CN215216785U - Double-unit refrigerating device - Google Patents
Double-unit refrigerating device Download PDFInfo
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- CN215216785U CN215216785U CN202120777101.5U CN202120777101U CN215216785U CN 215216785 U CN215216785 U CN 215216785U CN 202120777101 U CN202120777101 U CN 202120777101U CN 215216785 U CN215216785 U CN 215216785U
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Abstract
The utility model discloses a double-unit refrigerating device, which comprises an ultra-low temperature refrigerating unit and a limit low temperature refrigerating unit, the ultra-low temperature refrigeration unit is provided with a high-pressure air supply joint and a low-pressure air return joint, the extreme low temperature refrigeration unit comprises a vacuum pump body, a refrigeration component is arranged in the vacuum pump body and comprises a first refrigeration capillary tube and a first pipeline, a second pipeline is sleeved outside the first pipeline, a gap is arranged between the inner wall of the second pipeline and the first pipeline, the first and the last ends of the second pipeline are respectively provided with an adapter, one end of the first refrigeration capillary is connected with the tail end of the first pipeline, the other end of the first refrigeration capillary is communicated with the tail end of the second pipeline through the adapter, the head end of first pipeline is linked together with first high pressure air feed joint, the head end of second pipeline is linked together through adapter and low pressure return air joint. The utility model provides a pair of two unit refrigerating plant has higher stability.
Description
Technical Field
The utility model relates to a cooling device technical field, concretely says so and relates to a two unit refrigerating plant.
Background
Before a product is coated by the vacuum coating equipment, two-stage vacuum pumping is needed to obtain a high vacuum environment with highest cleanliness, after the preceding stage vacuum pumping, the vacuum chamber opens the absolute low-temperature chamber, the residual gas is subjected to two-stage condensation type vacuum pumping, and finally the coating vacuum degree reaches 1.0E-5 or lower, so that the high vacuum environment with the highest cleanliness can be obtained.
In the existing refrigerating device below the 15K temperature zone, a compression unit outside a vacuum cavity supplies high-pressure clean normal-temperature helium to be delivered to a low-temperature machine head in the vacuum cavity, the low-temperature machine head uses the high-pressure helium as power to compress part of the helium again, the compression is performed, throttling expansion is performed, and expansion absorbs heat to achieve a refrigerating effect.
Because the vacuum coating equipment requires higher cleanliness, when the low-temperature machine head compresses helium in a vacuum cavity, the moving parts cannot use lubricating oil, and the moving parts of the low-temperature machine head are easy to wear, so that the use stability of the refrigerating device is reduced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a two unit refrigerating plant has higher stability.
The utility model discloses a two unit refrigerating plant adopted technical scheme is:
a double-unit refrigerating device comprises an ultra-low temperature refrigerating unit and a limit low temperature refrigerating unit, wherein the ultra-low temperature refrigerating unit is provided with a high-pressure air supply joint and a low-pressure air return joint, the extreme low-temperature refrigeration unit comprises a vacuum pump body, a pre-vacuum pumping interface is arranged on the vacuum pump body, a refrigeration component is arranged in the vacuum pump body and comprises a first refrigeration capillary tube and a first pipeline, a second pipeline is sleeved outside the first pipeline, a gap is arranged between the inner wall of the second pipeline and the first pipeline, the first and the last ends of the second pipeline are respectively provided with an adapter, one end of the first refrigeration capillary is connected with the tail end of the first pipeline, the other end of the first refrigeration capillary is communicated with the tail end of the second pipeline through the adapter, the head end of first pipeline is linked together with first high pressure air feed joint, the head end of second pipeline is linked together through adapter and low pressure return air joint.
As preferred scheme, the refrigeration assembly still includes the third pipeline, the outside cover of third pipeline is equipped with the fourth pipeline, it is gapped between the inner wall of fourth pipeline and the third pipeline, still include first connecting pipe and second connecting pipe, the first end both ends of fourth pipeline are equipped with the adapter respectively, the end of third pipeline is linked together, head end and first high pressure air feed joint are linked together through the head end of first connecting pipe and first pipeline, the end of fourth pipeline is linked together through the one end of adapter and second connecting pipe, the other end of second connecting pipe is linked together through the head end of adapter and second pipeline, the head end of fourth pipeline is linked together through adapter and low pressure return air joint.
As a preferred scheme, the refrigeration assembly further comprises a second refrigeration capillary tube, one end of the second refrigeration capillary tube is communicated with the tail end of the third pipeline through an adapter, and the other end of the second refrigeration capillary tube is communicated with the second connecting pipe.
Preferably, the third pipeline and the first pipeline are arranged in the vacuum pump body side by side up and down.
Preferably, the first pipeline, the second pipeline, the third pipeline and the fourth pipeline are all in a planar spiral shape.
The utility model discloses a two unit refrigerating plant's beneficial effect is: the refrigeration device comprises an ultralow temperature refrigeration unit and a limit low temperature refrigeration unit, so that the ultralow temperature refrigeration unit can be arranged outside the vacuum coating equipment, the limit low temperature refrigeration unit is arranged inside the vacuum coating equipment, the refrigeration assembly comprises a first pipeline, a second pipeline and a first refrigeration capillary tube, the tail end of the first pipeline is communicated with the tail end of the second pipeline through the first refrigeration capillary tube, the head end of the first pipeline is communicated with a high-pressure gas supply joint, and the head end of the second pipeline is communicated with a low-pressure gas return joint; high-pressure low-temperature helium gas produced by the ultra-low-temperature refrigeration unit sequentially passes through the high-pressure gas supply joint, the first pipeline, the first refrigeration capillary tube and the second pipeline and then flows back into the ultra-low-temperature refrigeration unit through the low-pressure gas return joint, and the high-pressure low-temperature helium gas performs throttling expansion through the first refrigeration capillary tube and the second pipeline, so that the refrigeration effect is achieved; the vacuum pump body is used for vacuumizing the interior of the vacuum coating equipment, and the refrigeration assembly is used for refrigerating to adsorb water molecules in the vacuum coating equipment; because no moving part moves relatively in the limit low-temperature refrigeration unit, the problem that the moving part is easy to wear because lubricant cannot be used in the vacuum coating equipment is solved, and the use stability of the refrigeration device is enhanced.
Drawings
The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural diagram of a dual-unit refrigeration device according to the present invention.
Fig. 2 is a schematic view of a first embodiment of a refrigeration assembly of a dual unit refrigeration unit of the present invention.
Fig. 3 is a schematic diagram of a second embodiment of a refrigeration assembly of a dual unit refrigeration unit of the present invention.
Fig. 4 is a schematic view of a third embodiment of a refrigeration assembly of a dual unit refrigeration unit of the present invention.
Fig. 5 is a schematic structural diagram of a limit cryogenic refrigeration unit of a dual-unit refrigeration apparatus according to the present invention.
Detailed Description
The invention will be further elucidated and described with reference to the following embodiments and drawings in which:
referring to fig. 1 to 5, a dual-unit refrigeration device includes an ultra-low temperature refrigeration unit 10 and a extreme low temperature refrigeration unit 20, the ultra-low temperature refrigeration unit 10 is disposed outside a vacuum coating apparatus, the extreme low temperature refrigeration unit 20 is disposed inside the vacuum coating apparatus, the ultra-low temperature refrigeration unit 10 is provided with a high pressure air supply connector 11 and a low pressure air return connector 12, the extreme low temperature refrigeration unit 20 includes a vacuum pump body 21, the vacuum pump body 21 is provided with a pre-vacuum interface 211, the vacuum pump body 21 is provided with a refrigeration assembly 22, the refrigeration assembly 22 includes a first pipeline 221, a second pipeline 222, a third pipeline 223, a fourth pipeline 224, a first connection pipe 225, a second connection pipe 226, a first refrigeration capillary 227 and a second refrigeration capillary 228, an outer diameter of the first pipeline 221 is smaller than an inner diameter of the second pipeline 222, the first pipeline 221 passes through the second pipeline 222, an outer diameter of the third pipeline 223 is smaller than an inner diameter of the fourth pipeline 224, the third tube 223 passes through the fourth tube 224, and the first refrigerant capillary 227 has an inner diameter smaller than that of the first tube 221, and the second refrigerant capillary 228 has an inner diameter smaller than that of the third tube 223.
The first embodiment is as follows:
referring to fig. 1 to 2, two ends of the second pipeline 222 are respectively provided with an adapter 229, one end of the first refrigeration capillary 227 is connected to the end of the first pipeline 221, the other end of the first refrigeration capillary is communicated with the end of the second pipeline 222 through an adapter 229, the head end of the first pipeline 221 is communicated with the first high-pressure air supply joint 11, and the head end of the second pipeline 222 is communicated with the low-pressure return air joint 12 through an adapter 229.
High-pressure low-temperature helium gas produced by the ultra-low-temperature refrigeration unit 10 passes through the high-pressure gas supply joint 11, the first pipeline 221, the first refrigeration capillary 227 and the second pipeline 222 in sequence, and then flows back into the ultra-low-temperature refrigeration unit 10 through the low-pressure gas return joint 12, and the high-pressure low-temperature helium gas performs throttling expansion through the first refrigeration capillary 227 and the second pipeline 222, so that the refrigeration effect is achieved; therefore, the interior of the vacuum coating equipment is vacuumized through the vacuum pump body 21, and meanwhile, the refrigeration component 22 refrigerates, so that adsorption of water molecules in the vacuum coating equipment is realized; because no moving part moves relatively in the limit low-temperature refrigeration unit, the problem that the moving part is easy to wear because lubricant cannot be used in the vacuum coating equipment is solved, and the use stability of the refrigeration device is enhanced.
Example two:
referring to fig. 1 and 3, two ends of the fourth pipeline 224 are respectively provided with an adapter 229, the end of the third pipeline 223 is communicated with the head end of the first pipeline 221 through a first connecting pipe 225, the head end of the third pipeline is communicated with the first high-pressure air supply connector 11, the end of the fourth pipeline 224 is communicated with one end of the second connecting pipe 226 through an adapter 229, the other end of the second connecting pipe 226 is communicated with the head end of the second pipeline 222 through an adapter 229, one end of the first refrigeration capillary 227 is connected with the end of the first pipeline 221, the other end of the first refrigeration capillary 227 is communicated with the end of the second pipeline 222 through an adapter 229, and the head end of the fourth pipeline 224 is communicated with the low-pressure return air connector 12 through an adapter 229.
After passing through the high-pressure gas supply joint 11, the third pipeline 223, the first connecting pipe 225, the first pipeline 221, the first refrigeration capillary 227, the second pipeline 222 and the fourth pipeline 224 in sequence, the high-pressure low-temperature helium gas produced by the ultra-low-temperature refrigeration unit 10 returns to the ultra-low-temperature refrigeration unit 10 through the low-pressure gas return joint 12, and because the high-pressure low-temperature helium gas passes through the throttling expansion of the first refrigeration capillary 227, the second pipeline 22 and the fourth pipeline 224, a more sufficient refrigeration effect is achieved; therefore, the interior of the vacuum coating equipment is vacuumized through the vacuum pump body 21, and meanwhile, the refrigeration component 22 refrigerates, so that adsorption of water molecules in the vacuum coating equipment is realized; because no moving part moves relatively in the limit low-temperature refrigeration unit, the problem that the moving part is easy to wear because lubricant cannot be used in the vacuum coating equipment is solved, and the use stability of the refrigeration device is enhanced.
Example three:
referring to fig. 1 and 4, two ends of the fourth pipeline 224 are respectively provided with an adapter 229, a tail end of the third pipeline 223 is communicated with a head end of the first pipeline 221 through a first connecting pipe 225, the head end is communicated with the first high-pressure air supply connector 11, a tail end of the fourth pipeline 224 is communicated with one end of the second connecting pipe 226 through an adapter 229, the other end of the second connecting pipe 226 is communicated with a head end of the second pipeline 222 through an adapter 229, one end of the first refrigeration capillary 227 is connected with the tail end of the first pipeline 221, the other end is communicated with the tail end of the second pipeline 222 through an adapter 229, the head end of the fourth pipeline 224 is communicated with the low-pressure return air connector 12 through an adapter 229, one end of the second refrigeration capillary 228 is communicated with the tail end of the third pipeline 223 through an adapter 229, and the other end is communicated with the second connecting pipe 226.
After passing through the high-pressure gas supply joint 11, the third pipeline 223, the first connecting pipe 225, the first pipeline 221, the first refrigeration capillary tube 227, the second pipeline 222 and the fourth pipeline 224 in sequence, part of high-pressure low-temperature helium gas produced by the ultra-low-temperature refrigeration unit 10 returns to the ultra-low-temperature refrigeration unit 10 through the low-pressure gas return joint 12, and after passing through the high-pressure gas supply joint 11, the third pipeline 223, the second refrigeration capillary tube 228 and the fourth pipeline 224 in sequence, the other part of high-pressure low-temperature helium gas returns to the ultra-low-temperature refrigeration unit 10 through the low-pressure gas return joint 12, and because the high-pressure low-temperature helium gas passes through the first refrigeration capillary tube 227, the second refrigeration capillary tube 228, the second pipeline 222 and the fourth pipeline 224 and is subjected to twice throttling expansion, the refrigeration effect is further enhanced; therefore, the interior of the vacuum coating equipment is vacuumized through the vacuum pump body 21, and meanwhile, the refrigeration component 22 refrigerates, so that adsorption of water molecules in the vacuum coating equipment is realized; because no moving part moves relatively in the limit low-temperature refrigeration unit, the problem that the moving part is easy to wear because lubricant cannot be used in the vacuum coating equipment is solved, and the use stability of the refrigeration device is enhanced.
Referring to fig. 1 to 4, the first pipe 221, the second pipe 222, the third pipe 223 and the fourth pipe 224 are all in a planar spiral shape. The first pipe 221 and the third pipe 223 are arranged in parallel from top to bottom in the air pump body.
Two mounting holes are formed in the vacuum pump body 21, the head end of the third pipeline 223 penetrates through the mounting holes and is communicated with the high-pressure air supply connector 11 on the ultra-low-temperature refrigeration unit 10 through a pipeline, and the head end of the fourth pipeline 224 penetrates through the mounting holes and is communicated with the low-pressure air return connector 12 on the ultra-low-temperature refrigeration unit 10 through a pipeline.
Because the inside of the extreme low-temperature refrigeration unit is not provided with moving parts which move relatively, the problem that the moving parts are easy to wear because the inside of the vacuum coating equipment can not use the lubricant is avoided, thereby enhancing the use stability of the refrigeration device; meanwhile, the refrigeration effect in the vacuum coating equipment is enhanced because no heat is generated by the reciprocating motion of the moving part.
In summary, the refrigeration device is divided into the ultra-low temperature refrigeration unit 10 and the extreme low temperature refrigeration unit 20, when the refrigeration device is installed, the ultra-low temperature refrigeration unit 10 is installed outside the vacuum coating machine, the extreme low temperature refrigeration unit 20 is installed inside the vacuum coating machine, and the limitation low temperature refrigeration unit 20 refrigerates the high-pressure low-temperature gas input by the ultra-low temperature refrigeration unit 10 inside the vacuum coating machine by throttling expansion, so that the relative movement of components is avoided, the problem that the moving components are easy to lose due to lack of lubricating oil is also avoided, and the stability of the refrigeration device is improved.
Claims (5)
1. A double-unit refrigerating device is characterized by comprising an ultra-low temperature refrigerating unit and a limit low temperature refrigerating unit, the ultra-low temperature refrigeration unit is provided with a high-pressure air supply joint and a low-pressure air return joint, the extreme low temperature refrigeration unit comprises a vacuum pump body, a pre-vacuum pumping interface is arranged on the vacuum pump body, a refrigeration component is arranged in the vacuum pump body, the refrigerating component comprises a first refrigerating capillary tube and a first pipeline, a second pipeline is sleeved outside the first pipeline, a gap is arranged between the inner wall of the second pipeline and the first pipeline, the head end and the tail end of the second pipeline are respectively provided with an adapter, one end of the first refrigeration capillary is connected with the tail end of the first pipeline, the other end of the first refrigeration capillary is communicated with the tail end of the second pipeline through an adapter, the head end of first pipeline is linked together with first high pressure air feed joint, the head end of second pipeline is linked together through adapter and low pressure return air joint.
2. The dual-unit refrigeration device according to claim 1, wherein the refrigeration assembly further comprises a third pipeline, a fourth pipeline is sleeved outside the third pipeline, a gap is reserved between the inner wall of the fourth pipeline and the third pipeline, the dual-unit refrigeration device further comprises a first connecting pipe and a second connecting pipe, adapters are respectively arranged at the head end and the tail end of the fourth pipeline, the tail end of the third pipeline is communicated with the head end of the first pipeline through the first connecting pipe, the head end of the third pipeline is communicated with the first high-pressure gas supply connector, the tail end of the fourth pipeline is communicated with one end of the second connecting pipe through the adapter, the other end of the second connecting pipe is communicated with the head end of the second pipeline through the adapter, and the head end of the fourth pipeline is communicated with the low-pressure gas return connector through the adapter.
3. The dual unit refrigeration unit of claim 2 wherein said refrigeration assembly further comprises a second refrigeration capillary tube, said second refrigeration capillary tube communicating at one end with the end of the third conduit through an adapter and at the other end with a second connecting tube.
4. The dual unit refrigeration unit of claim 2, wherein the third conduit and the first conduit are disposed side-by-side one above the other within the vacuum pump body.
5. The dual unit refrigeration unit of any one of claims 2 to 4 wherein said first, second, third and fourth conduits are each in the form of a planar spiral.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120777101.5U CN215216785U (en) | 2021-04-16 | 2021-04-16 | Double-unit refrigerating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120777101.5U CN215216785U (en) | 2021-04-16 | 2021-04-16 | Double-unit refrigerating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215216785U true CN215216785U (en) | 2021-12-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120777101.5U Active CN215216785U (en) | 2021-04-16 | 2021-04-16 | Double-unit refrigerating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215216785U (en) |
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2021
- 2021-04-16 CN CN202120777101.5U patent/CN215216785U/en active Active
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