CN215233135U

CN215233135U - Adsorption device

Info

Publication number: CN215233135U
Application number: CN202120564011.8U
Authority: CN
Inventors: 张立宁; 张升学; 蒋国瑜
Original assignee: China ENFI Engineering Corp
Current assignee: China ENFI Engineering Corp
Priority date: 2021-03-18
Filing date: 2021-03-18
Publication date: 2021-12-21
Anticipated expiration: 2031-03-18

Abstract

The utility model relates to a recovery processing technology field of waste gas, concretely relates to adsorption equipment. The adsorption device comprises a heater, a first main adsorber, a second main adsorber, a first auxiliary adsorber, a second auxiliary adsorber and a cooling assembly. The on-off between the main adsorber and the auxiliary adsorber and the on-off between each adsorber and the heater and the cooling component can be controlled through the pipeline arrangement and the program control valve, so that the four adsorbers are in an adsorption state for adsorbing and removing substances to be adsorbed in raw material waste gas or in a regeneration state of heating regeneration and cooling regeneration. The utility model discloses an adsorption equipment is as the regeneration gas with the waste gas that comes from the waste gas source, and regeneration is accomplished the back, and the regeneration gas need not the raw materials waste gas import that the compressor can return main adsorber, and adsorption equipment has that effective handling capacity is big, operational reliability is high advantage.

Description

Adsorption device

Technical Field

The utility model relates to a recovery processing technology field of waste gas, concretely relates to adsorption equipment.

Background

At present, methods for industrially recovering valuable byproducts from waste gas mainly include absorption methods, adsorption methods, condensation methods, low-temperature rectification methods and the like, wherein the adsorption methods are widely adopted due to the advantages of mild operating conditions, low energy consumption, wide application range, environmental friendliness and the like. For example, in the process of producing polysilicon by using the improved siemens method, valuable byproduct chlorosilane exists in polysilicon waste gas, and most of the chlorosilane is primarily recovered by condensation separation and then deeply recovered by adsorption separation.

The adsorption method is divided into pressure swing adsorption, temperature swing adsorption and temperature swing adsorption, wherein the adsorption recovery of high boiling point substances mostly adopts a temperature swing adsorption or temperature swing adsorption mode, the flow commonly used in industry is generally divided into a two-tower flow and a three-tower flow, the two-tower flow adopts two adsorbers, one adsorber is in an adsorption state, the other adsorber is in a regeneration state, and the regeneration state is subjected to a heating regeneration process and a cooling regeneration process in sequence. The three-tower process adopts three adsorbers, wherein the first adsorber is in an adsorption state, the second adsorber is in a heating regeneration state, and the third adsorber is in a cooling regeneration state. The temperature swing adsorption device used in industry basically adopts regenerated gas introduced from outside or waste gas after desorption after being adsorbed by an adsorber as the regenerated gas, the regenerated gas enters an adsorber bed layer for heating and regeneration after being heated by a heater, and after the regenerated gas is cooled and separated, the gas phase is either discharged out of the system for additional treatment or is returned to the system after being pressurized by a circulating compressor or an upstream supercharger; after the heating regeneration is finished, cold regeneration gas enters an adsorber bed layer for cooling regeneration, the regeneration gas after being discharged from the adsorber is cooled and separated, and the gas phase is discharged from the system for additional treatment or is returned to the system after being pressurized by a circulating compressor or an upstream supercharger.

The method adopts the gas introduced from the outside as the regeneration gas, generally has higher cost and is rarely adopted in industry. The waste gas after the desorption of the adsorbate after being adsorbed by the adsorber is used as the regeneration gas, if valuable byproducts carried in the regeneration gas are to be recovered, a circulating compressor is required to be added, so that the reliability of the operation of the device is reduced, and the regeneration gas circulates in the adsorption device, so that the effective treatment capacity of the adsorption device is reduced; if valuable by-products carried in the regeneration gas are not recovered, the economic efficiency of the adsorption apparatus is reduced, and environmental pollution may be caused.

SUMMERY OF THE UTILITY MODEL

The present invention aims at solving at least one of the technical problems in the related art to a certain extent.

Therefore, the utility model discloses an aspect provides an adsorption equipment, this adsorption equipment uses the waste gas that comes from the waste gas source as the regeneration gas, and then can not reduce adsorption equipment's effective throughput.

According to the utility model discloses adsorption equipment, adsorption equipment includes: a heater having a heater inlet and a heater outlet, the heater inlet being communicable with a source of exhaust gas;

the system comprises a first main adsorber and a second main adsorber, wherein the first main adsorber is provided with a first raw material waste gas inlet and a first desorption matter waste gas outlet, and the second main adsorber is provided with a second raw material waste gas inlet and a second desorption matter waste gas outlet;

the first auxiliary adsorber is provided with a third raw material waste gas inlet and a third desorption matter waste gas outlet, and the second auxiliary adsorber is provided with a fourth raw material waste gas inlet and a fourth desorption matter waste gas outlet;

and a cooling assembly having a cooling assembly inlet, a cooling assembly vapor outlet, and a cooling assembly condensate outlet;

wherein the first desorbed exhaust gas outlet is switchably communicable with one of the heater outlet, the third desorbed exhaust gas outlet, and the fourth desorbed exhaust gas outlet, the second desorbed exhaust gas outlet is switchably communicable with one of the heater outlet, the third desorbed exhaust gas outlet, and the fourth desorbed exhaust gas outlet, the third desorbed exhaust gas outlet is switchably communicable with one of the heater outlet and the fourth desorbed exhaust gas outlet, the fourth desorbed exhaust gas outlet is switchably communicable with one of the heater outlet and the third desorbed exhaust gas outlet, the cooling assembly inlet is switchably communicable with one of the first raw exhaust gas inlet and the second raw exhaust gas inlet, and the cooling assembly inlet is switchably communicable with the third raw exhaust gas inlet and the fourth raw exhaust gas inlet One of the feed gas and waste gas inlets is communicated.

According to the utility model discloses adsorption equipment has the big advantage of effective handling capacity.

In some embodiments, the adsorption device further comprises:

the first waste gas main pipe and the second waste gas main pipe are respectively communicated with the waste gas source, and a first flow regulating valve is arranged on the first waste gas main pipe;

the system comprises a first waste gas branch pipe and a second waste gas branch pipe, wherein each of the first waste gas branch pipe and the second waste gas branch pipe is connected with a first waste gas main pipe, the first waste gas branch pipe is communicated with a first raw material waste gas inlet, the second waste gas branch pipe is communicated with a second raw material waste gas inlet, a first program control valve is arranged on the first waste gas branch pipe, and a second program control valve is arranged on the second waste gas branch pipe;

and a third waste gas branch pipe, a fourth waste gas branch pipe and a fifth waste gas branch pipe, each of the third waste gas branch pipe, the fourth waste gas branch pipe and the fifth waste gas branch pipe with the second waste gas main pipe is connected, the third waste gas branch pipe with the third raw material waste gas inlet is communicated, the fourth waste gas branch pipe with the fourth raw material waste gas inlet is communicated, the fifth waste gas branch pipe with the heater inlet is communicated, wherein, a third program control valve is arranged on the third waste gas branch pipe, a fourth program control valve is arranged on the fourth waste gas branch pipe, and a fifth program control valve is arranged on the fifth waste gas branch pipe.

In some embodiments, the adsorption device further comprises:

a regeneration gas main pipe communicated with the heater outlet;

each of the first regeneration gas branch pipe and the second regeneration gas branch pipe is connected with the regeneration gas main pipe, the first regeneration gas branch pipe is communicated with the first desorption mass waste gas outlet, the second regeneration gas branch pipe is communicated with the second desorption mass waste gas outlet, a sixth program control valve is arranged on the first regeneration gas branch pipe, and a seventh program control valve is arranged on the second regeneration gas branch pipe;

and a third regenerated gas branch pipe and a fourth regenerated gas branch pipe, wherein each of the third regenerated gas branch pipe and the fourth regenerated gas branch pipe is connected with the regenerated gas main pipe, the third regenerated gas branch pipe is communicated with the third desorption absorption waste gas outlet, the fourth regenerated gas branch pipe is communicated with the fourth desorption absorption waste gas outlet, an eighth program control valve is arranged on the third regenerated gas branch pipe, and a ninth program control valve is arranged on the fourth regenerated gas branch pipe.

In some embodiments, the adsorption device further comprises:

each of the third waste gas branch pipe and the fourth waste gas branch pipe is connected with the second waste gas main pipe, the third waste gas branch pipe is communicated with the third raw material waste gas inlet, the fourth waste gas branch pipe is communicated with the fourth raw material waste gas inlet, a third program control valve is arranged on the third waste gas branch pipe, and a fourth program control valve is arranged on the fourth waste gas branch pipe;

the heater inlet is switchably communicable with one of the third and fourth desorbed exhaust gas outlets.

In some embodiments, the adsorption device further comprises:

a regeneration gas main pipe communicated with the heater outlet;

and a third regenerated gas branch pipe and a fourth regenerated gas branch pipe, wherein each of the third regenerated gas branch pipe and the fourth regenerated gas branch pipe is connected with the inlet of the heater through a heater connecting pipe, the third regenerated gas branch pipe and each of the fourth regenerated gas branch pipes are connected with the regenerated gas main pipe through a heater bypass pipe, the third regenerated gas branch pipe is connected with the third desorption substance waste gas outlet, the fourth regenerated gas branch pipe is connected with the fourth desorption substance waste gas outlet, an inlet program control valve is arranged on the heater connecting pipe, an eighth program control valve is arranged on the third regenerated gas branch pipe, a ninth program control valve is arranged on the fourth regenerated gas branch pipe, and an outlet program control valve is arranged on the heater bypass pipe.

In some embodiments, the adsorption device further comprises:

a tee having a first opening, a second opening, and a third opening;

a first end of the fifth regeneration gas branch pipe is communicated with the third desorption mass waste gas outlet, a second end of the fifth regeneration gas branch pipe is communicated with the first opening, and a tenth program control valve is arranged on the fifth regeneration gas branch pipe;

a first end of the sixth regeneration gas branch pipe is communicated with the fourth desorption mass waste gas outlet, a second end of the sixth regeneration gas branch pipe is communicated with the second opening, and an eleventh program control valve is arranged on the sixth regeneration gas branch pipe;

and a seventh regeneration gas branch pipe, wherein the second end part of the seventh regeneration gas branch pipe is communicated with the regeneration gas main pipe, the first end part of the seventh regeneration gas branch pipe is communicated with the third opening, and a second flow regulating valve is arranged on the seventh regeneration gas branch pipe.

In some embodiments, the adsorption device further comprises:

the cooling assembly vapor outlet is switchably communicable with one of the first raw waste gas inlet and the second raw waste gas inlet.

In some embodiments, the adsorption device further comprises:

the gas main inlet pipe is communicated with the cooling assembly inlet, and the gas main outlet pipe is communicated with the cooling assembly gas-phase outlet;

each of the first gas branch pipe, the second gas branch pipe, the third gas branch pipe and the fourth gas branch pipe is connected with the gas main inlet pipe, the first gas branch pipe is communicated with the first raw material waste gas inlet, the second gas branch pipe is communicated with the second raw material waste gas inlet, the third gas branch pipe is communicated with the third raw material waste gas inlet, and the fourth gas branch pipe is communicated with the fourth raw material waste gas inlet, wherein the first gas branch pipe is provided with a twelfth program control valve, the second gas branch pipe is provided with a thirteenth program control valve, the third gas branch pipe is provided with a fourteenth program control valve, and the fourth gas branch pipe is provided with a fifteenth program control valve;

each of the first and second offgas manifolds is connected to the main gas outlet pipe.

In some embodiments, the cooling assembly comprises:

the water cooler is provided with a water cooler inlet, a water cooler gas phase outlet and a water cooler condensate outlet, the water cooler inlet forms the cooling assembly inlet, and the water cooler condensate outlet forms a first cooling assembly condensate outlet of the cooling assembly;

the heat exchanger is provided with a first heat exchanger inlet, a second heat exchanger inlet, a first heat exchanger outlet, a second heat exchanger outlet and a heat exchanger condensate outlet, the first heat exchanger inlet is communicated with the water cooler gas phase outlet, the main gas outlet pipe is communicated with the second heat exchanger outlet, namely the second heat exchanger outlet forms a cooling assembly gas phase outlet, and the heat exchanger condensate outlet forms a second cooling assembly condensate outlet of the cooling assembly;

the deep cooler is provided with a deep cooler inlet, a deep cooler gas-phase outlet and a deep cooler condensate outlet, the deep cooler inlet is communicated with the first outlet of the heat exchanger, the deep cooler gas-phase outlet is communicated with the second inlet of the heat exchanger, and the deep cooler condensate outlet forms a third cooling assembly condensate outlet of the cooling assembly;

the water cooler is also provided with a first cooling medium inlet and a first cooling medium outlet, and the chiller is also provided with a second cooling medium inlet and a second cooling medium outlet.

Drawings

Fig. 1 is a schematic structural diagram of an adsorption apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of an adsorption device according to another embodiment of the present invention.

Reference numerals: an adsorption device 100; a first primary adsorber 1; a first raw waste gas inlet 11; a first desorbed exhaust outlet 12; a second primary adsorber 2; a second raw material off-gas inlet 21; a second desorbed exhaust outlet 22; a first auxiliary adsorber 3; a third raw material exhaust inlet 31; a third desorbed exhaust outlet 32; a second auxiliary adsorber 4; a fourth raw exhaust gas inlet 41; a fourth desorbed exhaust outlet 42; a heater 5; a heater inlet 51; a heater outlet 52; a water cooler 6; a water cooler inlet 61; a water cooler gas phase outlet 62; a water cooler condensate outlet 63; a first cooling medium inlet 64; a first cooling medium outlet 65; a heat exchanger 7; a heat exchanger first inlet 71; a heat exchanger second inlet 72; a heat exchanger first outlet 73; a heat exchanger second outlet 74; a heat exchanger condensate outlet 75; a deep cooler 8; a chiller inlet 81; a chiller gas phase outlet 82; a chiller condensate outlet 83; a second cooling medium inlet 84; a second cooling medium outlet 85; a first flow rate regulating valve 9; a second flow rate regulating valve 10; a first main exhaust gas duct 101; a first exhaust branch pipe 1011; the second exhaust branch pipe 1012; a second main exhaust gas duct 102; a third exhaust branch 1021; the fourth exhaust branch pipe 1022; the fifth exhaust branch pipe 1023; a regeneration gas main 103; a first branch regeneration gas pipe 1031; second regeneration gas leg 1032; a third regeneration gas branch line 1033; fourth regeneration gas branch 1034; fifth regeneration gas branch 1035; a sixth regeneration gas branch 1036; a seventh regeneration gas branch line 1037; a main gas inlet 104; a first gas branch 1041; second gas manifold 1042; third gas branch 1043; a fourth gas manifold 1044; a main gas outlet pipe 105; a main gas discharge tube 106; a first gas exhaust branch pipe 1061; a second gas exhaust branch 1062; a heater bypass pipe 107; a cooling block connection pipe 108; a heater connection pipe 109; the auxiliary adsorber connects line 110.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

As shown in fig. 1 and 2, an adsorption apparatus 100 according to an embodiment of the present invention includes a first primary adsorber 1, a second primary adsorber 2, a first auxiliary adsorber 3, a second auxiliary adsorber 4, a heater 5, and a cooling assembly.

The heater 5 has a heater inlet 51 and a heater outlet 52, the heater inlet 51 being communicable with a source of exhaust gas. The first main adsorber 1 has a first raw-material waste-gas inlet 11 and a first desorbed-substance waste-gas outlet 12, and the second main adsorber 2 has a second raw-material waste-gas inlet 21 and a second desorbed-substance waste-gas outlet 22. The first auxiliary adsorber 3 has a third raw exhaust gas inlet 31 and a third desorbed exhaust gas outlet 32, and the second auxiliary adsorber 4 has a fourth raw exhaust gas inlet 41 and a fourth desorbed exhaust gas outlet 42.

The cooling assembly has a cooling assembly inlet, a cooling assembly vapor outlet, and a cooling assembly condensate outlet.

Wherein the first desorbed mass exhaust gas outlet 12 is switchably communicable with one of the heater outlet 52 and the third desorbed mass exhaust gas outlet 32, the second desorbed mass exhaust gas outlet 22 is switchably communicable with one of the heater outlet 52 and the fourth desorbed mass exhaust gas outlet 42, the third desorbed mass exhaust gas outlet 32 is switchably communicable with one of the heater outlet 52 and the fourth desorbed mass exhaust gas outlet 42, and the fourth desorbed mass exhaust gas outlet 42 is switchably communicable with one of the heater outlet 52 and the third desorbed mass exhaust gas outlet 32. The cooling assembly inlet is switchably communicable with one of the first raw flue gas inlet 11 and the second raw flue gas inlet 21, and the cooling assembly inlet is switchably communicable with one of the third raw flue gas inlet 31 and the fourth raw flue gas inlet 41.

The heater inlet 51 being capable of communicating with a source of exhaust gas means: when the adsorption device 100 is in an operating state, the heater inlet 51 may or may not be in communication with a source of exhaust gas; when the adsorption device 100 is not in operation, the heater inlet 51 may or may not be in communication with an exhaust gas source.

The first desorbed exhaust gas outlet 12 being switchably communicable with one of the heater outlet 51 and the third desorbed exhaust gas outlet 32 means: when the adsorption apparatus 100 is in the operating state, the first desorbed exhaust gas outlet 12 may be switched from a state of communication with the heater outlet 52 to a state of communication with the third desorbed exhaust gas outlet 32, and the first desorbed exhaust gas outlet 12 may also be switched from a state of communication with the third desorbed exhaust gas outlet 32 to a state of communication with the heater outlet 52.

The second desorbed exhaust gas outlet 22 being switchably communicable with one of the heater outlet 52 and the fourth desorbed exhaust gas outlet 42 means: when the adsorption apparatus 100 is in the operating state, the second desorbed exhaust gas outlet 22 may be switched from a state of communicating with the heater outlet 52 to a state of communicating with the fourth desorbed exhaust gas outlet 42, and the second desorbed exhaust gas outlet 22 may also be switched from a state of communicating with the fourth desorbed exhaust gas outlet 42 to a state of communicating with the heater outlet 52.

The third desorbed exhaust gas outlet 32 being switchably communicable with one of the heater outlet 52 and the fourth desorbed exhaust gas outlet 42 means: when the adsorption apparatus 100 is in the operating state, the third desorbed exhaust gas outlet 32 may be switched from communication with the heater outlet 52 to communication with the fourth desorbed exhaust gas outlet 42, and the third desorbed exhaust gas outlet 32 may also be switched from communication with the fourth desorbed exhaust gas outlet 42 to communication with the heater outlet 52.

The fourth desorbed exhaust gas outlet 42 being switchably communicable with one of the heater outlet 52 and the third desorbed exhaust gas outlet 32 means: when the adsorption apparatus 100 is in the operating state, the fourth desorbed exhaust gas outlet 42 may be switched from communication with the heater outlet 52 to communication with the third desorbed exhaust gas outlet 32, and the fourth desorbed exhaust gas outlet 42 may also be switched from communication with the third desorbed exhaust gas outlet 32 to communication with the heater outlet 52.

The cooling assembly inlet being switchably communicable with one of the third raw exhaust inlet 31 and the fourth raw exhaust inlet 41 means: when the adsorption apparatus 100 is in the operating state, the cooling unit inlet may be switched from a state of being communicated with the third raw material exhaust gas inlet 31 to a state of being communicated with the fourth raw material exhaust gas inlet 41, and the cooling unit inlet may also be switched from a state of being communicated with the fourth raw material exhaust gas inlet 41 to a state of being communicated with the third raw material exhaust gas inlet 31.

The adsorbents in the first main adsorber 1, the second main adsorber 2, the first auxiliary adsorber 3 and the second auxiliary adsorber 4 are activated carbon adsorbents. The heater 5 is electrically heated, and may be heated by a heating medium, such as steam. Two main adsorbers are switched to use, one of them is in adsorption state, another is in regeneration state, two auxiliary adsorbers are also switched to use, one is in adsorption state, another is in regeneration state. The operation of the adsorption apparatus 100 according to an embodiment of the present invention will be briefly described with reference to fig. 1 and 2, taking the first main adsorber 1 as an example of treating the raw material off-gas.

A feed waste gas (primary feed gas) from a waste gas source may be introduced into first primary adsorber 1 from first feed waste gas inlet 11 so that the adsorbent in first primary adsorber 1 adsorbs valuable material to be adsorbed in the feed waste gas. The exhaust gas from which the substances to be adsorbed have been removed is discharged from the first main adsorber 1 as a desorbed exhaust gas from the first desorbed exhaust gas outlet 12. After a period of use of the first primary adsorber 1, the adsorbent in the first primary adsorber 1 reaches a saturation state. The second main adsorber 2 can then be switched to further process the feed exhaust gas, i.e. the feed exhaust gas can be fed into the second main adsorber 2 from the second feed exhaust gas inlet 21, so that the adsorbent in the second main adsorber 2 adsorbs the valuable substances to be adsorbed in the feed exhaust gas. The substance to be adsorbed refers to a substance which can be theoretically adsorbed by the adsorbent in the adsorber before the raw material waste gas passes through the adsorber; the adsorbate refers to a substance adsorbed by the adsorbent in the adsorber.

When the raw material exhaust gas is treated by the second main adsorber 2, the adsorbent in the first main adsorber 1 may be subjected to heating regeneration and cooling regeneration in this order.

When the adsorbent in the first main adsorber 1 is heated and regenerated, a small part of the raw material waste gas is separated to be used as heating regeneration gas, and the rest part of the raw material waste gas is used as main raw material gas and enters the second main adsorber 2 through a second raw material waste gas inlet 21. The heated regeneration gas enters the heater 5 from the heater inlet 51 to be heated and then flows out from the heater outlet 52 so as to obtain the heated regeneration gas, and the heated regeneration gas is the heated exhaust gas. Most of the heated regeneration gas enters the first main adsorber 1 through the first desorbed waste gas outlet 12, so as to heat and regenerate the adsorbent in the first main adsorber 1. The remaining (small) portion of the heated regeneration gas is introduced into the second auxiliary adsorber 4 through the fourth desorbed exhaust gas outlet 42 to heat and regenerate the adsorbent in the second auxiliary adsorber 4. The exhaust gas after the heating regeneration is cooled by the cooling module, valuable adsorbates in the exhaust gas are condensed and recovered as a byproduct, and the gaseous phase of the exhaust gas is discharged from the gaseous phase outlet of the cooling module, and then returned to the second raw material exhaust gas inlet 21 through a pipeline to be mixed with the main raw material gas and enter the second main adsorber 2.

After the heating regeneration is completed, the adsorbent in the first main adsorber 1 is cooled and regenerated. A small portion of the feed offgas is also split off as a cooled regeneration gas, and the remaining portion is used as the main feed gas and enters the second main adsorber 2 through the second feed offgas inlet 21. The cooled regenerated gas enters the first auxiliary adsorber 3 from the third raw material waste gas inlet 31, the substance to be adsorbed in the cooled regenerated gas is adsorbed by the adsorbent in the first auxiliary adsorber 3 to obtain the desorbed cooling regenerated gas, and the desorbed cooling regenerated gas is discharged from the third desorbed waste gas outlet 32 out of the first auxiliary adsorber 3.

Most of the desorbed cooling regeneration gas enters the first main adsorber 1 through the first desorbed waste gas outlet 12 so as to cool and regenerate the adsorbent in the first main adsorber 1. The remaining (small) portion of the desorbed cooling regeneration gas is introduced into the second auxiliary adsorber 4 through the fourth desorbed exhaust gas outlet 42 to cool and regenerate the adsorbent in the second auxiliary adsorber 4. Regeneration of the adsorbent in the first main adsorber 1 and the adsorbent in the second auxiliary adsorber 4 is now complete. The cooled and regenerated exhaust gas is cooled by the cooling module, the valuable adsorbate in the exhaust gas is condensed and recovered as a byproduct, and the gaseous phase of the exhaust gas is discharged from the gaseous phase outlet of the cooling module and then returned to the second raw material exhaust gas inlet 21 through a pipeline to be mixed with the main raw material gas to enter the second main adsorber 2. Wherein the raw material waste gas can be polysilicon raw material waste gas, and the substance to be adsorbed can be chlorosilane.

The regeneration of the adsorbent in the second main adsorber 2 and the adsorbent in the first auxiliary adsorber 3 is the same as the regeneration of the adsorbent in the first main adsorber 1 and the adsorbent in the second auxiliary adsorber 4 and will not be described in detail here.

It will be appreciated by those skilled in the art that when the feed exhaust gas is first treated using the first primary adsorber 1, regeneration of the adsorbent in the second secondary adsorber 4 is not required since the feed exhaust gas is not treated using the second secondary adsorber 4.

In the prior art, a part of the waste gas after the desorption is used as the regeneration gas to regenerate the adsorber, which causes the part of the waste gas after the desorption to be mixed with the adsorbate adsorbed by the adsorber, and further causes the part of the waste gas after the desorption to become the raw waste gas to be treated, which is equivalent to that the part of the waste gas after the desorption as the regeneration gas is not treated, and thus the effective treatment capacity of the adsorption device 100 is reduced.

According to the utility model discloses adsorption equipment 100 is through setting up heater 5 to can utilize the raw materials waste gas that comes from the waste gas source to heat regeneration as the adsorbent in heating regeneration gas to adsorbent in first main adsorber 1 and the adsorbent in second main adsorber 2, need not to recycle the waste gas after the desorption nature that first main adsorber 1 and second main adsorber 2 produced from this as the regeneration gas. According to the utility model discloses adsorption equipment 100 is through setting up first supplementary adsorber 3 and second supplementary adsorber 4 to can utilize the waste gas after the desorption matter that first supplementary adsorber 3 and second supplementary adsorber 4 produced as cooling regeneration gas, the waste gas after the desorption matter that from this need not to recycle first main adsorber 1 and second main adsorber 2 produced is as the regeneration gas, can not reduce the effective throughput of first main adsorber 1 and second main adsorber 2 promptly.

In addition, in the prior art, the adsorbent is regenerated by using the waste gas after the adsorbate removal, that is, the waste gas after the adsorbate removal is used as the regeneration gas, and since the pressure of the regeneration gas is low, a pressure swing adsorption device is mostly used, that is, the pressure of the regeneration gas is much lower than the adsorption pressure when the adsorber is in an adsorption state, before the adsorber is regenerated, the adsorber needs to be subjected to reverse release decompression, that is, a part of gas is released through a raw material waste gas inlet of the adsorber, so that the regeneration gas can be ensured to be introduced into the adsorber. After the regeneration of the adsorber is completed, the adsorber needs to be pressurized, that is, a part of raw material waste gas is filled through a raw material waste gas inlet of the adsorber, so that the inside of the adsorber has a certain gas pressure to prepare for adsorption. When the pressure is reduced and increased in a reverse releasing mode, airflow flows at high speed inside the adsorber, the high-speed airflow can scour the adsorbent in the adsorber, and the adsorbent in the adsorber is easily pulverized.

According to the utility model discloses adsorption equipment 100, first main adsorber 1, the main adsorber 2 of second, when first supplementary adsorber 3 and the supplementary adsorber 4 of second adsorb and regenerate, it all comes from the waste gas source to get into its inside gas, this makes in whole course of the work first main adsorber 1, the main adsorber 2 of second, the internal pressure of the supplementary adsorber 4 of first supplementary adsorber 3 and second equals basically, consequently there is not the process of putting decompression and pressurizing in the contrary, thereby weakened because of the high velocity gas stream erodees the adsorbent and causes the adsorbent pulverization.

Therefore, the adsorption device 100 according to the embodiment of the present invention has the advantages of large effective treatment capacity, long service life of the adsorbent, etc.

In some embodiments, as shown in fig. 1, the sorption arrangement 100 further comprises: the first exhaust main pipe 101, the second exhaust main pipe 102, the first exhaust branch pipe 1011, the second exhaust branch pipe 1012, the third exhaust branch pipe 1021, the fourth exhaust branch pipe 1022, and the fifth exhaust branch pipe 1023, each of the first exhaust main pipe 101 and the second exhaust main pipe 102 can communicate with an exhaust gas source, and the first exhaust main pipe 101 is provided with a first flow rate adjustment valve 9.

Each of the first and second exhaust branch pipes 1011 and 1012 is connected to the first exhaust main pipe 101, the first exhaust branch pipe 1011 communicates with the first raw material exhaust inlet 11, and the second exhaust branch pipe 1012 communicates with the second raw material exhaust inlet 2112. Each of the third exhaust gas branch pipe 1021, the fourth exhaust gas branch pipe 1022, and the fifth exhaust gas branch pipe 1023 is connected to the second exhaust gas main pipe 102, the third exhaust gas branch pipe 1021 is communicated with the third raw material exhaust gas inlet 31, the fourth exhaust gas branch pipe 1022 is communicated with the fourth raw material exhaust gas inlet 4132, and the fifth exhaust gas branch pipe 1023 is communicated with the heater inlet 51.

The first waste gas branch pipe 1011 is provided with a first program control valve V1, the second waste gas branch pipe 1012 is provided with a second program control valve V2, the third waste gas branch pipe 1021 is provided with a third program control valve V3, the fourth waste gas branch pipe 1022 is provided with a fourth program control valve V4, and the fifth waste gas branch pipe 1023 is provided with a fifth program control valve V5.

Each of the first exhaust main 101 and the second exhaust main 102 being communicable with an exhaust gas source means: when the adsorption device 100 is in an operating state, the first exhaust main pipe 101 and the second exhaust main pipe 102 are both communicated with an exhaust gas source; when the adsorption device 100 is not in an operating state, the first exhaust main 101 and the second exhaust main 102 may or may not be in communication with an exhaust gas source.

The first waste gas branch pipe 1011, that is, the first main adsorber 1 and the waste gas source are connected and disconnected by controlling the first program control valve V1. The second waste gas branch pipe 1012, that is, the second main adsorber 2 and the waste gas source are switched on and off by controlling the second program control valve V2. The third waste gas branch pipe 1021 is switched on and off by controlling the third program control valve V3, namely the first auxiliary absorber 3 and the waste gas source are switched on and off. The fourth exhaust gas branch pipe 1022, that is, the second auxiliary adsorber 4 and the exhaust gas source are opened and closed by controlling the fourth program control valve V4. The fifth waste gas branch pipe 1023, that is, the heater 5 and the waste gas source are connected and disconnected by controlling the fifth program control valve V5. The pipelines and the program control valve are arranged to conveniently realize the communication and disconnection between the waste gas source and the corresponding parts, so that the structure of the adsorption device 100 is more reasonable.

By arranging the first flow regulating valve 9, the flow of the main raw material gas can be regulated, and then the flow of the regeneration gas (heating regeneration gas or cooling regeneration gas) is regulated, so that the flow of the regeneration gas is in a reasonable range. On the other hand, the pressure of the main feed gas can be adjusted by the first flow control valve 9, so that the pressure of the exhaust gas after completion of regeneration (including heating regeneration gas and cooling regeneration gas) matches the pressure of the main feed gas before entering the first main adsorber 1 and the second main adsorber 2, so that the exhaust gas after completion of regeneration can flow into the corresponding main adsorber together with the main feed gas without pressurizing the exhaust gas after completion of regeneration. Since a pressurizing device is not required, the structure of the adsorption apparatus 100 can be simplified, the manufacturing cost of the adsorption apparatus 100 can be reduced, and the reliability of operation can be improved.

Preferably, as shown in fig. 1, the adsorption apparatus 100 further includes: a regeneration gas main pipe 103, a first regeneration gas branch pipe 1031, a second regeneration gas branch pipe 1032, a third regeneration gas branch pipe 1033 and a fourth regeneration gas branch pipe 1034, the regeneration gas main pipe 103 communicating with the heater outlet 52.

Each of the first branch regeneration gas pipe 1031 and the second branch regeneration gas pipe 1032 is connected to the main regeneration gas pipe 103, the first branch regeneration gas pipe 1031 is communicated with the first desorbed exhaust gas outlet 12, and the second branch regeneration gas pipe 1032 is communicated with the second desorbed exhaust gas outlet 22. Each of the third regeneration gas branch pipe 1033 and the fourth regeneration gas branch pipe 1034 is connected to the regeneration gas main pipe 103, the third regeneration gas branch pipe 1033 is communicated with the third desorbed exhaust gas outlet 32, and the fourth regeneration gas branch pipe 1034 is communicated with the fourth desorbed exhaust gas outlet 42. The first regenerated gas branch pipe 1031 is provided with a sixth program control valve V6, the second regenerated gas branch pipe 1032 is provided with a seventh program control valve V7, the third regenerated gas branch pipe 1033 is provided with an eighth program control valve V8, and the fourth regenerated gas branch pipe 1034 is provided with a ninth program control valve V9.

The sixth program control valve V6 is controlled to open and close the first regenerated gas branch pipe 1031, that is, to open and close the first main adsorber 1 and the heated regenerated gas and desorbed substance cooling regenerated gas. The second regenerated gas branch pipe 1032 is opened and closed by controlling the seventh program control valve V7, that is, the second main adsorber 2 is opened and closed with the heated regenerated gas and the desorption cooling regenerated gas. The on-off of the third waste gas branch pipe 1021, namely the on-off of the first auxiliary adsorber 3 and the heated regenerated gas and desorption cooling regenerated gas, is realized by controlling the eighth program control valve V8. The fourth regeneration gas branch pipe 1034 is opened and closed by controlling the ninth program control valve V9, that is, the second auxiliary adsorber 4 is opened and closed with the heated regeneration gas and the desorption cooling regeneration gas. Therefore, the heated regeneration gas and the desorption substance cooling regeneration gas are conveniently communicated with the corresponding adsorbers, the working states of the adsorbers are conveniently switched, and the structure of the adsorption device 100 can be more reasonable.

As shown in fig. 1, the adsorption apparatus 100 further includes: a tee joint having a first opening, a second opening, and a third opening, a fifth regeneration gas branch line 1035, a sixth regeneration gas branch line 1036, and a seventh regeneration gas branch line 1037. A first end of fifth regeneration gas branch 1035 is in communication with third desorbed exhaust outlet 32, a second end of fifth regeneration gas branch 1035 is in communication with the first opening, and fifth regeneration gas branch 1035 is provided with tenth programmable valve V10. A first end of the sixth regenerated gas branch pipe 1036 is communicated with the fourth desorbed waste gas outlet 42, a second end of the sixth regenerated gas branch pipe 1036 is communicated with the second opening, and an eleventh program control valve V11 is arranged on the sixth regenerated gas branch pipe 1036. A second end portion of the seventh regeneration gas branch pipe 1037 is communicated with the regeneration gas main pipe 103, a first end portion of the seventh regeneration gas branch pipe 1037 is communicated with the third opening, and the seventh regeneration gas branch pipe 1037 is provided with a second flow rate adjustment valve 10.

When the heating regeneration and the cooling regeneration are performed on the adsorbent in the first main adsorber 1, the tenth program control valve V10 is closed, and the eleventh program control valve V11 is opened, so that most of the heated regeneration gas and desorption cooling regeneration gas enters the first main adsorber 1 through the first desorption waste gas outlet 12, and the rest of the heated regeneration gas and desorption cooling regeneration gas enters the second auxiliary adsorber 4 through the regeneration gas main pipe 103, the seventh regeneration gas branch pipe 1037, the sixth regeneration gas branch pipe 1036 and the fourth desorption waste gas outlet 42.

When the heating regeneration and the cooling regeneration are performed on the adsorbent in the second main adsorber 2, the tenth program control valve V10 is opened, and the eleventh program control valve V11 is closed, so that most of the heated regeneration gas and desorbed mass cooling regeneration gas enters the second main adsorber 2 through the second desorbed mass waste gas outlet 22, and the rest of the heated regeneration gas and desorbed mass cooling regeneration gas enters the first auxiliary adsorber 3 through the regeneration gas main pipe 103, the seventh regeneration gas branch pipe 1037, the fifth regeneration gas branch pipe 1035 and the third desorbed mass waste gas outlet 32. Therefore, the heated regeneration gas and the desorption substance cooling regeneration gas are conveniently communicated with the corresponding adsorbers, the working states of the adsorbers are conveniently switched, and the structure of the adsorption device 100 can be more reasonable.

In addition, when the heated regeneration gas and the desorbed cooling regeneration gas pass through the seventh regeneration gas branch pipe 1037, the second flow rate regulating valve 10 provided in the seventh regeneration gas branch pipe 1037 can regulate the flow rates of the heated regeneration gas and the desorbed cooling regeneration gas flowing through the seventh regeneration gas branch pipe 1037, so that the flow rates of the heated regeneration gas and the cooled regeneration gas entering the respective main and auxiliary adsorbers are within a reasonable range.

In other embodiments, as shown in fig. 2, the adsorption device 100 further comprises: a first exhaust main pipe 101, a second exhaust main pipe 102, a first exhaust branch pipe 1011, a second exhaust branch pipe 1012, a third exhaust branch pipe 1021, and a fourth exhaust branch pipe 1022. Each of the first exhaust main pipe 101 and the second exhaust main pipe 102 can communicate with an exhaust gas source, and the first exhaust main pipe 101 is provided with a first flow rate adjustment valve 9.

Each of the first and second exhaust branch pipes 1011 and 1012 is connected to the first exhaust main pipe 101, the first exhaust branch pipe 1011 communicates with the first raw material exhaust inlet 11, and the second exhaust branch pipe 1012 communicates with the second raw material exhaust inlet 21. Each of the third exhaust branch pipe 1021 and the fourth exhaust branch pipe 1022 is connected to the second exhaust main pipe 102, the third exhaust branch pipe 1021 is communicated with the third raw material exhaust inlet 31, and the fourth exhaust branch pipe 1022 is communicated with the fourth raw material exhaust inlet 41.

The first waste gas branch pipe 1011 is provided with a first program control valve V1, the second waste gas branch pipe 1012 is provided with a second program control valve V2, the third waste gas branch pipe 1021 is provided with a third program control valve V3, and the fourth waste gas branch pipe 1022 is provided with a fourth program control valve V4.

The heater inlet 51 is switchably communicable with one of the third and fourth desorbed

exhaust gas outlets

32, 42.

The heater inlet 51 being switchably in communication with one of the third and fourth desorbed

exhaust gas outlets

32, 42 means that when the adsorption apparatus 100 is in the operating state, the heater inlet 51 may be switched from a state of being in communication with the third desorbed exhaust gas outlet 32 to a state of being in communication with the fourth desorbed exhaust gas outlet 42, and the heater inlet 51 may also be switched from a state of being in communication with the fourth desorbed exhaust gas outlet 42 to a state of being in communication with the third desorbed exhaust gas outlet 32.

The pipelines and the program control valve are arranged to conveniently realize the communication and disconnection between the waste gas source and the corresponding parts, so that the structure of the adsorption device 100 is more reasonable. Through setting up first flow control valve 9, can adjust the pressure of main feed gas and the flow of regeneration gas to need not to carry out the pressure boost to the waste gas after the completion of regeneration, just can make the waste gas after the completion of regeneration can flow into corresponding main adsorber with main feed gas together.

In addition, when the first main adsorber 1 is heated and regenerated, the heated regeneration gas firstly enters the first auxiliary adsorber 3 through the third raw material waste gas inlet 31, substances to be adsorbed in the heated regeneration gas are adsorbed by the adsorbent in the first auxiliary adsorber 3 so as to obtain desorbed regeneration gas, the desorbed regeneration gas enters the heater 5 and is heated by the heater 5 to form the heated regeneration gas, and the heated regeneration gas enters the first main adsorber 1 and the second auxiliary adsorber 4 to heat and regenerate the adsorbent in the first main adsorber 1 and the second auxiliary adsorber 4; when the second main adsorber 2 is heated and regenerated, the heated regeneration gas firstly enters the second auxiliary adsorber 4 through the fourth raw material waste gas inlet 41, substances to be adsorbed in the heated regeneration gas are adsorbed by the adsorbent in the second auxiliary adsorber 4 so as to obtain a desorption regeneration gas, the desorption regeneration gas enters the heater 5 and is heated by the heater 5 to form the heated regeneration gas, and the heated regeneration gas enters the second main adsorber 2 and the first auxiliary adsorber 1 to heat and regenerate the adsorbent therein. The heated regeneration gas is the waste gas after desorption, so that the regeneration effect of the first main adsorber 1, the second main adsorber 2, the first auxiliary adsorber 3 and the second auxiliary adsorber 4 is improved, and the regeneration of the adsorbers is more thorough.

Preferably, as shown in fig. 2, the adsorption apparatus 100 further includes: a regeneration gas main pipe 103, a first regeneration gas branch pipe 1031, a second regeneration gas branch pipe 1032, a third regeneration gas branch pipe 1033 and a fourth regeneration gas branch pipe 1034, the regeneration gas main pipe 103 communicating with the heater outlet 52.

Each of the first branch regeneration gas pipe 1031 and the second branch regeneration gas pipe 1032 is connected to the main regeneration gas pipe 103, the first branch regeneration gas pipe 1031 is communicated with the first desorbed exhaust gas outlet 12, and the second branch regeneration gas pipe 1032 is communicated with the second desorbed exhaust gas outlet 22. Each of the third regeneration gas branch pipe 1033 and the fourth regeneration gas branch pipe 1034 is connected to the heater inlet 51 through the heater connection pipe 109, each of the third regeneration gas branch pipe 1033 and the fourth regeneration gas branch pipe 1034 is connected to the regeneration gas main pipe 103 through the heater bypass pipe 107, the third regeneration gas branch pipe 1033 is communicated with the third desorbed exhaust gas outlet 32, and the fourth regeneration gas branch pipe 1034 is communicated with the fourth desorbed exhaust gas outlet 42. The first regenerated gas branch 1031 is provided with a sixth program control valve V6, the second regenerated gas branch 1032 is provided with a seventh program control valve V7, the heater connecting pipe 109 is provided with an inlet program control valve V5, the third regenerated gas branch 1033 is provided with an eighth program control valve V8, the fourth regenerated gas branch 1034 is provided with a ninth program control valve V9, and the heater bypass pipe 107 is provided with an outlet program control valve V21.

When the first and second main adsorbers 1 and 2 are heated and regenerated, the inlet control valve 5 is opened and the outlet control valve V21 is closed, and the desorbed regeneration gas discharged from one of the first and second

auxiliary adsorbers

3 and 4 enters the heater 5 through the heater connection pipe 109. When the first main adsorber 1 and the second main adsorber 2 are cooled and regenerated, the inlet programmable valve V5 is closed and the outlet programmable valve V21 is opened, and the desorbed cooling regeneration gas discharged from one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 flows into the regeneration gas main pipe 103 through the heater bypass pipe 107 and the outlet programmable valve V21, and then enters the corresponding main adsorber and auxiliary adsorber. The heated regeneration gas and the desorption substance cooling regeneration gas are conveniently communicated with the corresponding adsorbers, and the working states of the adsorbers are conveniently switched.

As shown in fig. 2, the adsorption apparatus 100 further includes: a tee joint having a first opening, a second opening, and a third opening, a fifth regeneration gas branch line 1035, a sixth regeneration gas branch line 1036, and a seventh regeneration gas branch line 1037. A first end of fifth regeneration gas branch 1035 is in communication with third desorbed exhaust outlet 32, a second end of fifth regeneration gas branch 1035 is in communication with the first opening, and fifth regeneration gas branch 1035 is provided with tenth programmable valve V10. A first end of the sixth regenerated gas branch pipe 1036 is communicated with the fourth desorbed waste gas outlet 42, a second end of the sixth regenerated gas branch pipe 1036 is communicated with the second opening, and an eleventh program control valve V11 is arranged on the sixth regenerated gas branch pipe 1036. A second end portion of the seventh regeneration gas branch pipe 1037 is communicated with the regeneration gas main pipe 103, a first end portion of the seventh regeneration gas branch pipe 1037 is communicated with the third opening, and the seventh regeneration gas branch pipe 1037 is provided with a second flow rate adjustment valve 10.

The regenerated gas after being heated and the desorption substance cooling regenerated gas are conveniently communicated with the corresponding adsorbers, the working states of the adsorbers are conveniently switched, and the structure of the adsorption device 100 can be more reasonable.

In some embodiments, as shown in fig. 1 and 2, the cooling assembly gas phase outlet is switchably communicable with one of the first raw flue gas inlet 11 and the second raw flue gas inlet 21. The cooling assembly gas phase outlet being switchably communicable with one of the first raw waste gas inlet 11 and the second raw waste gas inlet 21 means: when the adsorption device 100 is in an operating state, the cooling module gas phase outlet may be switched from a state of being communicated with the first raw material exhaust gas inlet 11 to a state of being communicated with the second raw material exhaust gas inlet 21, and may or may not be communicated with an exhaust gas source; the cooling module gas phase outlet may also be switched from a state of communication with the second raw material off-gas inlet 21 to a state of communication with the first raw material off-gas inlet 11 when the adsorption apparatus 100 is not in an operating state. The regenerated waste gas discharged from the gas phase outlet of the cooling component and the main raw material gas flow into the corresponding main adsorber conveniently.

Preferably, the adsorption apparatus 100 further includes: a main gas inlet 104, a main gas outlet 105, a first gas branch 1041, a second gas branch 1042, a third gas branch 1043, a fourth gas branch 1044, a first waste gas branch 1011 and a second gas branch 1052. The main gas inlet pipe 104 is communicated with the inlet of the cooling assembly, and the main gas outlet pipe 105 is communicated with the gas phase outlet of the cooling assembly.

Each of the first gas branch pipe 1041, the second gas branch pipe 1042, the third gas branch pipe 1043, and the fourth gas branch pipe 1044 is connected to the gas main inlet pipe 104, the first gas branch pipe 1041 is communicated with the first raw material exhaust gas inlet 11, the second gas branch pipe 1042 is communicated with the second raw material exhaust gas inlet 21, the third gas branch pipe 1043 is communicated with the third raw material exhaust gas inlet 31, and the fourth gas branch pipe 1044 is communicated with the fourth raw material exhaust gas inlet 41. A twelfth program control valve V12 is disposed on the first gas branch pipe 1041, a thirteenth program control valve V13 is disposed on the second gas branch pipe 1042, a fourteenth program control valve V14 is disposed on the third gas branch pipe 1043, and a fifteenth program control valve V15 is disposed on the fourth gas branch pipe 1044.

Each of the first and second offgas manifolds 1011 and 1012 is connected to the main gas outlet pipe 105.

When the first main adsorber 1 is subjected to heating regeneration and cooling regeneration, the regenerated waste gas discharged from the first raw material waste gas inlet 11 of the first main adsorber 1 enters the gas main inlet pipe 104 through the first gas branch pipe 1041, the regenerated waste gas discharged from the fourth raw material waste gas inlet 41 of the second auxiliary adsorber 4 enters the gas main inlet pipe 104 through the third gas branch pipe 1043, and then the regenerated waste gas enters the cooling system through the gas main inlet pipe 104 and the cooling component inlet. The condensation recovery of the substances to be adsorbed is realized through the condensation of the cooling system, so as to form the cooled regeneration gas, and the cooled regeneration gas enters the first main adsorber 1 through the gas phase outlet of the cooling component, the gas main outlet pipe 105, the first waste gas branch pipe 1011 and the first raw material waste gas inlet 11, is adsorbed and purified by the adsorber in the first adsorber 1, and is discharged from the first desorption substance waste gas outlet 12.

When the second main adsorber 2 is subjected to heating regeneration and cooling regeneration, the regenerated waste gas discharged from the second raw material waste gas inlet 21 of the second main adsorber 2 enters the gas main inlet pipe 104 through the second gas branch pipe 1042, the regenerated waste gas discharged from the third raw material waste gas inlet 31 of the first auxiliary adsorber 3 enters the gas main inlet pipe 104 through the fourth gas branch pipe 1044, and then the regenerated waste gas enters the cooling system through the gas main inlet pipe 104 and the cooling module inlet. The condensation recovery of the material to be adsorbed is realized by the condensation of the cooling system, so as to form the cooled regeneration gas, and the cooled regeneration gas enters the second main adsorber 2 through the gas phase outlet of the cooling component, the gas main outlet pipe 105, the second waste gas branch pipe 1012 and the second raw material waste gas inlet 21, is adsorbed and purified by the adsorber in the second adsorber 2, and is discharged from the second desorption material waste gas outlet 22. The pipelines and the program control valve are arranged to conveniently realize the communication between the cooling assembly and the adsorbers.

In some embodiments, the cooling assembly comprises: a water cooler 6, a heat exchanger 7 and a chiller 8.

The water cooler 6 is provided with a water cooler inlet 61, a water cooler gas phase outlet 62 and a water cooler condensate outlet 63, the gas main inlet pipe 104 is communicated with the water cooler inlet 61, namely the water cooler inlet 61 forms a cooling assembly inlet, and the water cooler condensate outlet 63 forms one cooling assembly condensate outlet of the cooling assembly.

The heat exchanger 7 is provided with a heat exchanger first inlet 71, a heat exchanger second inlet 72, a heat exchanger first outlet 73, a heat exchanger second outlet 74 and a heat exchanger condensate outlet 75, wherein the heat exchanger first inlet 71 is communicated with the water cooler gas phase outlet 62, the main gas outlet pipe 105 is communicated with the heat exchanger second outlet 74, namely the heat exchanger second outlet 74 forms a cooling assembly gas phase outlet, and the heat exchanger condensate outlet 75 forms one cooling assembly condensate outlet of the cooling assembly.

The chiller 8 has a chiller inlet 81, a chiller gas outlet 82 and a chiller condensate outlet 83, the chiller inlet 81 communicating with the heat exchanger first outlet 73, the chiller gas outlet 82 communicating with the heat exchanger second inlet 72, the chiller condensate outlet 83 constituting one of the cooling module condensate outlets.

The water cooler 6 also has a first cooling medium inlet 64 and a first cooling medium outlet 65, and the chiller 8 also has a second cooling medium inlet 84 and a second cooling medium outlet 85.

And the water cooler condensate outlet 63, the heat exchanger condensate outlet 75 and the deep cooler condensate outlet 83 are respectively used for discharging substances to be adsorbed, which are recovered through condensation in the corresponding cooling part, so that the substances to be adsorbed in the regenerated gas are recovered. The first cooling medium inlet 64 and the first cooling medium outlet 65 are respectively used for the inlet and outlet of the refrigerant of the water cooler 6, and the second cooling medium inlet 84 and the second cooling medium outlet 85 are respectively used for the inlet and outlet of the refrigerant of the chiller 8. The deep cooler 8 adopts a refrigerant with the temperature of minus 35 ℃ to minus 50 ℃, for example, Freon is adopted.

This cooling module can play better condensation effect to the waste gas after the regeneration is accomplished to treat that the adsorbed substance condensation becomes liquid, can retrieve, be favorable to improving resource utilization. In addition, the gas flowing into the heat exchanger 7 from the water cooler 6 can be cooled through the heat exchanger 7, so that the cold energy of the chiller 8 is recycled, and resource saving is facilitated.

Alternatively, the cooling assembly may include only a water cooler. In this case, the gas outlet of the water cooler constitutes the gas outlet of the cooling module, and the gas discharged from the gas outlet of the water cooler flows directly into the corresponding main adsorber together with the main feed gas.

Alternatively, the cooling module may comprise only a water cooler and a chiller. In this case, the gas outlet of the chiller forms the gas outlet of the cooling module, and the gas discharged from the gas outlet of the chiller flows directly into the corresponding main adsorber together with the main feed gas.

The operation method of the adsorption device 100 according to the embodiment of the present invention includes the following steps:

adsorbing substances to be adsorbed in the raw material waste gas by using a first main adsorber 1;

meanwhile, a part of the exhaust gas from the exhaust gas source is heated by a heater 5 to perform heating regeneration on one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 and the second main adsorber 2 by the heated exhaust gas, and the exhaust gas after the heating regeneration is cooled by a cooling component to condense valuable adsorbates in the exhaust gas to be recovered as a byproduct;

and (2) adsorbing and removing substances to be adsorbed in a raw material waste gas by one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 to obtain a desorption substance cooling regeneration gas, cooling and regenerating one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 and the second main adsorber 2 by using the desorption substance cooling regeneration gas, and cooling the waste gas after cooling and regenerating by using a cooling component to condense valuable adsorbates in the waste gas to be recovered as a byproduct.

The waste gas from the waste gas source can be in two forms, one is raw waste gas directly flowing from the waste gas source into the heater 5 through a pipeline, the other is desorbed waste gas obtained after the raw waste gas enters one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 and is adsorbed and desorbed by the corresponding auxiliary adsorber to be adsorbed, and any one of the two forms can be used for heating and regenerating the adsorber.

In some embodiments, a portion of the raw exhaust gas is used to adsorb and remove the substance to be adsorbed by one of the first auxiliary adsorber 3 and the second auxiliary adsorber 4 to obtain a desorbed exhaust gas, and then the heated exhaust gas is obtained by heating the desorbed exhaust gas by the heater 5.

Other structures of the adsorption apparatus 100 according to an embodiment of the present invention will be described with reference to fig. 1.

As shown in fig. 1, the third gas branch 1043 and the fourth gas branch 1044 are connected to the gas main inlet 104 via the cooling block connecting pipe 108. The third regeneration gas branch line 1033 and the fourth regeneration gas branch line 1034 are connected to the regeneration gas main line 103 through the heater bypass line 107, and the third waste gas branch line 1021 and the fourth waste gas branch line 1022 are connected to the second waste gas main line 102 through the auxiliary adsorber connection pipe 110. A switching line is also connected between the first main exhaust gas pipe 101 and the second main exhaust gas pipe 102, and a switching valve V20 is provided on the switching line, and the switching valve V20 is used when the states of the first main adsorber 1, the second main adsorber 2, the first auxiliary adsorber 3, and the second auxiliary adsorber 4 are switched, for example, when the adsorption state and the regeneration state of the first main adsorber 1 and the second main adsorber 2 are switched, the switching valve V20 is opened to ensure that the gas path in the adsorption apparatus 100 is always in flow communication.

As shown in fig. 1, the adsorption device 100 further includes a main gas discharge pipe 106, a first gas discharge branch pipe 1061 and a second gas discharge branch pipe 1062, the first gas discharge branch pipe 1061 and the second gas discharge branch pipe 1062 are both connected to the main gas discharge pipe 106, the first gas discharge branch pipe 1061 is communicated with the first desorbed waste gas outlet 12, the second gas discharge branch pipe 1062 is communicated with the second desorbed waste gas outlet 22, the first discharge branch pipe is provided with an eighteenth program control valve V18, the eighteenth program control valve V18 is used for controlling on/off of the first desorbed waste gas outlet 12 and the main gas discharge pipe 106, the second discharge branch pipe is provided with a nineteenth program control valve V19, and the nineteenth program control valve V19 is used for controlling on/off of the second desorbed waste gas outlet 22 and the main gas discharge pipe 106.

The operation of the adsorption apparatus 100 according to an embodiment of the present invention will be briefly described with reference to fig. 1, taking the use of the adsorption apparatus 100 for treating the off-gas of polysilicon feedstock as an example.

When the polycrystalline silicon raw material off-gas is treated by the first main adsorber 1 and the second main adsorber 2 and the first auxiliary adsorber 31 are heated and regenerated. And the second program control valve V2, the third program control valve V3, the fourth program control valve V4, the sixth program control valve V6, the ninth program control valve V9, the eleventh program control valve V11, the fifteenth program control valve V15 and the nineteenth program control valve V19 are closed, and other program control valves, the heater 5, the water cooler 6, the heat exchanger 7 and the deep cooler 8 are opened.

The main raw material gas enters the first main adsorber 1 through the first main waste gas pipe 101 and the first raw material waste gas inlet 11. A small part of polycrystalline silicon raw material waste gas is used as heating regeneration gas, the heating regeneration gas enters the heater 5 from the heater inlet 51 through the second waste gas main pipe 102, is heated by the heater 5, is heated and is discharged from the heater outlet 52, and the heated regeneration gas is obtained. Most of the heated regeneration gas enters the second main adsorber 2 through the regeneration gas main pipe 103, the second regeneration gas branch pipe 1032 and the second desorbed waste gas inlet 22, heats and regenerates the adsorbent in the second main adsorber 2, then is discharged from the second raw material waste gas inlet 21, and enters the gas main inlet pipe 104 through the second gas branch pipe 1042; a small part of the heated regeneration gas enters the first auxiliary adsorber 3 through the main regeneration gas pipe 103, the seventh regeneration gas branch pipe 1037, the tee joint, the fifth regeneration gas branch pipe 1035 and the third desorbed waste gas outlet 32, heats and regenerates the adsorbent in the first auxiliary adsorber 3, then is discharged from the third raw material waste gas inlet 31, and enters the main gas inlet pipe 104 through the third gas branch pipe 1043 and the cooling module connecting pipe 108.

Then, the waste gas after the heating regeneration in the gas main inlet pipe 104 enters the water cooler 6 through the water cooler inlet 61, and the chlorosilane liquid condensed by the water cooler 6 is discharged from the water cooler condensate outlet 63; the gas cooled by the water cooler 6 enters the heat exchanger 7 through the water cooler gas phase outlet 62 and the heat exchanger first inlet 71, and the chlorosilane liquid condensed by the heat exchanger 7 is discharged from the heat exchanger condensate outlet 75; the gas cooled by the heat exchanger 7 enters the chiller 8 through a first outlet 73 of the heat exchanger and an inlet 81 of the chiller, and the chlorosilane liquid condensed by the chiller 8 is discharged from a condensate outlet 83 of the chiller; the gas cooled by the chiller 8 enters the heat exchanger 7 through the chiller gas phase outlet 82 and the heat exchanger second inlet 72, exchanges heat with the gas entering from the heat exchanger first inlet 71, joins the main raw material gas in the first waste gas branch pipe 1011 through the heat exchanger second outlet 74 and the gas main outlet pipe 105, enters the first main adsorber 1, discharges the waste gas after the adsorption treatment of the first main adsorber 1 and the desorption from the first desorption waste gas outlet 12, discharges the waste gas through the first gas discharge branch pipe 1061 and the gas main discharge pipe 106, enters the subsequent process, and completes the heating regeneration of the second main adsorber 2 and the first auxiliary adsorber 3.

After the heating regeneration of the second main adsorber 2 and the first auxiliary adsorber 3 is finished, the fifth programmable valve V5 and the heater 5 are closed, and the fourth programmable valve V4 and the ninth programmable valve V9 are opened.

A small part of polycrystalline silicon raw material waste gas is used as cooling regeneration gas, the cooling regeneration gas enters the second auxiliary adsorber 4 through the second waste gas main pipe 102, the auxiliary adsorber connecting pipe 110, the fourth regeneration gas branch pipe 1034 and the fourth raw material waste gas inlet 41, and is discharged from the fourth desorption mass waste gas outlet 42 after being adsorbed and purified by the second auxiliary adsorber 4 to form desorption mass cooling regeneration gas; the desorbed cooling regeneration gas enters the main regeneration gas pipe 103 through the fourth regeneration gas branch pipe 1034, then most of the desorbed cooling regeneration gas enters the second main adsorber 2 through the second regeneration gas branch pipe 1032 and the second desorbed waste gas inlet 22, the adsorbent in the second main adsorber 2 is cooled and regenerated, then the adsorbent is discharged from the second raw material waste gas inlet 21, and the adsorbent enters the main gas inlet pipe 104 through the second gas branch pipe 1042; a small part of the desorbed cooling regeneration gas enters the first auxiliary adsorber 3 through the seventh regeneration gas branch pipe 1037, the fifth regeneration gas branch pipe 1035 and the third desorbed waste gas outlet 32, cools and regenerates the adsorbent in the first auxiliary adsorber 3, and then is discharged from the third raw material waste gas inlet 31 and enters the gas main inlet pipe 104 through the third gas branch pipe 1043 and the cooling module connecting pipe 108. The subsequent processes of cooling the regenerated exhaust gas and heating the regenerated exhaust gas are the same, and are not described again here, so far, the regeneration of the adsorbent in the second main adsorber 2 and the adsorbent in the first auxiliary adsorber 3 is completed.

When the adsorbent in the first main adsorber 1 is saturated, the switching between the adsorption state and the regeneration state of each adsorber can be realized by controlling the corresponding program control valve, the second main adsorber 2 is used for treating the polycrystalline silicon raw material waste gas, and the first main adsorber 1 and the second auxiliary adsorber 4 are subjected to heating regeneration and cooling regeneration, wherein the specific regeneration process is the same as that of the second main adsorber 2 and the first auxiliary adsorber 3, and is not described in detail herein.

The other structure of the adsorption apparatus 100 shown in fig. 2 is the same as that of the embodiment shown in fig. 1, and will not be described in detail here.

The operation of the adsorption apparatus 100 according to an embodiment of the present invention will be briefly described with reference to fig. 2, also taking the example of treating the off-gas of the polysilicon raw material using the adsorption apparatus 100.

When the polycrystalline silicon raw material off-gas is treated by the first main adsorber 1 and the second main adsorber 2 and the first auxiliary adsorber 31 are heated and regenerated. The second program-controlled valve V2, the third program-controlled valve V3, the sixth program-controlled valve V6, the eighth program-controlled valve V8, the eleventh program-controlled valve V11, the fifteenth program-controlled valve V15, the nineteenth program-controlled valve V19 and the outlet program-controlled valve V21 are closed, and the other program-controlled valves, the heater 5, the water cooler 6, the heat exchanger 7 and the deep cooler 8 are opened.

A small part of polysilicon raw material waste gas is used as heating regeneration gas, the heating regeneration gas enters the second auxiliary adsorber 4 through the second waste gas branch pipe 1012, the auxiliary adsorber connecting pipe 110, the fourth waste gas branch pipe 1022 and the fourth raw material waste gas inlet 41, is subjected to adsorption treatment by the adsorbent in the second auxiliary adsorber 4, is discharged from the fourth desorption mass waste gas outlet 42 to form desorption mass regeneration gas, and then enters the heater 5 through the fourth regeneration gas branch pipe 1034, the heater connecting pipe 109 and the heater inlet 51.

After the heating regeneration of the second main adsorber 2 and the first auxiliary adsorber 3 is completed, when the second main adsorber 2 and the first auxiliary adsorber 3 are cooled and regenerated, the inlet program control valve V5 and the heater 5 are closed and the outlet program control valve V21 is opened on the basis of the heating regeneration state. A small part of polysilicon raw material waste gas is used as cooling regeneration gas, the cooling regeneration gas enters the second auxiliary adsorber 4 through the second waste gas branch pipe 1012, the auxiliary adsorber connecting pipe 110, the fourth waste gas branch pipe 1022 and the fourth raw material waste gas inlet 41, is subjected to adsorption treatment by the adsorbent in the second auxiliary adsorber 4, is discharged from the fourth desorption matter waste gas outlet 42 to form desorption matter cooling regeneration gas, and then the desorption matter cooling regeneration gas enters the regeneration gas main pipe 103 through the fourth regeneration gas branch pipe 1034 and the heater bypass pipe 107.

The other operations of the adsorption apparatus 100 shown in fig. 2 are the same as those of the embodiment shown in fig. 1, and will not be described in detail here.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the present disclosure, the terms "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.

Claims

1. An adsorption device, comprising:

a heater having a heater inlet and a heater outlet, the heater inlet being communicable with a source of exhaust gas;

2. The sorption arrangement of claim 1, further comprising:

3. The sorption arrangement of claim 2, further comprising:

a regeneration gas main pipe communicated with the heater outlet;

each of the first regeneration gas branch pipe and the second regeneration gas branch pipe is connected with the regeneration gas main pipe, the first regeneration gas branch pipe is communicated with the first desorption substance waste gas outlet, the second regeneration gas branch pipe is communicated with the second desorption substance waste gas outlet, a sixth program control valve is arranged on the first regeneration gas branch pipe, and a seventh program control valve is arranged on the second regeneration gas branch pipe;

4. The sorption arrangement of claim 1, further comprising:

5. The sorption arrangement of claim 4, further comprising:

a regeneration gas main pipe communicated with the heater outlet;

6. The adsorption device of claim 3 or 5, further comprising:

a tee having a first opening, a second opening, and a third opening;

7. The adsorption device according to any one of claims 2 to 5,

8. The sorption arrangement of claim 7, further comprising:

9. The sorption arrangement of claim 7, wherein the cooling assembly includes: