CN215222026U

CN215222026U - High-frequency alternating-current plasma high-voltage power supply module

Info

Publication number: CN215222026U
Application number: CN202120896292.7U
Authority: CN
Inventors: 胡卫平
Original assignee: Changshu Dongshen Electron Device Co ltd
Current assignee: Changshu Dongshen Electron Device Co ltd
Priority date: 2021-04-28
Filing date: 2021-04-28
Publication date: 2021-12-17
Anticipated expiration: 2031-04-28

Abstract

The utility model discloses a high frequency exchanges plasma high voltage power supply module, high frequency exchanges plasma high voltage power supply module including the current input end, exchange filter rectifier circuit, half-bridge drive circuit, DC-AC interchanger and the AC high voltage output circuit that connect gradually, set up direct current voltage calibration circuit on the half-bridge drive module, set up output frequency calibration circuit on the DC-AC interchanger. In this way, the utility model discloses can improve output voltage's stability and security, can improve the stability of ion output according to actual output voltage effective control ozone index, potential safety hazard when reducing the occurence of failure.

Description

High-frequency alternating-current plasma high-voltage power supply module

Technical Field

The utility model relates to a high voltage power supply field especially relates to a high frequency exchanges plasma high voltage power supply module.

Background

The plasma high-voltage power supply is a voltage output device of low-temperature plasma equipment, the existing plasma high-voltage power supply is directly boosted and then frequency-modulated by a power frequency transformer as described in patent document CN201520580683.2, the output voltage is up to 2800V-4000V in the process, the frequency is 50Hz as same as the input current, on the one hand, the voltage is too high, and the frequency is too low, if the problems of electric leakage, short circuit and the like occur in daily use, serious electric shock danger is easily caused, even the personal safety of field operators is endangered, on the other hand, because the plasma high-voltage power supply generally uses the commercial power as the input power supply, the commercial power generally has certain voltage fluctuation in the actual work, when the voltage of the commercial power fluctuates, the fluctuation of the output voltage is amplified in the boosting process, leading to huge fluctuation of ion amount in the plasma and uncontrollable exceeding of ozone content.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the main technical problem who solves provides a plasma high voltage power supply module, can improve the voltage stability and the security of power.

In order to solve the technical problem, the utility model discloses a technical scheme be: the high-frequency alternating current plasma high-voltage power supply module comprises a current input end, an alternating current filter rectification circuit, a half-bridge driving circuit, a DC-AC exchanger and an AC high-voltage output circuit which are sequentially connected, wherein the half-bridge driving module is provided with a direct current voltage calibration circuit, and the DC-AC exchanger is provided with an output frequency calibration circuit.

In a preferred embodiment of the present invention, the current input terminal is provided with a fuse between the ac filter circuits.

In a preferred embodiment of the present invention, the ac filter/rectifier circuit is a CLC filter/rectifier circuit.

In a preferred embodiment of the present invention, the calibration voltage of the dc voltage calibration circuit is 12V.

In a preferred embodiment of the present invention, the DC-AC exchanger includes a central control chip and a MOS transistor electrically connected in sequence, the central control chip is formed by integrating a self-oscillating half-bridge switch chip and a power management chip, the power management chip can convert the input DC into 50 ± 5KHz high-frequency AC and control the frequency calibration circuit to automatically calibrate the output frequency, and the voltage of the high-frequency AC is 90V-120V.

In a preferred embodiment of the present invention, a diode voltage stabilizing circuit is disposed outside the central control chip, and the input voltage of the diode voltage stabilizing circuit is 12V.

The utility model has the advantages that: the utility model is based on the common plasma high-voltage power supply booster circuit, firstly, the voltage is calibrated after the alternating current is changed into the direct current, then, the input power supply is changed into the stable alternating current power supply through the direct current to alternating current, and then, the boosting is carried out, thereby reducing the influence of input current pressure fluctuation on final input voltage, improving the stability of the plasma high-voltage power supply, effectively preventing the ozone amount from exceeding the standard and the total ion amount from being suddenly high and low, and in addition, the utility model can improve the current from 50Hz of common commercial power to about 50KHz and simultaneously reduce the working voltage to be lower than the commercial power voltage through the control chip in the process of direct current to alternating current, then the voltage is adjusted to the numerical value required by the work through the transformer, so that the operation safety of field personnel can be obviously improved, and the human body cannot be injured even if the leakage or the short circuit happens.

Drawings

FIG. 1 is a schematic flow chart of a preferred embodiment of the present invention;

FIG. 2 is a circuit diagram of the preferred embodiment;

the parts in the drawings are numbered as follows:

1. fuse, 2.CLC filtering and rectifying circuit, 3. central control chip, 4.MOS pipe.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

Referring to fig. 1 and 2, an embodiment of the present invention includes:

the high-frequency alternating current plasma high-voltage power supply module comprises a current input end, an alternating current filter rectification circuit, a half-bridge driving circuit, a DC-AC exchanger and an AC high-voltage output circuit which are sequentially connected, wherein a direct current calibration voltage is arranged on the half-bridge driving circuit, and an output frequency calibration circuit is arranged on the DC-AC exchanger. And a fuse 1 is arranged between the current input end and the alternating current filter circuit. The direct current power supply device is characterized in that a follow-up circuit is prevented from being damaged due to too large input voltage fluctuation, the alternating current filter rectification circuit is a CLC filter rectification circuit 2, the DC-AC exchanger comprises a central control chip 3 and an MOS (metal oxide semiconductor) tube 4 which are electrically connected in sequence, the central control chip 3 is formed by integrating a self-oscillation half-bridge switch chip and a power supply management chip, and the power supply management chip can convert direct current into high-frequency alternating current of 50 +/-5 KHz. The working voltage of the central control chip 3 is 12V, and in order to prevent the chip from being damaged, a 12V diode voltage stabilizing circuit is further arranged on the chip.

220V alternating current input by the current input end is rectified into a direct current circuit through the CLC filter rectification circuit 2 and then is boosted to about 310V through a capacitor, the boosted direct current enters the MOS tube 4 after being calibrated through 12V calibration voltage, the half-bridge driving circuit sends a signal to the MOS tube 4 to drive the MOS tube to be opened, so that the current enters the region of the central control chip 3, the current is converted into high-frequency alternating current with the voltage of about 100V and the frequency of 50 +/-5 KHz after being processed by the self-oscillation half-bridge switching chip and the power management chip, and the high-frequency alternating current enters the AC high-voltage output circuit, is boosted through the transformer and then outputs the high-frequency high-voltage alternating current with the voltage of 4000V to be used as a power supply of the plasma generator. In the process, the driving circuit is connected with the calibration voltage, so that the voltage stability of the direct current circuit can be improved, the influence of voltage instability of the alternating current input end on the direct current circuit is reduced, and the power management chip of the DC-AC exchanger can control the frequency calibration circuit to automatically calibrate the output frequency, so that the stability of the output frequency is improved.

By the mode, when the plasma generator works, the working current is converted from the common low-frequency high-voltage electricity into the stable high-frequency high-voltage electricity, so that the field workers cannot be greatly damaged even if faults such as short circuit, electric shock and the like occur, and the personal safety guarantee of the field operators is improved.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

1. The high-frequency alternating current plasma high-voltage power supply module is characterized by comprising a current input end, an alternating current filter rectification circuit, a half-bridge driving circuit, a DC-AC exchanger and an AC high-voltage output circuit which are sequentially connected, wherein the half-bridge driving module is provided with a direct current voltage calibration circuit, and the DC-AC exchanger is provided with an output frequency calibration circuit.

2. The high frequency ac plasma high voltage power supply module according to claim 1, wherein a fuse is installed between the current input terminal and the ac filter circuit.

3. The high frequency ac plasma high voltage power supply module according to claim 1, wherein said ac filter-rectifier circuit is a CLC filter-rectifier circuit.

4. The high frequency ac plasma high voltage power supply module according to claim 1, wherein the calibration voltage of the dc voltage calibration circuit is 12V.

5. The high-frequency alternating-current plasma high-voltage power supply module according to claim 1, wherein the DC-AC exchanger comprises a central control chip and an MOS transistor electrically connected in sequence, the central control chip is formed by integrating a self-oscillating half-bridge switch chip and a power management chip, the power management chip can convert an input direct current into a 50 ± 5KHz high-frequency alternating current and control a frequency calibration circuit to automatically calibrate an output frequency, and a voltage of the high-frequency alternating current is 90V to 120V.

6. The high-frequency alternating-current plasma high-voltage power supply module according to claim 5, wherein a diode voltage stabilizing circuit is arranged outside the central control chip, and the input voltage of the diode voltage stabilizing circuit is 12V.