CN215116864U

CN215116864U - Micro-nano optical element and projection device

Info

Publication number: CN215116864U
Application number: CN202023296726.4U
Authority: CN
Inventors: 王燚言
Original assignee: Jiaxing Uphoton Optoelectronics Technology Co Ltd
Current assignee: Jiaxing Uphoton Optoelectronics Technology Co Ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2021-12-10
Anticipated expiration: 2030-12-31

Abstract

The utility model provides a receive optical element a little, a serial communication port, include: a first lenticular lens array including a plurality of lenticular lenses arranged periodically along a first direction, the first lenticular lens array being configured to modulate light beams incident thereon to project a first straight line extending along the first direction; and a second lenticular lens array including a plurality of lenticular lenses periodically arranged along a second direction, the second lenticular lens array being configured to modulate light beams incident thereon to project a second line extending along the second direction, wherein the first direction is different from the second direction.

Description

Micro-nano optical element and projection device

Technical Field

The utility model relates to a laser projection technical field generally, especially, relate to a receive optical element and projection arrangement a little.

Background

The laser demarcation device is widely applied to the building construction industry and is used for projecting a laser reference line so as to improve the construction precision. Industrial Diffractive Optical Elements (DOEs) that can be designed using lasers as light sources for projecting cross-shaped reference lines. However, due to the characteristics of the diffractive optical element, significant noise, such as a large number of scattered points as shown in fig. 1, is generated around the cross-shaped datum line, and the diffraction efficiency of the diffractive optical element is relatively low, so that the beauty and usability of the cross line are relatively poor. In addition, the same problems as above also exist in an apparatus such as a laser scanning gun that needs to project an alignment pattern. Therefore, it is highly desirable to obtain a micro-nano optical element with higher projection efficiency by some special designs, and obtain a brighter and clear target pattern under the irradiation of a laser light source.

The statements in this background section merely represent techniques known to the public and are not, of course, representative of the prior art.

SUMMERY OF THE UTILITY MODEL

In view of at least one defect of the prior art, the utility model provides a receive optical element a little, include:

a first lenticular lens array including a plurality of lenticular lenses arranged periodically along a first direction, the first lenticular lens array being configured to modulate light beams incident thereon to project a first straight line extending along the first direction; and

a second lenticular lens array comprising a plurality of lenticular lenses arranged periodically along a second direction, the second lenticular lens array being configured to modulate light beams incident thereon to project a second line extending along the second direction, wherein the first direction is different from the second direction.

According to one aspect of the invention, said first straight line and said second straight line are both dotted lines,

the period of the first lenticular lens array corresponds to a dot pitch of the first straight line, and the period of the second lenticular lens array corresponds to a dot pitch of the second straight line.

According to an aspect of the present invention, the period of the first lenticular lens array and the second lenticular lens array is between 5um and 500um, preferably between 20um and 200um, and most preferably 64 um.

the cylindrical lens surface topography of the first cylindrical lens array corresponds to the field angle and/or the light field intensity distribution of the first straight line, and the cylindrical lens surface topography of the second cylindrical lens array corresponds to the field angle and/or the light field intensity distribution of the second straight line.

According to an aspect of the present invention, the lenticular lens of the first lenticular lens array and the lenticular lens of the second lenticular lens array are fresnel-like lenticular lenses.

According to an aspect of the present invention, the fresnel surface topography of the fresnel lenticular lens has a continuous topography area and a plurality of saw-toothed structures that do not contain vertical walls.

According to an aspect of the invention, the first direction is perpendicular to the second direction.

According to an aspect of the present invention, the periods of the first lenticular lens array and the second lenticular lens array are different to project two dot lines which are different in dot pitch and perpendicular to each other.

According to an aspect of the present invention, the surface topography of the lenticular lens of the first lenticular lens array and the surface topography of the lenticular lens of the second lenticular lens array are different to project two dot-like lines of different and mutually perpendicular angles of view and/or light field intensity distribution.

According to an aspect of the present invention, the first lenticular lens array and the second lenticular lens array are adjacently prepared on the same substrate.

According to an aspect of the present invention, a slit is provided between the first lenticular lens array and the second lenticular lens array, and a width of the slit is smaller than 100 um.

The utility model also provides a projection device, include:

a laser configured to emit a laser beam;

a micro-nano optical element as described above, configured to receive a laser beam from the laser and project at least a first line and a second line on a target plane.

According to an aspect of the present invention, the laser beam is in a light spot on the optical device covers at least a part of the first lenticular lens array and at least a part of the second lenticular lens array of the micro-nano optical element at the same time.

According to an aspect of the utility model, projection arrangement still includes collimating lens, collimating lens set up in the laser instrument with receive between the optical element a little, be used for right the laser beam that the laser instrument sent carries out the collimation.

The utility model discloses a preferred embodiment provides a receive optical element a little, include the first lenticular lens array of arranging along the first direction periodicity and the second lenticular lens array of arranging along the second direction periodicity for throw out the cross line of big visual field. The micro-nano optical element provided by the utility model reduces the noise generated by the traditional Diffraction Optical Element (DOE), and improves the industrial practicability and the aesthetic degree of the cross line with large view field; compare in traditional Diffraction Optical Element (DOE), under the illumination of same light source, can throw out brighter, clear pattern, actual measurement single point diffraction efficiency has improved 1.4 times.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 illustrates the prior art use of diffractive optical elements to project significant noise around a reticle;

fig. 2 schematically shows a micro-nano optical element according to a preferred embodiment of the present invention;

FIG. 3 illustrates a reticle projected by a micro-nano optical element according to a preferred embodiment of the invention;

FIG. 4 shows the surface profile of a lenticular lens designed according to Table 1;

FIG. 5 shows the surface profile of a lenticular lens designed according to Table 2;

FIG. 6A schematically shows the surface topography of an original lenticular lens;

FIG. 6B schematically illustrates the surface topography resulting from Fresnel-izing the lenticular lens shown in FIG. 6A;

FIG. 6C schematically illustrates the surface topography resulting from pairwise splicing of vertical walls of at least some of the serrations of the serrated structure of the Fresnel lenticular lens shown in FIG. 6B according to a preferred embodiment of the present invention;

FIG. 7A schematically illustrates the deflection of incident light rays by an original lenticular lens;

FIG. 7B shows the far field intensity profile of the lenticular lens shown in FIG. 7A;

FIG. 8A schematically illustrates the deflection of incident light rays by a Fresnel lenticular lens according to a preferred embodiment of the present invention;

FIG. 8B illustrates a far field intensity profile of the Fresnel lenticular lens shown in FIG. 8A;

fig. 9 schematically illustrates a micro-nano optical element according to a preferred embodiment of the present invention and a partially enlarged view thereof;

fig. 10 schematically illustrates a micro-nano optical element according to a preferred embodiment of the present invention;

FIG. 11 schematically illustrates a projection device according to a preferred embodiment of the present invention;

fig. 12 schematically illustrates a light source spot covering at least a portion of the first lenticular lens array and the second lenticular lens array according to a preferred embodiment of the present invention;

FIG. 13A shows a reticle projected in accordance with a preferred embodiment of the present invention;

fig. 13B shows the cross line projected by the diffractive optical element under the same imaging conditions as fig. 13A.

Detailed Description

In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present invention, it should be noted that unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. The first feature being "under," "below," and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or merely indicates that the first feature is at a lower level than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or reference letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, the present disclosure provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

Embodiments of the present invention will be described with reference to the accompanying drawings, and it should be understood that the embodiments described herein are merely illustrative and explanatory of the present invention, and are not restrictive of the invention.

The utility model provides a receive optical element a little utilizes traditional refraction optical element can be with the characteristic that incident beam widens to utilize the diffraction interference effect of laser on this basis, design one kind can throw out the receive optical element a little of punctiform cross line, form required target light field.

According to a preferred embodiment of the present invention, as shown in fig. 2, the present invention provides a micro-nano optical element 100, including: a first lenticular lens array 110 and a second lenticular lens array 120. Wherein:

the first lenticular lens array 110 includes a plurality of lenticular lenses 111 arranged periodically along a first direction, and the first lenticular lens array 110 is configured to modulate a light beam incident thereon to project a first straight line extending along the first direction.

The second lenticular lens array 120 includes a plurality of lenticular lenses 121 periodically arranged along a second direction, and the second lenticular lens array 120 is configured to modulate the light beams incident thereon to project a second straight line extending along the second direction, wherein the first direction is different from the second direction.

Fig. 2 schematically illustrates a micro-nano optical element 100 provided by the present invention. The upper half of the micro-nano optical element 100 is a first lenticular lens array 110, the lower half is a second lenticular lens array 120, the first lenticular lens array 110 includes a plurality of lenticular lenses 111 arranged periodically along a first direction (shown as a horizontal direction in the figure), and the second lenticular lens 120 includes a plurality of lenticular lenses 121 arranged periodically along a second direction (shown as a vertical direction in the figure). As shown in fig. 2, the periods of the first and second

lenticular lens arrays

110 and 120 are different, and those skilled in the art will understand that the period of the first lenticular lens array 110 and the period of the second lenticular lens array 120 may be set to the same period according to the need of projecting the light field. Further, although not shown in fig. 2, those skilled in the art will appreciate that the plurality of lenticular lenses 111 of the first lenticular lens array 110 may be provided with the same or different surface type as the plurality of lenticular lenses 121 of the second lenticular lens array 120, and such are within the scope of the present invention.

In the preferred embodiment of the present invention as shown in fig. 2, the first lenticular lens arrays 110 of the micro-nano optical element 100 are periodically arranged along the horizontal direction for projecting to form a horizontal line; the second cylindrical lens arrays 120 of the micro-nano optical element 100 are periodically arranged along the vertical direction for projection to form a vertical line.

According to a preferred embodiment of the present invention, as shown in fig. 3, a first straight line extending along a first direction projected by the first lenticular lens array 110 of the micro-nano optical element 100 is a dotted line; a second straight line extending along the second direction projected by the second cylindrical lens array 120 of the micro-nano optical element 100 is a dotted line.

According to a preferred embodiment of the present invention, the period of the first lenticular lens array 110 of the micro-nano optical element 100 corresponds to the dot pitch of the first straight line; the period of the second cylindrical lens array 120 of the micro-nano optical element 100 corresponds to the dot pitch of the second line. That is, by the early design, the period of the first lenticular lens array 110 is adjusted, so that a first straight line with a first dot pitch meeting the requirement of projecting the light field can be projected; through the earlier design, the period of the second cylindrical lens array 120 is adjusted, so that a second straight line with a second point interval meeting the requirement of projecting the light field can be projected. The first straight line with the first point spacing and the second straight line with the second point spacing are combined to form a cross-shaped datum line meeting the requirement of a projected light field. The dot pitch is related to the period of the lenticular lens array, the wavelength of the projection laser light source, and the working distance of the micro-nano optical element (i.e. the distance between the micro-nano optical element and the projection plane). Preferably, as in the embodiment shown in fig. 3, the period of the first lenticular lens array 110 is set to be the same as the period of the second lenticular lens array 120, the size of the single period dimension (i.e. the lateral dimension of the curved surface shape direction of the single lenticular lens) is 5um to 500um, more preferably 20um to 200um, and most preferably 64um, and the dot pitch of the dot line can be controlled by adjusting the period dimension, so that the dot pitch of the projected first straight line is the same as that of the projected second straight line.

According to a preferred embodiment of the present invention, the lenticular surface topography of the first lenticular lens array 110 corresponds to the field angle and/or the light field intensity distribution of the first straight line; the lenticular lens surface topography of the second lenticular lens array 120 corresponds to the field angle and/or light field intensity distribution of the second line. That is, through the early design, the surface morphology of the lenticular lenses of the first lenticular lens array 110 is adjusted, so that a first straight line with a first field angle meeting the requirement of a projection light field can be projected; through the early design, the surface morphology of the lenticular lens of the second lenticular lens array 120 is adjusted, so that a second straight line with a second field angle meeting the requirement of a projection light field can be projected. The first straight line with the first angle of view and the second straight line with the second angle of view combine to form a cross-shaped reference line meeting the requirements of a projected light field, such as a dotted cross light field with 40 ° horizontal and 26 ° vertical directions shown in fig. 3.

For the design of the surface topography of the lenticular lens, the following formula is followed:

wherein x and y are horizontal and vertical coordinates on a modeling horizontal plane,

c is the curvature, k is the conic constant, NR is the normalized radius, A_ijIs xⁱy^jThe coefficient of (a).

As shown in table 1 and fig. 4, when a dotted line with a field angle of 40 ° is projected, the corresponding lenticular lens surface type parameters are shown in table 1 and the surface type of the corresponding lenticular lens is shown in fig. 4 through simulation calculation.

TABLE 1

As shown in table 2 and fig. 5, when a dotted line with a field angle of 26 ° is projected, the surface shape parameters of the corresponding lenticular lens are shown in table 2 and the surface shape of the corresponding lenticular lens is shown in fig. 5 through simulation calculation.

TABLE 2

According to a preferred embodiment of the present invention, the first lenticular lens array 110 and the second lenticular lens array 120 of the micro-nano optical element 100 may include fresnel lenticular lenses. Preferably, the plurality of lenticular lenses 111 of the first lenticular lens array 110 and the plurality of lenticular lenses 112 of the second lenticular lens array 120 are fresnel-ized lenticular lenses as shown in fig. 6B (fig. 6A is an original lenticular lens that is not fresnel-ized). The Fresnel columnar lens has the micron-scale thickness, can be prepared on a glass or PET substrate through a micro-nano imprinting technology, and can be imprinted on two surfaces of the same substrate or different areas of the same surface, so that Fresnel columnar lens arrays which are periodically arranged along two different directions can be projected, and a cross-shaped datum line can be projected.

According to a preferred embodiment of the present invention, as shown in fig. 6C, the fresnel surface topography of the fresnel lenticular lens has a continuous topography area and a plurality of saw-tooth like structures that do not contain vertical walls. For the fresnel-shaped lenticular lens shown in fig. 6B, the vertical walls of at least some of the serrations in the first serrated structure formed after the fresnel-shaped lenses are spliced in pairs, two by two, to form a plurality of second serrated structures that do not include vertical walls. The number of tips of the Fresnel cylindrical lens is further reduced, and the vertical wall is eliminated, further reducing the difficulty of the embossing process.

As shown in fig. 7A and 8A, fig. 7A shows a case where light rays incident on the original lenticular lens surface are deflected; fig. 8A shows a case where light is incident on the surface of the fresnel lens in a deflected manner. Fig. 7B shows the simulation result of the light intensity distribution of the original lenticular far field shown in fig. 7A, and fig. 8B shows the simulation result of the light intensity distribution of the fresnel lenticular far field shown in fig. 8A. It is thus clear that original lenticular lens reaches the utility model provides a fresnel lens all has stronger light intensity distribution in-30 and 30 field of view regions, and light intensity distribution is equal basically in-20 to 20 field of view within range, and compares in marginal area's light intensity and weakens. As can be seen from the simulation results of fig. 7B and fig. 8B, the original lenticular lens and the fresnel lenticular lens provided by the present invention have substantially the same light intensity distribution in the far field.

According to a preferred embodiment of the present invention, the micro-nano optical element 100 provided by the present invention is used for projecting a cross-shaped datum line. Thus, the first direction is perpendicular to the second direction to create mutually perpendicular crosshairs. Further preferably, the first lenticular lens array 110 and the second lenticular lens array 120 of the micro-nano optical element 100 have different periods according to the requirement of projecting the light field, so as to project two dotted lines with different dot pitches and perpendicular to each other. It is further preferable that the surface topography of the plurality of lenticular lenses 111 of the first lenticular lens array 110 and the surface topography of the plurality of lenticular lenses 121 of the second lenticular lens array 120 are different to project two dotted lines which are different in angle of field and/or intensity distribution of the light field and perpendicular to each other.

According to a preferred embodiment of the present invention, as shown on the left side in fig. 9, the first lenticular lens array 110 and the second lenticular lens array 120 are adjacently prepared on the same substrate, and the right side in fig. 9 shows a single period in the first lenticular lens array 110. Further preferably, as shown in fig. 10, a slit having a width smaller than 100um is provided between the first lenticular lens array 110 and the second lenticular lens array 120 to facilitate imprinting of two sets of lenticular lens arrays in different directions.

According to a preferred embodiment of the present invention, as shown in fig. 11, the present invention further provides a projection device 200, including: a laser 210 and a micro-nano optical element 100 as described above. Wherein:

the laser 210 is configured to emit a laser beam;

the micro-nano optical element 100 is configured to receive a laser beam from a laser 210 and project at least a first line and a second line on a target plane.

According to a preferred embodiment of the present invention, as shown in fig. 12, the laser beam has a light spot on the micro-nano optical element 100 that covers at least a portion of the first lenticular lens array 110 and at least a portion of the second lenticular lens array 120 of the micro-nano optical element 100 at the same time.

According to a preferred embodiment of the present invention, the projection device 200 further includes a collimating lens, and the collimating lens is disposed between the laser 210 and the micro-nano optical element 100, and is used for collimating the laser beam emitted by the laser 210.

As shown in fig. 13A and 13B, under the same laser light source, collimating lens and the same shooting condition, the cross line projected by the projection apparatus 200 composed of the micro-nano optical element 100 provided by the present invention is as shown in fig. 13A; the reticle projected by the Diffractive Optical Element (DOE) scheme is shown in fig. 13B, and is quantitatively calculated as: the utility model provides a receive optical element a little's single-point average power is 1.4 times of Diffraction Optical Element (DOE).

The utility model discloses a preferred embodiment provides a receive optical element a little, include the first lenticular lens array of arranging along the first direction periodicity and the second lenticular lens array of arranging along the second direction periodicity for throw out the reticle. The micro-nano optical element provided by the utility model reduces the noise generated by the Diffraction Optical Element (DOE), and improves the industrial practicability and the aesthetic degree of the cross line; compare in Diffraction Optical Element (DOE), under the illumination of same light source, can throw out brighter, clear pattern, actual measurement single-point light efficiency has improved 1.4 times.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro-nano optical element is characterized by comprising:

2. A micro-nano optical element according to claim 1, characterized in that: the first straight line and the second straight line are both dotted lines,

3. A micro-nano optical element according to claim 2, characterized in that: the period of the first lenticular lens array and the second lenticular lens array is between 5um and 500 um.

4. A micro-nano optical element according to claim 1, characterized in that: the first straight line and the second straight line are both dotted lines,

5. A micro-nano optical element according to any one of claims 1 to 4, characterized in that:

the cylindrical lenses of the first cylindrical lens array and the second cylindrical lens array are Fresnel cylindrical lenses.

6. A micro-nano optical element according to claim 5, characterized in that:

the Fresnel surface topography of the Fresnel cylindrical lens has a continuous topography region and a plurality of sawtooth-shaped structures that do not include vertical walls.

7. A micro-nano optical element according to any one of claims 1 to 4, characterized in that: the first direction is perpendicular to the second direction.

8. A micro-nano optical element according to claim 7, characterized in that:

the first columnar lens array and the second columnar lens array have different periods so as to project two dot lines which are different in dot spacing and perpendicular to each other.

9. A micro-nano optical element according to claim 7, characterized in that:

the surface topography of the cylindrical lens of the first cylindrical lens array is different from that of the cylindrical lens of the second cylindrical lens array so as to project two mutually perpendicular dotted lines with different field angles and/or light field intensity distributions.

10. A micro-nano optical element according to any one of claims 1 to 4, characterized in that:

the first lenticular lens array and the second lenticular lens array are adjacently prepared on the same substrate.

11. A micro-nano optical element according to claim 10, characterized in that:

be provided with the slit between first lenticular lens array and the second lenticular lens array, the width of slit is less than 100 um.

12. A micro-nano optical element according to claim 3, characterized in that: the period of the first lenticular lens array and the second lenticular lens array is between 20um and 200 um.

13. A micro-nano optical element according to claim 3, characterized in that: the period of the first lenticular lens array and the second lenticular lens array is 64 um.

14. A projection device, comprising:

a laser configured to emit a laser beam;

the micro-nano optical element of any of claims 1-13, configured to receive a laser beam from the laser and project at least a first line and a second line on a target plane.

15. The projection apparatus according to claim 14, wherein the spot of the laser beam on the micro-nano optical element covers at least a portion of the first lenticular lens array and at least a portion of the second lenticular lens array of the micro-nano optical element simultaneously.

16. Projection device according to claim 14 or 15,

the projection device further comprises a collimating lens, wherein the collimating lens is arranged between the laser and the micro-nano optical element and is used for collimating laser beams emitted by the laser.