CN215103487U - Pull type ion source mechanism on vacuum coating equipment - Google Patents
Pull type ion source mechanism on vacuum coating equipment Download PDFInfo
- Publication number
- CN215103487U CN215103487U CN202121258959.7U CN202121258959U CN215103487U CN 215103487 U CN215103487 U CN 215103487U CN 202121258959 U CN202121258959 U CN 202121258959U CN 215103487 U CN215103487 U CN 215103487U
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- China
- Prior art keywords
- fixedly connected
- ion source
- pull
- source mechanism
- type ion
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- Expired - Fee Related
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 16
- 238000009434 installation Methods 0.000 abstract description 21
- 238000003780 insertion Methods 0.000 abstract description 5
- 230000037431 insertion Effects 0.000 abstract description 5
- 150000002500 ions Chemical class 0.000 description 23
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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Abstract
The utility model discloses a pull type ion source mechanism on vacuum coating equipment, which comprises an installation box, an insertion groove in the installation box, a storage rack is arranged in the insertion groove, sliding plates are fixedly connected on the outer walls of two sides of the storage rack, a plurality of guide blocks are fixedly connected on the inner walls of two sides of the installation box, a plurality of guide grooves corresponding to the sliding plates are arranged on the guide blocks, installation blocks are fixedly connected on the inner walls of the upper side and the lower side of the guide blocks, limiting wheels are rotatably connected on the installation blocks, limiting grooves corresponding to the limiting wheels are arranged on the outer walls of two sides of the sliding plates, a closing plate is fixedly connected on one end of the storage rack, a support frame is fixedly connected at the bottom of the installation box, a clamping rod is inserted on one end of the support frame in a sliding way, the utility model has simple integral structure, higher stability of a pull structure, and can effectively limit the position of the pull type ion source mechanism after the pull type ion source mechanism is closed, avoiding self-starting and being suitable for large-scale popularization.
Description
Technical Field
The utility model relates to a vacuum coating related products field specifically is a pull formula ion source mechanism on vacuum coating equipment.
Background
An ion source is a device that ionizes neutral atoms or molecules and extracts a stream of ions therefrom. The ion source is an indispensable component of equipment such as various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, neutral beam injectors in controlled fusion devices and the like, has wide application, and can realize the function of coating by utilizing the chemical activity of particles which are ionized and have controllable kinetic energy and greatly improved chemical activity in the application of ion source coating.
The characteristic of stable in structure of the current ion source design is mostly fixed structure, but it has the problems of difficult maintenance and heavy disassembly task, so that a pull type ion source mechanism on vacuum coating equipment is urgently needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a pull formula ion source mechanism on vacuum coating equipment to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a pull type ion source mechanism on vacuum coating equipment comprises an installation box, wherein an insertion groove is formed in the installation box, a storage rack is arranged in the insertion groove, sliding plates are fixedly connected to the outer walls of the two sides of the storage rack, a plurality of guide blocks are fixedly connected to the inner walls of the two sides of the installation box, guide grooves corresponding to the sliding plates are formed in the guide blocks, installation blocks are fixedly connected to the inner walls of the upper side and the lower side of each guide block, limiting wheels are connected to the installation blocks in a rotating mode, limiting grooves corresponding to the limiting wheels are formed in the outer walls of the two sides of the sliding plates, a closing plate is fixedly connected to one end of the storage rack, a support frame is fixedly connected to the bottom of the installation box, a clamping rod is inserted into one end of the support frame in a sliding mode, a clamping groove corresponding to the clamping rod is formed in the bottom of the closing plate, a pull ring is fixedly connected to the bottom end of the clamping rod, and a connecting block is fixedly connected to the bottom of the support frame, a positioning rod is slidably inserted into the connecting block, a positioning hole corresponding to the positioning rod is formed in one side of the pull ring, and a limiting sleeve is fixedly sleeved on one end, close to the pull ring, of the positioning rod.
Preferably, one end of the clamping rod close to the closing plate is fixedly sleeved with the anti-falling block.
Preferably, the positioning rod is sleeved with a spring, and two ends of the spring are fixedly connected with the limiting sleeve and the connecting block respectively.
Preferably, one end of the positioning rod, which is far away from the limiting sleeve, is fixedly connected with a holding block.
Preferably, a handle is fixedly connected to one side of the closing plate, which is far away from the commodity shelf.
Compared with the prior art, the beneficial effects of the utility model are that:
this pull formula ion source mechanism on vacuum coating equipment places in the supporter through the ion source, inside pushing the supporter to the install bin, slide card on the supporter both sides is gone into the guide slot on the guide block in, stability when spacing wheel on the installation block just gomphosis advances the spacing inslot on the slide and increases the supporter pull this moment, slide the card pole and insert the draw-in groove on the closing plate in the card pole and realize the fixed of closing plate in the draw-in groove on the closing plate after the closing plate is closed completely, slide the locating lever afterwards and insert the locating lever in the locating hole on the pull ring and fix the card pole position, prevent that the locating lever from deviating from, the utility model has the advantages of simple overall structure, the stability of pull structure is higher, and can effectively carry out the position to it after the closure and prescribe a limit to it, has avoided opening by oneself, is fit for extensive popularization.
Drawings
Fig. 1 is a schematic structural view of a pull-out ion source mechanism of a vacuum deposition apparatus of the present invention;
fig. 2 is an enlarged view of a position a of a pull-out ion source mechanism of the vacuum deposition apparatus of the present invention;
fig. 3 is a schematic side view of a pull-out ion source mechanism of the vacuum deposition apparatus of the present invention;
fig. 4 is an enlarged view of a drawing type ion source mechanism diagram 3 of the vacuum deposition apparatus of the present invention at the position B.
FIG. 5 is a schematic view of the inside of the rack of the pull-out ion source mechanism of the vacuum coating apparatus of the present invention
In the figure: 1. installing a box; 2. a rack; 3. a slide plate; 4. a guide block; 5. mounting blocks; 6. a limiting wheel; 7. a closing plate; 8. a support frame; 9. a clamping rod; 10. a pull ring; 11. connecting blocks; 12. positioning a rod; 13. a limiting sleeve; 14. an anti-drop block; 15. a spring; 16. a holding block; 17. a handle.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-5, the present invention provides an embodiment: a pull type ion source mechanism on vacuum coating equipment comprises an installation box 1, an insertion groove in the installation box 1 is internally provided with a commodity shelf 2, sliding plates 3 are fixedly connected on the outer walls of two sides of the commodity shelf 2, a plurality of guide blocks 4 are fixedly connected on the inner walls of two sides of the installation box 1, guide grooves corresponding to the sliding plates 3 are arranged on the guide blocks 4, installation blocks 5 are fixedly connected on the inner walls of the upper side and the lower side of the guide blocks 4, limiting wheels 6 are rotatably connected on the installation blocks 5, limiting grooves corresponding to the limiting wheels 6 are arranged on the outer walls of two sides of the sliding plates 3, a closing plate 7 is fixedly connected on one end of the commodity shelf 2, a support frame 8 is fixedly connected to the bottom of the installation box 1, a clamping rod 9 is slidably inserted on one end of the support frame 8, a clamping groove corresponding to the clamping rod 9 is arranged at the bottom of the closing plate 7, a pull ring 10 is fixedly connected to the bottom of the clamping rod 9, and a connecting block 11 is fixedly connected to the bottom of the support frame 8, connecting block 11 is gone up the slip and is inserted and be equipped with locating lever 12, one side of pull ring 10 is equipped with the locating hole that corresponds with locating lever 12, locating lever 12 is close to one of pull ring 10 and serves fixedly cup joints stop collar 13, specifically speaking, the ion source is placed in supporter 2, push into install bin 1 inside with supporter 2, slide 3 card on supporter 2 both sides is gone into in the guide slot on guide block 4, spacing wheel 6 on the installation block 5 just gomphosis advances the stability when spacing inslot on slide 3 increases supporter 2 pull, slide clamping bar 9 after closing plate 7 complete closure finishes and insert the draw-in groove on closing plate 7 with clamping bar 9 and realize closing plate 7's fixed, slide positioning lever 12 inserts locating lever 12 in the locating hole on pull ring 10 afterwards fixes clamping bar 12 position, prevent that locating lever 9 from deviating from.
Furthermore, the clamping rod 9 is fixedly sleeved with an anti-falling block 14 at one end close to the closing plate 7, so that the clamping rod 9 is prevented from falling off from the support frame 8.
Further, the locating rod 12 is sleeved with a spring 15, two ends of the spring 15 are fixedly connected with the limiting sleeve 13 and the connecting block 11 respectively, and the locating rod 12 is convenient to automatically rebound by using resilience force.
Furthermore, a holding block 16 is fixedly connected to one end of the positioning rod 12 far away from the limiting sleeve 13, so that the positioning rod 12 can be conveniently pulled.
Further, one side of the closing plate 7, which is far away from the article shelf 2, is fixedly connected with a handle 17, so that the closing plate 7 can be pulled conveniently.
The working principle is as follows: at first place the ion source in supporter 2, push into 1 inside of install bin 2 with supporter, 3 cards of slide on the supporter 2 both sides are gone into in the guide slot on guide block 4, stability when spacing wheel 6 on the installation piece 5 just gomphosis advances the spacing inslot on slide 3 and increases supporter 2 pull this moment, slide clamping bar 9 and insert clamping bar 9 in the draw-in groove on the closing plate 7 and realize closing plate 7's fixed after closing plate 7 is closed completely, slide positioning bar 12 afterwards and fix clamping bar 12 position in inserting the locating hole on pull ring 10 with locating lever 12, prevent that locating lever 9 from deviating from.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (5)
1. The utility model provides a pull formula ion source mechanism on vacuum coating equipment, includes install bin (1), its characterized in that: the mounting box comprises a mounting box body (1), a storage rack (2) is arranged in the slot, sliding plates (3) are fixedly connected to the outer walls of the two sides of the storage rack (2), a plurality of guide blocks (4) are fixedly connected to the inner walls of the two sides of the mounting box body (1), guide grooves corresponding to the sliding plates (3) are formed in the guide blocks (4), mounting blocks (5) are fixedly connected to the inner walls of the upper side and the lower side of the guide blocks (4), limiting wheels (6) are rotatably connected to the mounting blocks (5), limiting grooves corresponding to the limiting wheels (6) are formed in the outer walls of the two sides of the sliding plates (3), a closing plate (7) is fixedly connected to one end of the storage rack body (2), a supporting frame (8) is fixedly connected to the bottom of the mounting box body (1), a clamping rod (9) is slidably inserted into one end of the supporting frame (8), and clamping grooves corresponding to the clamping rod (9) are formed in the bottom of the closing plate (7), the bottom fixedly connected with pull ring (10) of kelly (9), the bottom fixedly connected with connecting block (11) of support frame (8), sliding on connecting block (11) is inserted and is equipped with locating lever (12), one side of pull ring (10) is equipped with the locating hole that corresponds with locating lever (12), locating lever (12) are close to one of pull ring (10) and serve fixed the cup joint and have stop collar (13).
2. The pull-out type ion source mechanism of claim 1, wherein: an anti-falling block (14) is fixedly sleeved on one end of the clamping rod (9) close to the closing plate (7).
3. The pull-out type ion source mechanism of claim 1, wherein: the positioning rod (12) is sleeved with a spring (15), and two ends of the spring (15) are fixedly connected with the limiting sleeve (13) and the connecting block (11) respectively.
4. The pull-out type ion source mechanism of claim 1, wherein: and one end of the positioning rod (12) far away from the limiting sleeve (13) is fixedly connected with a holding block (16).
5. The pull-out type ion source mechanism of claim 1, wherein: one side of the closing plate (7) far away from the commodity shelf (2) is fixedly connected with a handle (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121258959.7U CN215103487U (en) | 2021-06-07 | 2021-06-07 | Pull type ion source mechanism on vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121258959.7U CN215103487U (en) | 2021-06-07 | 2021-06-07 | Pull type ion source mechanism on vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215103487U true CN215103487U (en) | 2021-12-10 |
Family
ID=79304262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121258959.7U Expired - Fee Related CN215103487U (en) | 2021-06-07 | 2021-06-07 | Pull type ion source mechanism on vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215103487U (en) |
-
2021
- 2021-06-07 CN CN202121258959.7U patent/CN215103487U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211210 |