CN215256986U

CN215256986U - Rotor cover for a turbo-molecular vacuum pump

Info

Publication number: CN215256986U
Application number: CN202120607244.1U
Authority: CN
Inventors: 方志强; 孙世源; 陈建勋
Original assignee: Highlight Technology Corp
Current assignee: Highlight Technology Corp
Priority date: 2021-03-25
Filing date: 2021-03-25
Publication date: 2021-12-21
Anticipated expiration: 2031-03-25

Abstract

The utility model relates to a rotor lid for turbo molecular formula vacuum pump contains cover assembly and links the subassembly, and wherein cover assembly's lateral wall and top surface are smooth curved surface, and it contains an extension rod and hardness and weight adjustment subassembly to link the subassembly. The first end of the extension rod is connected to the center of the bottom surface of the covering component, the second end of the extension rod extends in a direction away from the covering component so as to be adjacent to the rotating shaft, and the hardness and weight adjusting component is connected between the second end of the extension rod and the rotating shaft, so that the hardness difference between the connecting component and the rotating shaft is reduced, and the counterweight effect is provided to reduce the rotating vibration phenomenon of the covering component.

Description

Rotor cover for a turbo-molecular vacuum pump

Technical Field

The present invention relates to a cover, and more particularly, to a rotor cover for a vacuum pump of the turbo-molecular formula.

Background

In the conventional turbo vacuum pump, a rotor coupled thereto is driven to perform a vacuum pumping process, and the center of the rotor is recessed toward the turbo vacuum pump to form a locking space, so that the rotor and the turbo vacuum pump are assembled by a fixing member such as a bolt. However, when the turbo vacuum pump is used in etching process of wafer or electronic substrate, the dust particles generated during the processing process are easily accumulated in the lock space, and the air flow generated during the processing process of the rotor easily makes the dust particles in the lock space float back to the processing area along with the air flow, which may cause the wafer or electronic substrate in the processing area to be contaminated. Therefore, in order to prevent the dust particles from accumulating in the locking chamber, U.S. Pat. No. 3908977 discloses a product having a rotor cover designed above the rotor to close the locking chamber, wherein the rotor cover is provided with a bolt fastened to the bottom side of the locking chamber from outside to inside. However, the bolt locking area still has a small amount of space for dust particles to accumulate, so that the blocking of the cover is not perfect, and the bolt locking is easy to excessively force the rotor cover, so that the rotor cover has deformation and fracture after the rotor rotates at a high speed.

SUMMERY OF THE UTILITY MODEL

In addition, in the conventional bolt locking technology, when the rotor cover rotates at a high speed, the phenomenon of rotational vibration is easily generated, which causes the problem that the center of gravity of the rotor rotates to shift or the sealing effect is lost. If the bolt extended from the lower portion of the rotor cover is connected to the bottom side of the locking chamber, the rotor cover will still generate rotational vibration and/or abrasion. Accordingly, an object of the present invention is to provide a rotor cover for a turbo-molecular vacuum pump, which overcomes the above-mentioned long-standing technical problems that cannot be solved.

To achieve the above object, the present invention provides a rotor cover for a turbo-molecular vacuum pump, the turbo-molecular vacuum pump having a protruded rotating shaft, a rotor sleeved on the rotating shaft, a locking chamber recessed in the center of the rotor, the locking chamber fixedly connected to the rotating shaft at the center, the rotor cover comprising: a covering component, the side wall and the top surface of the covering component are smooth curved surfaces; and a coupling assembly comprising: an extension rod and a hardness and weight adjusting component, wherein a first end of the extension rod is connected to the center of the bottom surface of the covering component, a second end of the extension rod extends towards the direction away from the covering component to be adjacent to the rotating shaft, and the hardness and weight adjusting component is connected between the second end of the extension rod and the rotating shaft, so as to reduce the hardness difference between the connecting component and the rotating shaft and provide a weight balancing effect to reduce the rotating vibration phenomenon of the covering component.

Wherein the first end of the extension rod is integrally connected to the center of the bottom surface of the covering component.

Wherein the first end of the extension rod is screwed to the center of the bottom surface of the covering component.

Wherein the top end of the rotating shaft is recessed to form a first screw hole, the second end of the extension rod is recessed to form a second screw hole, the first end of the hardness and weight adjusting component is a first bolt, the second end of the hardness and weight adjusting component is a second bolt, the first bolt of the hardness and weight adjusting component is used for screwing the first screw hole of the rotating shaft, and the second bolt of the hardness and weight adjusting component is used for screwing the second screw hole of the extension rod.

Wherein the diameter of the first bolt of the hardness and weight adjusting component is larger than the diameter of the second bolt, and the diameter of the first bolt corresponds to the diameter of the first screw hole of the rotating shaft, and the diameter of the second bolt corresponds to the diameter of the second screw hole of the extension rod.

Wherein the first bolt of the hardness and weight adjusting component and the extension rod have a length ratio, the length ratio is between 1: 7-7: 1.

Wherein the first bolt of the hardness and weight adjusting component and the extension rod have a length ratio, the length ratio is 1: 7.

wherein the diameters of the second end of the extension rod and the first end of the stiffness and weight adjusting element are substantially the same.

Wherein the top end of the rotating shaft is recessed to form a first screw hole, and the hardness and weight adjusting component covers the second end of the extension rod to form a first bolt together, so as to screw the first screw hole of the rotating shaft.

Wherein, it also includes a fixture, one end of the fixture is concave to form a clamping space, and a clamping component is set in the clamping space, when the covering component is set in the clamping space of the fixture, the clamping component holds the surface of the covering component, and the fixture is rotated to drive the rotor cover to rotate.

Wherein, the side surface or the top surface of the covering component is a complete curved surface, and when the covering component is placed in the clamping space of the fixture, the clamping component holds the complete curved surface of the covering component, and the fixture is rotated to drive the rotor cover to rotate, wherein the clamping component is a plate body, a rod body or a ring body.

Wherein, the side or top of the covering component has a plane area or a concave area, and when the covering component is placed in the holding space of the fixture, the holding component holds the plane area or the concave area of the covering component, and the fixture is rotated to drive the rotor cover to rotate, wherein the holding component is a plate, a rod or a ring.

Wherein, when the turbo-molecular vacuum pump is operated, the rotational vibration variation of the top surface and the bottom surface of the cover assembly is less than a target value.

Wherein the target value is 15 μm.

Wherein the hardness of a first end of the hardness and weight adjusting component is substantially the same as the hardness of the rotating shaft, and the hardness of a second end of the hardness and weight adjusting component is substantially the same as the hardness of the extension rod.

Wherein the hardness of a first end of the hardness and weight adjusting component is substantially the same as the hardness of the rotating shaft, and the hardness of a second end of the hardness and weight adjusting component is substantially different from the hardness of the extension rod.

Wherein, when the rotor cover covers the locking chamber of the rotor, the rotor cover is connected to the rotating shaft only by a first end of the hardness and weight adjusting component of the connecting component.

In view of the above, according to the present invention, the rotor cover for a turbo molecular vacuum pump not only can maintain the locking chamber for sealing the turbo molecular vacuum pump, but also can generate a weight balancing effect by the coupling member having the hardness and weight adjusting member, so as to reduce the rotational vibration phenomenon of the cover member of the rotor cover, and by reducing the difference in hardness, the wear phenomenon can be generated when the coupling member is coupled to the rotating shaft.

In order to make the jun have a better understanding and appreciation of the technical features and technical effects of the invention, the preferred embodiments and the accompanying detailed description are considered in the following.

Drawings

Fig. 1 is a schematic view of a rotor cover for a turbo-molecular vacuum pump according to the present invention.

Fig. 2 is a schematic cross-sectional exploded view of a rotor cover for a turbo-molecular vacuum pump according to the present invention.

Fig. 3 is a schematic cross-sectional view illustrating the rotor cover for a turbo-molecular vacuum pump according to the present invention mounted on the turbo-molecular vacuum pump.

Fig. 4 is a schematic top view of the rotor cover for a turbo-molecular vacuum pump according to the present invention, which has a completely curved side surface.

Fig. 5 is a schematic top view of a rotor cover for a turbo-molecular vacuum pump according to the present invention, having a flat area on a side thereof.

Fig. 6 is a schematic top view of a rotor cover for a turbo-molecular vacuum pump according to the present invention having a recessed area on a side surface thereof.

Fig. 7 is a schematic bottom perspective view of the fixture for the rotor cover of the turbo-molecular vacuum pump according to the present invention as a ring.

Fig. 8 is a schematic bottom perspective view of the clamp for the rotor cover of the turbo-molecular vacuum pump according to the present invention.

Fig. 9 is a schematic bottom perspective view of the fixture for the rotor cover of the turbo-molecular vacuum pump according to the present invention as a plate.

Description of reference numerals:

10: rotor cover

20: covering assembly

22: plane area

24: depressed region

30: connecting assembly

32: extension rod

32 a: first end

32 b: second end

33: second screw hole

34: hardness and weight adjusting assembly

34 a: first end

34 b: second end

35: first bolt

37: second bolt

38: clamping area

60: jig tool

62: clamping space

64: clamping assembly

100: turbine molecular formula vacuum pump

102: rotating shaft

104: first screw hole

110: rotor

112: lock-joint chamber

Detailed Description

In order to facilitate understanding of the technical features, contents, advantages and effects achieved by the present invention, the present invention will be described in detail with reference to the accompanying drawings and the embodiments, wherein the drawings are used only for illustration and supplementary description, and not necessarily for actual proportion and precise configuration after the implementation of the present invention, so the scope of the present invention in actual implementation should not be read and limited with reference to the proportion and configuration of the drawings. Moreover, for ease of understanding, like components in the following embodiments are illustrated with like reference numerals.

Referring to fig. 1 and 2, fig. 1 is a schematic view illustrating an appearance of a rotor cover for a turbo-molecular vacuum pump according to the present invention, and fig. 2 is a schematic cross-sectional exploded view illustrating the rotor cover for a turbo-molecular vacuum pump according to the present invention. The present invention relates to a rotor cover 10 for a turbo-molecular vacuum pump 100, as shown in fig. 3, a rotary shaft 102 is protruded above the turbo-molecular vacuum pump 100. The center of the rotor 110 is recessed with a locking chamber 112, the rotor 110 is sleeved on the rotating shaft 102, and the rotating shaft 102 is fixed to the center of the locking chamber 112 of the rotor 110, so that the rotor 110 is sleeved on the rotating shaft 102. Wherein the rotating shaft 102 may be fixed to the center of the locking chamber 112 of the rotor 110, for example, by screw fitting or by other means. Wherein, the outer surface of the rotating shaft 102 has threads, for example, the other components can be nuts, for example, the rotating shaft 102 is locked on the locking chamber 112 of the rotor 110 by the way of the nuts being screwed with the threads. Alternatively, a bolt (not shown) may pass through the locking chamber 112 of the rotor 110 from top to bottom and be screwed into a screw hole (not shown) formed in the top surface of the rotating shaft 102. In other words, the present invention is not limited to the locking chamber 112 that adopts any way to fix the rotation axis 102 to the rotor 110, as long as the rotation axis 102 can drive the rotor 110 to rotate, which can be applied to the present invention, and belongs to the protection scope of the present invention.

The rotor cover 10 of the present invention includes a cover member 20 and a connecting member 30. The cover assembly 20 is used to cover the lock chamber 112 of the rotor 110, thereby preventing deposition or accumulation of process particles in the lock chamber 112 from the process chamber of the gas extracted by the turbo-molecular vacuum pump 100. The top surface of the cover member 20 of the rotor cover 10 of the present invention is, for example, a conical shape, a hemispherical shape or a planar shape, but is not limited thereto. The sidewalls and top surface of the cover member 20 are preferably smoothly curved to effectively guide the airflow toward stability. In addition, the side walls and the top surface of the cover element 20 are not limited to a completely curved surface, i.e. the side surfaces or the top surface of the cover element 20 may also have, for example, planar regions or recessed regions. The bottom surface of the cover member 20 may be conical, hemispherical or planar in shape, for example. In addition, the top surface and the bottom surface of the cover member 20 are not limited to substantially correspond to each other, but have the same shape. For example, the top surface and the bottom surface of the cover member 20 may not correspond to each other, but have different shapes. In other words, as long as the rotor cover 10 can guide the air flow and the center of the bottom surface thereof can be connected to the rotary shaft 102 of the vacuum pump 100 via the connection assembly 30, the present invention is applicable and within the scope of the claimed invention.

The two ends of the connection component 30 of the rotor cover 10 of the present invention are respectively connected to the bottom center of the cover component 20 of the rotor cover 10 and the top center of the rotation shaft 102 of the turbo vacuum pump 100, so that the cover component 20 can be detached to cover the locking chamber 112 of the turbo vacuum pump 100. In addition, the bottom surface of the rotor cover 10 of the present invention may have a sealing gasket (not shown), for example, when the cover assembly 20 covers the locking chamber 112 of the rotor 110, the sealing gasket is located between the cover assembly 20 and the locking chamber 112 of the rotor 110, thereby improving the airtight sealing effect.

One feature of the present invention is that the connecting assembly 30 includes an extension rod 32 and a hardness and weight adjusting assembly 34. The first end 32a of the extension rod 32 is integrally or detachably connected to the bottom center of the cover member 20. The integral connection can be formed integrally, but is not limited thereto. If the first end 32a of the extension rod 32 is integrally formed and connected to the bottom center of the covering member 20, the material of the extension rod 32 and the covering member 20 is the same. If the first end 32a of the extension rod 32 is detachably connected to the bottom center of the covering member 20, the material of the extension rod 32 and the material of the covering member 20 may be the same or different. The above-mentioned detachable connection method can be, for example, but not limited to, screw connection. The connecting member 30 is connected at its both ends to the covering member 20 and the rotary shaft 102 via the extension rod 32 and the hardness and weight adjusting member 34, respectively. In one embodiment, the second end 32b of the extension rod 32 is provided with a hardness and weight adjusting component 34, wherein the hardness and weight adjusting component 34 can cover the second end 32b of the extension rod 32 to form a first bolt 35, and the connecting component 30 is connected to the rotating shaft 102 by the first bolt 35. Alternatively, in another embodiment, the second end 34b of the stiffness and weight adjusting element 34 is connected to the second end 32b of the extension rod 32, for example, via a second bolt 37, and the first end 34a of the stiffness and weight adjusting element 34 has a first bolt 35, wherein the connecting element 30 is connected to the rotating shaft 102 via the first bolt 35. Alternatively, in another embodiment, the second end 34b of the hardness and weight adjusting component 34 is screwed into the second screw hole 33 of the second end 32b of the extension rod 32, for example, via a second bolt 37, and the first end 34a of the hardness and weight adjusting component 34 has a first bolt 35, wherein the connecting component 30 is connected to the rotating shaft 102 by the first bolt 35. Wherein the first bolt 35 may have a clamping area 38, for example, the clamping area 38 may be a flat surface, wherein a user may clamp the clamping area 38, for example, with a clamp, thereby screwing the second bolt 37 of the hardness and weight adjusting assembly 34 into the second screw hole 33 of the second end 32b of the extension rod 32.

In order to avoid the rotational vibration phenomenon such as shaking or swinging of the rotor cover 10 due to the high center of gravity when the turbo vacuum pump 100 rotates at a high speed, the cover member 20 and the connecting member 30 are preferably made of light materials such as aluminum or aluminum alloy. The rotating shaft 102 of the turbo vacuum pump 100 is usually made of a corrosion-resistant and high-hardness material such as stainless steel or nickel plating, but since aluminum or aluminum alloy has a lower hardness than stainless steel, the extension rod 32 made of aluminum or aluminum alloy is easily worn or chipped if directly screwed to the rotating shaft 102 made of stainless steel or nickel plating. Therefore, another feature of the present invention is that the connecting member 30 has an extension rod 32 and a hardness and weight adjusting member 34, wherein the extension rod 32 is preferably made of a material with a light weight but a low hardness, such as aluminum or aluminum alloy, and the hardness and weight adjusting member 34 is preferably made of a material with a high hardness, such as nickel-plated metal (e.g., nickel-plated aluminum or nickel-plated aluminum alloy) or stainless steel, so that the present invention can simultaneously avoid the covering member 20 from generating a rotational vibration phenomenon and the connecting member 30 from generating a wear phenomenon, such as a loss or tooth collapse, etc. Wherein the ratio of the length of the stiffness and weight adjusting element 34 to the length of the extension rod 32 is in the range of, but not limited to, 1: 7-7: 1, and preferably 1: 7. the hardness and weight adjusting component 34 of the connecting component 30 of the present invention is connected between the second end 32b of the extension rod 32 and the rotating shaft 102, so as to reduce the hardness difference between the extension rod 32 of the connecting component 30 and the rotating shaft 102, and provide a weight-balancing effect to reduce the vibration phenomenon generated by the covering component 20 during high-speed rotation.

Take the embodiment of the hardness and weight adjusting assembly 34 screwed to the extension rod 32 as an example, wherein the first end 34a of the hardness and weight adjusting assembly 34 of the present invention is detachably connected to the rotating shaft 102 of the turbo vacuum pump 100, and the second end 34b of the hardness and weight adjusting assembly 34 is detachably disposed at the second end 32b of the extension rod 32. For example, the top end of the rotating shaft 102 of the turbo-molecular vacuum pump 100 is recessed to form a first screw hole 104, the second end 32b of the extension rod 32 of the rotor cover 10 is recessed to form a second screw hole 33, the first end 34a of the hardness and weight adjusting member 34 is a first bolt 35, and the second end 34b of the hardness and weight adjusting member 34 is a second bolt 37. The first bolt 35 of the hardness and weight adjusting assembly 34 is used to screw the first screw hole 104 of the rotating shaft 102, and the second bolt 37 of the hardness and weight adjusting assembly 34 is used to screw the second screw hole 33 of the extension rod 32. Wherein the length ratio of the first bolt 35 of the hardness and weight adjusting assembly 34 to the extension rod 32 ranges from about 1: 7 to about 7: 1, and preferably about 1: 7.

wherein, the connecting component 30 of the present invention is, for example, a cylindrical rod. For example, the diameter of the extension rod 32 is, for example, substantially the same as the diameter of the stiffness and weight adjustment assembly 34, thereby effectively avoiding increasing the weight of the link assembly 30. The diameter of the first bolt 35 of the hardness and weight adjusting member 34 is, for example, substantially larger than the diameter of the second bolt 37, and the diameter of the first bolt 35 corresponds to the diameter of the first screw hole 104 of the rotary shaft 102, and the diameter of the second bolt 37 corresponds to the diameter of the second screw hole 33 of the extension rod 32. Wherein the diameters of the second end 32b of the extension rod 32 and the first end 34a of the stiffness and weight adjustment assembly 34 are, for example, substantially the same.

Since the hardness and weight adjusting member 34 is screwed with the first end 34a into the first screw hole 104 formed in the top end recess of the rotation shaft 102, the hardness of the first end 34a of the hardness and weight adjusting member 34 is preferably similar to the hardness of the rotation shaft 102, and more preferably substantially the same, thereby reducing the difference in hardness between the extension rod 32 and the rotation shaft 102. The hardness and weight adjusting element 34 is removably threaded with the second end 34b to the second end 32b of the extension rod 32, such that the hardness of the second end 34b of the hardness and weight adjusting element 34 is preferably approximately the same as the hardness of the extension rod 32, and more preferably substantially the same, thereby reducing the difference in hardness between the hardness and weight adjusting element 34 and the extension rod 32. However, the present invention is not limited thereto, and the hardness of the second end 34b of the hardness and weight adjusting assembly 34 may not be the same as, for example, greater than or less than, the hardness of the second end 32b of the extension rod 32, so long as the hardness of the first end 34a of the hardness and weight adjusting assembly 34 is similar to or the same as the hardness of the rotating shaft 102, the hardness difference between the connecting assembly 30 and the rotating shaft 102 can be reduced, and the occurrence of the wear phenomenon can be reduced. Similarly, the stiffness and weight adjustment assembly 34 of the present invention may be replaced with other adjustment assemblies having other physical characteristics, such as rigidity, volume, density, thermal expansion or magnetism, to reduce the difference in physical characteristics between the connecting assembly 30 and the rotating shaft 102.

Therefore, in the process of high-speed operation of the rotating shaft 102 of the turbo vacuum pump 100, the rotor cover 10 of the present invention not only can maintain the locking chamber 112 of the turbo vacuum pump 100, but also can reduce the rotational vibration phenomenon of the cover assembly 20 of the rotor cover 10 by the weight and hardness adjusting assembly 34 due to the hardness and hardness adjusting assembly 34 of the connecting assembly 30 of the rotor cover 10, and reduce the wear phenomenon when the connecting assembly 30 connects to the rotating shaft 102 by reducing the hardness difference.

Wherein, the direction of detaching the hardness and weight adjusting component 34 from the extension rod 32 is opposite to the rotation direction of the rotation shaft 102, and the direction of installing the hardness and weight adjusting component 34 from the extension rod 32 is the same as the rotation direction of the rotation shaft 102, so as to prevent the rotor cover 10 from being shifted when the rotation shaft 102 rotates. Similarly, the direction of detaching the hardness and weight adjusting member 34 from the rotating shaft 102 is opposite to the rotating direction of the rotating shaft 102, and the direction of attaching the hardness and weight adjusting member 34 to the rotating shaft 102 is the same as the rotating direction of the rotating shaft 102, so that the rotor cover 10 can be prevented from being displaced when the rotating shaft 102 rotates. However, the above-mentioned disassembling and assembling directions are only examples and are not intended to limit the present invention.

In other words, the rotor cover 10 of the present invention can reduce the wear phenomena such as wear and chipping between the connecting member 30 and the rotating shaft 102 due to the difference in material hardness, and can reduce the rotational vibration phenomena of the cover member 20 of the rotor cover 10 when the rotating shaft 102 of the turbo vacuum pump 100 is operated at high speed by weight adjustment, for example, by reducing the height of the center of gravity of the connecting member 30, and the vibration variations of the top surface and the bottom surface of the cover member 20 can be smaller than a target value. In practical operation, the target value may be about 15 μm when the rotation speed of the rotating shaft 102 reaches about 27,660rpm to 27,780 rpm.

In addition, the rotor cover 10 for the turbo-molecular vacuum pump of the present invention further includes a jig 60. The fixture 60 is used to clamp the covering component 20 of the rotor cover 10, and the covering component 20 can be driven to rotate by rotating the fixture 60. One end of the fixture 60 is recessed to form a clamping space 62, and the clamping space 62 has a clamping component 64. When the user covers the rotor cover 10 with the jig 60, and when the cover assembly 20 is placed in the holding space 62 of the jig 60, the holding member 64 of the jig 60 can hold the surface of the cover assembly 20, so that the rotor cover 10 can be rotated by rotating the jig 60 clockwise or counterclockwise to mount the rotor cover 10 on the rotating shaft 102 or dismount the rotor cover 10. The holding member 64 is, for example, a plate, a rod or a ring. In addition, the clamping component 64 can be disposed in the clamping space 62 of the fixture 60, for example, fixedly or detachably, or the clamping component 64 can be disposed in the clamping space 62 of the fixture 60, for example, in a resettable manner. For example, the clamping member 64 can be resiliently disposed in the clamping space 62 of the fixture 60, such as by the elastic force of a spring or the elastic force of the clamping member 64 itself, so as to hold the surface of the cover member 20.

Wherein the side or top surface of the cover member 20 may be completely curved, i.e. without a flat area or a recessed area (see fig. 4). Alternatively, the cover member 20 may further have a flat region 22 (see fig. 5) or a recessed region 24 (see fig. 6) on the curved surface of the side or top surface. When the cover member 20 is placed in the holding space 62 of the fixture 60, the holding member 64 is used to hold the planar region 22 or the recessed region 24 of the cover member 20, and the rotor cover 10 is rotated by rotating the fixture 60. The clamping component 64 is, for example, a plate (see fig. 9), a rod (see fig. 8), or a ring (see fig. 7). For example, the clamping member 64 may be a plate, a rod or a ring disposed on the inner surface of the clamping space 62 of the fixture 60, wherein the plate, the rod or the ring is made of rubber or metal, and the metal is aluminum, aluminum alloy or stainless steel. The fixture 60 can be tightly pressed on the side wall of the cover assembly 20 by the fastening force of the plate, rod or ring made of rubber material, so as to drive the rotor cover 10 to rotate. Alternatively, the shape of the plate, rod or ring on the inner surface of the holding space 62 may correspond to the flat area 22 or the recessed area 24 on the curved surface of the side wall of the covering member 20, for example, so that the holding member 64 of the jig 60 can be tightly attached to the flat area 22 or the recessed area 24 on the curved surface of the covering member 20 to drive the rotor cover 10 to rotate.

To sum up, the present invention provides a rotor cover for a turbo molecular vacuum pump, which not only can maintain a locking chamber for sealing the turbo molecular vacuum pump, but also can generate a weight balancing effect by a connecting member having a hardness and weight adjusting member, so as to reduce the rotational vibration phenomenon of the cover member of the rotor cover, and by reducing the hardness difference, the wear phenomenon can be generated when the connecting member is connected to a rotating shaft.

The foregoing is by way of example only, and not limiting. It is intended that all equivalent modifications and variations not departing from the spirit and scope of the present invention be included in the following claims.

Claims

1. A rotor cover for a turbo-molecular vacuum pump, wherein a rotary shaft protrudes from an upper portion of the turbo-molecular vacuum pump, the rotary shaft is sleeved with a rotor, a locking chamber is recessed in a center of the rotor, the locking chamber is centrally fixed to the rotary shaft, the rotor cover comprises:

a covering component, the side wall and the top surface of the covering component are smooth curved surfaces; and

a coupling assembly, comprising: an extension rod and a hardness and weight adjusting component, wherein a first end of the extension rod is connected to the center of the bottom surface of the covering component, a second end of the extension rod extends towards the direction away from the covering component to be adjacent to the rotating shaft, and the hardness and weight adjusting component is connected between the second end of the extension rod and the rotating shaft, so as to reduce the hardness difference between the connecting component and the rotating shaft and provide a weight balancing effect to reduce the rotating vibration phenomenon of the covering component.

2. The rotor cover for a turbomolecular vacuum pump as claimed in claim 1, wherein said first end of said extension rod is integrally connected to the center of the bottom surface of said cover member.

3. The rotor cover for a turbomolecular vacuum pump of claim 1, wherein said first end of said extension rod is screwed to the center of the bottom surface of said cover member.

4. The rotor cover for a turbo-molecular vacuum pump as claimed in claim 2 or 3, wherein a top end of the rotation shaft is recessed to form a first screw hole, the second end of the extension rod is recessed to form a second screw hole, a first end of the hardness and weight adjusting member is a first bolt, a second end of the hardness and weight adjusting member is a second bolt, the first bolt of the hardness and weight adjusting member is for screw-coupling with the first screw hole of the rotation shaft, and the second bolt of the hardness and weight adjusting member is for screw-coupling with the second screw hole of the extension rod.

5. The rotor cover for a turbo-molecular vacuum pump as claimed in claim 4, wherein the first bolt of the hardness and weight adjusting assembly has a diameter greater than that of the second bolt, and the first bolt has a diameter corresponding to that of the first screw hole of the rotation shaft, and the second bolt has a diameter corresponding to that of the second screw hole of the extension rod.

6. The rotor cover for a turbo-molecular vacuum pump of claim 4, wherein the first bolt and the extension rod of the hardness and weight adjusting assembly have a length ratio of 1: 7-7: 1.

7. The rotor cover for a turbo-molecular vacuum pump of claim 4, wherein the first bolt and the extension rod of the hardness and weight adjusting assembly have a length ratio of 1: 7.

8. the rotor cover for a turbomolecular vacuum pump of claim 4, wherein the diameter of the second end of the extension rod and the first end of the hardness and weight adjusting element are substantially the same.

9. The rotor cover for a turbo-molecular vacuum pump as claimed in claim 2 or 3, wherein the top end of the rotation shaft is recessed to form a first screw hole, and the hardness and weight adjusting member is covered on the second end of the extension rod to form a first bolt together, thereby being screwed to the first screw hole of the rotation shaft.

10. The lid as claimed in claim 1, further comprising a fixture, wherein an end of the fixture is recessed to form a holding space, and a holding member is disposed in the holding space, wherein when the covering member is disposed in the holding space of the fixture, the holding member holds a surface of the covering member, and the fixture is rotated to rotate the lid.

11. The lid as claimed in claim 10, wherein the cover member has a substantially curved side surface or top surface, and the holding member holds the substantially curved surface of the cover member when the cover member is disposed in the holding space of the fixture, and rotates the fixture to rotate the lid, wherein the holding member is a plate, a rod or a ring.

12. The lid as claimed in claim 10, wherein the cover member has a flat area or a recessed area on a side surface or a top surface thereof, and the holding member holds the flat area or the recessed area of the cover member when the cover member is disposed in the holding space of the fixture, and the fixture is rotated to rotate the lid, wherein the holding member is a plate, a rod or a ring.

13. The rotor cover for a turbo-molecular vacuum pump as claimed in claim 1, wherein the rotational vibration variation of the top and bottom surfaces of the cover assembly is less than a target value when the turbo-molecular vacuum pump is operated.

14. The rotor cover for a turbo molecular vacuum pump according to claim 13, wherein the target value is 15 μm.

15. The rotor cover for a turbo-molecular vacuum pump of claim 1, wherein a first end of the hardness and weight adjusting member has a hardness substantially the same as a hardness of the rotation shaft, and a second end of the hardness and weight adjusting member has a hardness substantially the same as a hardness of the extension rod.

16. The rotor cover for a turbo-molecular vacuum pump of claim 1, wherein a first end of the hardness and weight adjusting member has a hardness substantially the same as a hardness of the rotation shaft, and a second end of the hardness and weight adjusting member has a hardness substantially different from a hardness of the extension rod.

17. The rotor cover for a turbo-molecular vacuum pump as claimed in claim 1, wherein the rotor cover is coupled to the rotation shaft only at a first end of the hardness and weight adjusting member of the coupling member when the rotor cover covers the locking chamber of the rotor.