CN215114438U - Rotary axis full attitude error synchronous measurement device based on angle trigger acquisition - Google Patents

Abstract

The utility model discloses a full attitude error synchronous measurement device of gyration axis based on angle trigger is gathered, including fixing base, little slope regulation platform, circle grating encoder, grating reading head, reference ball, backup pad and clamping platform, little slope regulation platform top center shaping has the round hole groove, and several grating reading head evenly distributed is peripheral at circle grating encoder, it has the through-hole coaxial with the round hole groove to open in the backup pad, the one end and the round hole groove of reference ball are pegged graft, and the other end passes the through-hole and is located the backup pad top, first displacement sensor, second displacement sensor, third displacement sensor, fourth displacement sensor and fifth displacement sensor are all fixed on clamping platform, clamping platform fixed mounting is at the backup pad top. The utility model discloses can accomplish the six degrees of freedom measurement of ultra-precision revolving stage axis of revolution simultaneously, measurement process is simple, measurement of efficiency is high, can effectively improve measuring precision simultaneously.

Description

Rotary axis full attitude error synchronous measurement device based on angle trigger acquisition

Technical Field

The utility model belongs to the technical field of precision machine error measures, concretely relates to gyration axis full attitude error synchronous measurement device based on angle triggers collection.

Background

The ultra-precise turntable is one of important devices in the fields of mechanical processing and measurement. The six-degree-of-freedom error of the rotation axis of the ultra-precise turntable is one of important technical indexes for evaluating the dynamic performance of the ultra-precise turntable. Assuming that the Z axis is a rotating axis, the six-degree-of-freedom error mainly includes a radial motion error of the revolution axis in the direction X, Y, an axial motion error in the Z direction, a yaw angle error around X, Y, and a revolution angle error around the Z axis. At present, the measurement of the error of six degrees of freedom is generally divided into two or more steps, the measurement mode is complicated, and a plurality of uncertain factors are introduced by excessive measurement steps and overlong measurement period.

In addition, the important step of the six-degree-of-freedom measurement of the rotation axis of the ultra-precise rotary table is to acquire displacement data and angle data, a high-precision displacement sensor and a circular grating angle encoder are generally adopted, a displacement value of the rotating shaft measured at a certain angle can be obtained through the measurement of the displacement sensor, and a value of the position of the rotating shaft can be obtained through the measurement of the circular grating angle encoder. However, in ultra-precise measurement, the measurement result is easily affected by various uncertain factors, such as the angular velocity fluctuation of the rotating shaft and the installation eccentricity, which affect the measurement data: the fluctuation of the angular speed of the rotating shaft can cause the displacement value measured by the displacement sensor to generate phase shift, so that the measured displacement value and the actual angle value cannot correspond to each other one by one, and the accuracy of the measurement result of the radial rotation error and the deflection angle error can be influenced; the installation eccentricity comprises the installation eccentricity of a standard device and the installation eccentricity of a circular grating, the installation eccentricity of the standard device can lead to inaccurate displacement value measurement, and then can influence the accuracy of radial rotation error and deflection angle error measurement results, and the installation eccentricity of the circular grating can lead to inaccurate angle value measurement, and then can influence the accuracy of rotation angle error measurement results.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that just is not enough to above-mentioned prior art, provide a gyration axis full attitude error synchronous measurement device based on angle trigger collection, its design benefit, it is convenient to measure, can eliminate speed fluctuation simultaneously to displacement measurement's influence and eliminate the eccentric influence to angular surveying of circle grating installation, has improved measuring precision greatly.

The utility model adopts the technical proposal that: a rotary axis full-attitude error synchronous measuring device based on angle trigger collection comprises a fixed seat, a micro-tilt adjusting table, a circular grating encoder, grating reading heads, a reference ball, a supporting plate and a clamping table, wherein the micro-tilt adjusting table is positioned below the supporting plate, a circular hole groove is formed in the center of the top of the micro-tilt adjusting table, the circular grating encoder is fixedly installed at the top of the micro-tilt adjusting table and is coaxially arranged with the circular hole groove, the grating reading heads are provided with a plurality of grating reading heads which are uniformly distributed on the periphery of the circular grating encoder and are positioned on the same horizontal plane with the circular grating encoder, the grating reading heads are fixed at the bottom of the supporting plate through an installation plate, a through hole coaxial with the circular hole groove is formed in the supporting plate, one end of the reference ball is spliced with the circular hole groove, the other end of the reference ball passes through the through hole, and a first target ball and a second target ball of the reference ball are positioned above the supporting plate, the horizontal corresponding position of the first target ball center of the reference ball is vertically provided with a first displacement sensor and a second displacement sensor, the horizontal corresponding position of the second target ball center of the reference ball is vertically provided with a third displacement sensor and a fourth displacement sensor, the fifth displacement sensor coaxial with the reference ball is further arranged above the reference ball, the first displacement sensor, the second displacement sensor, the third displacement sensor, the fourth displacement sensor and the fifth displacement sensor are all fixed on the clamping table, and the clamping table is fixedly arranged at the top of the supporting plate.

Preferably, the little slope is adjusted the platform and is included from supreme base, the connecting seat and the regulation seat of coaxial setting in proper order down, base and connecting seat fixed connection are equipped with between connecting seat and the regulation seat and adjust ball and several adjusting bolt, adjust the ball and be located connecting seat top center, several adjusting bolt along connecting seat circumference evenly distributed, round hole groove and circle grating encoder all are located and adjust the seat top to with adjust the coaxial setting of seat.

Preferably, the clamping table comprises a bottom plate, a top plate and a side plate fixed between the bottom plate and the top plate, the side plate is composed of two vertical plates which are integrally formed and perpendicular to each other, the bottom plate is provided with an opening matched with the through hole and is fixedly installed at the through hole of the supporting plate, two mounting holes which are perpendicular to each other are formed in the lower portion of the side plate and the position corresponding to the first target ball center level of the reference ball, two mounting holes which are perpendicular to each other are formed in the upper portion of the side plate and the position corresponding to the second target ball center level of the reference ball, and mounting holes are also formed in the top plate and the position corresponding to the axis of the reference ball.

Preferably, the mounting hole is provided with a pressing seam and an adjusting seam, the pressing seam is L-shaped, one end of the pressing seam is communicated with the mounting hole, the other end of the pressing seam penetrates through the side wall of the side plate or the top plate, the adjusting seam is located below the mounting hole and corresponds to the pressing seam, the side wall of the side plate between the pressing seam and the adjusting seam is provided with a locking hole, the locking hole and the mounting hole are distributed in a staggered mode, the locking hole is parallel to one side of the pressing seam, and the locking hole penetrates through the other side of the pressing seam.

Preferably, the mounting panel is the L type, and the one end and the backup pad bottom fixed connection of mounting panel, the other end is opened has the spread groove with grating reading head matching, grating reading head joint is fixed in the spread groove to with circular grating encoder level alignment.

The beneficial effects of the utility model reside in that:

(1) the method has the advantages that the fixed-angle displacement data acquisition is realized by arranging the first displacement sensor and the second displacement sensor which have mutually vertical central lines, the third displacement sensor and the fourth displacement sensor which have mutually vertical central lines and the fifth displacement sensor which is coaxial with the reference ball, and the fixed-angle displacement data acquisition corresponds to the angle values acquired by the circular grating encoder one by one, so that the influence of speed fluctuation on displacement measurement is eliminated;

(2) the grating reading heads are uniformly distributed around the circular grating encoder, the average value of the data measured by the grating reading heads can be taken as the final angle value, and the influence of the eccentricity of the circular grating encoder on the angle measurement is eliminated.

The utility model discloses can accomplish the six degrees of freedom measurement of ultra-precision revolving stage axis of revolution simultaneously, measurement process is simple, measurement of efficiency is high, can effectively improve measuring precision simultaneously.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of a micro-tilt adjusting table according to the present invention;

FIG. 3 is a cross-sectional view of the micro-tilt adjusting table of the present invention

FIG. 4 is a schematic view of the clamping table of the present invention;

fig. 5 is a schematic structural view of the clamping table of the present invention (no displacement sensor is installed);

fig. 6 is a partial schematic view of the circular grating encoder and the grating reading head of the present invention.

In the figure: 1. a fixed seat; 2. a fine tilt adjustment stage; 3. a circular grating encoder; 4. a grating reading head; 5. a reference ball; 6. a support plate; 7. a clamping table; 8. a circular hole groove; 9. mounting a plate; 10. a first displacement sensor; 11. a second displacement sensor; 12. a third displacement sensor; 13. a fourth displacement sensor; 14. a fifth displacement sensor; 15. an ultra-precise turntable; 201. a base; 202. a connecting seat; 203. an adjusting seat; 204. adjusting the ball; 205. adjusting the bolt; 701. a base plate; 702. a top plate; 703. a side plate; 704. an opening; 705. mounting holes; 706. pressing a seam; 707. adjusting the seam; 708. and (4) locking holes.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

Examples

As shown in fig. 1, fig. 2, fig. 3, fig. 4, fig. 5 and fig. 6, the device for synchronously measuring the full attitude error of the rotation axis based on angle trigger acquisition according to the present embodiment includes a fixing base 1, a micro tilt adjusting table 2, a circular grating encoder 3, a grating reading head 4, a reference ball 5, a supporting plate 6 and a clamping table 7;

the top of the fixed seat 1 is fixedly connected with an ultra-precise rotary table 15 to be tested, and the micro-tilt adjusting table 2 is fixed on the top surface of the ultra-precise rotary table 15;

the micro-tilt adjusting platform 2 comprises a base 201, a connecting seat 202 and an adjusting seat 203 which are coaxially arranged from bottom to top in sequence, the base 201 is fixedly connected with the connecting seat 202, an adjusting ball 204 and a plurality of adjusting bolts 205 are arranged between the connecting seat 202 and the adjusting seat 203, grooves matched with the adjusting ball 204 are respectively formed in the center of the top of the connecting seat 202 and the center of the bottom of the adjusting seat 203, the adjusting ball 204 is arranged in the grooves, the adjusting seat 203 can achieve tilt adjustment in the horizontal direction through the adjusting ball 204, meanwhile, connecting holes are correspondingly formed in the connecting seat 202 and the adjusting seat 203 along the circumference of the connecting seat 202, the adjusting bolts 205 are matched with the connecting holes, eight adjusting bolts 205 are arranged in the embodiment, and the adjusting seat 203 achieves tilt change of +/-5 degrees in the horizontal direction by screwing or loosening different adjusting bolts 205;

a circular hole groove 8 matched with the reference ball 5 is formed in the center of the top of the adjusting seat 203 of the micro-tilt adjusting table 2, the circular hole groove 8 is used for fixedly connecting the reference ball 5, a circular grating encoder 3 is sleeved outside the circular hole groove 8, and the circular grating encoder 3, the circular hole groove 8 and the adjusting seat 203 are coaxially arranged; when the horizontal position of the adjusting seat 203 is adjusted, namely the position of the reference ball 5 arranged in the circular hole groove 8 is adjusted;

the micro-tilt adjusting table 2 is assembled and then fixed on the top surface of the ultra-precise rotary table 15, when the micro-tilt adjusting table 2 is fixed, the base 201 of the micro-tilt adjusting table 2 needs to be ensured to be coaxial with the ultra-precise rotary table 15, because the ultra-precise machinery is measured, after the micro-tilt adjusting table 2 is installed, the coaxiality of the adjusting seat 203 and the base 201 cannot meet the measurement requirement, after the reference ball 5 is installed in the circular hole groove 8 of the adjusting seat 203, the adjusting seat 203 needs to be adjusted and controlled, so that the reference ball 5 and the base 201 of the micro-tilt adjusting table 2 are ensured to be coaxial, namely the reference ball 5 and the ultra-precise rotary table 15 are ensured to be coaxial before measurement, and the coaxial error of the reference ball 5 and the ultra-precise rotary table 15 is controlled to be below 1 micron;

the supporting plate 6 is fixed on the fixing seat 1 through a plurality of supporting rods and is positioned above the micro-tilt adjusting table 2, a through hole is formed in the supporting plate 6 and corresponds to the micro-tilt adjusting table 2, the center of the through hole is positioned on the axis of the micro-tilt adjusting table 2, the through hole is a square hole in the embodiment, the size of the through hole is matched with that of the reference ball 5, the upper portion of the reference ball 5 can be ensured to penetrate through the through hole and be positioned above the supporting plate 6, namely after the reference ball 5 is installed in a round hole groove 8 of the micro-tilt adjusting table 2, a first target ball and a second target ball on the upper portion of the reference ball 5 both penetrate through the supporting plate 6 and are positioned above the supporting plate 6;

a plurality of grating reading heads 4 are uniformly distributed around the circular grating encoder 3, the circular grating encoder is provided with four grating reading heads 4, the four grating reading heads 4 are parallel and level and are distributed around the circular grating encoder 3 in a cross manner, so that the linear distance between the grating reading heads 4 and the circular grating encoder 3 meets the requirement, and meanwhile, the grating reading heads 4 and the circular grating encoder 3 are horizontally aligned; the grating reading head 4 is fixed with the bottom of the supporting plate 6 through the mounting plate 9, the mounting plate 9 is L-shaped, one end of the mounting plate 9 is fixedly mounted at the bottom of the supporting plate 6, the other end of the mounting plate 9 is provided with a connecting groove, and the grating reading head 4 is fixed at the end part of the mounting plate 9 through the connecting groove;

the clamping table 7 comprises a bottom plate 701, a top plate 702 and a side plate 703 fixed between the bottom plate 701 and the top plate 702, the side plate 703 is composed of two vertical plates which are integrally formed and perpendicular to each other, the bottom plate 701 is provided with an opening 704 matched with the through hole of the support plate 6, the bottom plate 701 is fixedly installed at the through hole of the support plate 6, namely the clamping table 7 is installed at the through hole, and the reference ball 5 penetrating out of the through hole is surrounded by the side plate 703;

two mounting holes 705 are formed in the lower portion of the side plate 703 and horizontally correspond to the first target ball center of the reference ball 5, the two mounting holes 705 are respectively located on two vertical plates of the side plate 703, and the center lines of the two mounting holes 705 are vertically intersected at the first target ball center of the reference ball 5 and used for mounting a first displacement sensor 10 and a second displacement sensor 11;

two mounting holes 705 are further formed in the upper portion of the side plate 703 and horizontally correspond to the second target ball center of the reference ball 5, the two mounting holes 705 are respectively located on two vertical plates of the side plate 703, and center lines of the two mounting holes 705 are vertically intersected at the second target ball center of the reference ball 5 and used for mounting a third displacement sensor 12 and a fourth displacement sensor 13;

a through hole is also formed in the top plate 702 corresponding to the axis of the reference ball 5 and used for mounting the fifth displacement sensor 14;

a pressing seam 706 and an adjusting seam 707 penetrating through the wall thickness of the side plate 703 are formed in an installation hole 705 of the side plate 703, the pressing seam 706 is in an L shape, one end of the pressing seam 706 is communicated with the installation hole 705, the other end of the pressing seam penetrates through the side wall of the side plate 703, the adjusting seam 707 is located below the installation hole 705 and corresponds to the pressing seam 706, a locking hole 708 is formed in the side wall of the side plate 703 between the pressing seam 706 and the adjusting seam 707, the locking hole 708 and the installation hole 705 are distributed in a staggered mode, and the locking hole 708 is parallel to one side of the pressing seam 706 and penetrates through the other side of the pressing seam 706; the side plate 703 at the mounting hole 705 is divided into locking blocks by arranging the pressing seam 706 and the adjusting seam 707, and the locking blocks at the mounting hole 705 are locked inwards by using locking bolts matched with the locking holes 708, so that the pressing seam 706 is closed, that is, the mounting hole 705 is shrunk, and the purpose of fixing the displacement sensor is achieved;

the top plate 702 also adopts a pressing seam 706, an adjusting seam 707 and a locking hole 708 to realize the contraction of the mounting hole 705;

after the utility model is installed, the axes of the ultra-precise turntable 15, the base 201 of the micro-tilt adjusting table 2 and the reference ball 5 are positioned on the same axis; the first displacement sensor 10 and the second displacement sensor 11 face the first target ball of the reference ball 5 and are in the same horizontal plane with the center of the first target ball; the third displacement sensor 12 and the fourth displacement sensor 13 face the second target ball of the reference ball 5 and are positioned on the same horizontal plane with the center of the second target ball; the fifth displacement sensor 14 is directed towards the top center of the second target ball of the reference ball 5 and is vertically aligned with the center of the second target ball.

During measurement, the ultra-precise turntable 15 rotates to drive the reference ball 5 to rotate, the displacement error of the reference ball 5 along the X axis can be measured through the first displacement sensor 10 and the third displacement sensor 12, and the displacement error of the reference ball 5 along the Y axis can be measured through the second displacement sensor 11 and the fourth displacement sensor 13; displacement error of the reference ball 5 along the Z axis can be measured by the fifth displacement sensor 14, and the rotation angle error of the rotating shaft around the X axis or the Y axis can be obtained by formula calculation through data measured by the first displacement sensor 10 and the third displacement sensor 12 or data measured by the second displacement sensor 11 and the fourth displacement sensor 13; four grating reading heads 4 are uniformly arranged around the circular grating encoder 3, the average value of the angle errors measured by the four grating reading heads 4 is taken as the rotation angle error of the reference ball 5, the influence of the installation eccentricity and the radial motion of the main shaft of the circular grating encoder 3 on the reading can be eliminated, and the measurement precision of the angle error is greatly improved.

The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any modification and replacement based on the technical solution and inventive concept provided by the present invention should be covered within the protection scope of the present invention.

Claims (5)

1. The utility model provides a gyration axis full attitude error synchronous measurement device based on angle triggers collection which characterized in that: comprises a fixed seat (1), a micro-tilt adjusting platform (2), a circular grating encoder (3), a grating reading head (4), a reference ball (5), a supporting plate (6) and a clamping platform (7), wherein the micro-tilt adjusting platform (2) is positioned below the supporting plate (6), a circular hole groove (8) is formed in the center of the top of the micro-tilt adjusting platform (2), the circular grating encoder (3) is fixedly arranged at the top of the micro-tilt adjusting platform (2), the circular grating encoder (3) and the circular hole groove (8) are coaxially arranged, the grating reading head (4) is provided with a plurality of grating reading heads (4), the plurality of grating reading heads (4) are uniformly distributed on the periphery of the circular grating encoder (3) and are positioned at the same horizontal plane with the circular grating encoder (3), the grating reading heads (4) are fixed at the bottom of the supporting plate (6) through a mounting plate (9), and a through hole coaxial with the circular hole groove (8) is formed in the supporting plate (6), one end of the reference ball (5) is inserted into the round hole groove (8), the other end of the reference ball passes through the through hole, and the first target ball and the second target ball of the reference ball (5) are positioned above the supporting plate (6), a first displacement sensor (10) and a second displacement sensor (11) are vertically distributed at the position corresponding to the sphere center of the first target ball of the reference ball (5), a third displacement sensor (12) and a fourth displacement sensor (13) are vertically distributed at the position corresponding to the sphere center of the second target ball of the reference ball (5) horizontally, a fifth displacement sensor (14) which is coaxial with the reference ball (5) is also arranged above the reference ball (5), the first displacement sensor (10), the second displacement sensor (11), the third displacement sensor (12), the fourth displacement sensor (13) and the fifth displacement sensor (14) are all fixed on the clamping table (7), and the clamping table (7) is fixedly installed at the top of the supporting plate (6).

2. The synchronous measurement device of the full attitude error of the revolution axis based on the angle trigger acquisition of claim 1, characterized in that: micro-tilt adjusting platform (2) include from supreme base (201), connecting seat (202) and the regulation seat (203) of coaxial setting in proper order down, base (201) and connecting seat (202) fixed connection are equipped with between connecting seat (202) and the regulation seat (203) and adjust ball (204) and several adjusting bolt (205), adjust ball (204) and be located connecting seat (202) top center, and several adjusting bolt (205) are along connecting seat (202) circumference evenly distributed, round hole groove (8) and circle grating encoder (3) all are located and adjust seat (203) top to with adjust seat (203) coaxial setting.

3. The synchronous measurement device of the full attitude error of the revolution axis based on the angle trigger acquisition according to claim 1 or 2, characterized in that: the clamping table (7) comprises a bottom plate (701), a top plate (702) and a side plate (703) fixed between the bottom plate (701) and the top plate (702), the side plate (703) is composed of two vertical plates which are integrally formed and perpendicular to each other, the bottom plate (701) is provided with an opening (704) matched with the through hole, the opening is fixedly installed at the through hole of the supporting plate (6), two installation holes (705) which are perpendicular to each other with center lines are formed in the position, corresponding to the first target ball center level, of the lower portion of the side plate (703) and the first target ball center level of the reference ball (5), two installation holes (705) which are perpendicular to each other with center lines are formed in the position, corresponding to the second target ball center level, of the upper portion of the side plate (703) and the second target ball center level of the reference ball (5), and the installation holes (705) are also formed in the positions, corresponding to the axes of the top plate (702) and the reference ball (5).

4. The synchronous measurement device of the full attitude error of the revolution axis based on the angle trigger acquisition of claim 3, characterized in that: the mounting hole (705) is provided with a pressing seam (706) and an adjusting seam (707), the pressing seam (706) is L-shaped, one end of the pressing seam (706) is communicated with the mounting hole (705), the other end of the pressing seam penetrates through the side wall of the side plate (703) or the top plate (702), the adjusting seam (707) is positioned below the mounting hole (705) and corresponds to the pressing seam (706), the side wall of the side plate (703) between the pressing seam (706) and the adjusting seam (707) is provided with a locking hole (708), the locking hole (708) and the mounting hole (705) are distributed in a staggered mode, the locking hole (708) is parallel to one side of the pressing seam (706), and the locking hole (708) penetrates through the other side of the pressing seam (706).

5. The synchronous measurement device of the full attitude error of the revolution axis based on the angle trigger acquisition according to claim 1, 2 or 4, characterized in that: mounting panel (9) are the L type, and the one end and backup pad (6) bottom fixed connection of mounting panel (9), the other end are opened has the spread groove that matches with grating reading head (4), grating reading head (4) joint is fixed in the spread groove to align with circle grating encoder (3) level.

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