CN215058164U - Roots screw combined vacuum pump - Google Patents
Roots screw combined vacuum pump Download PDFInfo
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- CN215058164U CN215058164U CN202121155508.0U CN202121155508U CN215058164U CN 215058164 U CN215058164 U CN 215058164U CN 202121155508 U CN202121155508 U CN 202121155508U CN 215058164 U CN215058164 U CN 215058164U
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Abstract
The utility model provides a roots's screw rod composite vacuum pump, it is equipped with the pump body, the inside of the pump body is equipped with cavity and the interior cavity of composite rotor in leading, be equipped with a pair of intermeshing's composite rotor in the cavity of composite rotor, the adjacent fixed screw pump rotor that is equipped with of composite rotor is equipped with, be equipped with screw pump rotor impeller on the screw pump rotor, the adjacent fixed lobe pump rotor that is equipped with of screw pump rotor, lobe pump rotor circumferencial direction is equipped with lobe pump rotor blade, be equipped with lobe pump rotor meshing curved surface between the lobe pump rotor blade. The technical problems that the Roots rotor and the screw rotor are not stably meshed in a rotating mode, the vacuum pump is low in reliability and short in service life are solved. The utility model discloses but the wide application is in the vacuum treatment of semiconductor trade process chamber and display equipment process chamber.
Description
Technical Field
The utility model relates to a vacuum pump especially relates to a roots screw rod compound vacuum pump.
Background
The development of modern industry has increased the demand for vacuum pumps, and particularly with the development of the semiconductor industry and the display manufacturing industry, the demand for vacuuming of process chambers has increased.
Most of the existing vacuum pumps have large volume and long axial dimension, and the energy consumption is high due to more links in the process of vacuumizing, so that the requirement of energy conservation cannot be met after long-term use; some vacuum pumps adopt roots's rotor and screw rotor composite rotor structure, but roots's rotor and screw rotor take the fixed form of keyway mostly in the location of circumferencial direction, can't satisfy at the accurate location of circumferencial direction, lead to the assembly precision of vacuum pump not high, have rotational stress between roots's rotor and the screw rotor when long-term operation, roots's rotor and screw rotor's rotatory meshing is unstable, the reliability of vacuum pump is low, short service life.
SUMMERY OF THE UTILITY MODEL
The utility model provides a Roots screw composite vacuum pump, which aims at the technical problems that most of the existing vacuum pumps have larger volume and long axial dimension, the energy consumption is higher due to more links in the process of vacuum pumping, and the long-term use cannot meet the energy-saving requirement, some vacuum pumps adopt a Roots rotor and screw rotor composite rotor structure, but the positioning of the Roots rotor and the screw rotor in the circumferential direction mostly adopts the fixed form of a key slot, the accurate positioning in the circumferential direction cannot be met, the assembly precision of the vacuum pump is not high, the rotational stress exists between the Roots rotor and the screw rotor during long-term operation, the rotational meshing of the Roots rotor and the screw rotor is unstable, the reliability of the vacuum pump is low, and the working life is short, the Roots screw composite vacuum pump is provided, the axial dimension of the vacuum pump is shorter, the working parts of the Roots rotor and the screw rotor can be seamlessly communicated, and the working efficiency is high, the long-term working power consumption is lower, and roots's rotor and screw rotor are accurate in the location of circumferencial direction simultaneously, can conveniently adjust roots's part in axial location when the assembly, make it can adapt to screw rotor's meshing, and at the during operation like this, there is not stress interference roots's rotor and screw rotor, and the roots's rotor and the screw rotor of holistic vacuum pump operate steadily, have just so improved the operational reliability of vacuum pump, have improved the life-span of vacuum pump greatly.
Therefore, the technical scheme of the utility model is that the Roots screw composite vacuum pump is provided with a pump body, one side of the pump body is provided with a front end cover, the outer side of the front end cover is fixedly provided with a motor, the other side of the pump body is provided with a rear end cover, an end face seal ring is arranged between the rear end cover and the pump body, and the outer side of the rear end cover is fixedly provided with a rear cover plate;
a front inner cavity is arranged on one side inside the pump body, a composite rotor inner cavity is arranged on the other side inside the pump body, a pump body supporting partition plate is arranged between the front inner cavity and the composite rotor inner cavity, a pair of composite rotors meshed with each other is arranged in the composite rotor inner cavity, one end of each composite rotor penetrates through the pump body supporting partition plate and enters the front inner cavity, and the other end of each composite rotor penetrates through the rear end cover;
the composite rotor comprises a composite rotor shaft, the composite rotor shaft is fixedly provided with screw pump rotors adjacent to each other, the screw pump rotors and the composite rotor shaft are of an integral structure, screw pump rotor impellers are arranged on the screw pump rotors, the screw pump rotors are fixedly provided with roots pump rotors adjacent to each other, three roots pump rotor blades are uniformly distributed and fixedly arranged in the circumferential direction of the roots pump rotors, a roots pump rotor meshing curved surface is arranged between every two adjacent roots pump rotor blades, and the roots pump rotors and the composite rotor shaft are detachably connected; the pair of screw pump rotors are meshed and connected with each other through screw pump rotor impellers, a gas flow channel is formed between the screw pump rotor impellers which are meshed and connected with each other, and the pair of roots pump rotors are meshed and connected with each other through a roots pump rotor meshing curved surface;
the composite rotor shaft of one composite rotor is connected with the output end of the motor, a pair of synchronous gears which are meshed with each other are arranged in the front inner cavity, and the synchronous gears are respectively fixed on the composite rotor shaft; a bearing is fixedly arranged at one end of the composite rotor shaft, the outer ring of the bearing is fixed inside the pump body supporting partition plate, a bearing is also arranged at the other end of the composite rotor shaft, and the bearing is positioned inside the rear end cover;
the outer side of the lower surface of the pump body is provided with a discharge port, the discharge port is positioned at one side close to the screw pump rotor, and the discharge port is communicated with the inner cavity of the composite rotor;
the gas flow primary pressure cavity is positioned on one side of the suction inlet of the Roots pump rotor blades which are meshed with each other in the composite rotor inner cavity, the gas flow primary pressure cavity is communicated with the suction inlet, the gas flow secondary pressure cavity is positioned on the side wall of the Roots pump rotor blades which are positioned in the composite rotor inner cavity, the gas flow tertiary pressure cavity is positioned at the bottom of the Roots pump rotor blades which are meshed with each other, a gas flow pressure release compensation cavity is also arranged at the bottom of the composite rotor inner cavity, and the gas flow tertiary pressure cavity is communicated with the gas flow pressure release compensation cavity;
the bottom of the inner cavity of the composite rotor is correspondingly provided with a gas flow compression cavity at the joint of the screw pump rotor and the roots pump rotor; the suction inlet, the gas flow primary pressure cavity, the gas flow secondary pressure cavity, the gas flow tertiary pressure cavity, the gas flow pressure release compensation cavity, the gas flow compression cavity, a gas flow channel formed between the screw pump rotor impellers in meshed connection and the discharge port form a gas flow compression discharge channel of the Roots screw composite vacuum pump.
Preferably, a nitrogen inlet hole is formed in the pump body supporting partition plate and located on the inner side of the bearing inside the pump body supporting partition plate, the nitrogen inlet hole penetrates through the pump body, and a nitrogen fixing joint is arranged on the pump body; the inner side of the bearing positioned in the rear end cover on the rear end cover is also provided with a nitrogen inlet hole, the nitrogen inlet hole penetrates through the rear end cover, and the rear end cover is also provided with a nitrogen fixing joint;
the nitrogen fixed joint is communicated with the nitrogen inlet hole, a pair of lip-shaped sealing rings are arranged on the inner sides, close to the inner cavity of the composite rotor, of the bearing located inside the pump body supporting partition plate and the bearing located inside the rear end cover, a lip-shaped sealing ring floating pressing ring is arranged between the pair of lip-shaped sealing rings, a pressure adjusting hole is formed in the middle of the lip-shaped sealing ring floating pressing ring and communicated with the nitrogen inlet hole, an annular sealing ring is arranged on the inner side, close to one side of the inner cavity of the composite rotor, of the lip-shaped sealing ring, and the annular sealing ring is fixed on the composite rotor shaft.
Preferably, one end of the roots pump rotor is provided with a roots pump rotor inner ring positioning and pressing annular part, the roots pump rotor is sleeved on the composite rotor shaft, an outer cone locking sleeve and an inner cone locking sleeve are arranged on the composite rotor shaft and located inside the roots pump rotor, the inner cone surface of the outer cone locking sleeve is matched with the outer cone surface of the inner cone locking sleeve, the outer end face of the outer cone locking sleeve is in pressing contact with the roots pump rotor inner ring positioning and pressing annular part, a roots pump rotor locking inner sleeve is fixedly arranged on the outer side of the roots pump rotor, the front end of the roots pump rotor locking inner sleeve is provided with an inner sleeve pressing part, the inner sleeve pressing part is in pressing contact with the outer end face of the inner cone locking sleeve, and a locking gap is formed between the roots pump rotor locking inner sleeve and the roots pump rotor.
Preferably, the composite rotor shaft is provided with three pairs of outer cone locking sleeves and inner cone locking sleeves which are positioned inside the rotor of the roots pump.
Preferably, the roots pump rotor inner race positioning compression ring portion has a contact portion with the composite rotor shaft outer surface that has a length exceeding 1/3 of the composite rotor shaft length.
Preferably, an end face seal ring is arranged between the front end cover and the pump body.
Preferably, an end face sealing ring is arranged between the rear cover plate and the rear end cover.
Preferably, the outer wall of the pump body is provided with a cooling water cavity.
Preferably, a nitrogen inlet hole is formed in the middle position of the pump body corresponding to the position of the inner cavity of the composite rotor, the nitrogen inlet hole is communicated with the inner cavity of the composite rotor, a nitrogen fixing joint is arranged on the outer wall of the pump body, and the nitrogen fixing joint is communicated with the nitrogen inlet hole.
The utility model has the advantages that the roots pump rotors are adjacently and fixedly arranged on the screw pump rotors, so that the vacuum can be generated more efficiently; because the Roots pump rotor blades which are meshed with each other in the composite rotor inner cavity are positioned on one side of the suction inlet and are respectively a gas flow primary pressure cavity, the gas flow primary pressure cavity is communicated with the suction inlet, the side wall of the Roots pump rotor blades which are positioned in the composite rotor inner cavity is a gas flow secondary pressure cavity, the Roots pump rotor blades which are meshed with each other are positioned on the bottom and are respectively a gas flow tertiary pressure cavity, the gas flow pressure release compensation cavity is also arranged at the bottom of the composite rotor inner cavity and is communicated with the gas flow pressure release compensation cavity, in the structure, when vacuum pumping is performed, air of the suction inlet enters the gas flow tertiary pressure cavity after passing through the gas flow primary pressure cavity and the gas flow secondary pressure cavity, because the gas flow tertiary pressure cavity is communicated with the gas flow pressure release compensation cavity, the communicated volume is larger than the volume of the gas flow secondary pressure cavity, the sucked air is released rapidly, the rotor blade of the roots pump rotates continuously, compressed air is sucked continuously and reciprocally, and then the compressed air is released continuously through the three-stage pressure cavity with the gas flow, so that the continuous suction and compression transmission of the air are realized, and compressed air flow is formed and discharged.
Because the bottom of the inner cavity of the composite rotor is positioned at the joint of the screw pump rotor and the roots pump rotor and is correspondingly provided with a gas flow compression cavity, and a gas flow compression discharge channel of the roots screw composite vacuum pump is formed by a suction inlet, a gas flow primary pressure cavity, a gas flow secondary pressure cavity, a gas flow tertiary pressure cavity, a gas flow pressure release compensation cavity, a gas flow compression cavity, a gas flow channel formed between screw pump rotor impellers which are mutually meshed and connected and a discharge outlet; because the gas flow pressure release compensation cavity exists, a partition plate structure arranged in the traditional vacuum pump is removed, the axial structural layout is greatly simplified, the power consumption of the pump is reduced, and the manufacturing cost is also reduced.
The utility model is also because one end of the Roots pump rotor is provided with a Roots pump rotor inner ring positioning and pressing annular part, the Roots pump rotor is sleeved on the composite rotor shaft, the composite rotor shaft is provided with an outer cone locking sleeve and an inner cone locking sleeve inside the Roots pump rotor, the inner cone surface of the outer cone locking sleeve is matched with the outer cone surface of the inner cone locking sleeve, the outer end surface of the outer cone locking sleeve is in pressing contact with the Roots pump rotor inner ring positioning and pressing annular part, the Roots pump rotor locking inner sleeve is fixedly arranged outside the Roots pump rotor, the front end of the Roots pump rotor locking inner sleeve is provided with an inner sleeve pressing part, the inner sleeve pressing part is in pressing contact with the outer end surface of the inner cone locking sleeve, a locking gap is arranged between the Roots pump rotor locking inner sleeve and the Roots pump rotor, the structure can conveniently adjust the axial positioning of the Roots pump rotor and the screw pump rotor during assembly, thereby achieving the high precision requirement, the traditional connection usually adopts a key connection mode, the angle fine adjustment cannot be carried out in the circumferential axial direction by the key connection mode, the processing precision needs to be improved, only a fixed angle can be formed during assembly, the processing precision cannot be improved without limit, so that the stress exists during the operation of the vacuum pump, the service life of the pump is reduced, the inner conical surface of the outer cone locking sleeve and the outer conical surface of the inner cone locking sleeve are matched and locked, the optimal circumferential angle matching can be adjusted during assembly, and then the locking is fixed, so that the optimal axial positioning angle of a rotor of the roots pump and a rotor of the screw pump is realized, the assembly error is eliminated to the maximum extent, the operating stress is eliminated, the operation reliability of the pump is improved, and the service life of the pump is also prolonged; on the other hand, the difficulty of mechanical processing is reduced, and the cost is greatly reduced.
Meanwhile, because the nitrogen fixed joint is communicated with the nitrogen inlet hole, the bearing positioned in the pump body supporting partition plate and the bearing positioned in the rear end cover are both provided with a pair of lip-shaped sealing rings at the inner sides close to the inner cavity of the composite rotor, a lip-shaped sealing ring floating pressure ring is arranged between the pair of lip-shaped sealing rings, the middle position of the lip-shaped sealing ring floating pressure ring is provided with a pressure adjusting hole, the pressure adjusting hole is communicated with the nitrogen inlet hole, the inner side of the lip-shaped sealing ring at one side close to the inner cavity of the composite rotor is provided with an annular sealing ring which is fixed on the composite rotor shaft, and in the structure, the sealing structure combining the lip-shaped sealing rings and the annular sealing rings is adopted in consideration of the very high sealing requirement of the inner cavity of the composite rotor, and the sealing form of the lip-shaped sealing rings is adopted at the outer sides of the lip-shaped sealing rings; meanwhile, a lip-shaped sealing ring floating pressure ring is arranged between the pair of lip-shaped sealing rings, so that the composite rotor sealing ring floating pressure ring can automatically adapt to different sealing pressures, and when the pressure of the inner cavity of the composite rotor is different from that of the front inner cavity, the lip-shaped sealing ring floating pressure ring slides in the axial direction under the pressure of nitrogen, so that the pressure of the inner cavity of the composite rotor and the pressure of the front inner cavity are balanced, and the optimal sealing effect is achieved; on the other hand, as the nitrogen fixed joint is communicated with the nitrogen inlet hole, and the pressure adjusting hole is communicated with the nitrogen inlet hole, the pump body also has a self-cleaning function in the pump body, nitrogen is continuously introduced in the operation process to take away tiny particles falling off from the lip-shaped sealing ring and the annular sealing ring, the nitrogen inlet hole is arranged at the middle position on the intermittent starting pump body corresponding to the position of the inner cavity of the composite rotor during operation, the nitrogen in the nitrogen inlet hole enters the inner cavity of the composite rotor, blowing the micro impurities or floating particles in the inner cavity of the composite rotor to the outside, and discharging the micro impurities or floating particles together with compressed gas, wherein nitrogen inlet holes are arranged at a plurality of positions, and the nitrogen is controlled to enter as required, so that the self-cleaning in the pump body is realized, the service life of the vacuum pump is further prolonged, the cleanliness in the pump body is improved, and the running reliability of the pump is improved.
Drawings
Fig. 1 is a front view of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
FIG. 3 is a cross-sectional view B-B of FIG. 1;
FIG. 4 is a top view of FIG. 1;
FIG. 5 is a cross-sectional view W-W of FIG. 4;
FIG. 6 is an enlarged view at K of FIG. 5;
FIG. 7 is a C-C rotational cross-sectional view of FIG. 1;
FIG. 8 is a schematic three-dimensional structure of a composite rotor;
FIG. 9 is a front view of FIG. 8;
FIG. 10 is a cross-sectional view D-D of FIG. 9;
FIG. 11 is an enlarged view at Z of FIG. 10;
fig. 12 is a side view of fig. 8.
The symbols in the drawings illustrate that:
1. a motor; 2. a composite rotor; 201. a composite rotor shaft; 202. a screw pump rotor; 20201. a screw pump rotor impeller; 203. a roots pump rotor; 20301. roots pump rotor blades; 20302. a Roots pump rotor meshing curved surface; 204. the rotor of the Roots pump locks the inner sleeve; 205. an inner cone locking sleeve; 206. an outer cone locking sleeve; 207. locking the gap; 208. the inner ring of the rotor of the Roots pump is positioned and pressed on the annular part; 209. an inner sleeve pressing part; 3. a synchronizing gear; 4. an end face seal ring; 5. a front end cover; 6. a rear end cap; 7. a gas flow compression chamber; 8. a cooling water cavity; 9. a suction inlet; 10. an outlet port; 11. a bearing seat; 12. a pump body; 13. fixing a joint by nitrogen; 14. a lip-shaped seal ring; 15. an annular seal ring; 16. a nitrogen inlet hole; 17. a pressure regulating hole; 18. a lip-shaped sealing ring floating pressure ring; 19. a bearing; 20. a rear cover plate; 21. a pump body annular sealing ring; 22. a gas flow secondary pressure chamber; 23. a gas flow three-stage pressure cavity; 24. a gas flow pressure release compensation chamber; 25. a gas flow primary pressure chamber; 26. a front inner cavity; 27. a composite rotor inner cavity; 28. the pump body supports the partition plate.
Detailed Description
The present invention will be further described with reference to the following examples.
Fig. 1-12 show an embodiment of a roots screw compound vacuum pump according to the present invention, which is shown in the drawings, and is provided with a pump body 12, a front end cap 5 is provided on one side of the pump body 12, a motor 1 is fixedly provided on the outside of the front end cap 5, a rear end cap 6 is provided on the other side of the pump body 12, an end face seal ring 4 is provided between the rear end cap 6 and the pump body 12, and a rear cover plate 20 is fixedly provided on the outside of the rear end cap 6.
As can be seen from fig. 2 and 3, a front inner cavity 26 is provided on one side of the interior of the pump body 12, a composite rotor inner cavity 27 is provided on the other side of the interior of the pump body 12, a pump body supporting partition plate 28 is provided between the front inner cavity 26 and the composite rotor inner cavity 27, a pair of composite rotors 2 meshed with each other is provided in the composite rotor inner cavity 27, one end of each composite rotor 2 penetrates through the pump body supporting partition plate 28 and enters the front inner cavity 26, and the other end of each composite rotor 2 penetrates through the rear end cover 6.
As can be seen in fig. 8, the composite rotor 2 includes a composite rotor shaft 201, the composite rotor shaft 201 is adjacently and fixedly provided with a screw pump rotor 202, the screw pump rotor 202 and the composite rotor shaft 201 are of an integral structure, a screw pump rotor impeller 20201 is arranged on the screw pump rotor 202, roots pump rotors 203 are adjacently and fixedly arranged on the screw pump rotors 202, three roots pump rotor blades 20301 are uniformly and fixedly arranged in the circumferential direction of the roots pump rotors 203, a roots pump rotor meshing curved surface 20302 is arranged between every two adjacent roots pump rotor blades 20301, and the roots pump rotors 203 and the composite rotor shaft 201 are detachably connected; the pair of screw pump rotors 202 are meshed with each other through screw pump rotor impellers 20201, a gas flow passage is formed between the screw pump rotor impellers 20201 meshed with each other, and the pair of roots pump rotors 203 are meshed with each other through a roots pump rotor meshing curved surface 20302.
The composite rotor shaft 201 of one of the composite rotors 2 is connected with the output end of the motor 1, as can be clearly seen in fig. 3, a pair of synchronous gears 3 which are meshed with each other are arranged in the front inner cavity 26, and the synchronous gears 3 are respectively fixed on the composite rotor shaft 201; one end of the composite rotor shaft 201 is fixedly provided with a bearing 19, the outer ring of the bearing 19 is fixed inside the pump body supporting partition plate 28, the other end of the composite rotor shaft 201 is also provided with the bearing 19, and the bearing 19 is positioned inside the rear end cover 6.
Fig. 7 mainly shows various compressed air chambers formed by the roots pump rotor blade 20301 and the inner wall of the composite rotor inner cavity 27, and it can be seen that, the gas flow primary pressure chamber 25 is located on the side of the suction port 9 of the roots pump rotor blade 20301 engaged with each other in the composite rotor inner cavity 27, the gas flow primary pressure chamber 25 is communicated with the suction port 9, the gas flow secondary pressure chamber 22 is located on the side wall of the composite rotor inner cavity 27 of the roots pump rotor blade 20301, the gas flow tertiary pressure chamber 23 is located at the bottom of the roots pump rotor blade 20301 engaged with each other, the gas flow pressure release compensation chamber 24 is also located at the bottom of the composite rotor inner cavity 27, and the gas flow tertiary pressure chamber 23 is communicated with the gas flow pressure release compensation chamber 24.
The bottom of the composite rotor inner cavity 27 is correspondingly provided with a gas flow compression cavity 7 at the joint of the screw pump rotor 202 and the roots pump rotor 203; the outer side of the upper surface of the pump body 12 is provided with a suction inlet 9, the suction inlet 9 is communicated with the inner cavity 27 of the composite rotor, the position of the suction inlet 9 corresponds to the rotor 203 of the roots pump, the outer side of the lower surface of the pump body 12 is provided with a discharge outlet 10, the discharge outlet 10 is positioned at one side close to the rotor 202 of the screw pump, the discharge outlet 10 is communicated with the inner cavity 27 of the composite rotor, and the suction inlet 9, the primary gas flow pressure cavity 25, the secondary gas flow pressure cavity 22, the tertiary gas flow pressure cavity 23, the pressure release compensation cavity 24, the compression cavity 7, the rotor impeller 20201 of the screw pump which are mutually meshed and connected form a gas flow channel and the discharge outlet 10 form a gas flow compression discharge channel of the roots screw composite vacuum pump;
as can also be seen from fig. 5, in the technical solution of the present embodiment, a nitrogen gas inlet hole 16 is formed in the pump body support partition 28 inside the bearing 19 inside the pump body support partition 28, the nitrogen gas inlet hole 16 penetrates through the pump body 12, and the pump body 12 is provided with a nitrogen gas fixed joint 13; the inner side of a bearing 19 positioned on the rear end cover 6 and positioned in the rear end cover 6 is also provided with a nitrogen inlet hole 16, the nitrogen inlet hole 16 penetrates through the rear end cover 6, and the rear end cover 6 is also provided with a nitrogen fixing joint 13; the nitrogen fixing joint 13 is communicated with a nitrogen inlet hole 16, a pair of lip-shaped sealing rings 14 are arranged on the inner sides, close to a composite rotor inner cavity 27, of a bearing 19 located in the pump body supporting partition plate 28 and the bearing 19 located in the rear end cover 6, a lip-shaped sealing ring floating pressing ring 18 is arranged between the lip-shaped sealing rings 14, a pressure adjusting hole 17 is arranged in the middle of the lip-shaped sealing ring floating pressing ring 18, the pressure adjusting hole 17 is communicated with the nitrogen inlet hole 16, an annular sealing ring 15 is arranged on the inner side, close to one side of the composite rotor inner cavity 27, of the lip-shaped sealing ring 14, and the annular sealing ring 15 is fixed on the composite rotor shaft 201.
As can be seen in the enlarged view of fig. 11, three pairs of outer cone locking sleeves 206 and inner cone locking sleeves 205 are provided on the composite rotor shaft 201 inside the roots pump rotor 203; more or fewer pairs of outer cone locking sleeve 206 and inner cone locking sleeve 205 may be selected depending on the size of the axial dimension. Meanwhile, the length of the contact part of the rotor inner ring positioning and pressing annular part 208 of the roots pump and the outer surface of the composite rotor shaft 201 exceeds 1/3 of the composite rotor shaft 201, the structure ensures the positioning reliability in the circumferential direction, can exceed 1/2 of the composite rotor shaft 201 in length, is even longer, ensures the stability and precision of the roots pump rotor during operation, and improves the reliability.
An end face seal ring 4 is arranged between the front end cover 5 and the pump body 12, an end face seal ring 4 is arranged between the rear cover plate 20 and the rear end cover 6, and the main function of the end face seal ring 4 is a dustproof effect.
Because the roots pump rotor 203 is fixedly arranged adjacent to the screw pump rotor 202, the structure can more efficiently complete the generation of vacuum; because the gas flow primary pressure cavity 25 is positioned on the side of the suction port 9 of the mutually meshed roots pump rotor blade 20301 in the composite rotor inner cavity 27, the gas flow primary pressure cavity 25 is communicated with the suction port 9, the gas flow secondary pressure cavity 22 is positioned on the side wall of the roots pump rotor blade 20301 in the composite rotor inner cavity 27, the gas flow tertiary pressure cavity 23 is positioned on the bottom of the mutually meshed roots pump rotor blade 20301, the gas flow tertiary pressure cavity 23 is also arranged on the bottom of the composite rotor inner cavity 27, and the gas flow pressure release compensation cavity 24 is communicated with the gas flow tertiary pressure cavity 23, in the structure, when the vacuum is pumped, the air in the suction port 9 enters the gas flow tertiary pressure cavity 23 after passing through the gas flow primary pressure cavity 25 and the gas flow secondary pressure cavity 22, because the gas flow tertiary pressure cavity 23 is communicated with the gas flow pressure release compensation cavity 24, the communicated volume is larger than that of the gas flow secondary pressure cavity 22, so that the sucked air is rapidly released, the rotor blade 20301 of the roots pump continuously rotates to continuously suck the compressed air in a reciprocating manner, and the compressed air is continuously released through the gas flow tertiary pressure cavity 23, so that the continuous suction and compression transmission of the air are realized, and the compressed air flow is formed for discharge.
Because the bottom of the composite rotor inner cavity 27 is located at the joint of the screw pump rotor 202 and the roots pump rotor 203 and is correspondingly provided with the gas flow compression cavity 7, and the gas flow channel formed by the suction inlet 9, the gas flow primary pressure cavity 25, the gas flow secondary pressure cavity 22, the gas flow tertiary pressure cavity 23, the gas flow pressure release compensation cavity 24, the gas flow compression cavity 7 and the screw pump rotor impeller 20201 which are mutually meshed and connected and the discharge outlet 10 form the gas flow compression discharge channel of the roots screw composite vacuum pump, the design is that the air which is continuously compressed and released in the gas flow tertiary pressure cavity 23 is further conveyed to the discharge outlet 10 through the screw pump rotor impeller 20201 which are mutually meshed and connected, so that the reciprocating compression and transmission of the air are formed, and the purpose of vacuumizing is achieved; because the gas flow pressure release compensation cavity 24 exists, a partition plate structure arranged in the traditional vacuum pump is removed, the axial structural layout is greatly simplified, the power consumption of the pump is reduced, and the manufacturing cost is also reduced.
As can be seen in the enlarged view of fig. 6 of this embodiment, one end of the roots pump rotor 203 is provided with a roots pump rotor inner ring positioning and pressing annular portion 208, the roots pump rotor 203 is sleeved on the composite rotor shaft 201, an outer cone locking sleeve 206 and an inner cone locking sleeve 205 are arranged inside the roots pump rotor 203 on the composite rotor shaft 201, an inner cone surface of the outer cone locking sleeve 206 is matched with an outer cone surface of the inner cone locking sleeve 205, an outer end surface of the outer cone locking sleeve 206 is in pressing contact with the roots pump rotor inner ring positioning and pressing annular portion 208, a roots pump rotor locking inner sleeve 204 is fixedly arranged on the outer side of the roots pump rotor 203, an inner sleeve pressing portion 209 is arranged at the front end of the roots pump rotor locking inner sleeve 204, the inner sleeve pressing portion 209 is in pressing contact with an outer end surface of the inner cone locking sleeve 205, and a locking gap 207 is arranged between the roots pump rotor locking inner sleeve 204 and the roots pump rotor 203.
The utility model is also because one end of the Roots pump rotor 203 is provided with a Roots pump rotor inner ring positioning and pressing annular part 208, the Roots pump rotor 203 is sleeved on the composite rotor shaft 201, the composite rotor shaft 201 is provided with an outer cone locking sleeve 206 and an inner cone locking sleeve 205 inside the Roots pump rotor 203, the inner cone surface of the outer cone locking sleeve 206 is matched with the outer cone surface of the inner cone locking sleeve 205, the outer end surface of the outer cone locking sleeve 206 is in pressing contact with the Roots pump rotor inner ring positioning and pressing annular part 208, the Roots pump rotor 203 is fixedly provided with a Roots pump rotor locking inner sleeve 204 outside, the front end of the Roots pump rotor locking inner sleeve 204 is provided with an inner sleeve pressing part 209, the inner sleeve pressing part 209 is in pressing contact with the outer end surface of the inner cone locking sleeve 205, a locking gap 207 is arranged between the Roots pump rotor locking inner sleeve 204 and the Roots pump rotor 203, the structure can conveniently adjust the Roots pump rotor 203 and the screw pump rotor 202 in axial positioning during assembly, therefore, the requirement of high precision is met, the traditional connection usually adopts a key connection mode which cannot finely adjust the angle in the circumferential axial direction, the machining precision needs to be improved, only a fixed angle can be formed during assembly, the machining precision cannot be improved without limit, so that the stress exists in the vacuum pump during operation, the service life of the pump is reduced, the inner conical surface of the outer cone locking sleeve 206 and the outer conical surface of the inner cone locking sleeve 205 are matched and locked, the optimal circumferential angle matching can be adjusted during assembly, and then the locking is fixed, so that the optimal axial positioning angle of the Roots pump rotor 203 and the screw pump rotor 202 is realized, the assembly error is eliminated to the maximum extent, the operating stress is eliminated, the operating reliability of the pump is improved, and the service life of the pump is also prolonged; on the other hand, the difficulty of mechanical processing is reduced, and the cost is greatly reduced.
As can be seen from fig. 2, the pair of intermeshing synchronizing gears 3 disposed in the front inner cavity 26 are helical gears, and such a mechanism is more stable in operation because of the use of the synchronizing gears 3 with helical tooth profiles, and the synchronizing gears 3 using helical gears have an advantage that the lubricating oil of the gears can be transferred to the side away from the pump body supporting partition plate 28, so that the lubricating oil is prevented from entering the composite rotor inner cavity 27 and contaminating the composite rotor inner cavity 27, thereby improving the reliability of long-term operation of the pump and prolonging the service life.
Meanwhile, because the nitrogen fixed joint 13 is communicated with the nitrogen inlet hole 16, a pair of lip-shaped sealing rings 14 are respectively arranged at the inner sides of the bearing 19 positioned in the pump body supporting clapboard 28 and the bearing 19 positioned in the rear end cover 6 close to the inner cavity 27 of the composite rotor, a lip-shaped sealing ring floating press ring 18 is arranged between the pair of lip-shaped sealing rings 14, a pressure adjusting hole 17 is arranged at the middle position of the lip-shaped sealing ring floating press ring 18, the pressure adjusting hole 17 is communicated with the nitrogen inlet hole 16, an annular sealing ring 15 is arranged at the inner side of the lip-shaped sealing ring 14 close to one side of the inner cavity 27 of the composite rotor, and the annular sealing ring 15 is fixed on the composite rotor shaft 201, in this structure, in consideration of the very high sealing requirement of the composite rotor inner cavity 27, a sealing structure in which the lip seal 14 and the annular seal 15 are combined is adopted, and the sealing form of the lip seal 14 is adopted on the outer side; meanwhile, the lip-shaped sealing ring floating press ring 18 is arranged between the pair of lip-shaped sealing rings 14, so that the sealing device can automatically adapt to different sealing pressures, and when the pressure of the composite rotor inner cavity 27 and the pressure of the front inner cavity 26 are different, the lip-shaped sealing ring floating press ring 18 slides in the axial direction under the pressure of nitrogen, so that the pressures of the composite rotor inner cavity 27 and the front inner cavity 26 are balanced, and the optimal sealing effect is achieved; on the other hand, because the nitrogen fixed joint 13 is communicated with the nitrogen inlet hole 16, and further the pressure adjusting hole 17 is communicated with the nitrogen inlet hole 16, the pump body also has a self-cleaning function in the pump body, nitrogen is continuously introduced in the operation process to take away the tiny particles falling off from the lip-shaped sealing ring 14 and the annular sealing ring 15, the nitrogen inlet hole 16 is arranged at the middle position on the pump body 12 corresponding to the position of the cavity 27 in the composite rotor during the operation, the nitrogen in the nitrogen inlet hole 16 enters the cavity 27 in the composite rotor to blow the tiny impurities or floating particles in the cavity 27 in the composite rotor outwards, and the tiny impurities or floating particles are exhausted along with compressed gas, so the nitrogen inlet holes 16 are arranged at a plurality of positions, and the nitrogen is controlled to enter according to requirements, thereby realizing the self-cleaning in the pump body 12, further improving the service life of the vacuum pump and improving the cleanliness in the pump body, the reliability of the operation of the pump is improved.
Meanwhile, the outer wall of the pump body 12 of the embodiment is provided with the cooling water cavity 8, so that effective cooling is formed, and long-term operation of the pump is guaranteed.
When the composite vacuum pump of the roots screw of this embodiment is working, the motor 1 is started to drive the synchronous gear 3 to rotate in a meshing way, and further drive the screw pump rotor 202 and the roots pump rotor 203 to rotate, the meshing curved surfaces 20302 of the roots pump rotors 203 which are meshed with each other, air is sucked to the primary pressure chamber 25 of gas flow from the external suction port 9, then the part of gas is transferred to the secondary pressure chamber 22 of gas flow and then continues to rotate, the part of gas is transferred to the tertiary pressure chamber 23 of gas flow, because the tertiary pressure chamber 23 of gas flow and the pressure release compensation chamber 24 of gas flow form a chamber with larger volume, at this time, the compressed gas is released to the tertiary pressure chamber 23 of gas flow and the pressure release compensation chamber 24 of gas flow, because the bottom of the inner chamber 27 of the composite rotor is located at the joint of the screw pump rotors 202 and the roots pump rotors 203 and correspondingly provided with the gas flow compression chamber 7, this gas is continuously fed to the end of the screw pump rotor 202 through the gas flow compression chamber 7 following the passage between the intermeshing screw pump rotor lobes 20201 and is discharged through the discharge port 10. The gas of the embodiment forms a gas flow compression and discharge channel of the Roots screw compound vacuum pump through a gas inlet 9, a gas flow primary pressure cavity 25, a gas flow secondary pressure cavity 22, a gas flow tertiary pressure cavity 23, a gas flow pressure release compensation cavity 24, a gas flow compression cavity 7, a gas flow channel formed between screw pump rotor impellers 20201 which are mutually meshed and connected and a discharge port 10, and the pump body continuously works to continuously discharge the gas through the channel so as to achieve the purpose of vacuumizing.
Meanwhile, the gas flow pressure release compensation cavity 24 is arranged, so that the release effect can be instantly formed when adsorbed impurities and dust particles enter the gas flow pressure release compensation cavity 24, the adsorbed impurities and the dust particles are transmitted out through the meshing channel of the screw pump rotor 202 and cannot be accumulated in the gas flow pressure release compensation cavity 24, the fine dust particle discharge effect is further improved through the structure, the service life of parts is prolonged, and the running stability is also ensured.
The technical scheme of the embodiment is very suitable for vacuum treatment of the process chamber in the semiconductor industry and the process chamber of the display device, and is also suitable for vacuum treatment processes in other fields.
However, the above description is only an embodiment of the present invention, and the scope of the present invention should not be limited thereto, so that the replacement of the equivalent components or the equivalent changes and modifications made according to the protection scope of the present invention should be covered by the claims of the present invention.
Claims (9)
1. The utility model provides a roots's screw rod compound vacuum pump which characterized by: the pump is provided with a pump body, a front end cover is arranged on one side of the pump body, a motor is fixedly arranged on the outer side of the front end cover, a rear end cover is arranged on the other side of the pump body, an end face sealing ring is arranged between the rear end cover and the pump body, and a rear cover plate is fixedly arranged on the outer side of the rear end cover;
a front inner cavity is arranged on one side inside the pump body, a composite rotor inner cavity is arranged on the other side inside the pump body, a pump body supporting partition plate is arranged between the front inner cavity and the composite rotor inner cavity, a pair of composite rotors meshed with each other is arranged in the composite rotor inner cavity, one end of each composite rotor penetrates through the pump body supporting partition plate and enters the front inner cavity, and the other end of each composite rotor penetrates through the rear end cover;
the composite rotor comprises a composite rotor shaft, screw pump rotors are fixedly arranged adjacent to the composite rotor shaft, the screw pump rotors and the composite rotor shaft are of an integral structure, screw pump rotor impellers are arranged on the screw pump rotors, roots pump rotors are fixedly arranged adjacent to the screw pump rotors, three roots pump rotor blades are uniformly and fixedly arranged in the circumferential direction of the roots pump rotors, a roots pump rotor meshing curved surface is arranged between every two adjacent roots pump rotor blades, and the roots pump rotors and the composite rotor shaft are detachably connected; the pair of screw pump rotors are meshed and connected with each other through screw pump rotor impellers, a gas flow channel is formed between the screw pump rotor impellers which are meshed and connected with each other, and the pair of roots pump rotors are meshed and connected with each other through a roots pump rotor meshing curved surface;
the composite rotor shaft of one composite rotor is connected with the output end of the motor, a pair of synchronous gears which are meshed with each other are arranged in the front inner cavity, and the synchronous gears are respectively fixed on the composite rotor shaft; a bearing is fixedly arranged at one end of the composite rotor shaft, the outer ring of the bearing is fixed inside the pump body supporting partition plate, a bearing is also arranged at the other end of the composite rotor shaft, and the bearing is positioned inside the rear end cover;
the outer side of the lower surface of the pump body is provided with a discharge port, the discharge port is positioned at one side close to the screw pump rotor, and the discharge port is communicated with the inner cavity of the composite rotor;
the gas flow rate primary pressure cavity is formed in one side, located at the suction inlet, of each Roots pump rotor blade meshed with each other in the composite rotor inner cavity, the gas flow rate primary pressure cavity is communicated with the suction inlet, the gas flow rate secondary pressure cavity is formed in the side wall, located at the composite rotor inner cavity, of each Roots pump rotor blade meshed with each other, the gas flow rate tertiary pressure cavity is formed in the bottom of each Roots pump rotor blade meshed with each other, a gas flow rate pressure release compensation cavity is further formed in the bottom of each composite rotor inner cavity, and the gas flow rate tertiary pressure cavity is communicated with the gas flow rate pressure release compensation cavity;
the bottom of the inner cavity of the composite rotor is correspondingly provided with a gas flow compression cavity at the joint of the screw pump rotor and the roots pump rotor; the suction inlet, the gas flow primary pressure cavity, the gas flow secondary pressure cavity, the gas flow tertiary pressure cavity, the gas flow pressure release compensation cavity, the gas flow compression cavity, a gas flow channel formed between the screw pump rotor impellers in meshed connection and the discharge port form a gas flow compression discharge channel of the Roots screw composite vacuum pump.
2. A roots screw compound vacuum pump according to claim 1, characterized in that: a nitrogen inlet hole is formed in the pump body supporting partition plate and located on the inner side of the bearing inside the pump body supporting partition plate, the nitrogen inlet hole penetrates through the pump body, and a nitrogen fixing joint is arranged on the pump body; the inner side of the bearing positioned in the rear end cover on the rear end cover is also provided with a nitrogen inlet hole, the nitrogen inlet hole penetrates through the rear end cover, and the rear end cover is also provided with a nitrogen fixing joint;
nitrogen gas fixed joint is linked together with the nitrogen gas manhole, and the inboard that is located the inside bearing of pump body supporting baffle and is located the inside bearing of rear end cap and is close to cavity in the compound rotor all is equipped with a pair of lip seal, is equipped with lip seal ring floating pressure ring between a pair of lip seal, lip seal ring floating pressure ring intermediate position is equipped with the pressure adjustment hole, pressure adjustment hole and nitrogen gas manhole intercommunication are close to the inboard of the lip seal of cavity one side in the compound rotor and are equipped with ring packing, ring packing fixes on the compound rotor axle.
3. A roots screw compound vacuum pump according to claim 1, characterized in that: one end of the roots pump rotor is provided with a roots pump rotor inner ring positioning and pressing annular part, the roots pump rotor is sleeved on a composite rotor shaft, an outer cone locking sleeve and an inner cone locking sleeve are arranged on the composite rotor shaft and located inside the roots pump rotor, the inner cone surface of the outer cone locking sleeve is matched with the outer cone surface of the inner cone locking sleeve, the outer end face of the outer cone locking sleeve is in pressing contact with the roots pump rotor inner ring positioning and pressing annular part, a roots pump rotor locking inner sleeve is fixedly arranged on the outer side of the roots pump rotor, the front end of the roots pump rotor locking inner sleeve is provided with an inner sleeve pressing part, the inner sleeve pressing part is in pressing contact with the outer end face of the inner cone locking sleeve, and a locking gap is formed between the roots pump rotor locking inner sleeve and the roots pump rotor.
4. A roots screw compound vacuum pump according to claim 3, characterized in that: and the composite rotor shaft is provided with three pairs of outer cone locking sleeves and inner cone locking sleeves which are positioned inside the roots pump rotor.
5. A roots screw compound vacuum pump according to claim 3, characterized in that: the length of the contact part of the roots pump rotor inner ring positioning pressing annular part and the outer surface of the composite rotor shaft exceeds 1/3 of the length of the composite rotor shaft.
6. A roots screw compound vacuum pump according to any one of claims 1-5, characterized in that: and an end face sealing ring is arranged between the front end cover and the pump body.
7. A roots screw compound vacuum pump according to any one of claims 1-5, characterized in that: and an end face sealing ring is arranged between the rear cover plate and the rear end cover.
8. A roots screw compound vacuum pump according to any one of claims 1-5, characterized in that: and a cooling water cavity is arranged on the outer wall of the pump body.
9. A roots screw compound vacuum pump according to any one of claims 1-5, characterized in that: the nitrogen gas inlet hole is formed in the middle position of the pump body, corresponds to the position of the inner cavity of the composite rotor, and is communicated with the inner cavity of the composite rotor, and the nitrogen gas fixing connector is arranged on the outer wall of the pump body and is communicated with the nitrogen gas inlet hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121155508.0U CN215058164U (en) | 2021-05-27 | 2021-05-27 | Roots screw combined vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121155508.0U CN215058164U (en) | 2021-05-27 | 2021-05-27 | Roots screw combined vacuum pump |
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| Publication Number | Publication Date |
|---|---|
| CN215058164U true CN215058164U (en) | 2021-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121155508.0U Active CN215058164U (en) | 2021-05-27 | 2021-05-27 | Roots screw combined vacuum pump |
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| CN (1) | CN215058164U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113137369A (en) * | 2021-05-27 | 2021-07-20 | 威鹏晟(山东)真空技术有限公司 | Roots screw composite vacuum pump |
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2021
- 2021-05-27 CN CN202121155508.0U patent/CN215058164U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113137369A (en) * | 2021-05-27 | 2021-07-20 | 威鹏晟(山东)真空技术有限公司 | Roots screw composite vacuum pump |
| CN113137369B (en) * | 2021-05-27 | 2024-05-31 | 威鹏晟(山东)真空技术有限公司 | Roots screw composite vacuum pump |
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