CN215142796U - Ultrasonic corrosion tank for cleaning zone-melting germanium material - Google Patents

Abstract

The embodiment of the utility model discloses ultrasonic corrosion groove of washing zone-melting germanium material relates to zone-melting germanium material and washs technical field. The ultrasonic corrosion tank for cleaning the zone-melting germanium material comprises a corrosion tank, a rolling tank, a driving device and an ultrasonic generator. The rolling groove is arranged in the corrosion groove and used for placing a material to be cleaned; the driving device is connected with the rolling groove and used for driving the rolling groove to rotate; the ultrasonic generator is arranged at the bottom of the corrosion tank and used for emitting ultrasonic waves into the corrosion tank. In the embodiment of the utility model, the material to be cleaned is placed in the rolling groove, and the rolling groove is soaked in the corrosive liquid in the corrosion groove; the driving device is connected with the rolling groove and drives the rolling groove to rotate, so that all surfaces of the material to be cleaned and stored are fully contacted with the corrosive liquid; meanwhile, the ultrasonic generator can emit ultrasonic waves to generate vibration, so that the cleaning effect is greatly improved.

Description

Ultrasonic corrosion tank for cleaning zone-melting germanium material

Technical Field

The utility model relates to a zone-melting germanium material washs technical field, especially relates to an ultrasonic corrosion groove of wasing zone-melting germanium material.

Background

With the development of scientific technology, semiconductor materials occupy an extremely important position in aspects of national defense safety, environmental monitoring, national production and life and the like. In the production process of semiconductor crystals, a strong acid corrosion process is required for removing impurities on the surface of raw materials. If the corrosion is incomplete, elements such as oxygen and nitrogen will remain, so that more defects exist in the produced crystal, and the performance of the final product is affected. Therefore, the etching process of the raw material is critical to the production of semiconductor crystals, particularly semiconductor crystals with extremely high requirements on purity and defects.

The traditional etching process is to directly place the raw materials in an etching tank, take out the raw materials after etching for a certain time and wash the raw materials. In order to ensure sufficient corrosion, the corrosion needs a long time, and the raw materials are corroded while impurities are fully corroded, so that the raw materials are excessively consumed. Meanwhile, because the raw material is statically placed in the corrosion tank, the raw material is inevitably contacted with the corrosion tank, the corrosion effect of the contact position is difficult to guarantee, the condition of insufficient corrosion is easy to occur, and the performance of subsequently produced crystals is influenced. In order to solve the problem of insufficient corrosion, a device with a roller in a corrosion groove appears on the market, but the zone-melting germanium ingots are mostly square, are difficult to turn over by the roller at the bottom of the groove, and are difficult to achieve the effect of thorough corrosion.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a wash ultrasonic corrosion groove of zone-melting germanium material, aim at solving the poor problem of zone-melting germanium material cleaning performance among the prior art.

In order to solve the above problems, an embodiment of the present invention provides an ultrasonic etching tank for cleaning a zone-melting germanium material, where the ultrasonic etching tank for cleaning a zone-melting germanium material includes an etching tank, a rolling tank, a driving device, and an ultrasonic generator; the rolling groove is arranged in the corrosion groove and used for placing a material to be cleaned; the driving device is connected with the rolling groove and used for driving the rolling groove to rotate; the ultrasonic generator is arranged at the bottom of the corrosion tank and used for emitting ultrasonic waves into the corrosion tank.

The further technical scheme is that the ultrasonic corrosion tank for cleaning the zone-melting germanium material further comprises a cover plate, and the cover plate covers the opening of the corrosion tank.

The further technical proposal is that the cover plate is provided with a deionized water inlet.

The further technical proposal is that the side surface of the corrosion groove is provided with a corrosive liquid inlet.

The further technical proposal is that the bottom of the corrosion tank is provided with a waste liquid outlet.

The further technical proposal is that a pH value detector is arranged on the waste liquid outlet.

The further technical proposal is that the driving device is arranged on the side surface of the corrosion tank.

The driving device comprises a motor and an output shaft, and the motor is connected with the output shaft.

The further technical scheme is that the rolling groove comprises a rotating shaft, and an output shaft of the motor is connected with the rotating shaft of the rolling groove.

The further technical scheme is that the ultrasonic corrosion tank for cleaning the zone-melting germanium material further comprises a support, and the corrosion tank is arranged on the support.

Compared with the prior art, the embodiment of the utility model provides a technical effect that can reach includes:

the embodiment of the utility model discloses wash ultrasonic corrosion groove of zone-melting germanium material, the ultrasonic corrosion groove of washing zone-melting germanium material is including corroding groove, rolling groove, drive arrangement and supersonic generator. The rolling groove is arranged in the corrosion groove and used for placing a material to be cleaned; the driving device is connected with the rolling groove and used for driving the rolling groove to rotate; the ultrasonic generator is arranged at the bottom of the corrosion tank and used for emitting ultrasonic waves into the corrosion tank. In the embodiment of the utility model, the material to be cleaned is placed in the rolling groove, and the rolling groove is soaked in the corrosive liquid in the corrosion groove; the driving device is connected with the rolling groove and drives the rolling groove to rotate, so that all surfaces of the material to be cleaned and stored are fully contacted with the corrosive liquid; meanwhile, the ultrasonic generator can emit ultrasonic waves to generate vibration, so that the cleaning effect is greatly improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without any creative effort.

Fig. 1 is a schematic structural diagram of an ultrasonic etching tank for cleaning a zone-melting germanium material according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a rolling groove of an ultrasonic etching groove for cleaning zone-melting germanium materials according to an embodiment of the present invention.

Reference numerals

The device comprises a cover plate 1, a deionized water inlet 2, an etching tank 3, a driving device 4, a bracket 5, an ultrasonic generator 6, a waste liquid outlet 7, a pH value detector 8, an etching liquid inlet 9, a rolling tank 10 and a rotating shaft 11.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, wherein like component numbers represent like components. It is obvious that the embodiments to be described below are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It is also to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of the embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

Referring to fig. 1-2, an embodiment of the present invention provides an ultrasonic etching tank for cleaning a zone-melting germanium material. The ultrasonic corrosion tank for cleaning the zone-melting germanium material comprises a corrosion tank 3, a rolling tank 10, a driving device 4 and an ultrasonic generator 6.

The rolling groove 10 is arranged in the corrosion groove 3 and used for placing a material to be cleaned; the driving device 4 is connected with the rolling groove 10 and is used for driving the rolling groove 10 to rotate; the ultrasonic generator 6 is arranged at the bottom of the etching tank 3 and is used for emitting ultrasonic waves into the etching tank 3.

It can be understood that the rolling groove 10 is opened with an opening for the corrosive liquid to enter, so that the corrosive liquid can enter into the rolling groove 10.

In the embodiment of the utility model, the material to be cleaned is placed in the rolling groove 10, and the rolling groove 10 is soaked in the corrosive liquid in the corrosion groove 3; the driving device 4 is connected with the rolling groove 10 and drives the rolling groove 10 to rotate, so that each surface of the material to be cleaned is fully contacted with the corrosive liquid; meanwhile, the ultrasonic generator 6 can emit ultrasonic waves to generate vibration, so that the cleaning effect is greatly improved.

Furthermore, the ultrasonic etching tank for cleaning the zone-melting germanium material further comprises a cover plate 1, and the cover plate 1 covers the opening of the etching tank 3. The cover plate 1 is used for sealing the corrosion tank 3, and corrosion liquid is prevented from splashing outside the corrosion tank 3 to hurt a user.

Further, the cover plate 1 is provided with a deionized water inlet 2. The deionized water inlet 2 is used for injecting deionized water into the etching tank 3 so as to clean the germanium material.

Further, the side surface of the etching bath 3 is provided with an etching solution inlet 9. The etching solution inlet 9 is used for injecting the etching solution into the etching bath 3.

Further, the bottom of the etching tank 3 is provided with a waste liquid outlet 7. The waste liquid outlet 7 is used for discharging waste liquid in the etching tank 3.

Further, a pH detector 8 is disposed on the waste liquid outlet 7. The pH detector 8 is used to detect the pH of the waste liquid.

Further, the driving device 4 is provided on the side of the etching bath 3. The driving device 4 includes a motor and an output shaft, and the motor is connected with the output shaft. The rolling groove 10 includes a rotation shaft 11, and an output shaft of the motor is connected to the rotation shaft 11 of the rolling groove 10. For example, the output shaft is coupled to the rotating shaft 11 by a coupling.

Further, the ultrasonic corrosion tank for cleaning the zone-melting germanium material further comprises a support 5, and the corrosion tank 3 is placed on the support 5.

The embodiment of the utility model provides a cleaning zone-melting germanium material's ultrasonic corrosion groove's working process as follows:

during acid washing, firstly, loading a germanium material to be washed into a rolling groove, and placing the rolling groove into a corrosion groove for fixing; covering the cover plate; pouring the prepared corrosive liquid into a corrosion tank from a corrosive liquid inlet until the germanium material is completely immersed; starting an ultrasonic device and a driving device of a rolling groove to roll the germanium material in the corrosive liquid; after the corrosion is finished, deionized water flows in from the deionized water inlet, the corrosive liquid is diluted, and meanwhile, the waste liquid outlet valve is slowly opened, so that the waste liquid discharge speed is approximately equal to the deionized water inflow speed; and opening a pH value detector, detecting the pH value of the waste liquid until the waste liquid is neutral, closing the deionized water, taking out the germanium material and drying.

In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "secured" are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, while the invention has been described with respect to certain embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.

The above description is for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope of the present invention, and these modifications or replacements should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. An ultrasonic corrosion tank for cleaning zone-melting germanium materials is characterized by comprising a corrosion tank, a rolling tank, a driving device and an ultrasonic generator; the rolling groove is arranged in the corrosion groove and used for placing a material to be cleaned; the driving device is connected with the rolling groove and used for driving the rolling groove to rotate; the ultrasonic generator is arranged at the bottom of the corrosion tank and used for emitting ultrasonic waves into the corrosion tank.

2. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 1, further comprising a cover plate covering the opening of the etching tank.

3. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 2, wherein the cover plate is provided with a deionized water inlet.

4. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 1, wherein an etching solution inlet is provided at a side surface of the etching tank.

5. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 1, wherein a waste liquid outlet is arranged at the bottom of the etching tank.

6. The ultrasonic corrosion tank for cleaning the zone-melting germanium material as claimed in claim 5, wherein a pH detector is disposed on the waste liquid outlet.

7. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 1, wherein the driving means is provided at a side of the etching tank.

8. The ultrasonic erosion tank for cleaning zone-melting germanium material of claim 1, wherein the driving device comprises a motor and an output shaft, and the motor is connected with the output shaft.

9. The ultrasonic erosion tank for cleaning zone-melting germanium material as claimed in claim 8, wherein the rolling tank comprises a rotating shaft, and the output shaft of the motor is connected with the rotating shaft of the rolling tank.

10. The ultrasonic etching tank for cleaning the zone-melting germanium material as claimed in claim 1, further comprising a support, wherein the etching tank is placed on the support.

Images