CN215181202U - Large-view-field eyepiece for scattering measurement - Google Patents
Large-view-field eyepiece for scattering measurement Download PDFInfo
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- CN215181202U CN215181202U CN202121667797.2U CN202121667797U CN215181202U CN 215181202 U CN215181202 U CN 215181202U CN 202121667797 U CN202121667797 U CN 202121667797U CN 215181202 U CN215181202 U CN 215181202U
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Abstract
The utility model discloses an eyepiece with a large view field for scattering measurement, which comprises a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5) and a sixth lens (6); the first lens (1), the second lens (2), the third lens (3), the fourth lens (4), the fifth lens (5) and the sixth lens (6) are arranged in sequence from an object side to an image side; the first lens (1), the second lens (2), the third lens (3) and the fourth lens (4) are spherical lenses, and main shafts of the spherical lenses are positioned on the same straight line; the surface of the first lens (1) facing the object side is a convex surface, and the surface of the first lens (1) facing the image side is a concave surface; the surfaces of the second lens (2) facing the object side and the image side are both concave surfaces. The beneficial effects are as follows: the objective lens has a large field of view, the size of the objective lens is reduced, and the use is convenient.
Description
Technical Field
The utility model relates to an eyepiece for scatterometry's big visual field belongs to the optical equipment field.
Background
The objective lens is a lens group formed by combining a plurality of lenses. The combined use aims to overcome the imaging defects of a single lens and improve the optical quality of the objective lens. Generally, the distortion of the objective lens increases sharply with the increase of the field of view, the distortion of the objective lens with the field of view of 60 degrees can be controlled within 5%, while the distortion of the objective lens with the field of view of 100 degrees usually exceeds 20%, and in the case of a large field of view, the distortion is reduced by adding an aspheric surface or making the lens complicated. The existing objective lens has the defects that the large view field and the small view field can not be obtained due to the structural design, so that the volume of the existing objective lens with the large view field is large, and the use of the objective lens is influenced.
SUMMERY OF THE UTILITY MODEL
To the above, an object of the utility model is to provide an eyepiece for scatterometry's big visual field, have the condition in big visual field guaranteeing the objective lens, reduce the volume of objective, facilitate the use.
The utility model discloses a following technical scheme realizes:
an eyepiece with a large field of view for scatterometry comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens; the first lens, the second lens, the third lens, the fourth lens, the fifth lens and the sixth lens are arranged in sequence from an object side to an image side; the first lens, the second lens, the third lens and the fourth lens are spherical lenses, and main shafts of the first lens, the second lens, the third lens and the fourth lens are positioned on the same straight line; the surface of the first lens facing the object side is a convex surface, and the surface of the first lens facing the image side is a concave surface; the surfaces of the second lens facing the object side and the image side are both concave surfaces; the surfaces of the third lens facing the object side and the image side are convex surfaces; the surfaces of the fourth lens facing the object side and the image side are both concave surfaces; the surfaces of the fifth lens facing the object side and the image side are convex surfaces; the surfaces of the sixth lens element facing the object side and the image side are convex surfaces; the first lens, the second lens, the third lens and the fourth lens are arranged at intervals, a convex surface of the fifth lens, which faces the object side, is arranged in a concave surface of the fourth lens, which faces the image side, and the fifth lens and the sixth lens are arranged at intervals; and an aperture diaphragm is arranged in the middle of the fourth lens.
Preferably, the fourth lens and the fifth lens form a cemented lens for the large-field eyepiece for scatterometry.
Optimized, large field of view eyepiece for scatterometry as described above, said first lens having a refractive index in the range of (1.58, 1.66); the refractive index range of the second lens is (1.45, 1.62); the refractive index range of the third lens is (1.71, 1.79); the refractive index range of the fourth lens is (1.71, 1.79); the refractive index range of the fifth lens is (1.51, 1.58); the refractive index range of the sixth lens is (1.62, 1.65).
Optimally, the first lens has a refractive index range of 1.62, the second lens has a refractive index range of 1.49, the third lens has a refractive index range of 1.75, the fourth lens has a refractive index range of 1.75, the fifth lens has a refractive index range of 1.55, and the sixth lens has a refractive index range of 1.62.
Preferably, the focal length of the first lens is-13.96 mm, the focal length of the second lens is-6.53 mm, the focal length of the third lens is 6.98 mm, the focal length of the fourth lens is-28.56 mm, the focal length of the fifth lens is 13.24 mm, and the focal length of the sixth lens is 11.86 mm.
Preferably, in the eyepiece with a large field of view for scatterometry described above, the radii of curvature of the object-side surface and the image-side surface of the first lens are 31.89mm and 6.71mm, respectively, the radii of curvature of the object-side surface and the image-side surface of the second lens are-20.36 mm and 3.85mm, respectively, the radii of curvature of the object-side surface and the image-side surface of the third lens are 7.92mm and-12.35 mm, respectively, the radii of curvature of the object-side surface and the image-side surface of the fourth lens are-50.27 mm and 5.24mm, respectively, the radii of curvature of the object-side surface and the image-side surface of the fifth lens are 5.24mm and-5.24 mm, respectively, and the radii of curvature of the object-side surface and the image-side surface of the sixth lens are 7.90mm and-93.79 mm, respectively.
Optimally, the focal length ratio of the fourth lens to the cemented lens of the large-field eyepiece for scatterometry is (-2.1, -1.7), and the focal length ratio of the fifth lens to the cemented lens is (0.8, 0.9).
Preferably, in the eyepiece with a large field of view for scatterometry, the focal length ratio of the fourth lens to the cemented lens is-1.85, and the focal length ratio of the fifth lens to the cemented lens is 0.86.
Optimally, the first lens and the second lens are spaced at a distance of 2.95mm from each other by the large-field eyepiece for scatterometry; the spacing distance between the second lens and the third lens is 0.72 mm; the distance between the third lens and the aperture diaphragm is 1.41 mm; the spacing distance between the aperture diaphragm and the cemented lens is 0.20 mm; the spacing distance between the cemented lens and the sixth lens is 0.20 mm.
Compared with the prior art, the utility model, following advantage and beneficial effect have:
1) in the technical scheme of this application, constitute cemented lens with fourth lens, fifth lens for the fifth lens is laminated in the concave surface of fourth lens orientation image side towards the convex surface of thing side, the effectual focal length that improves the short burnt of objective lens, when guaranteeing that the objective lens has great magnification, through shortening the total length of lens group, reduces the volume of objective lens.
2) In the technical scheme of this application, because the battery of lens of objective has used through focus, camber complex cemented lens, can guarantee that objective has better imaging quality, ensure that objective can reach better scattering measurement effect.
3) According to the technical scheme, the objective lens can be ensured to have a larger view field through the combination of a plurality of different spherical lenses; through accurate curvature and spacing matching, the objective lens can reach a view field exceeding 100 degrees, the measurement view field is wide during scattering measurement, and the scattering measurement effect is guaranteed.
4) According to the technical scheme, all the lenses are global surface lenses, the optical performance stability is high, the cost is low, the process is simple, and the lower cost is guaranteed.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a schematic structural diagram of the present application.
Reference numbers and corresponding part names in the drawings:
1-first lens, 2-second lens, 3-third lens, 4-fourth lens, 5-fifth lens, 6-sixth lens, 7-imaging surface and 8-aperture diaphragm.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the following examples and drawings, and the exemplary embodiments and descriptions thereof of the present invention are only used for explaining the present invention, and are not intended as limitations of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to one of ordinary skill in the art that: it is not necessary to employ these specific details to practice the invention. In other instances, well-known structures, circuits, materials, or methods have not been described in detail so as not to obscure the present invention.
Throughout the specification, reference to "one embodiment," "an embodiment," "one example," or "an example" means: the particular features, structures, or characteristics described in connection with the embodiment or example are included in at least one embodiment of the present invention. Thus, the appearances of the phrases "one embodiment," "an embodiment," "one example" or "an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in any suitable combination and/or sub-combination in one or more embodiments or examples. Further, those of ordinary skill in the art will appreciate that the illustrations provided herein are for illustrative purposes and are not necessarily drawn to scale. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
In the description of the present invention, the terms "front", "back", "left", "right", "up", "down", "vertical", "horizontal", "high", "low", "inner", "outer", etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the scope of the present invention.
As shown in the drawings, the eyepiece for the large field of view of scatterometry of the present invention includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, a fifth lens 5, and a sixth lens 6; the first lens element 1, the second lens element 2, the third lens element 3, the fourth lens element 4, the fifth lens element 5 and the sixth lens element 6 are sequentially arranged from an object side to an image side; the first lens 1, the second lens 2, the third lens 3 and the fourth lens 4 are spherical lenses, and main shafts of the spherical lenses are positioned on the same straight line; the surface of the first lens element 1 facing the object side is a convex surface, and the surface of the first lens element 1 facing the image side is a concave surface; the surfaces of the second lens element 2 facing the object side and the image side are both concave surfaces; the surfaces of the third lens element 3 facing the object side and the image side are convex surfaces; the surfaces of the fourth lens element 4 facing the object side and the image side are both concave surfaces; the surfaces of the fifth lens element 5 facing the object side and the image side are convex surfaces; the surfaces of the sixth lens element 6 facing the object side and the image side are convex surfaces; the first lens element 1, the second lens element 2, the third lens element 3 and the fourth lens element 4 are spaced apart from each other, a convex surface of the fifth lens element 5 facing the object side is disposed in a concave surface of the fourth lens element 4 facing the image side, and the fifth lens element 5 and the sixth lens element 6 are spaced apart from each other; and an aperture diaphragm 8 is arranged in the middle of the fourth lens 4. The fourth lens 4 and the fifth lens 5 form a cemented lens.
The fourth lens 4 and the fifth lens 5 form a cemented lens, so that the convex surface of the fifth lens 5 facing the object side is fitted in the concave surface of the fourth lens 4 facing the image side, the focal length of the short focus of the objective lens is effectively improved, and the total length of the lens group is shortened while the objective lens has a larger magnification, so that the volume of the objective lens is reduced.
The refractive index of the first lens 1 is 1.58; the refractive index of the second lens 2 is 1.45; the refractive index of the third lens 3 is 1.71; the refractive index of the fourth lens 4 is 1.71; the refractive index of the fifth lens 5 is 1.51; the refractive index of the sixth lens 6 is 1.62.
The focal length of the first lens 1 is-13.96 mm, the focal length of the second lens 2 is-6.53 mm, the focal length of the third lens 3 is 6.98 mm, the focal length of the fourth lens 4 is-28.56 mm, the focal length of the fifth lens 5 is 13.24 mm, and the focal length of the sixth lens 6 is 11.86 mm.
The curvature radii of the surface, facing the object side, of the first lens 1 and the surface, facing the image side, of the second lens 2 are 31.89mm and 6.71mm respectively, the curvature radii of the surface, facing the object side, of the second lens 2 are-20.36 mm and 3.85mm respectively, the curvature radii of the surface, facing the image side, of the third lens 3 are 7.92mm and-12.35 mm respectively, the curvature radii of the surface, facing the object side, of the fourth lens 4 are-50.27 mm and 5.24mm respectively, the curvature radii of the surface, facing the image side, of the fifth lens 5 are 5.24mm and-5.24 mm respectively, and the curvature radii of the surface, facing the object side and the surface facing the image side, of the sixth lens 6 are 7.90mm and-93.79 mm respectively.
The focal length ratio of the fourth lens 4 to the cemented lens is-2.1, and the focal length ratio of the fifth lens 5 to the cemented lens is 0.8.
The distance between the first lens 1 and the second lens 2 is 2.95 mm; the spacing distance between the second lens 2 and the third lens 3 is 0.72 mm; the spacing distance between the third lens 3 and the aperture diaphragm 8 is 1.41 mm; the spacing distance between the aperture diaphragm 8 and the cemented lens is 0.20 mm; the cemented lens and the sixth lens 6 are spaced apart by 0.20 mm.
All the lenses adopt global surface lenses, so that the optical performance stability is high; and the curvature of all the lenses is reasonably set, the set spherical curvature is small in processing difficulty, the cost is low, the process is simple, and the lower cost is ensured.
Example 2
This example differs from example 1 in that:
the refractive index of the first lens 1 is 1.66; the refractive index of the second lens 2 is 1.62; the refractive index of the third lens 3 is 1.79; the refractive index of the fourth lens 4 is 1.79; the refractive index of the fifth lens 5 is 1.58; the refractive index of the sixth lens 6 is 1.65.
The focal length ratio of the fourth lens 4 to the cemented lens is-1.7, and the focal length ratio of the fifth lens 5 to the cemented lens is 0.9.
Example 3
This example differs from examples 1 and 2 in that:
the refractive index range of the first lens 1 is 1.62, the refractive index range of the second lens 2 is 1.49, the refractive index range of the third lens 3 is 1.75, the refractive index range of the fourth lens 4 is 1.75, the refractive index range of the fifth lens 5 is 1.55, and the refractive index range of the sixth lens 6 is 1.62.
The focal length ratio of the fourth lens 4 to the cemented lens is-1.85, and the focal length ratio of the fifth lens 5 to the cemented lens is 0.86.
In the technical scheme of this embodiment, because the lens group of objective has used the cemented lens through focus, curvature complex, can guarantee that objective has better imaging quality, ensures that objective can reach better scattering measurement effect. In the embodiment, the combination of a plurality of different spherical lenses can ensure that the objective lens has a larger field of view; by accurately matching the curvature and the distance, the objective lens adopting the data of the embodiment can reach a view field of over 100 degrees, the measurement view field is wide during scattering measurement, and the scattering measurement effect is ensured.
The above-mentioned embodiments, further detailed description of the objects, technical solutions and advantages of the present invention, it should be understood that the above description is only the embodiments of the present invention, and is not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. An eyepiece for a large field of view for scatterometry characterized by: the lens comprises a first lens (1), a second lens (2), a third lens (3), a fourth lens (4), a fifth lens (5) and a sixth lens (6); the first lens (1), the second lens (2), the third lens (3), the fourth lens (4), the fifth lens (5) and the sixth lens (6) are arranged in sequence from an object side to an image side; the first lens (1), the second lens (2), the third lens (3) and the fourth lens (4) are spherical lenses, and main shafts of the spherical lenses are positioned on the same straight line; the surface of the first lens (1) facing the object side is a convex surface, and the surface of the first lens (1) facing the image side is a concave surface; the surfaces of the second lens (2) facing the object side and the image side are both concave surfaces; the surfaces of the third lens (3) facing the object side and the image side are convex surfaces; the surfaces of the fourth lens (4) facing the object side and the image side are both concave surfaces; the surfaces of the fifth lens (5) facing the object side and the image side are convex surfaces; the surfaces of the sixth lens (6) facing the object side and the image side are convex surfaces; the first lens (1), the second lens (2), the third lens (3) and the fourth lens (4) are arranged at intervals, a convex surface of the fifth lens (5) facing the object side is arranged in a concave surface of the fourth lens (4) facing the image side, and the fifth lens (5) and the sixth lens (6) are arranged at intervals; and an aperture diaphragm (8) is arranged in the middle of the fourth lens (4).
2. The large field of view eyepiece for scatterometry of claim 1, wherein: the fourth lens (4) and the fifth lens (5) form a cemented lens.
3. The large field of view eyepiece for scatterometry of claim 1, wherein: the refractive index range of the first lens (1) is (1.58, 1.66); the refractive index range of the second lens (2) is (1.45, 1.62); the refractive index range of the third lens (3) is (1.71, 1.79); the refractive index range of the fourth lens (4) is (1.71, 1.79); the refractive index range of the fifth lens (5) is (1.51, 1.58); the refractive index range of the sixth lens (6) is (1.62, 1.65).
4. The large field of view eyepiece for scatterometry of claim 3, wherein: the refractive index range of the first lens (1) is 1.62, the refractive index range of the second lens (2) is 1.49, the refractive index range of the third lens (3) is 1.75, the refractive index range of the fourth lens (4) is 1.75, the refractive index range of the fifth lens (5) is 1.55, and the refractive index range of the sixth lens (6) is 1.62.
5. The large field of view eyepiece for scatterometry of claim 1, wherein: the focal length of the first lens (1) is-13.96 mm, the focal length of the second lens (2) is-6.53 mm, the focal length of the third lens (3) is 6.98 mm, the focal length of the fourth lens (4) is-28.56 mm, the focal length of the fifth lens (5) is 13.24 mm, and the focal length of the sixth lens (6) is 11.86 mm.
6. The large field of view eyepiece for scatterometry of claim 1, wherein: the curvature radii of the surface, facing the object side, of the first lens (1) are 31.89mm and 6.71mm respectively, the curvature radii of the surface, facing the image side, of the second lens (2) are-20.36 mm and 3.85mm respectively, the curvature radii of the surface, facing the object side, of the third lens (3) are 7.92mm and-12.35 mm respectively, the curvature radii of the surface, facing the object side, of the fourth lens (4) are-50.27 mm and 5.24mm respectively, the curvature radii of the surface, facing the image side, of the fifth lens (5) are 5.24mm and-5.24 mm respectively, and the curvature radii of the surface, facing the object side and the surface facing the image side, of the sixth lens (6) are 7.90mm and-93.79 mm respectively.
7. The large field of view eyepiece for scatterometry of claim 2, wherein: the focal length ratio range of the fourth lens (4) to the cemented lens is (-2.1, -1.7), and the focal length ratio range of the fifth lens (5) to the cemented lens is (0.8, 0.9).
8. The large field of view eyepiece for scatterometry of claim 7, wherein: the focal length ratio of the fourth lens (4) to the cemented lens is-1.85, and the focal length ratio of the fifth lens (5) to the cemented lens is 0.86.
9. The large field of view eyepiece for scatterometry of claim 2, wherein: the spacing distance between the first lens (1) and the second lens (2) is 2.95 mm; the spacing distance between the second lens (2) and the third lens (3) is 0.72 mm; the spacing distance between the third lens (3) and the aperture diaphragm (8) is 1.41 mm; the distance between the aperture diaphragm (8) and the cemented lens is 0.20 mm; the spacing distance between the cemented lens and the sixth lens (6) is 0.20 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121667797.2U CN215181202U (en) | 2021-07-21 | 2021-07-21 | Large-view-field eyepiece for scattering measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121667797.2U CN215181202U (en) | 2021-07-21 | 2021-07-21 | Large-view-field eyepiece for scattering measurement |
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| Publication Number | Publication Date |
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| CN215181202U true CN215181202U (en) | 2021-12-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202121667797.2U Active CN215181202U (en) | 2021-07-21 | 2021-07-21 | Large-view-field eyepiece for scattering measurement |
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| CN (1) | CN215181202U (en) |
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2021
- 2021-07-21 CN CN202121667797.2U patent/CN215181202U/en active Active
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Address after: No. 311, 3rd floor, Building 1, No. 187, Section 1, Changcheng Road, Xihanggang Street, Chengdu City, Sichuan Province, 610200 (self declared) Patentee after: Chengdu Supai Optical Technology Co.,Ltd. Address before: 215600 building C, Dongcheng science and technology entrepreneurship Park, Miaoqiao Kechuang Road, Tangqiao town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: Suzhou speeda Optical Technology Co.,Ltd. |
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