CN215299215U - Protective cover for electrostatic chuck and wafer processing device - Google Patents

Abstract

The application discloses a protective cover for an electrostatic chuck and a wafer processing device, wherein the protective cover comprises a cover shell and a surrounding part, the surrounding part is arranged on the cover shell, the cover shell and the surrounding part form a protective cavity with an opening, and the surrounding part comprises at least one clamping structure; when the electrostatic chuck is accommodated in the protection cavity through the opening, the clamping structure is clamped and matched with the fixing structure on the electrostatic chuck so as to realize the relative fixation of the position between the protection cover and the electrostatic chuck. In this design, the safety cover is connected with the lock between the electrostatic chuck through the cooperation of the fixed knot structure joint on the joint structure on the piece that surrounds and the electrostatic chuck, thereby realize the relatively fixed of safety cover and electrostatic chuck, also make easy dismounting between safety cover and the electrostatic chuck, the safety cover of lock on the electrostatic chuck plays the guard action to the electrostatic chuck, can avoid the surface of electrostatic chuck to be damaged effectively, thereby prolong the life of electrostatic chuck, reach reduction in production cost's purpose.

Description

Protective cover for electrostatic chuck and wafer processing device

Technical Field

The application relates to the technical field of wafer processing, in particular to a protective cover for an electrostatic chuck and a wafer processing device.

Background

Electrostatic chucks, which are used to process wafers, have a surface that is silicon and are highly susceptible to damage, such as a slight scratch on the surface of the electrostatic chuck, which can render it unusable and expensive to replace the electrostatic chuck. Therefore, how to effectively prevent the surface of the electrostatic chuck from being damaged to reduce the production cost is a problem to be solved.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a protective cover for an electrostatic chuck and a wafer processing device, which can effectively prevent the surface of the electrostatic chuck from being damaged, thereby achieving the purpose of reducing the production cost.

In a first aspect, embodiments of the present application provide a protective shield for an electrostatic chuck; the protective cover comprises a cover shell and a surrounding piece, wherein the surrounding piece is arranged on the cover shell, the cover shell and the surrounding piece form a protective cavity with an opening, and the surrounding piece comprises at least one clamping structure; when the electrostatic chuck is accommodated in the protection cavity through the opening, the clamping structure is clamped and matched with the fixing structure on the electrostatic chuck so as to realize the relative fixation of the position between the protection cover and the electrostatic chuck.

Based on this application embodiment's a safety cover for electrostatic chuck, the housing is through closing the fixed knot who constructs on the joint structure on the piece and the electrostatic chuck joint cooperation realization and be connected with the lock between the electrostatic chuck, thereby realize safety cover and electrostatic chuck's relatively fixed, also make easy dismounting between safety cover and the electrostatic chuck, the safety cover of lock on the electrostatic chuck plays the guard action to the electrostatic chuck, can avoid the surface of electrostatic chuck to be damaged effectively, thereby prolong electrostatic chuck's life, reach reduction in production cost's purpose.

In some embodiments, the clamping structure is a clamping interface opened on the enclosing member, and the fixing structure is a protruding member matched with the clamping interface.

Based on above-mentioned embodiment, the housing is connected with the lock between the electrostatic chuck through enclosing the protruding piece joint cooperation realization on the joint mouth on the piece and the electrostatic chuck, has reduced the installation degree of difficulty between safety cover and the electrostatic chuck.

In some embodiments, the clip interface penetrates the enclosure in the thickness direction of the enclosure, and the clip interface extends to the edge of the enclosure away from the housing.

Based on above-mentioned embodiment, the joint mouth runs through and surrounds the piece and extend to and surround the edge that the piece kept away from the housing, when the lock safety cover, can once only will surround all joint mouths on the piece and all protruding piece joint on the electrostatic chuck, further reduced the installation degree of difficulty between safety cover and the electrostatic chuck.

In some embodiments, the enclosure comprises an inner enclosure and an outer enclosure, the inner enclosure is disposed on the housing and forms a protection cavity with the housing, and the outer enclosure is disposed on the housing and spaced from the inner enclosure and surrounds the inner enclosure; wherein, the joint structure includes first joint structure at least, and outside surrounds the piece and includes a first joint structure at least.

Based on the embodiment, a double-layer protection cover structure is formed among the inner surrounding part, the outer surrounding part and the housing, so that the structural strength of the protection cover is enhanced; the housing is connected with the electrostatic chuck in a buckling mode through the first clamping structure on the external enclosing piece and the fixing structure on the electrostatic chuck in a clamping mode.

In some embodiments, the inner enclosure includes at least one limiting hole, and when the electrostatic chuck is accommodated in the protection cavity, the pin of the electrostatic chuck is located in the limiting hole to prevent the pin of the electrostatic chuck from falling off from the electrostatic chuck.

Based on the above embodiment, when the electrostatic chuck is accommodated in the protection cavity, the pin of the electrostatic chuck is located in the limiting hole of the internal enclosing piece, and the limiting hole plays a role in protecting the pin of the electrostatic chuck, so that the pin of the electrostatic chuck can be prevented from falling off from the electrostatic chuck under the action of external force (such as wind power).

In some embodiments, the limiting hole penetrates through the outer surface of the inner enclosure in the thickness direction of the inner enclosure to form a notch facing the outer enclosure, and the notch extends to the edge of the inner enclosure away from the housing.

Based on above-mentioned embodiment, through the design of breach, can let spacing hole produce better deformation under the effect of outside extrusion force, and the production of this deformation can play the not impaired effect of pin of protection electrostatic chuck, and the processing degree of difficulty in spacing hole can also be reduced in the design of breach simultaneously.

In some embodiments, the clamping structure further includes at least one second clamping structure located inside the enclosing member, the second clamping structure corresponds to the first clamping structure in position and is clamped and matched with the fixing structure at the same position, or the second clamping structure and the first clamping structure are respectively clamped and matched with the fixing structures at different positions.

Based on the embodiment, the second clamping structure is arranged on the inner surrounding part, so that the number of clamping points between the protective cover and the electrostatic chuck is increased, and the effect of further improving the clamping stability between the protective cover and the electrostatic chuck is achieved; the first clamping structures on the outer enclosing piece and the second clamping structures on the inner enclosing piece are arranged in a one-to-one correspondence mode, so that the clamping stability between the protective cover and the electrostatic chuck is improved, and the number of fixing structures on the electrostatic chuck is reduced; through the first clamping structure that will be located outside on enclosing the piece and the setting of staggering of second clamping structure that is located inside on enclosing the piece, still reduced the installation degree of difficulty between safety cover and the electrostatic chuck when promoting the joint stability between safety cover and the electrostatic chuck.

In some embodiments, the enclosure is annular, and the plurality of snap structures are equally spaced around the circumference of the housing.

Based on above-mentioned embodiment, a plurality of joint structures are around the circumference of housing and are arranged at equal intervals for when the safety cover lock is on electrostatic chuck, electrostatic chuck is around the circumference evenly distributed of housing on enclosing the piece to the effort of safety cover, thereby makes the atress of safety cover even, prolongs the life of safety cover, reaches the effect of reinforcing safety cover and electrostatic chuck's stability of being connected simultaneously.

In some embodiments, the enclosing member is provided with a clamping structure at intervals of a preset angle α, and the preset angle α satisfies the following conditional expression: alpha is more than or equal to 36 degrees and less than or equal to 60 degrees.

Based on the embodiment, when the alpha is more than or equal to 36 degrees and less than or equal to 60 degrees, the connection stability between the protective cover and the electrostatic chuck is good, so that the protective cover is prevented from falling off from the electrostatic chuck, the surface of the electrostatic chuck can be effectively prevented from being damaged, the service life of the electrostatic chuck is prolonged, and the aim of reducing the production cost is fulfilled; when the alpha is less than or equal to 36 degrees, the number of clamping points between the protective cover and the electrostatic chuck is large, so that the protective cover and the electrostatic chuck are inconvenient to disassemble and assemble; when alpha is larger than or equal to 60 degrees, the number of clamping points between the protective cover and the electrostatic chuck is small, so that the connection stability between the protective cover and the electrostatic chuck is poor.

In a second aspect, embodiments of the present application provide a wafer processing apparatus including the electrostatic chuck and any one of the protective covers.

According to the wafer processing device provided by the embodiment of the application, the wafer processing device is provided with the protective cover, the protective cover can play a good role in protecting the electrostatic chuck, the possibility that the surface of the electrostatic chuck is damaged is effectively avoided, and the service life of a machine table is prolonged.

Based on this application embodiment's a safety cover and wafer processingequipment for electrostatic chuck, the safety cover is through enclosing the fixed knot on the structure on joint structure and the electrostatic chuck on the piece and construct the joint cooperation realize and be connected with the lock between the electrostatic chuck, thereby realize the relative fixity of safety cover and electrostatic chuck, also make easy dismounting between safety cover and the electrostatic chuck, the safety cover of lock on the electrostatic chuck plays the guard action to the electrostatic chuck, can avoid the surface of electrostatic chuck to be damaged effectively, with the life of extension electrostatic chuck, reach reduction in production cost's purpose.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic view of a protective shield according to an embodiment of the present disclosure;

FIG. 2 is a schematic diagram of an electrostatic chuck in an embodiment of the present application;

FIG. 3 is a schematic view of a first clamping structure aligned with a second clamping structure according to an embodiment of the present disclosure;

FIG. 4 is an enlarged schematic view at A in FIG. 3;

fig. 5 is a schematic structural diagram illustrating a first clamping structure and a second clamping structure that are staggered in an embodiment of the present application.

Reference numerals: 100. a protective cover; 110. a housing; 120. a surround; 121. an outer surround; 122. an inner enclosure; 123. a protection cavity; 130. a clamping structure; 131. a first clamping structure; 131a, a card interface; 132. a second clamping structure; 140. a limiting hole; 141. a notch; 200. an electrostatic chuck; 210. a fixed structure; 220. and (7) a pin.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

In the related art, the electrostatic chuck is used for processing the wafer, the surface of the electrostatic chuck is silicon material and is very easy to be damaged, for example, a slight scratch on the surface of the electrostatic chuck may cause the electrostatic chuck to be unusable, and the electrostatic chuck is expensive to replace. Therefore, how to effectively prevent the surface of the electrostatic chuck from being damaged to reduce the production cost is a problem to be solved.

In order to solve the above technical problems, referring to fig. 1 to 5, a first aspect of the present invention provides a protective cover 100 for an electrostatic chuck 200, which can effectively prevent a surface of the electrostatic chuck 200 from being damaged, thereby achieving a purpose of reducing a production cost.

The protective cover 100 includes a cover shell 110 and a surrounding member 120, the surrounding member 120 is disposed on the cover shell 110, the cover shell 110 and the surrounding member 120 form a protective cavity 123 with an opening, and the surrounding member 120 includes at least one clamping structure 130; when the electrostatic chuck 200 is accommodated in the protection cavity 123 through the opening, the clamping structure 130 is clamped and matched with the fixing structure 210 on the electrostatic chuck 200, so as to relatively fix the position between the protection cover 100 and the electrostatic chuck 200.

Based on a safety cover 100 for electrostatic chuck 200 of this application embodiment, safety cover 100 is connected with the lock between electrostatic chuck 200 through the cooperation of the fixed knot who surrounds clamping structure 130 on the piece 120 and the fixed knot who surrounds 210 on the electrostatic chuck 200 constructs 210, thereby realize safety cover 100 and electrostatic chuck 200's relatively fixed, also make easy dismounting between safety cover 100 and the electrostatic chuck 200, safety cover 100 of lock on electrostatic chuck 200 plays the guard action to electrostatic chuck 200, can avoid electrostatic chuck 200's surface to be damaged effectively, thereby prolong electrostatic chuck 200's life, reach reduction in production cost's purpose.

Referring to fig. 1 to 4, fig. 1 is a schematic structural view of a protective cover in an embodiment of the present application, fig. 2 is a schematic structural view of an electrostatic chuck in an embodiment of the present application, fig. 3 is a schematic structural view of a first clamping structure and a second clamping structure in an embodiment of the present application when they are aligned, and fig. 4 is an enlarged schematic view of a portion a in fig. 3.

The protective cover 100 includes a shell 110 and a surround 120.

The housing 110 serves as a component of the protective cover 100 for preventing the surface of the electrostatic chuck 200 from being damaged, and the shape of the housing 110 is not limited herein, and it should be understood that the shape of the housing 110 is adapted to the shape of the electrostatic chuck 200, for example, the electrostatic chuck 200 is circular, the housing 110 is circular, the electrostatic chuck 200 is rectangular, and the housing 110 is rectangular. In order to avoid the cover case 110 from scratching the surface of the electrostatic chuck 200 when the maintainer covers the electrostatic chuck 200 with the protective cover 100, the cover case 110 should be made of a material with good elasticity, for example, the material of the cover case 110 may be, but is not limited to, elastic resin or elastic rubber, etc.

The enclosure 120 is used as a component of the protective cover 100 for supporting the housing 110, the enclosure 120 is disposed on the housing 110, the enclosure 120 may be indirectly integrated with the housing 110 through some intermediate connection structure, for example, the intermediate connection structure may be a connection adhesive layer, of course, the enclosure 120 may also be directly integrated with the housing 110 without some intermediate connection structure, for example, the enclosure 120 and the housing 110 may be integrally formed by injection molding, and the enclosure 120 and the housing 110 may also be integrally formed by 3D printing.

Further, the housing 110 and the enclosure 120 form a protection cavity 123 having an opening, that is, one end of the enclosure 120 away from the housing 110 is used to form the opening, and the space enclosed by the enclosure 120 and the housing 110 is the protection cavity 123. In order to avoid the enclosing member 120 from scratching the surface of the electrostatic chuck 200 when the maintainer covers the electrostatic chuck 200 with the protective cover 100, the enclosing member 120 should be made of a material with good elasticity, such as but not limited to elastic resin or elastic rubber, to avoid the enclosing member 120 from scratching the surface of the electrostatic chuck 200.

Further, the enclosing member 120 includes at least one engaging structure 130, and when the electrostatic chuck 200 is accommodated in the protection cavity 123 through the opening, the engaging structure 130 engages with the fixing structure 210 on the electrostatic chuck 200, so as to achieve relative fixing between the protection cover 100 and the electrostatic chuck 200. That is to say, the clamping structure 130 has a similar clamping member having the same function as one of the male buckle or the female buckle, the fixing structure 210 has a similar clamping member having the same function as the other of the male buckle or the female buckle and being matched with the clamping structure 130, the protective cover 100 is connected with the electrostatic chuck 200 by the clamping fit between the clamping structure 130 on the surrounding member 120 and the fixing structure 210 on the electrostatic chuck 200, so that the protective cover 100 covers the electrostatic chuck 200 and does not move around the circumference of the electrostatic chuck 200 relative to the electrostatic chuck 200, thereby achieving the relative fixation between the protective cover 100 and the electrostatic chuck 200.

Referring to fig. 1-4, in order to make the protective cover 100 also effectively protect the side surface of the electrostatic chuck 200, the enclosing member 120 is disposed on one side of the housing 110 and arranged around the circumference of the housing 110, that is, the enclosing member 120 is annular, for example, the enclosing member 120 may be square-ring-shaped, and at this time, the housing 110 is square-shaped correspondingly. In this design, the enclosure 120 is annularly provided to cover the side surface of the electrostatic chuck 200 in all directions, thereby further enhancing the protective effect of the protective cap 100 on the electrostatic chuck 200.

It is understood that the clamping structures 130 can be distributed on the enclosure 120 at any location, in some embodiments, the enclosure 120 is circular, and a plurality of clamping structures 130 are arranged at equal intervals around the circumference of the housing 110, that is, the interval between two adjacent clamping structures 130 is equal. In this design, a plurality of joint structures 130 are arranged around the circumference of housing 110 at equal intervals for when safety cover 100 lock is on electrostatic chuck 200, electrostatic chuck 200 is around housing 110's circumference evenly distributed on enclosing piece 120 to the effort of safety cover 100, thereby makes the atress of safety cover 100 even, prolongs safety cover 100's life, reaches the effect of reinforcing safety cover 100 and electrostatic chuck 200's connection stability simultaneously.

Considering that the different angles between two adjacent clamping structures 130 may affect the clamping stability between the protection cover 100 and the electrostatic chuck 200, in order to further improve the connection stability between the protection cover 100 and the electrostatic chuck 200, in some embodiments, one clamping structure 130 is disposed on the surrounding member 120 at every preset angle α, and the preset angle α satisfies the following conditional expression: the angle alpha is more than or equal to 36 degrees and less than or equal to 60 degrees, for example, the preset angle alpha can be 36 degrees, 45 degrees or 60 degrees, etc. In the design, when the preset angle α satisfies the conditional expression, the connection stability between the protective cover 100 and the electrostatic chuck 200 is good, so as to prevent the protective cover 100 from falling off from the electrostatic chuck 200, thereby effectively preventing the surface of the electrostatic chuck 200 from being damaged, prolonging the service life of the electrostatic chuck 200, and achieving the purpose of reducing the production cost; when the alpha is less than or equal to 36 degrees, the number of clamping points between the protective cover 100 and the electrostatic chuck 200 is large, so that the protective cover 100 and the electrostatic chuck 200 are inconvenient to disassemble and assemble; when α is greater than or equal to 60 °, the number of the clamping points between the protection cover 100 and the electrostatic chuck 200 is small, resulting in poor connection stability between the protection cover 100 and the electrostatic chuck 200.

Referring to fig. 1-4, it is contemplated that there are many ways to implement the snap-fit structure 130 and the fixing structure 210 for achieving relative fixing of the position between the protective cover 100 and the electrostatic chuck 200.

In some embodiments, the clamping structure 130 is a clamping interface 131a opened on the surrounding member 120, and the fixing structure 210 is a protrusion matched with the clamping interface 131a, specifically, the protrusion may be a bump disposed on the electrostatic chuck 200, and the shape of the bump is adapted to the shape of the clamping interface 131a, that is, when the electrostatic chuck 200 is accommodated in the protection cavity 123 of the protection cover 100, the outer wall surface of the bump abuts against the clamping interface 131 a. In the design, the housing 110 is connected with the electrostatic chuck 200 in a buckling manner through the clamping interface 131a on the surrounding member 120 and the convex member on the electrostatic chuck 200 in a clamping manner, so that the mounting difficulty between the protective cover 100 and the electrostatic chuck 200 is reduced.

In other embodiments, the engaging structure 130 is an engaging opening disposed on the surrounding member 120, the fixing structure 210 is an engaging member (not shown) engaged with the engaging opening, and specifically, the engaging opening penetrates the surrounding member 120 along the thickness direction of the surrounding member 120 and is spaced apart from the edge of the surrounding member 120, the side surface of the electrostatic chuck 200 has a groove (not shown), the engaging member is disposed in the groove, the engaging member includes an engaging block and a spring, one end of the spring is fixedly connected to the bottom wall of the groove, the other end of the spring is fixedly connected to the engaging block, when the electrostatic chuck 200 is covered by the protective cover 100, the inner surface of the surrounding member 120 presses the engaging block, the engaging block presses the spring and moves toward the bottom of the groove and is completely accommodated in the groove, when the engaging opening on the surrounding member 120 is aligned with the notch of the groove, the engaging block moves toward the bottom of the groove under the elastic force of the spring and is finally engaged with the engaging opening, thereby achieving relative fixation of the position between the protective cover 100 and the electrostatic chuck 200. In this design, through the joint cooperation between joint piece and the joint interface, realize that the lock between safety cover 100 and the electrostatic chuck 200 is connected to realize safety cover 100 and electrostatic chuck 200's relatively fixed, the safety cover 100 of lock on electrostatic chuck 200 plays the guard action to electrostatic chuck 200, can avoid electrostatic chuck 200's surface to be damaged effectively, thereby prolong electrostatic chuck 200's life, reach reduction in production cost's purpose.

Referring to fig. 1-4, it is considered that the different positions of the card interface 131a on the surrounding member 120 may cause different installation difficulties of the protection cover 100 and the electrostatic chuck 200. In some embodiments, the clip interface 131a penetrates the surround 120 in the thickness direction of the surround 120, and the clip interface 131a extends to the edge of the surround 120 away from the cover 110. In the design, the clamping interface 131a penetrates through the surrounding part 120 and extends to the edge of the surrounding part 120 far away from the housing 110, so that when a maintainer buckles the protective cover 100, all the clamping interfaces 131a on the surrounding part 120 can be clamped with all the bulges on the electrostatic chuck 200 at one time, and the installation difficulty between the protective cover 100 and the electrostatic chuck 200 is further reduced.

Certainly, in some other embodiments, the clamping interface 131a may also penetrate through the surrounding member 120 in the thickness direction of the surrounding member 120, and the clamping interface 131a is spaced from the edge of the surrounding member 120, at this time, the protruding member may be in a structure similar to an "L" shape and has elasticity, one end of the protruding member is fixedly connected to the electrostatic chuck 200, and the other end of the protruding member is adapted to the clamping interface 131a, when the electrostatic chuck 200 is covered by the protection cover 100, the protection cover 100 presses the protruding member, the protruding member deforms and bends toward the direction close to the electrostatic chuck 200 until the protection cover 100 moves in place, the protruding member recovers deformation and releases bending toward the direction away from the electrostatic chuck 200 to clamp with the clamping interface 131a, thereby achieving relative fixing of the position between the protection cover 100 and the electrostatic chuck 200.

Referring to fig. 1 to 4, considering that the enclosure 120 is used as a component of the protective cover 100 for supporting the housing 110, the specific structure of the enclosure 120 is numerous, and it can be understood that the specific structure of the enclosure 120 also determines the structural strength of the protective cover 100 to some extent, in some embodiments, the enclosure 120 includes an inner enclosure 122 and an outer enclosure 121, the inner enclosure 122 is disposed on the housing 110 and forms the protective cavity 123 with the housing 110, the outer enclosure 121 is disposed on the housing 110, and the outer enclosure 121 and the inner enclosure 122 are spaced apart and surround the inner enclosure 122. That is to say, the inner surrounding member 122 is disposed around the circumference of the housing 110, the space enclosed by the inner surrounding member 122 and the housing 110 is the protection cavity 123, the outer surrounding member 121 and the inner surrounding member 122 are located on the same side of the housing 110, the outer surrounding member 121 is disposed around the inner surrounding member 122, and the inner surface of the outer surrounding member 121 is spaced from the outer surface of the inner surrounding member 122. Specifically, the inner enclosure 122 and the outer enclosure 121 may be fixedly connected to the housing 110 by injection molding.

Further, the clamping structure 130 at least includes a first clamping structure 131, and the external enclosure 121 at least includes a first clamping structure 131, that is, the first clamping structure 131 is disposed on the external enclosure 121, and the protective cover 100 can be at least matched with the fixing structure 210 on the electrostatic chuck 200 through the first clamping structure 131, so that the protective cover 100 cannot move around the circumference of the electrostatic chuck 200 relative to the electrostatic chuck 200, thereby achieving the relative fixing of the position between the protective cover 100 and the electrostatic chuck 200. It should be noted that, the specific number of the first clamping structures 131 is not limited, and a designer can reasonably design the number of the first clamping structures 131 according to actual needs.

In the design, a double-layer protection cover 100 structure is formed among the inner surrounding part 122, the outer surrounding part 121 and the cover shell 110, so that the structural strength of the protection cover 100 is enhanced; the protective cover 100 is snap-fitted with the fixing structure 210 on the electrostatic chuck 200 through the first snap-fit structure 131 on the outer surrounding member 121 to realize a snap-fit connection with the electrostatic chuck 200.

Referring to fig. 3 and 5, fig. 5 is a schematic structural view illustrating a first clamping structure and a second clamping structure of an embodiment of the present application when they are staggered.

Considering that the distribution of the clamping structures 130 on the inner surrounding member 122 and the outer surrounding member 121 also determines the connection stability between the protection cover 100 and the electrostatic chuck 200 to some extent, for example, the clamping structures 130 are disposed on both the inner surrounding member 122 and the outer surrounding member 121, and compared with the clamping structures 130 disposed on one of the inner surrounding member 122 and the outer surrounding member 121, the connection stability between the protection cover 100 and the electrostatic chuck 200 is better based on the former scheme.

Referring to fig. 3, in some embodiments, the clamping structure 130 further includes at least one second clamping structure 132 located on the inner surrounding member 122, the second clamping structure 132 corresponds to the first clamping structure 131 and is clamped and matched with the fixing structure 210 at the same position, that is, the second clamping structure 132 on the inner surrounding member 122 and the first clamping structure 131 on the outer surrounding member 121 are arranged in a one-to-one correspondence manner, and when the electrostatic chuck 200 is accommodated in the protection cavity 123 of the protection cover 100, the corresponding first clamping structure 131 and second clamping structure 132 are clamped and connected to the same fixing structure 210 of the electrostatic chuck 200. The second latch structure 132 may be embodied in the same manner as the first latch structure 131, for example, the second latch structure 132 may be another latch interface, which penetrates through the inner enclosure 122 along the thickness direction of the inner enclosure 122 and extends to the edge of the inner enclosure 122 away from the housing 110. In this design, through set up second joint structure 132 on enclosing piece 122 in inside, increased the quantity of the joint point between safety cover 100 and the electrostatic chuck 200, so reach the effect that further promotes the connection stability between safety cover 100 and the electrostatic chuck 200, through with the outside enclose first joint structure 131 on the piece 121 and the inside enclose second joint structure 132 one-to-one setting on the piece 122, still reduced the quantity of fixed knot structure 210 on the electrostatic chuck 200 simultaneously.

Referring to fig. 5, in other embodiments, the clamping structure 130 further includes at least one second clamping structure 132 located on the inner surrounding member 122, the second clamping structure 132 and the first clamping structure 131 are respectively clamped and matched with the fixing structures 210 at different positions, that is, the second clamping structure 132 on the inner surrounding member 122 is staggered with the first clamping structure 131 on the outer surrounding member 121, and when the electrostatic chuck 200 is accommodated in the protection cavity 123 of the protection cover 100, the staggered first clamping structure 131 and second clamping structure 132 are clamped and matched with different fixing structures 210 of the electrostatic chuck 200, for example, the fixing structure 210 includes a first fixing structure 210 clamped and matched with the first clamping structure 131 and a second fixing structure 210 matched with the second clamping structure 132, and similarly, the specific form of the second clamping structure 132 may be the same as that of the first clamping structure 131, and will not be described in detail herein. In this design, through set up second clamping structure 132 on enclosing piece 122 in inside, increased the quantity of the joint point between safety cover 100 and the electrostatic chuck 200, so reach the effect that further promotes the stability of being connected between safety cover 100 and the electrostatic chuck 200, through enclosing the first clamping structure 131 on piece 121 and enclosing piece 122 in inside with the outside second clamping structure 132 staggered arrangement that encloses, still reduced the installation degree of difficulty between safety cover 100 and the electrostatic chuck 200 simultaneously.

Referring to fig. 3 and 5, it is understood that a maintenance person needs to use an air gun to clean the electrostatic chuck 200 and the surrounding environment of the electrostatic chuck 200 periodically to prevent impurities such as dust from depositing, but during the cleaning process, the pins 220 on the electrostatic chuck 200 may be blown off by the air gun, in order to prevent the pins 220 on the electrostatic chuck 200 from falling off from the electrostatic chuck 200, in some embodiments, the inner enclosure 122 includes at least one limiting hole 140, when the electrostatic chuck 200 is accommodated in the protection cavity 123, the pins 220 of the electrostatic chuck 200 are located in the limiting holes 140 to prevent the pins 220 of the electrostatic chuck 200 from falling off from the electrostatic chuck 200, and here, the specific shape of the limiting holes 140 is not limited, for example, the limiting holes 140 may be circular holes or rectangular holes. In this design, the limiting hole 140 protects the pins 220 of the electrostatic chuck 200, and can prevent the pins 220 of the electrostatic chuck 200 from falling off from the electrostatic chuck 200 under the action of external force.

Considering the machining errors in machining the restraint holes 140 in the inner enclosure 122, the actual cross-sectional size of the hole 140 may be small, resulting in interaction between the wall of the hole 140 and the leads 220 of the electrostatic chuck 200, the interaction force may cause damage to the leads 220, so to avoid damage to the leads 220 of the electrostatic chuck 200, in some embodiments, in the thickness direction of the inner enclosure 122, the restraint apertures 140 extend through the outer surface of the inner enclosure 122, so as to form a notch 141 facing the outer enclosure 121, and the notch 141 extends to the edge of the inner enclosure 122 away from the cover 110, that is, the limiting hole 140 is disposed along the thickness direction of the inner enclosure 122, and the part of the hole wall surface of the limiting hole 140 is communicated with the outer surface of the inner enclosing piece 122 to form the notch 141, and the notch 141 penetrates through the edge of the inner enclosing piece 122 far away from the cover shell 110. In this design, through the design of breach 141, can let spacing hole 140 produce better deformation under the effect of outside extrusion force, and the production of this deformation can play the not impaired effect of pin 220 of protection electrostatic chuck 200, and the processing degree of difficulty of spacing hole 140 can also be reduced in the design of breach 141 simultaneously.

In a second aspect of the present application, a wafer processing apparatus is provided, which includes the electrostatic chuck 200 and the protection cover 100, and a wafer processing apparatus having the protection cover 100, wherein the protection cover 100 can protect the electrostatic chuck 200 well, so as to effectively avoid the possibility that the surface of the electrostatic chuck 200 is damaged, thereby prolonging the service life of a machine.

The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present application, it is to be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of description and simplification of description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only for illustrative purposes and are not to be construed as limitations of the present patent, and specific meanings of the above terms may be understood by those skilled in the art according to specific situations.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A protective shield for an electrostatic chuck, comprising:

a housing; and

the enclosure is arranged on the housing, the housing and the enclosure form a protection cavity with an opening, and the enclosure comprises at least one clamping structure;

when the electrostatic chuck is accommodated in the protection cavity through the opening, the clamping structure is clamped and matched with the fixing structure on the electrostatic chuck so as to realize the relative fixation of the position between the protective cover and the electrostatic chuck.

2. The protective cover of claim 1,

the clamping structure is arranged on the clamping interface on the enclosing piece, and the fixing structure is a protruding piece matched with the clamping interface.

3. The protective cover of claim 2,

the clamping interface penetrates through the enclosure part in the thickness direction of the enclosure part, and extends to the edge of the enclosure part far away from the housing.

4. The protective cover of claim 1, wherein the surround comprises:

the inner surrounding piece is arranged on the housing and forms the protection cavity with the housing; and

the outer surrounding piece is arranged on the housing, is arranged at an interval with the inner surrounding piece and is arranged around the inner surrounding piece in a surrounding manner;

the clamping structure at least comprises a first clamping structure, and the external surrounding part at least comprises one first clamping structure.

5. The protective cover of claim 4,

the inner enclosing piece comprises at least one limiting hole, and when the electrostatic chuck is accommodated in the protection cavity, the pin of the electrostatic chuck is positioned in the limiting hole to prevent the pin of the electrostatic chuck from falling off from the electrostatic chuck.

6. The protective cover of claim 5,

in the thickness direction of the inner surrounding part, the limiting hole penetrates through the outer surface of the inner surrounding part to form a notch facing the outer surrounding part, and the notch extends to the edge of the inner surrounding part far away from the housing.

7. The protective cover of claim 4,

the clamping structure further comprises at least one second clamping structure located on the inner surrounding part, the second clamping structure corresponds to the position of the first clamping structure and is matched with the fixing structure in the same position, or the second clamping structure is matched with the fixing structure in different positions of the first clamping structure.

8. The protective cover of claim 1, wherein the enclosure is annular and the plurality of snap structures are equally spaced around the circumference of the cover.

9. The protective cover of claim 8,

the enclosure part is provided with one clamping structure at intervals of a preset angle alpha, and the preset angle alpha meets the conditional expression: alpha is more than or equal to 36 degrees and less than or equal to 60 degrees.

10. A wafer processing apparatus, comprising:

the electrostatic chuck; and

the protective cover of any one of claims 1-9.

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