CN214892245U - Anticreep high-efficient two room vacuum drying casees - Google Patents
Anticreep high-efficient two room vacuum drying casees Download PDFInfo
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- CN214892245U CN214892245U CN202120509377.5U CN202120509377U CN214892245U CN 214892245 U CN214892245 U CN 214892245U CN 202120509377 U CN202120509377 U CN 202120509377U CN 214892245 U CN214892245 U CN 214892245U
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Abstract
The utility model discloses a high-efficient two room vacuum drying cabinets of anticreep, including drying cabinet main part, drying chamber, sealing door, three-way pipe, evacuation machine, air supplement pipe, earth leakage protection device, controlling means, install earth leakage protection device in the drying cabinet main part, be equipped with two mutually independent drying chambers in the drying cabinet main part, every drying chamber all is furnished with heating system and vacuometer, and every drying chamber all links there is an exhaust tube and an air supplement pipe, and exhaust tube and air supplement pipe all extend to the outside of drying cabinet main part, are equipped with first automatically controlled valve on the exhaust tube, are equipped with the second automatically controlled valve on the air supplement pipe, and first automatically controlled valve and second automatically controlled valve all are located the outside of drying cabinet main part, the three-way pipe links to each other with two exhaust tubes and evacuation machine respectively. The utility model discloses a cooperate three-way pipe, evacuation machine, exhaust tube for but two drying chambers mutually independent evacuation, can not influence another when a drying chamber is opened, it is comparatively convenient to use.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a technical field of drying, especially vacuum drying oven's technical field.
[ background of the invention ]
A vacuum drying oven is a commonly used drying apparatus, which is mainly used for vacuum drying of articles. The existing vacuum drying box is often only provided with one drying chamber, all articles need to be stopped to be dried when the articles need to be taken, and the use is inconvenient.
[ Utility model ] content
The utility model aims at solving the problem in the prior art, providing a two room vacuum drying cabinets of anticreep high efficiency, two drying chambers that can make the drying cabinet are mutually independent, are convenient for get the material.
In order to achieve the purpose, the utility model provides a high-efficient two rooms vacuum drying oven of anticreep, including drying cabinet main part, drying chamber, sealing door, three-way pipe, evacuation machine, air supplement pipe, earth leakage protection device, controlling means, install earth leakage protection device in the drying cabinet main part, be equipped with two mutually independent drying chambers in the drying cabinet main part, every drying chamber all is furnished with heating system and vacuometer, every drying chamber all links to have an exhaust tube and an air supplement pipe, exhaust tube and air supplement pipe all extend to the outside of drying cabinet main part, are equipped with first automatically controlled valve on the exhaust tube, are equipped with the second automatically controlled valve on the air supplement pipe, and first automatically controlled valve and second automatically controlled valve all are located the outside of drying cabinet main part, the three-way pipe links to each other with two exhaust tubes and evacuation machine respectively, and evacuation machine is located the outside of drying cabinet main part, heating system, vacuometer, The first electric control valve, the second electric control valve and the vacuum-pumping machine are all connected with the control device.
Preferably, the control device is mounted on a side wall of the drying box main body.
Preferably, the air inlet end of the air supply pipe is provided with a joint, and the joint is used for being connected with a protective gas tank.
Preferably, a transparent observation window is arranged on the sealing door.
The utility model has the advantages that: the utility model has the advantages that the three-way pipe, the vacuum extractor and the exhaust pipe are matched, so that the two drying chambers can be mutually independent for vacuum extraction, one drying chamber can not be influenced when being opened, and the use is more convenient; the arrangement of the air supplement pipe enables the sealing door to be opened conveniently.
The features and advantages of the present invention will be described in detail by embodiments with reference to the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a front view of an anti-creeping high-efficiency dual-chamber vacuum drying oven of the present invention;
fig. 2 is a partial top view of the anti-creeping high-efficiency dual-chamber vacuum drying oven of the present invention.
In the figure: 1-a drying box main body, 2-a drying chamber, 3-a control device, 11-a leakage protection device, 12-a sealing door, 20-a vacuum gauge, 21-an air extraction pipe, 22-a first electric control valve, 23-a three-way pipe, 24-a vacuum extractor, 25-an air supplement pipe, 26-a second electric control valve, 27-a joint and 28-a protective gas tank.
[ detailed description ] embodiments
Referring to fig. 1 and 2, the utility model relates to an anti-creeping high-efficiency double-chamber vacuum drying oven, which comprises a drying oven main body 1, a drying chamber 2, a sealing door 12, a three-way pipe 23, a vacuum pumping machine 24, an air supplement pipe 25, an electric leakage protection device 11 and a control device 3, wherein the electric leakage protection device 11 is installed on the drying oven main body 1, two mutually independent drying chambers 2 are arranged in the drying oven main body 1, each drying chamber 2 is provided with a heating system and a vacuum gauge 20, each drying chamber 2 is connected with an air exhaust pipe 21 and an air supplement pipe 25, the air exhaust pipe 21 and the air supplement pipe 25 extend to the outside of the drying oven main body 1, the air exhaust pipe 21 is provided with a first electric control valve 22, the air supplement pipe 25 is provided with a second electric control valve 26, the first electric control valve 22 and the second electric control valve 26 are both located outside the drying oven main body 1, the three-way pipe 23 is respectively connected with the two air exhaust pipes 21 and the vacuum pumping machine 24, the vacuum pumping machine 24 is located outside the drying box main body 1, the heating system, the vacuum gauge 20, the first electric control valve 22, the second electric control valve 26 and the vacuum pumping machine 24 are all connected with the control device 3, the control device 3 is installed on the side wall of the drying box main body 1, a joint 27 is installed at the air inlet end of the air supplementing pipe 25, the joint 27 is used for being connected with the protective gas tank 28, and the sealing door 12 is provided with a transparent observation window.
The utility model discloses the working process:
in the working process of the anti-creeping high-efficiency double-chamber vacuum drying box, the three-way pipe 23, the vacuumizing machine 24 and the exhaust pipe 21 are matched, so that the two drying chambers 2 can be vacuumized independently, one drying chamber 2 cannot be influenced when being opened, and the use is more convenient; the air supplement pipe 25 is provided to facilitate the opening of the sealing door 12.
The above-mentioned embodiment is right the utility model discloses an explanation, it is not right the utility model discloses a limited, any right the scheme after the simple transform of the utility model all belongs to the protection scope of the utility model.
Claims (4)
1. The utility model provides a two room vacuum drying cabinets of anticreep high efficiency which characterized in that: comprises a drying box main body (1), a drying chamber (2), a sealing door (12), a three-way pipe (23), a vacuumizing machine (24), an air supplementing pipe (25), an electric leakage protection device (11) and a control device (3), wherein the electric leakage protection device (11) is installed on the drying box main body (1), two mutually independent drying chambers (2) are arranged in the drying box main body (1), each drying chamber (2) is provided with a heating system and a vacuum gauge (20), each drying chamber (2) is connected with an exhaust pipe (21) and an air supplementing pipe (25), the exhaust pipe (21) and the air supplementing pipe (25) extend to the outside of the drying box main body (1), a first electric control valve (22) is arranged on the exhaust pipe (21), a second electric control valve (26) is arranged on the air supplementing pipe (25), and the first electric control valve (22) and the second electric control valve (26) are both positioned outside the drying box main body (1), the three-way pipe (23) is respectively connected with the two air extraction pipes (21) and the vacuumizing machine (24), the vacuumizing machine (24) is positioned outside the drying box main body (1), and the heating system, the vacuum gauge (20), the first electric control valve (22), the second electric control valve (26) and the vacuumizing machine (24) are all connected with the control device (3).
2. An anti-creeping high-efficiency double-chamber vacuum drying oven as claimed in claim 1, characterized in that: the control device (3) is arranged on the side wall of the drying box main body (1).
3. An anti-creeping high-efficiency double-chamber vacuum drying oven as claimed in claim 1, characterized in that: and a joint (27) is installed at the air inlet end of the air supply pipe (25), and the joint (27) is used for being connected with a protective gas tank (28).
4. An anti-creeping high-efficiency double-chamber vacuum drying oven as claimed in claim 1, characterized in that: and a transparent observation window is arranged on the sealing door (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120509377.5U CN214892245U (en) | 2021-03-10 | 2021-03-10 | Anticreep high-efficient two room vacuum drying casees |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120509377.5U CN214892245U (en) | 2021-03-10 | 2021-03-10 | Anticreep high-efficient two room vacuum drying casees |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214892245U true CN214892245U (en) | 2021-11-26 |
Family
ID=79036145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120509377.5U Active CN214892245U (en) | 2021-03-10 | 2021-03-10 | Anticreep high-efficient two room vacuum drying casees |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214892245U (en) |
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2021
- 2021-03-10 CN CN202120509377.5U patent/CN214892245U/en active Active
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