the aim of simultaneously providing low-temperature refrigerating water and medium-temperature refrigerating water is fulfilled.

The utility model is suitable for the technical field of cold load supply system schemes for initial commissioning of electronic plants, and particularly relates to a method for solving the problems of the initial running state of the electronic plants, low cold load and prevention of surging of a centrifugal refrigerator during partial load and fluctuation of the temperature of chilled water supply water in a chilled water supply system of the electronic plants, namely a design method for preventing surging of the centrifugal refrigerator during the low initial running load of the electronic plants.

After the improvement, an intermediate plate exchanger is arranged between the low-temperature chilled water system and the medium-temperature chilled water system, the load of medium-temperature chilled water is borne by a low-temperature centrifugal water chilling unit, and the purpose of simultaneously providing the low-temperature chilled water and the medium-temperature chilled water is achieved by the way of plate heat exchange; the system is a low and medium temperature chilled water supply system which can effectively improve the operation stability and energy saving performance of a centrifugal water chilling unit and can also improve the water temperature stability of chilled water supply.

The utility model has the following advantages: the design method considers that the low-temperature centrifugal water chiller is used for loading the medium-temperature chilled water at the initial stage of factory investment and achieves the purpose of simultaneously providing the low-temperature chilled water and the medium-temperature chilled water in a plate heat exchange mode.

In chilled water applications in electronic factories such as liquid crystal panels, semiconductors, and the like, it is considered to provide chilled water supply systems of two water temperatures in consideration of comprehensive energy saving of the system; the temperature of return water supplied by the low-temperature refrigerator 1 is 7-14 ℃, and a low-temperature refrigeration water pump 2 is used for providing cold loads for the MAU dehumidification coil pipe in the production area, part of common air-conditioning cooling coil pipes in the support area, the office area and the power station; the temperature of return water supplied by the moderate temperature refrigerating machine 4 is 14-21 ℃, and cold loads are supplied to a pre-cooling coil, a clean room dry coil, a support area air conditioner, a process cooling water heat exchanger, an air compressor aftercooler, a process vacuum pump, ultrapure water (UPW) and the like of the MAU through a moderate temperature refrigerating water pump 5; when the intermediate-temperature refrigerator 4 is closed in the initial lighting stage of the electronic factory building, the low-temperature refrigerator 1, the low-temperature refrigeration water pump 2, the intermediate-temperature refrigeration water pump 5 and the plate heat exchanger 7 are started to respectively supply low-temperature and intermediate-temperature refrigeration water; and (3) closing the plate heat exchanger 7 along with the stability of the production order and the rise of the production process load, and opening the low-temperature refrigerator 1, the low-temperature freezing water pump 2 and the medium-temperature refrigerator 4 medium-temperature freezing water pump 5 to respectively supply low-temperature and medium-temperature freezing water. The design method is a method for transferring loads of a low-temperature system and a medium-temperature system to the low-temperature system when the operation loads of the low-temperature refrigerator and the medium-temperature refrigerator are low and providing medium-temperature loads after the low-temperature system exchanges heat through a heat exchanger under the condition that the process productivity is low at the initial stage of production, particularly the process exhaust is not opened. The utility model has the characteristics of simple construction, reasonable cost, energy saving of the system and improvement of the stability of the system operation and the water temperature, thereby meeting the operation requirement of the refrigerating machine under the condition of low load, preventing the surging phenomenon of the refrigerating machine and ensuring the stable water temperature requirement of low-temperature and medium-temperature refrigerating water. The design method in the patent not only considers the requirement of future system energy conservation, but also can ensure the operation requirement of the initial stage of the system, and most importantly, can stably provide chilled water with two different water temperatures in the initial stage of the system operation and eliminate the surge problem of a refrigerator.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (1)

1. A system for preventing surge of a centrifugal chiller when initial operation load of an electronic factory building is low is characterized in that: the system comprises a low-temperature refrigerator (1), a low-temperature freezing water pump (2), a cooling water pump A (3), a medium-temperature refrigerator (4), a medium-temperature freezing water pump (5), a cooling water pump B (6) and a plate heat exchanger (7); the low-temperature refrigerator (1), the low-temperature freezing water pump (2) and the cooling water pump A (3) are connected to form a branch, the medium-temperature refrigerator (4), the medium-temperature freezing water pump (5) and the cooling water pump B (6) are connected to form a branch, and the two branches are communicated through the plate heat exchanger (7).

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