CN215278010U - Nozzle device for spraying photoresist - Google Patents
Nozzle device for spraying photoresist Download PDFInfo
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- CN215278010U CN215278010U CN202121632530.XU CN202121632530U CN215278010U CN 215278010 U CN215278010 U CN 215278010U CN 202121632530 U CN202121632530 U CN 202121632530U CN 215278010 U CN215278010 U CN 215278010U
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Abstract
The utility model relates to a nozzle device for photoresist spraying, which comprises an air cap, a liquid cap and a transfusion thin tube, wherein the air cap is provided with a gas inlet, the bottom of the air cap is provided with a gas outlet, the inside of the air cap is provided with a cavity for accommodating the liquid cap, the upper part of the liquid cap is hermetically connected with the inner wall of the air cap, a rotary cavity is formed between the lower part of the liquid cap and the inner wall of the air cap, the top of the rotary cavity is communicated with the gas inlet, the bottom of the rotary cavity is communicated with the gas outlet, gas enters from the gas inlet of the air cap, and is rotationally ejected from a rotary cavity formed by the liquid cap and the air cap, a liquid outlet is arranged at the central position of the lower part in the liquid cap, a transfusion thin tube is inserted at the liquid outlet, the liquid enters from a slender hole of the transfusion thin tube, the gas sprayed out by rotation strikes the liquid sprayed out by the liquid outlet and drives the liquid to rotate to form conical spray; the utility model discloses spraying speed is adjustable, and the spraying pattern is more stable, and it is more even to distribute, improves the spraying effect.
Description
[ technical field ]
The utility model belongs to the technical field of the nozzle technique and specifically relates to a nozzle device for photoresist spraying.
[ background art ]
At present, the air atomizing nozzle is an important part in the field of industrial application, and can be applied to the semiconductor industry for spraying process. The use performance of the nozzle determines the performance of the whole equipment, and has extremely important significance on production. The use of many nozzles varies, and the semiconductor industry is particularly critical with regard to nozzle granularity and spray pattern. Therefore, the existing air atomizing nozzle can only preliminarily meet the application requirements, but can not meet the specific requirements of granularity, hitting power, coverage, angle, distribution, spraying form and the like, and the spraying effect can not be ensured.
[ contents of utility model ]
The utility model aims at solving foretell not enough and provide a nozzle device for photoresist spraying, through high-speed rotatory gaseous striking process liquid hole blowout liquid, drive the rotatory conical form spraying that forms of liquid, its spraying speed is adjustable, and the spraying form is more stable, and it is more even to distribute.
The nozzle device for photoresist spraying is designed to achieve the purpose, and comprises an air cap 1, a liquid cap 2 and a transfusion tubule 3, wherein the air cap 1 and the liquid cap 2 are connected into a whole through a screw, a gas inlet 1-1 is arranged on the air cap 1, a gas outlet 2-2 is arranged at the bottom of the air cap 1, a cavity for accommodating the liquid cap 2 is arranged in the air cap 1, the upper part of the liquid cap 2 is hermetically connected with the inner wall of the air cap 1, a rotating cavity 2-3 is formed between the lower part of the liquid cap 2 and the inner wall of the air cap 1, the top of the rotating cavity 2-3 is communicated with the gas inlet 1-1, the bottom of the rotating cavity 2-3 is communicated with the gas outlet 2-2, gas enters from the gas inlet 1-1 of the air cap 1 and is rotationally sprayed out from the rotating cavity 2-3 formed by the liquid cap 2 and the air cap 1, the central position of the lower part in the liquid cap 2 is provided with a liquid outlet 2-1, a transfusion thin tube 3 is inserted in the liquid outlet 2-1, liquid enters from a slender hole 3-1 of the transfusion thin tube 3 and is sprayed out from the liquid outlet 2-1, and gas sprayed out by rotation impacts the liquid sprayed out from the liquid outlet 2-1 and drives the liquid to rotate to form conical spray.
Preferably, a rotating cavity 2-3 formed between the liquid cap 2 and the air cap 1 is in an inverted cone shape, and the diameter of the rotating cavity 2-3 is gradually reduced from top to bottom.
Preferably, the relative position between the air cap 1 and the liquid cap 2 is adjusted by a first adjusting screw 4 and a second adjusting screw 5 to achieve better coaxiality, and the first adjusting screw 4 and the second adjusting screw 5 are respectively arranged on the left side and the right side.
Preferably, a sealing ring is arranged between the upper part of the liquid cap 2 and the inner wall of the air cap 1, and is connected in a sealing way through the sealing ring.
Preferably, the gas inlet 1-1 is arranged in the middle of the air cap 1 and is arranged in a ring shape, and the gas enters the air cap 1 tangentially through the gas inlet 1-1.
Compared with the prior art, the utility model has the advantages that the gas directly enters from the air cap in the tangential direction, and the nozzle body is cancelled, so that the gas resistance is smaller; the liquid passes through the liquid cap with the elongated hole, and the traditional shorter liquid hole is eliminated, so that the liquid supply is more stable; the gas tangentially enters the air cap, rotates at high speed, impacts the liquid sprayed out through the liquid hole, drives the liquid to rotate, and finally forms the required conical spraying form; the nozzle device has the advantages that under the condition of a stable spraying form, the spraying speed can be adjusted, the spraying form is more stable, the distribution is more uniform, the uniformity is the most important requirement of the nozzle, the manufacturing precision, the assembly precision and the adjustability can all ensure the performance, and the specific requirements of granularity, hitting power, coverage, angle, distribution, spraying form and the like can be met. Furthermore, the utility model discloses can realize better axiality through the relative position of adjusting screw regulation air cap and liquid cap to control improves the spraying effect.
[ description of the drawings ]
Fig. 1a is a cross-sectional view of the present invention;
fig. 1b is a schematic perspective view of the present invention;
FIG. 2a is a schematic structural view of the air cap of the present invention;
FIG. 2b is a cross-sectional view of the air cap of the present invention;
FIG. 3a is a schematic structural view of the liquid cap of the present invention;
FIG. 3b is a cross-sectional view of the liquid cap of the present invention;
in the figure: 1. an air cap 2, a liquid cap 3, a transfusion tubule 4, a first adjusting screw 5, a second adjusting screw 1-1, a gas inlet 2-1, a liquid outlet 2-2, a gas outlet 2-3 and a rotary cavity.
[ detailed description of the invention ]
The invention is further described below with reference to the accompanying drawings:
as shown in the attached drawing, the utility model provides a nozzle device for photoresist spraying, which comprises an air cap 1, a liquid cap 2 and a transfusion tubule 3, wherein the air cap 1 and the liquid cap 2 are connected into a whole through screws, the air cap 1 is provided with a gas inlet 1-1, the bottom of the air cap 1 is provided with a gas outlet 2-2, the air cap 1 is internally provided with a cavity for accommodating the liquid cap 2, the upper part of the liquid cap 2 is hermetically connected with the inner wall of the air cap 1, a rotating cavity 2-3 is formed between the lower part of the liquid cap 2 and the inner wall of the air cap 1, the top of the rotating cavity 2-3 is communicated with the gas inlet 1-1, the bottom of the rotating cavity 2-3 is communicated with the gas outlet 2-2, gas enters from the gas inlet 1-1 of the air cap 1 and is rotationally sprayed from the rotating cavity 2-3 formed by the liquid cap 2 and the air cap 1, the central position of the lower part in the liquid cap 2 is provided with a liquid outlet 2-1, a transfusion thin tube 3 is inserted in the liquid outlet 2-1, liquid enters from a slender hole 3-1 of the transfusion thin tube 3 and is sprayed out from the liquid outlet 2-1, and gas sprayed out by rotation impacts the liquid sprayed out from the liquid outlet 2-1 and drives the liquid to rotate to form conical spray.
Wherein, a rotary cavity 2-3 formed between the liquid cap 2 and the air cap 1 is in an inverted cone shape, and the diameter of the rotary cavity 2-3 is gradually reduced from top to bottom, thereby forming the required conical spraying form. The relative position between the air cap 1 and the liquid cap 2 is adjusted through the first adjusting screw 4 and the second adjusting screw 5, and the first adjusting screw 4 and the second adjusting screw 5 are respectively arranged on the left side and the right side, so that better coaxiality can be realized, and the spraying effect can be controlled and improved. A sealing ring is arranged between the upper part of the liquid cap 2 and the inner wall of the air cap 1 and is in sealing connection through the sealing ring; the gas inlet 1-1 is arranged in the middle of the air cap 1 and is annularly arranged, and gas tangentially enters the air cap 1 through the gas inlet 1-1, so that gas resistance can be smaller.
The utility model discloses a theory of operation does: gas enters from a gas inlet 1-1 of the air cap and passes through a rotating cavity 2-3 formed by the liquid cap and the air cap, and the gas is rotationally sprayed out; the liquid enters the spray hole from the elongated hole 3-1 of the transfusion tubule 3, and the gas impacts the liquid drop, so that the liquid obtains the rotation power and rotates at an accelerated speed to form a conical spray effect. Namely, atomized gas enters a gas inlet of the nozzle air cap tangentially and is sprayed out of the gas ring after rotating; the liquid enters from the inlet of the liquid cap and flows out through the elongated hole; the gas and liquid particles collide, break up and remain rotating, forming the droplets into the desired conical spray pattern.
The whole working process of the utility model is coherent, and only the gas flow and the liquid flow can be independently adjusted according to the process requirement; the relative position of the air cap and the liquid cap can be adjusted through the adjusting screw, so that better coaxiality is realized, and the spraying effect is controlled and improved; can obtain more stable confession liquid through the tubule, reduce the processing degree of difficulty of elongated hole simultaneously.
The present invention is not limited by the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and are all included in the protection scope of the present invention.
Claims (5)
1. A nozzle arrangement for spray coating a photoresist, comprising: the transfusion device comprises an air cap (1), a liquid cap (2) and a transfusion thin tube (3), wherein the air cap (1) and the liquid cap (2) are connected into a whole through a screw, a gas inlet (1-1) is formed in the air cap (1), a gas outlet (2-2) is formed in the bottom of the air cap (1), a cavity for accommodating the liquid cap (2) is formed in the air cap (1), the upper portion of the liquid cap (2) is hermetically connected with the inner wall of the air cap (1), a rotating cavity (2-3) is formed between the lower portion of the liquid cap (2) and the inner wall of the air cap (1), the top of the rotating cavity (2-3) is communicated with the gas inlet (1-1), the bottom of the rotating cavity (2-3) is communicated with the gas outlet (2-2), and gas enters from the gas inlet (1-1) of the air cap (1), and from rotatory blowout in rotatory chamber (2-3) that liquid cap (2) and air cap (1) constitute, lower part central point department is equipped with liquid outlet (2-1) in liquid cap (2), liquid outlet (2-1) department cartridge has infusion tubule (3), and liquid gets into from elongated hole (3-1) of infusion tubule (3) to spout from liquid outlet (2-1), rotatory spun gas impact through liquid outlet (2-1) spun liquid, and drive the liquid rotation and form conical spraying.
2. A nozzle arrangement for spray coating of photoresist as recited in claim 1, wherein: a rotating cavity (2-3) formed between the liquid cap (2) and the air cap (1) is in an inverted cone shape, and the diameter of the rotating cavity (2-3) is gradually reduced from top to bottom.
3. A nozzle arrangement for spray coating of photoresist as recited in claim 1, wherein: the air cap (1) and the liquid cap (2) are adjusted in relative position through a first adjusting screw (4) and a second adjusting screw (5) to achieve better coaxiality, and the first adjusting screw (4) and the second adjusting screw (5) are respectively arranged on the left side and the right side.
4. A nozzle arrangement for spray coating of photoresist as claimed in claim 1, 2 or 3 wherein: and a sealing ring is arranged between the upper part of the liquid cap (2) and the inner wall of the air cap (1) and is in sealing connection with the inner wall of the air cap through the sealing ring.
5. A nozzle arrangement for spray coating of photoresist as claimed in claim 1, 2 or 3 wherein: the gas inlet (1-1) is arranged in the middle of the air cap (1) and is annularly arranged, and gas tangentially enters the air cap (1) through the gas inlet (1-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121632530.XU CN215278010U (en) | 2021-07-19 | 2021-07-19 | Nozzle device for spraying photoresist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121632530.XU CN215278010U (en) | 2021-07-19 | 2021-07-19 | Nozzle device for spraying photoresist |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215278010U true CN215278010U (en) | 2021-12-24 |
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ID=79523022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121632530.XU Active CN215278010U (en) | 2021-07-19 | 2021-07-19 | Nozzle device for spraying photoresist |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215278010U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114918053A (en) * | 2022-05-26 | 2022-08-19 | 沧州信联化工有限公司 | Photoresist spraying equipment |
-
2021
- 2021-07-19 CN CN202121632530.XU patent/CN215278010U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114918053A (en) * | 2022-05-26 | 2022-08-19 | 沧州信联化工有限公司 | Photoresist spraying equipment |
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