CN215203540U - Nanoparticle aerosol jet printing device - Google Patents

Abstract

The utility model discloses a nano-particle aerosol jet printing device, which comprises a powder aerosol generator, a Venturi tube and an aerosol spray head which are sequentially communicated, wherein a heating device is arranged near the aerosol spray head; the venturi tube is positioned above the powder aerosol generator, and the outlet end of the venturi tube is connected with the aerosol spray head through an air pipe; the aerosol nozzle adopts double-sheath gas protection to the aerosol during jet printing so as to improve the stability of the aerosol, ensure the fineness of jet printing and avoid the damage of the aerosol backflow to the nozzle; meanwhile, the heating device is utilized to directly and synchronously carry out laser sintering during jet printing, so that the efficiency of the jet printing process is improved, and the combination between the nano material and the substrate is strengthened.

Description

Nanoparticle aerosol jet printing device

Technical Field

The utility model relates to an electron printing field especially relates to a be applied to flexible electron printing, realizes spouting the nano-particle aerosol of seal high accuracy micro-pattern or micro-structure and spouts seal device.

Background

With the continuous development of electronic technology, the precision requirement of the production process is higher and higher, the traditional microelectronic production process is completed in a clean room by high vacuum evaporation and material reduction manufacturing technology, and the defects of the process are as follows: the evaporation equipment and the process have high cost, expensive operating cost, time and material consumption and high discharge cost, and the waste liquid is easy to cause heavy metal pollution and chemical pollution. Compared with the traditional microelectronic production process, the printed electronic technology uses optimized graphic printing as an additive manufacturing process thereof, so that the functional material is formed on the substrate. The printed electronic technology greatly simplifies the production process, saves materials and is nearly zero in pollution emission. Meanwhile, the flexible printed circuit board has the characteristics of large area, high yield, low cost, mass production and the like, has the advantages of flexibility, small size, light weight, large-area functional distribution, low price and the like, and is widely applied to the fields of flexible circuits, displays, electronic packaging, biomedicine, energy science and technology, space science and the like.

The conventional printed electronic technology includes gravure printing, screen printing, inkjet printing, photolithography, laser etching, etc., however, some disadvantages of the conventional printed electronic technology greatly limit the further development of the printed electronic technology. For example, the pattern positioning accuracy is low and the resolution is low (> 20 μm), the manufacturing process is complex and toxic, the manufacturing cost is high, the material utilization rate is low, and the like, in order to overcome the problems, a new aerosol jet printing technology is developed in recent years, the aerosol jet printing technology is a non-contact and direct-writing type digital additive manufacturing technology, the printing resolution can reach 10 μm level, and the problems of low pattern accuracy and low resolution of the printed electronic technology are solved to a certain extent. The aerosol jet printing technology has the main advantages of high printing resolution; the printing precision is high; the applicable material range is wide; can work in the range of 1-5 mm (i.e. the distance between the outlet of the nozzle of the device and the surface of the substrate), thereby ensuring that the aerosol jet printing technology can be used for printing complex and fine structures.

Aerosol refers to a dispersion of solid or liquid particles of any substance dispersed and suspended in a gaseous medium with a specific law of motion. Wherein the suspended particles are called dispersed phase with size of 0.001-100 μm, and the gas carrying the particles is called dispersion medium. At present, the spray material of the traditional aerosol spray printing technology mostly exists in the form of ink, namely, the dispersed phase is mixed with an organic solvent and then added into spray printing equipment, the spray printing equipment firstly atomizes the functional material ink into small droplets and then sprays and prints the droplets on a substrate through a focusing nozzle, so that the miniature digital additive manufacturing is realized. However, because of the use of organic solvents, the existing aerosol jet printing technology has the problems of environmental pollution, harsh storage conditions of part of ink, and the need of removing and recycling the solvents and surfactants. On the other hand, in order to ensure the jet printing precision, part of the aerosol jet printing devices adopt a jet printing structure capable of generating a single-sheath gas layer, and the technology is often applied to high-precision occasions, so the diameter of the outlet of the nozzle is less than 1mm and even reaches below 0.1mm, if the outlet speed of the nozzle is too high, the outlet pressure is sharply reduced, a large backflow is formed at the outlet of the nozzle, and finally the nozzle is blocked and even damaged. Furthermore, the traditional aerosol jet printing technology for solid powder often adopts solid particle aerosol to carry out jet printing earlier, and after jet printing is finished, the pattern that still needs to spout the seal carries out thermal reduction and sintering treatment, and the multiple flow is handled and is makeed that spout the seal efficiency and obviously reduce, and the separation of step also influences the adhesive strength who spouts the material. With the development of electronic devices such as jet printing flexible circuits, thin film transistors and supercapacitors, the demand for aerosol jet printing technology for the production of the electronic devices is increasing, and the existing aerosol jet printing technology for solid powder, especially for some metal powder, needs to be further improved.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that a solid phase nano-material aerosol that can provide the density stability just is difficult for leading to the nanoparticle aerosol of nozzle jam spouts seal device is provided.

In order to solve the technical problem, the technical solution of the utility model is that:

a nanoparticle aerosol jet printing device comprises a powder aerosol generator, a Venturi tube and an aerosol nozzle which are sequentially communicated, wherein a heating device is arranged close to the aerosol nozzle; the venturi tube is located above the powder aerosol generator, and the outlet end of the venturi tube is connected with the aerosol spray head through an air pipe.

Preferably, the heating device is a laser generator which emits laser to the surface of the substrate below the nozzle of the aerosol spray head.

Preferably, the aerosol nozzle comprises an upper end outer shell and a lower end outer shell which are mutually covered, an aerosol supply channel positioned in the center and an aerosol focusing member around the aerosol supply channel, the aerosol focusing member and the upper end outer shell of the aerosol nozzle enclose to form a first sheath air cavity for providing focusing sheath air, and the aerosol focusing member and the lower end outer shell of the aerosol nozzle enclose to form a second sheath air cavity for providing protective sheath air; the aerosol supply passage includes that it installs the nozzle to advance gluey section and rectification section and low reaches end, it glues the mouth to have seted up out on the nozzle, first sheath air cavity is through first intake duct UNICOM the rectification section, second sheath air cavity UNICOM second inlet channel, second inlet channel is equipped with the second gas outlet, the second gas outlet is aimed at the nozzle.

Preferably, the upper end of the powder aerosol generator is provided with a glue outlet cavity, and the neck section of the venturi tube is horizontally arranged and the lower end of the venturi tube is provided with a glue inlet communicated with the glue outlet cavity.

Preferably, the powder aerosol generator comprises a generator body and a vibrating table, the generator body is internally provided with an aerosol generating cavity, the vibrating table is positioned below the generator body, one end of the vibrating table is arranged below a storage bin at the top of the generator body and is provided with an opening connected with an air-permeable sol generating cavity in parallel, a first air inlet is formed in the side wall, close to the bottom, of the aerosol generating cavity, and a steel wire mesh, a filter and a gas distributor are respectively arranged from top to bottom in the middle section of the aerosol generating cavity.

Preferably, the side wall of the glue outlet cavity, which is located inside the aerosol generation cavity, is a semi-open baffle, the lower part of the glue outlet cavity is isolated from the aerosol generation cavity by the baffle, and the upper part of the glue outlet cavity is communicated with the aerosol generation cavity through a screening opening above the baffle.

Preferably, the outlet end of the venturi tube is further connected with a recovery device through an air pipe.

The nanoparticle aerosol jet printing device has the following advantages:

1. the glue outlet cavity is arranged to screen solid phase nano materials in the aerosol to obtain relatively stable solid phase nano material aerosol with small particle size, and high shear stress of high-speed airflow in the Venturi tube acts on the aerosol to impact, so that the density and state stability of the aerosol are further improved, re-agglomeration of nano particles in the aerosol is avoided, stable and uniform aerosol is guaranteed to be sprayed and printed on a substrate and deposited, and a clear target pattern is obtained;

2. the spray printing device directly forms powder aerosol by utilizing gas carried powder, and compared with the traditional aerosol spray printing, the additive processing technology for directly spray printing nano material particles on a substrate can reduce the application of an organic solvent, avoid the problem of harsh ink storage conditions and the problem of possible environmental pollution, avoid the working link of removing and recovering the solvent and the surfactant and improve the working efficiency of aerosol printing;

3. the aerosol sprayed by the aerosol nozzle of the spray printing device is protected by double sheath gases, so that the aerosol can be effectively prevented from being diffused after being sprayed, the fineness of aerosol spray printing is improved, and the aerosol can be prevented from refluxing to damage the nozzle;

4. the aerosol nozzle is provided with a heating device, aerosol jet printing and laser sintering can be synchronously carried out, the working efficiency can be effectively improved, in addition, laser is adopted to heat the aerosol and preheat the substrate when in injection, and the connection between the solid-phase nano material and the substrate can be enhanced.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the working principle of the aerosol nozzle of the present invention;

FIG. 3 is a schematic view of the internal structure of the aerosol nozzle of the present invention;

fig. 4 is a side view of the aerosol spray head of the present invention;

fig. 5 is a bottom view of the aerosol nozzle of the present invention;

fig. 6 is a first perspective view of the aerosol nozzle of the present invention;

fig. 7 is a perspective view of the aerosol nozzle of the present invention with a second viewing angle.

Detailed Description

The following detailed description of the present invention will be made with reference to the accompanying drawings and specific embodiments.

The utility model discloses a nano-particle aerosol spouts seal device, as shown in fig. 1-7, should spout seal device and include powder aerosol generator 1, venturi 2 and the aerosol shower nozzle 3 of UNICOM in proper order, integrate powder aerosol generator 1 and aerosol shower nozzle 3 into a device through venturi 2, can make and spout seal device overall structure more compact. In the powder aerosol generator 1, gas and solid-phase nano material particles are mixed to form aerosol 91, and the aerosol 91 enters an aerosol nozzle 3 through a Venturi tube 2 to be subjected to spray printing deposition to form a pattern. Be equipped with heating device 4 near aerosol shower nozzle 3, heating device 4 heats spun aerosol at aerosol shower nozzle 3 spout seal in-process, preheats the substrate 92 that is used for the deposit aerosol simultaneously, realizes spouting seal and sintering and goes on in step, not only improves and spouts seal work efficiency, can strengthen solid phase nano-material and substrate 92 inter-phase connection in the sintering process in step moreover, makes and spouts the seal result more stable.

The powder aerosol generator 1 comprises a generator body 12 with an aerosol generating cavity 11 inside and a vibrating table 13 located below the generator body 12, the generator body 12 can be fixedly installed on the upper surface of the vibrating table 13 through bolt connection and can generate regular vibration along with the operation of the vibrating table 13, the energy wave generated by vibration is beneficial to breaking the agglomeration between solid-phase nano material particles, so that the solid-phase nano material particles are separated from each other, and the adopted vibrating table 13 can directly adopt the existing mature vibrating equipment, such as KS-130 equipment of Germany IKA. A storage bin 14 for storing solid phase nano materials 93 such as metal nano particles is arranged above the generator body 12, and an opening 141 is arranged below the storage bin 14 and is connected with the inside of the aerosol generating chamber 11 in parallel. Specifically, the lower end of the storage bin 14 is contracted to form a tubular structure 142, the tubular structure 142 is inserted into the aerosol generation cavity 11 from the top of the generator body 12, the tubular structure 142 is connected with the top of the generator body 12 by adopting a closed thread, and the tubular structure 142 is further provided with an opening and closing valve 143 for controlling the solid-phase nanomaterial 93 to enter the aerosol generation cavity 11. The aerosol generating cavity 11 is provided with a first air inlet 151 on the side wall close to the bottom, the middle section of the aerosol generating cavity 11 is respectively provided with a steel wire mesh 16, a filter 17 and an air distributor 18 from top to bottom, the solid-phase nano material 93 placed under the storage bin 14 stays on the surface of the steel wire mesh 16, and large lumps in the solid-phase nano material 93 can be broken by the steel wire mesh 16 along with the vibration of the steel wire mesh 16. The filter 17 prevents the solid-phase nanomaterial 93 from entering under the gas distributor 18, and also filters impurities that enter the interior of the aerosol-generating chamber 11 with the gas flow. The air current gets into in the aerosol takes place the chamber 11 through first air inlet 151, upwards through the dispersion of gas distributor 18, and even solid-phase nano-material 93 that will be broken and got from the bottom of solid-phase nano-material 93 upwards takes away, and solid-phase nano-material 93 rises along with the air current, and the in-process and air current interact form aerosol 91 that rises. Further, a second air inlet 152 may be further disposed on a side wall of the aerosol generating chamber 11 near the top, and the air flow entering from the second air inlet 152 interacts with the upward air flow to promote formation of the aerosol 91 and dilute the aerosol 91, so as to reduce the possibility of re-agglomeration of the solid-phase nanomaterial 93.

Powder aerosol generator 1 upper end is equipped with the play of being arranged in sieving aerosol solid phase nano-material 93 size and glues chamber 19, goes out in this embodiment and glues chamber 19 and sets up at the inside top in aerosol generation chamber 11, and is concrete, goes out to glue chamber 19 and inserts in aerosol generation chamber 11 from generator body 12 top, goes out to glue chamber 19 upper end lateral wall surface and generator body 12 top and adopts airtight threaded connection. The side wall of the glue outlet cavity 19 positioned in the aerosol generation cavity 11 is a semi-open baffle 191, the baffle 191 isolates the lower part of the glue outlet cavity 19 from the aerosol generation cavity 11, the upper part of the glue outlet cavity 19 is communicated with the aerosol generation cavity 11 through a screening hole 192 above the baffle 191, and the baffle 191 sorts the solid phase nano materials 93 in the aerosol 91 to obtain the small-particle-size solid phase nano material aerosol 95 with the same size. Specifically, the rising aerosol 91 enters the gel outlet cavity 19 through the screening opening 192, and due to the existence of the baffle 191, most of the large-particle-size solid-phase nanomaterial is isolated by the baffle 191 under the action of gravity, and continues to interact in the aerosol generation cavity 11 to form a small-particle-size solid-phase nanomaterial, and the small-particle-size solid-phase nanomaterial directly enters the gel outlet cavity 19 along with the airflow from the screening opening 192 to form the small-particle-size solid-phase nanomaterial aerosol 95.

Venturi 2 is located powder aerosol generator 1 top, and in this embodiment, venturi 2's neck section 21 level sets up and the lower extreme is seted up and is gone into jiao kou 22 of gluing chamber 19 UNICOM. Specifically, the air inlet 23 and the outlet end 24 of the venturi tube 2 are horizontally arranged, a neck section 21 with an inner diameter gradually enlarged after being gradually reduced is arranged between the air inlet 23 and the outlet end 24, the minimum part of the inner diameter of the neck section 21 is downwardly opened and extends to form a glue inlet pipeline 25, the glue inlet pipeline 25 is inserted into the glue outlet cavity 19 from the top of the glue outlet cavity 19, the outer wall of the lower end of the glue inlet pipeline 25 is connected with the top of the glue outlet cavity 19 through a closed thread, and small-particle-diameter solid-phase nano material aerosol 95 screened by the baffle 191 flows into the glue outlet cavity 19 and is positioned below the glue inlet 22. Meanwhile, the high-speed airflow 94 horizontally enters the venturi tube 2 from the air inlet 23, negative pressure is formed inside the rubber inlet pipe 25, and the small-particle-size solid-phase nano-material aerosol 95 below the rubber inlet 22 then enters the venturi tube 2 upwards to interact with the high-speed airflow 94 in the direction different from the entering direction of the small-particle-size solid-phase nano-material aerosol 95. Specifically, the solid phase nano material particles in the small particle size solid phase nano material aerosol 95 which enters the venturi tube 2 upwards are impacted with each other or continuously impacted on the inner wall of the tube by the high shear stress of the high-speed airflow 94, and the impacted result is that the small particles are further fully mixed with the high-speed airflow 94, while a small amount of large particles entering along with the airflow are further decomposed and dispersed to form small particles, so as to finally obtain the more stable small particle size solid phase nano material aerosol 95, and the smaller particle size solid phase nano material aerosol 95 flows out through the outlet end 24 of the venturi tube 2.

The outlet end 24 of the venturi tube 2 is in threaded connection with the aerosol nozzle 3 through the air tube 26, and provides the aerosol nozzle 3 with the solid-phase nanomaterial aerosol 95 with small particle size for jet printing. Because the aerosol flow generated in the powder aerosol generator 1 is often larger than the aerosol flow required by the aerosol nozzle 3, after the solid-phase nano-material aerosol 95 with small particle size flows out of the venturi tube 2, one part of the aerosol enters the aerosol nozzle 3, and the other part of the aerosol needs to be provided with a recovery device 5 for collecting the solid-phase nano-material particles in the redundant aerosol for reuse. The outlet end 24 of the venturi tube 2 is further connected to a recycling device 5 through an air tube 26, and the specific structure of the recycling device 5 has no direct relation to the solution of the present disclosure, and the remaining aerosol can be directly removed, so the specific structure of the recycling device 5 is not described herein again. In this embodiment, a pressure release valve 27 is provided on the air pipe 26 connected to the aerosol nozzle 3, so that the inlet pressure is controlled by the pressure release valve 27 to control the flow of the small-particle-size solid-phase nanomaterial aerosol 95 flowing into the aerosol nozzle 3, and the pressure release valve 27 can accurately control the flow of the small-particle-size solid-phase nanomaterial aerosol 95 entering the aerosol nozzle 3, thereby ensuring the accuracy of jet printing.

The aerosol 95 of the solid phase nano material with small particle size entering the aerosol nozzle 3 is further focused to form a compact aerosol 97 to be ejected for realizing jet printing, the aerosol nozzle 3 comprises an upper end shell 35 and a lower end shell 34 which are mutually covered, an aerosol supply channel 30 positioned in the center and an aerosol focusing member 32 around the aerosol supply channel, the aerosol focusing member 32 and the upper end shell 35 of the aerosol nozzle 3 are enclosed to form a first sheath air cavity 301 for providing a focusing sheath air 96, and the aerosol focusing member 32 and the lower end shell 34 of the aerosol nozzle 3 are enclosed to form a second sheath air cavity 302 for providing a protective sheath air 98; the aerosol supply channel 30 comprises a glue inlet section 303 and a rectification section 304, a nozzle 33 is installed at the downstream end of the aerosol supply channel, a glue outlet 307 is formed in the nozzle, the first sheath air cavity 301 is communicated with the rectification section 304 through a first air inlet 305, the second sheath air cavity 302 is communicated with a second air inlet channel 308, a second air outlet 3081 is formed in the second air inlet channel 308, and the second air outlet 3081 is aligned with the nozzle 33.

Specifically, the aerosol nozzle 3 comprises an aerosol inlet piece 31, an aerosol focusing piece 32, a nozzle 33 and a lower end outer shell 34 which are coaxially arranged from top to bottom, the air pipe 26 connected with the venturi tube is in sealed threaded connection with the aerosol inlet piece 31, and the aerosol supply channel 30 penetrates through the aerosol nozzle 3 from top to bottom. The aerosol supply channel 30 comprises a glue inlet section 303 which vertically penetrates through the aerosol inlet piece 31 and a rectification section 304 which vertically penetrates through the aerosol focusing piece 32, wherein the glue inlet section 303 is positioned at the upstream of the rectification section 304, and the inner diameter of the glue inlet section 303 is smaller than that of the rectification section 304.

The aerosol inlet piece 31 is further sleeved with an upper end shell 35, a sealing rubber ring is arranged at the joint of the upper end shell 35 and the aerosol inlet piece 31, the aerosol focusing piece 32 is fixed at the lower opening of the upper end shell 35 through threaded connection, the upper end shell 35 and the lower end shell 34 are mutually covered and locked through bolts to form an aerosol spray head shell, and the joint of the upper end shell 35, the lower end shell 34 and the aerosol focusing piece 32 is provided with the sealing rubber ring. The upper end housing 35, the aerosol focusing member 32 and the aerosol inlet member 31 together enclose to form an annular first sheath air cavity 301, the sidewall of the upper end housing 35 is provided with a first sheath air inlet hole 351, in this embodiment, only one first sheath air inlet hole 351 is provided, or two or more first sheath air inlet holes 351 are provided, and the first sheath air inlet holes 351 are communicated with the air compression device to provide focusing sheath air for the aerosol supply channel 30. First sheath air cavity 301 is through the first intake duct 305 UNICOM rectification section 304 of an inverted cone, first intake duct 305 is formed for aerosol inlet part 31 and aerosol focusing part 32 clearance fit, first intake duct 305 is opened between advancing gluey section 303 and rectification section 304 and is equipped with annular first gas outlet 3051, first gas outlet 3051 UNICOM aerosol supply channel 30 of first sheath air cavity 301, form annular sheath gas through first gas outlet 3051 after the focusing sheath gas, rectification section 304 lower extreme internal diameter reduces gradually and forms gluey section 306, in rectification section 304, aerosol can focus the shrink gradually under the effect of annular sheath gas, and form fine and close aerosol micelle 97 and get into gluey section 306.

The downstream end of the aerosol supply channel 30 is provided with a nozzle 33, i.e. the lower end of the glue outlet section 306 is provided with the nozzle 33, and the nozzle 33 is provided with a glue outlet 307. Specifically, the lower opening of the aerosol focusing element 32 is plugged with a nozzle connecting element 36, the nozzle connecting element 36 is hollow, and the hollow part is the glue outlet section 306, the nozzle 33 includes a glue outlet head 331 located in the lower hollow section and a mounting head 332 located in the upper hollow section, and the mounting head 332 is fixedly connected to the lower opening of the nozzle connecting element 36 through a threaded connection. After the nozzle connecting piece 36 is inserted into the aerosol focusing piece 32, a positioning piece 37 is sleeved at the lower end of the aerosol focusing piece 32 from bottom to top and locks the nozzle connecting piece 36 and the aerosol focusing piece 32, the positioning piece 37 and the aerosol focusing piece 32 can be connected by threads, a glue outlet 307 is arranged at the lower end of a glue outlet head 331, the glue outlet head 331 is sleeved with the lower end shell 34, the positioning piece 37, the aerosol focusing piece 32 and the lower end shell 34 jointly enclose an annular second sheath air cavity 302, a second sheath air inlet 341 is arranged on the side wall of the lower end shell 34, in the embodiment, two second sheath air inlets 341 are arranged, and the second sheath air inlet 341 is communicated with an air compression device to provide protective sheath air for the nozzle 33. The inner diameter of the lower end shell 34 is gradually reduced, a lower hole 342 is formed in the center, the glue outlet head 331 is located above the lower hole 342, a second air inlet channel 308 is formed between the inner conical surface of the lower half section of the lower end shell 34 and the outer conical surfaces of the lower ends of the nozzle connecting piece 36 and the positioning piece 37, the second air inlet channel 308 is communicated with the second sheath air cavity 302, a second air outlet 3081 of the second air inlet channel 308 is formed between the lower opening of the lower hole 342 and the conical surface of the glue outlet head 331, the second air outlet 3081 is also annular, the second air outlet 3081 of the second sheath air cavity 302 is aligned with the nozzle 33, when the dense aerosol 97 is ejected from the glue outlet 307, the protective sheath air forms an annular sheath air after passing through the second air outlet 3081, the protective sheath air acts on the surface of the ejected dense aerosol 97, the effect of restraining the emission of the dense aerosol 97 is achieved, and the influence of the backflow of the glue outlet 307 of the nozzle 33 on the nozzle 33 can be reduced.

The dense aerosol 97 is emitted from the aerosol nozzle 3 and deposited on the substrate 92 below the nozzle, and a heating device 4 is provided adjacent to the aerosol nozzle 3, the heating device 4 being a laser generator in this embodiment that emits laser light onto the surface of the substrate 92 below the nozzle 33. The laser generator heats the dense aerosol 97 by emitting a laser beam 99, and simultaneously preheats the substrate 92 below the spray head, the energy of the laser can strengthen the connection between the solid-phase nano material and the substrate 92, and the energy of the laser can promote the formation of metal bonds between metal nano particles, so as to ensure the stability of the connection, reduce the porosity between the particles and improve the bonding degree between the particles and the substrate 92.

When the device is applied, the nanoparticle aerosol jet printing method is realized through the following steps:

as shown in fig. 1-7, in step one, the vibrating table 13 is applied to the powder aerosol generator 1 containing the solid-phase nanomaterial 93, and the vibrated solid-phase nanomaterial 93 interacts with the airflow passing through the powder aerosol generator 1 to form an upward flowing aerosol 91.

And step two, the solid phase nanometer materials 93 in the aerosol 91 are sorted by utilizing the gravity of the solid phase nanometer materials to obtain small-particle-size solid phase nanometer material aerosol 95 with the same size, specifically, the nanometer material particles are distributed in a layered mode based on the particle sizes due to the fact that the gravity and the buoyancy difference of the nanometer material particles with different sizes are different, the large-particle-size solid phase nanometer materials with lower heights are settled and recycled, and the small-particle-size solid phase nanometer materials positioned at the high positions float into the glue outlet cavity 19 with the venturi tube 2 arranged above due to the fact that the small-particle-size solid phase nanometer materials are higher than the baffle 191 used for sorting the solid phase nanometer materials.

And step three, the venturi tube 2 is utilized to send the small-particle-size solid-phase nano material aerosol 95 into the aerosol nozzle 3, the small-particle-size solid-phase nano material aerosol 95 in the venturi tube 2 interacts with the high-speed airflow 94 in the direction different from the small-particle-size solid-phase nano material aerosol, specifically, the neck section 21 of the venturi tube 2 is horizontally arranged, the lower end of the neck section is provided with the glue inlet 22, the high-speed airflow 94 horizontally enters the venturi tube 2, and the small-particle-size solid-phase nano material aerosol 95 below the glue inlet 22 upwards enters the venturi tube 2 to interact with the high-speed airflow 94, so that the more stable small-particle-size solid-phase nano material aerosol 95 is obtained.

And step four, introducing focusing sheath gas 96 into the aerosol nozzle 3 to the periphery of the small-particle-size solid-phase nano material aerosol 95 to enable the small-particle-size solid-phase nano material aerosol 95 to shrink to form a compact aerosol bundle 97, specifically, forming the annular focusing sheath gas 96 around the aerosol 95 based on the inverted conical surface-shaped first air inlet 305 and the annular first air outlet 3051, and enabling the focusing sheath gas 96 to act on the aerosol 95 to enable the aerosol to focus and shrink to form the compact aerosol bundle 97.

And a fifth step of introducing the protective sheath gas 98 around the dense air-soluble particles 97 from the nozzle 33 to suppress the divergence of the dense air-soluble particles 97 after leaving the nozzle 33, specifically, forming the annular protective sheath gas 98 around the dense air-soluble particles 97 emitted from the nozzle 33 by the inverted conical second air inlet 308 and the annular second air outlet 3081, and allowing the protective sheath gas 98 to act around the dense air-soluble particles 97 to suppress the divergence of the dense air-soluble particles 97 after leaving the nozzle 33.

Step six, the aerosol nozzle 3 sprays the dense aerosol 97 to the substrate 92 and simultaneously preheats the substrate and improves the bonding strength between the solid-phase nano material 93 and the substrate 92, and specifically, the laser 99 is adopted to preheat the substrate 92 and improve the bonding strength between the solid-phase nano material 93 and the substrate 92.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that all changes and modifications made according to the claims and the specification of the present invention should fall within the scope covered by the present invention.

Claims (7)

1. A nanoparticle aerosol jet printing device is characterized by comprising a powder aerosol generator, a Venturi tube and an aerosol spray head which are sequentially communicated, wherein a heating device is arranged close to the aerosol spray head; the venturi tube is located above the powder aerosol generator, and the outlet end of the venturi tube is connected with the aerosol spray head through an air pipe.

2. The nanoparticle aerosol jet printing apparatus of claim 1, wherein the heating device is a laser generator that directs laser light onto the surface of the substrate below the nozzle of the aerosol jet head.

3. The nanoparticle aerosol jet printing apparatus of claim 1, wherein the aerosol jet head comprises an upper housing and a lower housing which are connected to each other in a covering manner, a central aerosol supply channel, and a surrounding aerosol focusing member, wherein the aerosol focusing member and the upper housing of the aerosol jet head enclose to form a first sheath air chamber for providing the focusing sheath air, and the aerosol focusing member and the lower housing of the aerosol jet head enclose to form a second sheath air chamber for providing the protective sheath air; the aerosol supply passage includes that it installs the nozzle to advance gluey section and rectification section and low reaches end, it glues the mouth to have seted up out on the nozzle, first sheath air cavity is through first intake duct UNICOM the rectification section, second sheath air cavity UNICOM second inlet channel, second inlet channel is equipped with the second gas outlet, the second gas outlet is aimed at the nozzle.

4. The nanoparticle aerosol jet printing device according to claim 1, wherein a glue outlet chamber is arranged at the upper end of the powder aerosol generator, the neck section of the venturi tube is horizontally arranged, and the lower end of the venturi tube is provided with a glue inlet communicated with the glue outlet chamber.

5. The nanoparticle aerosol jet printing device according to claim 4, wherein the powder aerosol generator comprises a generator body with an aerosol generating cavity inside, a vibrating table located below the generator body, an opening is arranged below a storage bin at the top of the generator body and is connected with the inside of the aerosol generating cavity in parallel, a first air inlet is arranged on the side wall of the aerosol generating cavity close to the bottom, and a steel wire mesh, a filter and a gas distributor are respectively arranged at the middle section of the aerosol generating cavity from top to bottom.

6. The nanoparticle aerosol jet printing device according to claim 5, wherein the sidewall of the glue outlet chamber inside the aerosol generation chamber is a semi-open baffle, the baffle isolates the lower part of the glue outlet chamber from the aerosol generation chamber, and the upper part of the glue outlet chamber is communicated with the aerosol generation chamber through a screening opening above the baffle.

7. The nanoparticle aerosol jet printing device of claim 1, wherein: the outlet end of the Venturi tube is also connected with a recovery device through an air tube.

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