CN215251325U - Single crystal furnace - Google Patents

Single crystal furnace Download PDF

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Publication number
CN215251325U
CN215251325U CN202120659216.4U CN202120659216U CN215251325U CN 215251325 U CN215251325 U CN 215251325U CN 202120659216 U CN202120659216 U CN 202120659216U CN 215251325 U CN215251325 U CN 215251325U
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China
Prior art keywords
plate body
hanging plate
furnace
single crystal
auxiliary chamber
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CN202120659216.4U
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Chinese (zh)
Inventor
杨超
宋克冉
孙须良
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Qujing Jinglong Electronic Materials Co ltd
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Qujing Jinglong Electronic Materials Co ltd
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Abstract

The utility model provides a single crystal furnace, which comprises a furnace barrel, a furnace cover, an auxiliary chamber and a locking mechanism. Wherein the furnace cover is arranged at the upper end of the furnace cylinder to open and close the furnace cylinder; the auxiliary chamber is arranged above a furnace cover of the single crystal furnace; the locking mechanism is used for connecting the furnace cover and the auxiliary chamber and comprises a hanging plate body, a driving piece and a locking part. Wherein, the hanging plate body is rotatably connected with the lower end of the auxiliary chamber; the driving piece is arranged on the outer side of the auxiliary chamber, is connected with the hanging plate body and is used for driving the hanging plate body to rotate between a first position and a second position; the locking portion is connected with the hanging plate body so as to connect the furnace cover and the auxiliary chamber through the hanging plate body, the corresponding hanging plate body is located at the first position when the locking portion is in an open state, and the corresponding hanging plate body is located at the second position when the locking portion is in a locked state. The utility model discloses a single crystal growing furnace to the driving piece replaces the manpower to promote the hitch plate rotatory, thereby has reduced the potential safety hazard of artifical work intensity and artifical closely operation.

Description

Single crystal furnace
Technical Field
The utility model relates to a monocrystalline silicon preparation technical field, concretely relates to single crystal growing furnace.
Background
With the wide application of solar-grade single crystals, the single crystal pulling industry is also greatly developed, and the improvement and optimization of the single crystal furnace are problems to be solved urgently. And with the market demand for large-size single crystals, the large-size furnace platform slowly occupies the production line and becomes the main production equipment. Some of the devices suitable for small furnace platforms become unsuitable for use in large furnace type equipment and need to be improved to meet the standards for safe and efficient production.
The interlocking device between the furnace cover of the single crystal furnace and the auxiliary chamber cylinder is a hanging plate, a metal handle is welded outside the hanging plate on the small-furnace-type single crystal furnace, when the furnace cover needs to be lifted, the metal handle needs to be pulled manually, the hanging plate is rotated to a locking position to interlock the furnace cover and the auxiliary chamber, and at the moment, the auxiliary chamber can be lifted together by lifting the furnace cover.
However, as the furnace shape is increased, the furnace platform is higher, the parts are larger, and the limitation of manual operation is larger and larger. The height that the height has surpassed the people height of standing of hitch plate has been made in the rising of stove top, and the convenience and the security of artifical rotatory link plate have then received the threat. And as the parts become larger, the manual stress operation becomes more inconvenient.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a single crystal growing furnace can realize the locking and the breaking away from of remote control auxiliary room and bell, avoids artifical closely operation to reduce artifical working strength and the artifical potential safety hazard of closely operating.
In order to solve the technical problem, the utility model discloses a following technical scheme:
according to the utility model discloses single crystal growing furnace, include:
a furnace barrel;
the furnace cover is arranged at the upper end of the furnace cylinder and is opened and closed;
the auxiliary chamber is arranged above the furnace cover of the single crystal furnace;
a locking mechanism for connecting the furnace lid with the sub-chamber, the locking mechanism comprising:
the hanging plate body is rotatably connected to the lower end of the auxiliary chamber;
the driving piece is arranged on the outer side of the auxiliary chamber, is connected with the hanging plate body and is used for driving the hanging plate body to rotate between a first position and a second position;
the locking portion is connected with the hanging plate body so as to connect the furnace cover and the auxiliary chamber through the hanging plate body, the corresponding hanging plate body of the locking portion in an open state is located at the first position, and the corresponding hanging plate body of the locking portion in a locked state is located at the second position.
Further, the driving member includes:
a first transmission part arranged on the hanging plate body,
and the second transmission part is arranged outside the auxiliary chamber of the single crystal furnace and is matched with the first transmission part to drive the hanging plate body to rotate.
Further, the first transmission part is formed into an arc-shaped rack which is arranged along the circumferential direction of the hanging plate body,
the second transmission part comprises a swing cylinder and a gear connected with the swing cylinder, one end of the swing cylinder is fixed on the outer side of the auxiliary chamber of the single crystal furnace,
the gear is meshed with the arc-shaped rack, and the swing cylinder drives the gear to rotate so as to drive the hanging plate body to rotate through the arc-shaped rack.
Further, the latch includes:
the positioning hole is formed in the hanging plate body;
the connecting piece is fixed at the upper end of the furnace cover and penetrates through the positioning hole,
when the hanging plate body is located at the first position, the connecting piece is separated from the positioning hole so that the locking portion is in an open state, and when the hanging plate body is located at the second position, the connecting piece is matched in the positioning hole so that the locking portion is in a locked state.
Further, the hanging plate body is formed into an annular plate, the positioning holes are formed in a plurality, and the positioning holes are arranged at intervals in the circumferential direction.
Further, the positioning hole is formed into a long hole, the diameter of one end, corresponding to the first position, of the long hole is larger than that of the other end of the long hole, and a spindle body is formed at one end, connected with the hanging plate body, of the connecting piece and one end, connected with the auxiliary chamber, of the connecting piece.
Further, one end of the positioning hole corresponding to the first position is formed into a circular hole and the other end is formed into a waist hole.
Further, the locking mechanism further comprises:
and the limiting mechanism is used for limiting the hanging plate main body to rotate between the first position and the second position.
Further, stop gear includes:
the limit stop is fixed on the furnace cover;
the limit switch is connected to the hanging plate body and matched with the limit stop block to limit the hanging plate main body to rotate between the first position and the second position.
Further, the limit switch includes:
a first limit switch and a second limit switch,
when the first limit switch is turned on and the second limit switch is turned off, the hanging plate main body is limited to be at the first position through the cooperation of the first limit switch and the limit stop,
when the second limit switch is opened and the first limit switch is closed, the second limit switch and the limit stop are matched to limit the hanging plate main body to be at the second position.
The above technical scheme of the utility model one of following beneficial effect has at least:
according to the single crystal furnace provided by the embodiment of the utility model, the driving piece replaces manpower to push the hanging plate to rotate, so that the labor intensity and the potential safety hazard of manual close-range operation are reduced;
further, with the main part in the swing cylinder as the driving piece, through the rotation that electric signal drive swing cylinder can accurate control hitch plate, and the signal of telecommunication can pass through remote control, that is to say can realize the locking and the breaking away from of remote control auxiliary room and bell to further make things convenient for staff's operation, greatly reduced the potential safety hazard, it is higher to compare in artifical precision moreover.
Drawings
FIG. 1 is a schematic view of a partial structure of a single crystal furnace according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a locking mechanism in a single crystal furnace according to an embodiment of the present invention;
fig. 3 is a partially enlarged schematic view of the locking mechanism of fig. 2.
Reference numerals: 1. a furnace barrel; 2. a furnace cover; 3. a sub-chamber; 4. a hanging plate body; 5. an arc-shaped rack; 6. a swing cylinder; 7. a gear; 8. positioning holes; 9. a connecting member; 10. a limit stop block; 11. and a limit switch.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the invention belongs. The use of "first," "second," and similar terms in the description herein do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. Also, the use of the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships are changed accordingly.
The single crystal furnace according to the embodiment of the present invention will be described first in detail with reference to the accompanying drawings.
The single crystal furnace according to the embodiment of the present invention, as shown in fig. 1-2, includes a furnace barrel 1, a furnace cover 2, an auxiliary chamber 3, and a locking mechanism. Wherein, the furnace cover 2 is arranged at the upper end of the furnace cylinder 1 to open and close the furnace cylinder 1. The sub-chamber 3 is arranged above the furnace cover 2. The locking mechanism is used for connecting the furnace cover 2 and the auxiliary chamber 3.
Specifically, the locking mechanism includes the hitch plate body 4, a driving member, and a locking portion. Wherein, the hitch plate body 4 is rotatably connected with the lower end of the auxiliary chamber 3; the driving piece is arranged on the outer side of the auxiliary chamber 3, is connected with the hanging plate body 4 and is used for driving the hanging plate body 4 to rotate between a first position and a second position; the locking portion is connected with the hanging plate body 4 so as to connect the furnace cover 2 and the auxiliary chamber 3 through the hanging plate body 4, the corresponding hanging plate body 4 is located at the first position when the locking portion is in an open state, and the corresponding hanging plate body 4 is located at the second position when the locking portion is in a locking state.
That is to say, the hook plate body 4 can realize interlocking of the sub-chamber 3 and the furnace cover 2 by rotating in a certain direction under the action of the driving member, and can realize separation of the sub-chamber 3 and the furnace cover 2 by rotating in another direction. In other words, replaced artifical the rotation through the driving piece to reduce the potential safety hazard of artifical work intensity and artifical closely operation, compare in the manual work moreover, fix a position more accurately.
Further, as shown in fig. 2, the driving member includes a first transmission portion and a second transmission portion. The first transmission part is arranged on the hanging plate body 4, the second transmission part is arranged outside the auxiliary chamber 3 of the single crystal furnace, and the second transmission part is matched with the first transmission part to drive the hanging plate body 4 to rotate. That is to say, through the first transmission portion and the second transmission portion of mutually supporting, it is more convenient, and be convenient for control.
Further, as shown in fig. 2, the first transmission part is formed into an arc-shaped rack 5, the arc-shaped rack 5 is circumferentially arranged along the hitching plate body 4, the second transmission part comprises a swing cylinder 6 and a gear 7 connected to the swing cylinder 6, one end of the swing cylinder 6 is fixed on the outer side of the auxiliary chamber 3 of the single crystal furnace, wherein the gear 7 is meshed with the arc-shaped rack 5, and the swing cylinder 6 drives the gear 7 to rotate so as to drive the hitching plate body 4 to rotate through the arc-shaped rack 5. The transmission part realizes transmission through mutual matching of the gear 7 and the rack, and is simple to install and low in cost. The cooperation of gear 7 and arc rack 5 makes the transmission more feasible and simple easy accuse, in addition, drives swing cylinder 6 through the signal of telecommunication and drives the rotation that gear 7 rotated can accurate control hitch plate body 4, and can realize remote control (through the remote input signal of telecommunication promptly) to further improve degree of automation, reduced the potential safety hazard, improved position control's accurate degree.
Further, as shown in fig. 2, the locking portion includes a positioning hole 8 and a connecting member 9. The positioning hole 8 is formed in the hook plate body 4, the connecting piece 9 is fixed to the upper end of the furnace cover and penetrates through the positioning hole 8, when the hook plate body 4 is located at the first position, the connecting piece is separated from the positioning hole 8 so that the locking portion is in an open state, and when the hook plate body 4 is located at the second position, the connecting piece is matched in the positioning hole 8 so that the locking portion is in a locking state. That is, when the hook plate rotates to the second position, the connecting piece 9 is matched with the positioning hole 8 so that the locking part is in a locking state, and the auxiliary chamber 3 and the furnace cover 2 are in a connecting state; when the furnace cover 2 is rotated to the first position, the connecting piece 9 can be separated from the positioning hole 8, and the auxiliary chamber 3 is separated from the furnace cover 2. The interlocking structure is simple and stable and is easy to manufacture.
Further, as shown in fig. 2, the hitch plate body 4 is formed as an annular plate, and the positioning hole 8 is formed in plural, and the plural positioning holes 8 are provided at intervals in the circumferential direction. The structure of the annular plate is matched with that of the lower end of the auxiliary chamber 3, and the plurality of positioning holes 8 can ensure the connection stability and tightness of the auxiliary chamber 3 and the furnace cover 2.
Further, as shown in fig. 2 to 3, the positioning hole 8 is formed as an elongated hole having one end having a larger diameter than the other end corresponding to the first position, and the connecting hitch plate body 4 of the connecting member 9 and one end of the sub-chamber 3 are formed as a spindle body. That is, when the hook plate body 4 is at the first position, the connecting piece 9 is at one end with a large diameter of the long hole, and the connecting piece 9 is separated from the positioning hole 8 due to the large diameter of the long hole, so that the furnace cover 2 and the auxiliary chamber 3 can be separated; when the hitch plate body 4 is at the second position, the connecting piece 9 is at one end with a small diameter of the long hole, the diameter of part of the spindle body is larger than that of the long hole, the connecting piece 9 can not be separated from the positioning hole 8, and the auxiliary chamber 3 and the furnace cover 2 are connected together. In addition, the connecting hitch plate body 4 of the connecting piece 9 and one end of the auxiliary chamber 3 are formed into a spindle body, the inverted cone shape at the lower end of the spindle body plays a guiding role in pushing in the long hole when switching from the opening state to the locking state, and the like when switching from the locking state to the opening state, and the description is omitted.
Further, as shown in fig. 2, one end of the positioning hole 8 corresponding to the first position is formed as a circular hole and the other end is formed as a kidney hole. Thereby making the switching of the latch between the locked/unlocked state smoother.
Further, as shown in fig. 2, the locking mechanism further includes a limiting mechanism for limiting the rotation of the hitch plate body 4 between the first position and the second position. The limiting mechanism is used for limiting the amplitude of the hanging plate body 4 in the rotating process, the positioning accuracy is guaranteed, and the collision caused by excessive rotation is avoided.
Further, as shown in fig. 2-3, the limit mechanism includes a limit stop 10 and a limit switch 11. The limit stop 10 is fixed on the furnace cover 2, the limit switch 11 is connected on the hitch plate body 4, and the limit switch 11 is matched with the limit stop 10 to limit the hitch plate body 4 to rotate between the first position and the second position.
Further, as shown in fig. 2 to 3, the limit switch 11 includes a first limit switch and a second limit switch. When the first limit switch is opened and the second limit switch is closed, the first limit switch is matched with the limit stop 10 to limit the hitching plate body 4 to be at the first position, and when the second limit switch is opened and the first limit switch is closed, the second limit switch is matched with the limit stop 10 to limit the hitching plate body 4 to be at the second position.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. A single crystal furnace, comprising:
a furnace barrel;
the furnace cover is arranged at the upper end of the furnace cylinder and is opened and closed;
the auxiliary chamber is arranged above the furnace cover of the single crystal furnace;
a locking mechanism for connecting the furnace lid with the sub-chamber, the locking mechanism comprising:
the hanging plate body is rotatably connected to the lower end of the auxiliary chamber;
the driving piece is arranged on the outer side of the auxiliary chamber, is connected with the hanging plate body and is used for driving the hanging plate body to rotate between a first position and a second position;
the locking portion is connected with the hanging plate body so as to connect the furnace cover and the auxiliary chamber through the hanging plate body, the corresponding hanging plate body of the locking portion in an open state is located at the first position, and the corresponding hanging plate body of the locking portion in a locked state is located at the second position.
2. The single crystal furnace of claim 1, wherein the drive comprises:
a first transmission part arranged on the hanging plate body,
and the second transmission part is arranged outside the auxiliary chamber of the single crystal furnace and is matched with the first transmission part to drive the hanging plate body to rotate.
3. The single crystal furnace of claim 2,
the first transmission part is formed into an arc-shaped rack which is arranged along the circumferential direction of the hanging plate body,
the second transmission part comprises a swing cylinder and a gear connected with the swing cylinder, one end of the swing cylinder is fixed on the outer side of the auxiliary chamber of the single crystal furnace,
the gear is meshed with the arc-shaped rack, and the swing cylinder drives the gear to rotate so as to drive the hanging plate body to rotate through the arc-shaped rack.
4. The single crystal furnace of claim 1, wherein the lock comprises:
the positioning hole is formed in the hanging plate body;
the connecting piece is fixed at the upper end of the furnace cover and penetrates through the positioning hole,
when the hanging plate body is located at the first position, the connecting piece is separated from the positioning hole so that the locking portion is in an open state, and when the hanging plate body is located at the second position, the connecting piece is matched in the positioning hole so that the locking portion is in a locked state.
5. The single crystal furnace of claim 4, wherein the hanger plate body is formed as an annular plate, and the positioning hole is formed in a plurality that are arranged at intervals in a circumferential direction.
6. The single crystal furnace of claim 4, wherein the positioning hole is formed as a long hole, and one end of the long hole corresponding to the first position has a diameter larger than the other end, and one end of the connecting member connecting the hanger plate body and the sub-chamber is formed as a spindle.
7. The single crystal furnace of claim 6, wherein one end of the positioning hole corresponding to the first position is formed as a circular hole and the other end is formed as a kidney hole.
8. The single crystal furnace of claim 1, wherein the locking mechanism further comprises:
and the limiting mechanism is used for limiting the hanging plate main body to rotate between the first position and the second position.
9. The single crystal furnace of claim 8, wherein the spacing mechanism comprises:
the limit stop is fixed on the furnace cover;
the limit switch is connected to the hanging plate body and matched with the limit stop block to limit the hanging plate main body to rotate between the first position and the second position.
10. The single crystal furnace of claim 9, wherein the limit switch comprises:
a first limit switch and a second limit switch,
when the first limit switch is turned on and the second limit switch is turned off, the hanging plate main body is limited to be at the first position through the cooperation of the first limit switch and the limit stop,
when the second limit switch is opened and the first limit switch is closed, the second limit switch and the limit stop are matched to limit the hanging plate main body to be at the second position.
CN202120659216.4U 2021-03-31 2021-03-31 Single crystal furnace Active CN215251325U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120659216.4U CN215251325U (en) 2021-03-31 2021-03-31 Single crystal furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120659216.4U CN215251325U (en) 2021-03-31 2021-03-31 Single crystal furnace

Publications (1)

Publication Number Publication Date
CN215251325U true CN215251325U (en) 2021-12-21

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ID=79506909

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120659216.4U Active CN215251325U (en) 2021-03-31 2021-03-31 Single crystal furnace

Country Status (1)

Country Link
CN (1) CN215251325U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230243588A1 (en) * 2022-01-30 2023-08-03 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230243588A1 (en) * 2022-01-30 2023-08-03 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace
US11821690B2 (en) * 2022-01-30 2023-11-21 Zhejiang Jingsheng M & E Co., Ltd Single crystal furnace

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