CN215036636U

CN215036636U - CMP polishing pad gum laminating equipment

Info

Publication number: CN215036636U
Application number: CN202121575024.1U
Authority: CN
Inventors: 詹军
Original assignee: Nanjing Fukexun New Material Co ltd
Current assignee: Nanjing Fukexun New Material Co ltd
Priority date: 2021-07-12
Filing date: 2021-07-12
Publication date: 2021-12-07
Anticipated expiration: 2031-07-12

Abstract

The utility model discloses a CMP polishing pad gum laminating equipment relates to gum laminating equipment technical field, and is not good to polishing pad's laminating effect for solving current gum laminating equipment, can not make things convenient for the quick problem of carrying out the rubberizing to polishing pad. Conveyer frame is installed at laminating device's both ends, mounting bracket one is all installed to the top and the below of laminating device one side, mounting bracket two is installed to laminating device's opposite side, the below hot melt adhesive membrane blowing roller is installed to one side of mounting bracket one, the top diaphragm blowing roller is installed to one side of mounting bracket one, and diaphragm receipts material roller is installed to one side of mounting bracket two, laminating device's internally mounted has electromagnetic heating roller, tensioning roller is installed to electromagnetic heating roller's below, carry over pinch rolls is installed to one side of electromagnetic heating roller, back pressure roller one is installed to electromagnetic heating roller's top, back pressure roller two is installed to one side of back pressure roller one, electric cylinder is installed to laminating device's one end.

Description

CMP polishing pad gum laminating equipment

Technical Field

The utility model relates to a gum laminating equipment technical field specifically is CMP polishing pad gum laminating equipment.

Background

The CMP polishing pad is also called polishing leather, polishing cloth, polishing sheet and important auxiliary materials for determining the surface quality in chemical mechanical polishing, and the CMP polishing pad needs to be glued by using back glue gluing equipment during production and processing.

However, the existing back glue laminating equipment has poor laminating effect on the polishing pad, and can not conveniently and quickly carry out glue laminating on the polishing pad, so that the problems are solved by the CMP polishing pad back glue laminating equipment which is urgently needed in the market.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a CMP polishing pad gum laminating equipment to the current gum laminating equipment that proposes among the solution above-mentioned background is not good to polishing pad's laminating effect, can not make things convenient for the quick problem of carrying out the rubberizing to polishing pad.

In order to achieve the above object, the utility model provides a following technical scheme: CMP polishing pad back glue laminating equipment comprises a laminating device, wherein two ends of the laminating device are provided with a conveying device frame, a first mounting frame is arranged above and below one side of the laminating device, a second mounting frame is arranged on the other side of the laminating device, one end of the second mounting frame is provided with a speed reducer, one side of the speed reducer is provided with a transmission motor, one end of the speed reducer is provided with a rotary mounting seat, one side of the first mounting frame is provided with a hot melt adhesive film discharging roller, one side of the first mounting frame is provided with a diaphragm discharging roller, one side of the second mounting frame is provided with a diaphragm receiving roller, an electromagnetic heating roller is arranged in the laminating device, a tensioning roller is arranged below the electromagnetic heating roller, one side of the electromagnetic heating roller is provided with a traction roller, a first back pressure roller is arranged above the electromagnetic heating roller, and one side of the first back pressure roller is provided with a second back pressure roller, an electric cylinder is installed at one end of the laminating device, a first thread fixing rod is installed on the two sides of the first back pressure roller and the two sides of the first back pressure roller, a first connecting fixing frame is installed on one side of the first thread fixing rod, a first rubber roller is installed below the first back pressure roller, and a second rubber roller is installed below the second back pressure roller.

Preferably, a rotating rod is installed on one side of the inner wall of the conveying device frame, a transmission belt is installed at one end of the rotating rod, and a conveying motor is installed on one side of the outer wall of the conveying device frame.

Preferably, the two ends of the first mounting frame and the second mounting frame are provided with fixing feet, the fixing feet are fixedly connected with the laminating device through fixing screws, and one ends of the fixing screws penetrate through the fixing feet and extend to the inside of the laminating device.

Preferably, the electric cylinders are four in number and are connected with the fitting device in a welding mode.

Preferably, the lower end of the electric cylinder is provided with a lifting and contracting rod, the lower end of the lifting and contracting rod is provided with a fixed seat, two ends of the first back pressure roller and the second back pressure roller are respectively provided with a rotating seat, and the rotating seats are fixedly connected with the fixed seats through fastening screws.

Preferably, the front ends of the first mounting rack and the second mounting rack are provided with two placing racks, the upper end of each placing rack is provided with a limiting placing groove, the placing racks and the first mounting rack are of an integrated structure, and the placing racks and the second mounting rack are of an integrated structure.

Preferably, the connection fixing frame is internally provided with a limiting fixing groove, and one end of the first threaded fixing rod penetrates through the limiting fixing groove and is fixedly connected with the first fixing bolt.

Preferably, both ends of the first rubber covered roller and the second rubber covered roller are provided with rotating shafts, a second thread fixing rod is installed on one side of each rotating shaft, and one end of the second thread fixing rod penetrates through the connecting fixing frame and is fixedly connected with the second fixing bolt.

Compared with the prior art, the beneficial effects of the utility model are that:

1. this kind of CMP polishing pad gum laminating equipment installs electric cylinder, earlier make through opening electric cylinder rise the draw back bar and promote back pressure roller one and back pressure roller two respectively and remove downwards, make rubber roll one and rubber roll two move down suitable position department through back pressure roller one and back pressure roller two, move electromagnetic heating roller directly over position department when the polishing pad, extrude through a pair of polishing pad of rubber roll, can make things convenient for quick laminating polishing pad gum like this, can balanced pressure through the back pressure roller one of installation, make even applying on the polishing pad of gluing, then can consolidate the polishing pad after the laminating through carry over pinch rolls and rubber roll two, make the laminating effect of polishing pad gum better.

2. This kind of CMP polishing pad gum laminating equipment installs mounting bracket one and mounting bracket two, the both ends of mounting bracket one and mounting bracket two are provided with the rack, the inside of rack upper end is provided with spacing standing groove, can carry out spacing placing to hot melt adhesive membrane blowing roller, diaphragm blowing roller and diaphragm receipts material roller through the spacing standing groove that sets up, avoid hot melt adhesive membrane blowing roller, the condition that drops appears when pivoted in diaphragm blowing roller and diaphragm receipts material roller, thereby influence the result of use of this kind of CMP polishing pad gum laminating equipment.

Drawings

Fig. 1 is an overall sectional view of the present invention;

FIG. 2 is a front partial sectional view of the laminating apparatus of the present invention;

FIG. 3 is a perspective view of a second mounting bracket of the present invention;

fig. 4 is a partially enlarged view of the area a of fig. 1 according to the present invention.

In the figure: 1. a bonding device; 2. a transporter frame; 3. rotating the stick; 301. a transmission belt; 4. a transfer motor; 5. a first mounting frame; 6. a second mounting frame; 7. a fixing leg; 8. placing a rack; 801. a limiting placing groove; 9. a speed reducer; 10. a drive motor; 11. rotating the mounting seat; 12. a set screw; 13. a hot melt adhesive film discharging roller; 14. a diaphragm discharge roller; 15. a diaphragm material receiving roller; 16. an electromagnetic heating roller; 17. a tension roller; 18. a traction roller; 19. a first back pressure roller; 20. a second back pressure roller; 21. a rotating seat; 22. an electric cylinder; 23. lifting and shrinking the rod; 24. a fixed seat; 25. fastening screws; 26. a first threaded fixing rod; 27. connecting the fixed frame; 2701. a limiting fixing groove; 28. fixing a first bolt; 29. a rubber roller I; 30. a rotating shaft; 31. a second threaded fixing rod; 32. fixing a second bolt; 33. and a second rubber roller.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-4, the present invention provides an embodiment: CMP polishing pad back glue laminating equipment comprises a laminating device 1, wherein two ends of the laminating device 1 are provided with a conveying device frame 2, a first mounting frame 5 is arranged above and below one side of the laminating device 1, a second mounting frame 6 is arranged on the other side of the laminating device 1, one end of the second mounting frame 6 is provided with a speed reducer 9, one side of the speed reducer 9 is provided with a transmission motor 10, one end of the speed reducer 9 is provided with a rotary mounting seat 11, one side of the first mounting frame 5 below is provided with a hot melt adhesive film discharging roller 13, one side of the first mounting frame 5 above is provided with a diaphragm discharging roller 14, one side of the second mounting frame 6 is provided with a diaphragm receiving roller 15, the laminating device 1 is internally provided with an electromagnetic heating roller 16, a tensioning roller 17 is arranged below the electromagnetic heating roller 16, one side of the electromagnetic heating roller 16 is provided with a traction roller 18, and a first back pressure roller 19 is arranged above the electromagnetic heating roller 16, a second back pressure roller 20 is installed on one side of the first back pressure roller 19, an electric cylinder 22 is installed at one end of the laminating device 1, first thread fixing rods 26 are installed on two sides of the first back pressure roller 19 and the first back pressure roller 19, a connecting fixing frame 27 is installed on one side of each first thread fixing rod 26, a first rubber roller 29 is installed below the first back pressure roller 19, and a second rubber roller 33 is installed below the second back pressure roller 20.

Further, the rotating rod 3 is installed on one side of the inner wall of the conveying device frame 2, the transmission belt 301 is installed at one end of the rotating rod 3, the conveying motor 4 is installed on one side of the outer wall of the conveying device frame 2, and the polishing pad to be attached can be conveniently conveyed.

Further, the both ends of mounting bracket one 5 and mounting bracket two 6 all are provided with fixed foot 7, through set screw 12 fixed connection between fixed foot 7 and the laminating device 1, and set screw 12's one end is passed fixed foot 7 and is extended to the inside of laminating device 1, and what can be convenient installs fixedly between mounting bracket one 5 and mounting bracket two 6 and the laminating device 1, and what make between mounting bracket one 5 and mounting bracket two 6 and the laminating device 1 can install is more firm.

Further, the electric cylinders 22 are provided in four, and the electric cylinders 22 are welded to the laminating apparatus 1, so that structural firmness between the electric cylinders 22 and the laminating apparatus 1 can be improved, and the first back pressure roller 19 and the second back pressure roller 20 can be moved up and down by the installed electric cylinders 22.

Furthermore, the lower end of the electric cylinder 22 is provided with a telescopic rod 23, the lower end of the telescopic rod 23 is provided with a fixed seat 24, two ends of the first back pressure roller 19 and the second back pressure roller 20 are respectively provided with a rotating seat 21, the rotating seats 21 and the fixed seat 24 are fixedly connected through fastening screws 25, and the electric cylinder 22, the first back pressure roller 19 and the second back pressure roller 20 can be conveniently installed and fixed.

Further, the front ends of the first mounting rack 5 and the second mounting rack 6 are provided with two placing racks 8, the upper end of each placing rack 8 is provided with a limiting placing groove 801, the placing racks 8 and the first mounting rack 5 are of an integrated structure, the placing racks 8 and the second mounting rack 6 are of an integrated structure, and the hot melt adhesive film discharging rollers 13, the diaphragm discharging rollers 14 and the diaphragm collecting rollers 15 can be conveniently placed in a limiting mode through the limiting placing grooves 801.

Further, a limiting fixing groove 2701 is formed in the connecting fixing frame 27, and one end of the first threaded fixing rod 26 penetrates through the limiting fixing groove 2701 and is fixedly connected with the first fixing bolt 28, so that the connecting fixing frame 27 and the first threaded fixing rod 26 can be conveniently installed and fixed.

Furthermore, both ends of the first rubber roll 29 and the second rubber roll 33 are provided with rotating shafts 30, one side of each rotating shaft 30 is provided with a second threaded fixing rod 31, and one end of each second threaded fixing rod 31 penetrates through the connecting fixing frame 27 and is fixedly connected with the second fixing bolt 32, so that the first rubber roll 29 and the second rubber roll 33 can be conveniently installed and fixed between the connecting fixing frame 27.

The working principle is as follows: when the polishing pad is used, the electric cylinder 22 is opened to enable the lifting and shrinking rod 23 to respectively push the first back pressure roller 19 and the second back pressure roller 20 to move downwards, the first rubber roller 29 and the second rubber roller 33 are enabled to move downwards to proper positions through the first back pressure roller 19 and the second back pressure roller 20, then the transmission motor 10 is opened to enable the rotary mounting seat 11 to drive the diaphragm material receiving roller 15 to rotate, meanwhile, the conveying motor 4 is opened to enable the placed polishing pad to move, meanwhile, the electromagnetic heating roller 16 and the traction roller 18 are controlled to rotate, meanwhile, the electromagnetic heating roller 16 is controlled to heat, when the hot melt adhesive film is located above the electromagnetic heating roller 16, the hot melt adhesive film is heated and melted through the electromagnetic heating roller 16, at the moment, the polishing pad moves to a position right above the electromagnetic heating roller 16, the polishing pad is extruded through the first rubber roller 29, and therefore, the back adhesive of the polishing pad can be conveniently and quickly attached, the back pressure roller 19 through the installation can balanced pressure, makes the even applying on the polishing pad of gluing, then can consolidate the polishing pad after the laminating through carry over pinch rolls 18 and rubber roll two 33, makes the laminating effect of polishing pad gum better, then continues to transport the polishing pad of laminating through drive belt 301.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

CMP polishing pad back glue laminating equipment, including laminating device (1), its characterized in that: conveyer frame (2) is installed at the both ends of laminating device (1), mounting bracket one (5) is all installed to the top and the below of laminating device (1) one side, mounting bracket two (6) are installed to the opposite side of laminating device (1), speed reducer (9) is installed to the one end of mounting bracket two (6), below hot melt adhesive film blowing roller (13) is installed to one side of mounting bracket one (5), top diaphragm blowing roller (14) is installed to one side of mounting bracket one (5), diaphragm receipts material roller (15) is installed to one side of mounting bracket two (6), the internally mounted of laminating device (1) has electromagnetic heating roller (16), tensioning roller (17) is installed to the below of electromagnetic heating roller (16), carry over roll (18) is installed to one side of electromagnetic heating roller (16), back pressure roller (19) is installed to the top of electromagnetic heating roller (16), two (20) back pressure rollers are installed to one side of the first back pressure roller (19), electric cylinder (22) are installed to the one end of laminating device (1), threaded fixing rod (26) are all installed to the both sides of the first back pressure roller (19) and the first back pressure roller (19), connection mount (27) are installed to one side of threaded fixing rod (26), rubber roll (29) is installed to the below of the first back pressure roller (19), rubber roll two (33) are installed to the below of the second back pressure roller (20).
2. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the conveying device is characterized in that a rotating roller (3) is installed on one side of the inner wall of the conveying device frame (2), a conveying belt (301) is installed at one end of the rotating roller (3), and a conveying motor (4) is installed on one side of the outer wall of the conveying device frame (2).
3. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the two ends of the first mounting frame (5) and the second mounting frame (6) are provided with fixing feet (7), the fixing feet (7) are fixedly connected with the laminating device (1) through fixing screws (12), and one ends of the fixing screws (12) penetrate through the fixing feet (7) and extend to the interior of the laminating device (1).
4. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the electric cylinders (22) are four in number, and the electric cylinders (22) are connected with the attaching device (1) in a welding mode.
5. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the lower extreme of electric cylinder (22) is provided with liter telescopic link (23), the lower extreme of liter telescopic link (23) is provided with fixing base (24), the both ends of back pressure roller (19) and back pressure roller (20) all are provided with and rotate seat (21), rotate between seat (21) and fixing base (24) through fastening screw (25) fixed connection.
6. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the front ends of the first mounting rack (5) and the second mounting rack (6) are provided with two placing racks (8), the limiting placing grooves (801) are formed in the inner portion of the upper end of the placing racks (8), the placing racks (8) and the first mounting rack (5) are of an integrated structure, and the placing racks (8) and the second mounting rack (6) are of an integrated structure.
7. The CMP polishing pad backing tape application apparatus of claim 1, wherein: a limiting fixing groove (2701) is formed in the connecting fixing frame (27), and one end of the first threaded fixing rod (26) penetrates through the limiting fixing groove (2701) and is fixedly connected with a first fixing bolt (28).
8. The CMP polishing pad backing tape application apparatus of claim 1, wherein: the two ends of the first rubber roller (29) and the second rubber roller (33) are provided with rotating shafts (30), a second threaded fixing rod (31) is installed on one side of each rotating shaft (30), and one end of the second threaded fixing rod (31) penetrates through the connecting fixing frame (27) and is fixedly connected with the second fixing bolt (32).