CN214876411U - Protection device of temperature detection device for photoresist transportation - Google Patents
Protection device of temperature detection device for photoresist transportation Download PDFInfo
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- CN214876411U CN214876411U CN202020671524.4U CN202020671524U CN214876411U CN 214876411 U CN214876411 U CN 214876411U CN 202020671524 U CN202020671524 U CN 202020671524U CN 214876411 U CN214876411 U CN 214876411U
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Abstract
The utility model relates to the technical field of protection of temperature detection devices, in particular to a protection device of a temperature detection device for photoresist transportation, which solves the defect of higher cost of all-round detection of the transportation temperature of the prior photoresist filling barrel, comprising a device base, wherein the outer side of the top of the device base is provided with a protective cover, the top of the protective cover is fixed with a lantern ring through a bolt, the top of the lantern ring is movably connected with a rotating ring, the outer part of one side of the lantern ring is fixed with a rotating adjusting motor through a bolt, the output shaft of the rotating adjusting motor is sleeved with a driving gear, the inner side of the top of the rotating ring is fixed with a vertical frame through a bolt, the top of the vertical frame is fixed with a lifting adjusting motor through a bolt, the driving gear of the output shaft of the rotating adjusting motor is utilized to drive the rotating ring to realize rotation, thereby the vertical frame fixed by the bolt on the inner wall of the rotating ring is adjusted to do annular movement in the interior of the protective cover, the temperature detection is conveniently carried out on the periphery of the photoresist filling barrel in an all-around mode.
Description
Technical Field
The utility model relates to a temperature-detecting device protects technical field, especially relates to a temperature-detecting device's protector is used in photoresist transportation.
Background
The photoresist is one of the key materials for processing fine patterns in the microelectronic technology, and particularly the development of large-scale and super-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist;
in the photoresist processing and transporting process, a certain temperature needs to be kept, so that a temperature detection device is installed on a photoresist filling barrel transport vehicle, a plurality of temperature detection devices need to be installed for omnibearing temperature detection of a filling barrel, and the cost is high.
Disclosure of Invention
The utility model aims at solving the higher shortcoming of the all-round detection cost of current photoresist filling bucket transportation temperature, and the protection device of a temperature-detecting device is used in photoresist transportation who proposes.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a photoresist transportation is with temperature-detecting device's protector, includes the device base, the top outside of device base is provided with the protection casing, there is the lantern ring at the top of protection casing through the bolt fastening, and the top swing joint of the lantern ring has the change, and one side of the lantern ring is outside to have through the bolt fastening rotates accommodate motor, and the output shaft that rotates accommodate motor has cup jointed the driving gear, and the top inboard of change has the grudging post through the bolt fastening, there is the lift accommodate motor at the top of grudging post through the bolt fastening, and the inside of grudging post still is connected with the guide arm through the bearing, the outside cover of guide arm is equipped with the connecting block, and the inside bull stick that still is connected with through the bearing in both sides of device base, the inside one end outside cover that is located the device base of bull stick is equipped with the telescopic link, the tip of telescopic link has splint through the bolt fastening.
Preferably, a guide groove is formed in the outer side of the top of the lantern ring, and a sliding block corresponding to the guide groove is arranged on the inner wall of the rotating ring.
Preferably, a tooth socket is formed in the outer side of the top of the rotating ring, and gear teeth meshed with the tooth socket are arranged on the surface of the driving gear.
Preferably, the output shaft of the lifting adjusting motor extends to the inner side of the top of the stand, and the output shaft of the lifting adjusting motor is connected with the end of the guide rod.
Preferably, the surface of the guide rod is provided with threads, and the inner wall of the connecting block is provided with a thread groove corresponding to the threads on the surface of the connecting block.
Preferably, the surface of the rotating rod is provided with threads, and the inner wall of the telescopic rod is provided with thread grooves corresponding to the threads on the surface of the telescopic rod.
The utility model has the advantages that:
1. the rotating rod is rotated to drive the telescopic rod in threaded connection to stretch out and draw back inside the base of the device, so that the clamping plate at the end part of the telescopic rod is clamped and fixed outside the bottom of the photoresist filling barrel, and fixation is realized.
2. Utilize the driving gear that rotates adjusting motor output shaft to drive the swivel and realize rotating to adjust its swivel inner wall bolt fastening's grudging post and do annular activity in the inside of protection casing, conveniently carry out temperature detection to all-round all around of photoetching glue filling barrel.
3. Utilize lift adjustment motor drive guide arm to rotate, make it drive the connecting block through the screw thread and realize going up and down, drive temperature-detecting device and realize the lift transmission in photoresist filling bucket one side, conveniently detect the operation to its not temperature of co-altitude.
4. The omnibearing temperature detection data aiming at the photoresist filling barrel is transmitted to a factory monitoring system through wireless transmission.
Drawings
FIG. 1 is a schematic structural view of a protection device of a temperature detection device for transporting photoresist according to the present invention;
FIG. 2 is a schematic cross-sectional view of a device base of a protective device of a temperature detecting device for transporting photoresist according to the present invention;
fig. 3 is a schematic view of a local overlooking structure of a protection device of the temperature detection device for transporting photoresist.
In the figure: the device comprises a device base 1, a protective cover 2, a lantern ring 3, a rotation adjusting motor 4, a rotating ring 5, a driving gear 6, a vertical frame 7, a guide rod 8, a connecting block 9, a lifting adjusting motor 10, a rotating rod 11, a telescopic rod 12 and a clamping plate 13.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a protection device of a temperature detection device for photoresist transportation comprises a device base 1, a protection cover 2 is arranged on the outer side of the top of the device base 1, a lantern ring 3 is fixed on the top of the protection cover 2 through bolts, a rotating ring 5 is movably connected on the top of the lantern ring 3, a rotation adjusting motor 4 is fixed on the outer portion of one side of the lantern ring 3 through bolts, a driving gear 6 is sleeved on an output shaft of the rotation adjusting motor 4, a vertical frame 7 is fixed on the inner side of the top of the rotating ring 5 through bolts, a lifting adjusting motor 10 is fixed on the top of the vertical frame 7 through bolts, a guide rod 8 is further connected inside the vertical frame 7 through a bearing, a connecting block 9 is sleeved on the outer side of the guide rod 8, rotating rods 11 are further connected inside two sides of the device base 1 through bearings, a telescopic rod 12 is sleeved on the outer side of one end, located inside the device base 1, of the rotating rods 11, and a clamping plate 13 is fixed on the end portion of the telescopic rod 12 through bolts;
the guide slot has been seted up in the top outside of the lantern ring 3, the inner wall of change 5 is provided with the slider that corresponds with the guide slot, the tooth's socket has been seted up in the top outside of change 5, the surface of driving gear 6 is equipped with the teeth of a cogwheel with tooth's socket meshing, it is inboard that the output shaft of lift adjustment motor 10 extends to the top of grudging post 7, and the output shaft of lift adjustment motor 10 and guide arm 8's end connection, guide arm 8's surface is equipped with the screw thread, the thread groove that corresponds rather than surperficial screw thread is seted up to the inner wall of connecting block 9, the surface of bull stick 11 is equipped with the screw thread, the thread groove that corresponds rather than surperficial screw thread is seted up to the inner wall of telescopic link 12.
In this embodiment, set up protection casing 2 at the top of device base 1 to through the 2 installation lantern rings 3 of protection casing, at the both sides inner wall bearing connection bull stick 11 of device base 1, rotate bull stick 11 and drive threaded connection's telescopic link 12 and realize at the inside flexible of device base 1, thereby make the splint 13 of telescopic link 12 tip press from both sides tightly to fix in the bottom outside of photoresist filling bucket, realize fixedly.
At the top swing joint change 5 of the lantern ring 3 to at one side bolt fastening of the lantern ring 3 and rotate accommodate motor 4, utilize the driving gear 6 that rotates accommodate motor 4 output shaft to drive change 5 and realize rotating, thereby adjust its 5 inner wall bolt fastening's of change grudging post 7 and do the annular activity in the inside of protection casing 2, conveniently carry out temperature detection to all-round all around of photoetching glue filling barrel.
At 7 top installations lift adjustment motor 10 of grudging post, utilize lift adjustment motor 10 drive guide arm 8 to rotate, make it drive connecting block 9 through the screw and realize going up and down, drive temperature-detecting device and realize the lift transmission in photoresist filling bucket one side, the convenience detects the operation to its not temperature of co-altitude.
Wherein, send to the factory monitoring system through wireless transmission to the all-round temperature detection data of photoetching glue filling bucket.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. The protection device of the temperature detection device for photoresist transportation comprises a device base (1) and is characterized in that a protection cover (2) is arranged on the outer side of the top of the device base (1), a lantern ring (3) is fixed on the top of the protection cover (2) through bolts, a rotating ring (5) is movably connected to the top of the lantern ring (3), a rotation adjusting motor (4) is fixed on the outer portion of one side of the lantern ring (3) through bolts, a driving gear (6) is sleeved on an output shaft of the rotation adjusting motor (4), a vertical frame (7) is fixed on the inner side of the top of the rotating ring (5) through bolts, a lifting adjusting motor (10) is fixed on the top of the vertical frame (7) through bolts, a guide rod (8) is connected to the inside of the vertical frame (7) through a bearing, a connecting block (9) is sleeved on the outer side of the guide rod (8), rotating rods (11) are connected to the inside of two sides of the device base (1) through bearings, the device is characterized in that a telescopic rod (12) is sleeved on the outer side of one end, located inside the device base (1), of the rotating rod (11), and a clamping plate (13) is fixed to the end portion of the telescopic rod (12) through a bolt.
2. The protection device of the temperature detection device for transporting the photoresist as claimed in claim 1, wherein a guide groove is formed on the outer side of the top of the lantern ring (3), and a sliding block corresponding to the guide groove is arranged on the inner wall of the rotating ring (5).
3. The protection device of the temperature detection device for photoresist transportation according to claim 1, wherein a tooth groove is formed on the outer side of the top of the rotating ring (5), and gear teeth meshed with the tooth groove are arranged on the surface of the driving gear (6).
4. The protection device of the photoresist conveying temperature detection device according to claim 1, wherein the output shaft of the lifting adjustment motor (10) extends to the inner side of the top of the stand (7), and the output shaft of the lifting adjustment motor (10) is connected with the end of the guide rod (8).
5. The protection device of the photoresist transportation temperature detection device according to claim 1, wherein the surface of the guide rod (8) is provided with threads, and the inner wall of the connection block (9) is provided with a thread groove corresponding to the threads on the surface.
6. The protection device of the photoresist transportation temperature detection device according to claim 1, wherein the surface of the rotating rod (11) is provided with threads, and the inner wall of the telescopic rod (12) is provided with thread grooves corresponding to the threads on the surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020671524.4U CN214876411U (en) | 2020-04-28 | 2020-04-28 | Protection device of temperature detection device for photoresist transportation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020671524.4U CN214876411U (en) | 2020-04-28 | 2020-04-28 | Protection device of temperature detection device for photoresist transportation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214876411U true CN214876411U (en) | 2021-11-26 |
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ID=78885333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020671524.4U Active CN214876411U (en) | 2020-04-28 | 2020-04-28 | Protection device of temperature detection device for photoresist transportation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214876411U (en) |
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2020
- 2020-04-28 CN CN202020671524.4U patent/CN214876411U/en active Active
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