CN215296142U

CN215296142U - Current vortex sensor assembly and magnetic suspension molecular pump with same

Info

Publication number: CN215296142U
Application number: CN202121812052.0U
Authority: CN
Inventors: 刘强; 张亮; 任世瑜; 罗珂; 陈林
Original assignee: Beijing Zhongke Jiuwei Technology Co ltd
Current assignee: Beijing Zhongke Jiuwei Technology Co ltd
Priority date: 2021-08-04
Filing date: 2021-08-04
Publication date: 2021-12-24
Anticipated expiration: 2031-08-04

Abstract

The utility model provides an eddy current sensor subassembly and have its magnetic suspension molecular pump belongs to magnetic suspension equipment technical field, and wherein, eddy current sensor subassembly includes: a mounting base having a central through hole; the inductive probes are symmetrically arranged around the central through hole, and the inductive probes are connected to the mounting seat in an adjustable manner along the radial position of the central through hole; the utility model discloses an eddy current sensor subassembly, inductance probe can carry out radial adjustment on the mount pad to be convenient for carry out the axle footpath of monitoring as required, carry out the position of accurate adjustment inductance probe, improve eddy current sensor subassembly's precision, and the scope of the axle footpath of adaptation.

Description

Current vortex sensor assembly and magnetic suspension molecular pump with same

Technical Field

The utility model relates to a sensor technical field, concretely relates to eddy current sensor subassembly and have its magnetic suspension molecular pump.

Background

The eddy current sensor consists of a sensor exciting lead and a metal body to be measured. According to Faraday's law of electromagnetic induction, when a sinusoidal alternating current passes through a sensor excitation wire, a sinusoidal alternating magnetic field is generated around the wire, so that a metal conductor located in the magnetic field generates an induced current, and the induced current generates a new alternating magnetic field. The new alternating magnetic field hinders the change of the original magnetic field, so that the equivalent impedance of the sensor wire changes.

In the prior art, for example, chinese patent document CN208383054U discloses an eddy current sensor assembly, which includes a mounting base and an inductance mechanism connected to the mounting base, wherein a circular through hole is formed in the center of the mounting base, an inductance wire is wound on the inductance mechanism, and the inductance mechanism is used for monitoring displacement signals of a shaft penetrating through the circular through hole at four positions, so as to monitor the operation of the shaft.

However, in the above solution, the inductance mechanism and the mounting seat are connected by a fixing method such as welding, which is not convenient for the accuracy of determining the position of the inductance mechanism, and on the other hand, the range of application is narrow, and the axes with different specifications cannot be monitored.

SUMMERY OF THE UTILITY MODEL

Therefore, the to-be-solved technical problem of the utility model lies in overcoming the defect that inductance mechanism mounted position among the prior art can not be controlled accurately to provide an eddy current sensor subassembly and have its magnetic suspension molecular pump.

In order to solve the technical problem, the utility model provides an eddy current sensor assembly, include:

a mounting base having a central through hole;

the inductive probes are symmetrically arranged around the central through hole, and are connected to the mounting seat in an adjustable manner along the radial position of the central through hole.

Optionally, the mounting seat has a mounting hole for inserting the inductance probe.

Optionally, the mounting seat has an abutment in the mounting hole for clamping the inductance probe.

Optionally, the abutting member is connected to the mounting seat through a threaded structure, one end of the abutting member extends into the mounting hole, and the other end of the abutting member extends to the outside of the mounting seat.

Optionally, one end of the abutting piece facing the outside of the mounting seat is provided with a rotation limiting structure used for being matched with the operating piece.

Optionally, the inductance probe is connected with the mounting seat through threads.

Optionally, the mounting seat is of an annular structure, the inductance probe is of a cylindrical structure, and the tail of the inductance probe penetrates through the mounting seat and then is communicated with the outside of the mounting seat.

Optionally, a lead is wound around the head of the inductance probe, the lead extends from the inside of the inductance probe to the tail of the inductance probe, and an annular groove for routing the lead of the inductance probe is formed in the outer wall of the mounting seat.

Optionally, the bottom end of the mounting seat is provided with a plurality of notches for mounting and positioning.

The utility model also provides a magnetic suspension molecular pump, include: in the eddy current sensor assembly in any one of the above schemes, the eddy current sensor assembly is sleeved on a rotating shaft of the magnetic suspension molecular pump.

The utility model discloses technical scheme has following advantage:

1. the utility model provides an eddy current sensor assembly, inductance probe can carry out radial adjustment on the mount pad to be convenient for carry out the axle footpath of monitoring as required, carry out the position of accurate adjustment inductance probe, improve eddy current sensor assembly's precision, and the scope of the axle footpath of adaptation.

2. The utility model provides an eddy current sensor subassembly fixes a position the position of inductance probe through the butt piece to improve the stability of eddy current sensor subassembly when the operation.

3. The utility model provides a magnetic suspension molecular pump owing to adopted any one of above-mentioned scheme eddy current sensor subassembly, consequently have any one of above-mentioned advantage.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a perspective view of an eddy current sensor assembly provided in an embodiment of the present invention.

Fig. 2 is a first enlarged view of the inductive probe of fig. 1.

Fig. 3 is a schematic cross-sectional front view of the inductive probe of fig. 1 at the location.

Fig. 4 is a second enlarged view of the inductive probe of fig. 1.

Fig. 5 is a perspective view of the inductive probe of fig. 1.

Fig. 6 is a third enlarged view of the inductive probe of fig. 1.

Description of reference numerals:

1. a mounting seat; 2. an inductive probe; 3. a notch; 4. an abutting member; 5. a head portion; 6. a tail portion; 7. an annular groove.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.

The eddy current sensor assembly provided by the embodiment can be used for monitoring the shaft of a rotating machine so as to measure the radial displacement of the rotating shaft during operation.

As shown in fig. 1, an embodiment of an eddy current sensor assembly provided in this embodiment includes: a mounting base 1 having a central through hole; specifically, the mounting seat 1 may be a ring-shaped structure having a certain height. In addition, as an alternative embodiment, the mounting base 1 may be of other conventional shapes to facilitate mounting.

As shown in fig. 1, the eddy current sensor assembly provided in this embodiment further includes: the inductance probes 2 are connected to the mounting base 1, specifically, the inductance probes 2 are screwed on the inner side wall of the mounting base 1 through threads, the number of the inductance probes 2 is four, and the four inductance probes 2 are symmetrically arranged around a central through hole of the mounting base 1; in addition, as an alternative embodiment, the number of the inductive probes 2 may be two, three or more, and a plurality of inductive probes 2 are arranged symmetrically around the center of the central through hole of the mounting base 1.

In addition, as an alternative embodiment, the inductive probe 2 may be mounted on the mounting base 1 by other means besides a threaded connection, such as a snap connection. So that the inductive probe 2 can be adjusted in the radial position of the central through hole to adapt to the monitored shaft diameter.

As shown in fig. 1, the bottom end of the mounting base 1 is provided with a plurality of notches 3 for mounting and positioning, the notches 3 are arranged at intervals, and the notches 3 are used for being clamped and fixed on a rotating machine. In addition, as an alternative embodiment, the notch 3 may be omitted or replaced with other conventional positioning structures.

As shown in fig. 1 and 2, the mounting base 1 has a mounting hole for inserting the inductance probe 2, and the mounting hole is connected to the inductance probe 2 by a fine thread. In addition, as an alternative implementation, the inductance probe 2 may further be in sliding fit with the mounting hole, and the mounting hole is connected with the inductance probe 2 by arranging a clamping structure.

As shown in fig. 3 and 4, an abutting piece 4 for clamping the inductance probe 2 is arranged in the mounting hole of the mounting base 1, and the abutting piece 4 can be selected as a jackscrew; the connection that the butt 4 passes through helicitic texture for inductance probe 2 is perpendicular on mount pad 1, the one end of butt 4 extends to in the mounting hole, the other end of butt 4 with the outside intercommunication of mount pad 1, the one end of butt 4 orientation mount pad 1 outside has and is used for with operating parts complex rotation limit structure, specifically, it can be interior hexagonal hole to rotate limit structure. In addition, as an alternative embodiment, the abutment member 4 may be disposed on the mounting seat 1 by means of a snap-fit manner, and the limiting structure may be omitted.

As shown in fig. 5, the inductance probe 2 has a cylindrical structure, the inductance probe 2 includes a head portion 5 and a tail portion 6, the head portion 5 has an annular groove for winding a wire, and the wire is wound around the annular groove to form a coil. The inductance probe 2 has a through hole for wiring inside, and the wire extends from the inside of the inductance probe 2 to the tail 6 of the inductance probe 2.

As shown in fig. 6, an annular groove 7 for routing a wire of the inductance probe 2 is formed in an outer wall of the mounting base 1, and a tail portion 6 of the inductance probe 2 penetrates through the mounting base 1 and then is communicated with the outside of the mounting base 1. The wires extending from the tail 6 of the inductive probe 2 are routed through the annular groove 7 so that the wires do not protrude out of the mount 1.

In addition, the present embodiment also provides a magnetic suspension molecular pump, including: in the eddy current sensor assembly described in the above embodiment, the eddy current sensor assembly is sleeved on the rotating shaft of the magnetic suspension molecular pump, so as to monitor the operation stability of the rotating shaft.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious changes and modifications may be made without departing from the scope of the present invention.

Claims

1. An eddy current sensor assembly, comprising:

a mounting base (1) having a central through hole;

the inductive probe (2) is provided with a plurality of inductive probes symmetrically arranged around the central through hole, and the inductive probes (2) are connected to the mounting base (1) in an adjustable manner along the radial position of the central through hole.

2. Eddy current sensor assembly according to claim 1, characterized in that the mounting socket (1) has a mounting hole for inserting the inductive probe (2).

3. Eddy current sensor assembly according to claim 2, characterized in that the mounting socket (1) has an abutment (4) in its mounting hole for snapping the inductive probe (2).

4. The eddy current sensor assembly according to claim 3, wherein the abutment member (4) is connected to the mounting base (1) by a threaded structure, one end of the abutment member (4) extends into the mounting hole, and the other end of the abutment member (4) extends to the outside of the mounting base (1).

5. Eddy current sensor assembly according to claim 4, characterized in that the end of the abutment member (4) facing the outside of the mounting seat (1) has a rotation limiting structure for cooperation with an operating member.

6. Eddy current sensor assembly according to one of the claims 1 to 5, characterized in that the inductance probe (2) is screwed to the mounting (1).

7. An eddy current sensor assembly according to any one of claims 1 to 5, wherein the mounting base (1) is of annular configuration, the inductive probe (2) is of cylindrical configuration, and the tail (6) of the inductive probe (2) passes through the mounting base (1) and communicates with the exterior of the mounting base (1).

8. The eddy current sensor assembly according to claim 7, wherein the head (5) of the inductance probe (2) is wound with a wire, the wire extends from the inside of the inductance probe (2) to the tail (6) of the inductance probe (2), and an annular groove (7) for routing the wire of the inductance probe (2) is formed in the outer wall of the mounting base (1).

9. Eddy current sensor assembly according to any one of claims 1-5, characterized in that the bottom end of the mounting base (1) is provided with a number of indentations (3) for mounting and positioning.

10. A magnetically levitated molecular pump, comprising: the eddy current sensor assembly as claimed in any one of claims 1 to 9, which is fitted over a rotating shaft of a magnetically levitated molecular pump.