CN214848528U - Door unlocking mechanism for 8-inch wafer box - Google Patents
Door unlocking mechanism for 8-inch wafer box Download PDFInfo
- Publication number
- CN214848528U CN214848528U CN202120696687.2U CN202120696687U CN214848528U CN 214848528 U CN214848528 U CN 214848528U CN 202120696687 U CN202120696687 U CN 202120696687U CN 214848528 U CN214848528 U CN 214848528U
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- Prior art keywords
- assembly
- unlocking
- transmission
- supporting substrate
- wafer box
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- 230000005540 biological transmission Effects 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 230000003044 adaptive effect Effects 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims 3
- 230000006978 adaptation Effects 0.000 abstract 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 230000001737 promoting effect Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides an 8 cun wafer box door body release mechanism, including supporting assembly subassembly, join in marriage the locating component, join in marriage the unblock subassembly, switch transmission assembly and power drive commentaries on classics subassembly, this release mechanism on the supporting substrate set up with the locating pin post of the locating pin hole adaptation in the wafer box base, and set up with the unblock round pin post of the tool to lock adaptation in the wafer box base, locating pin post and unblock round pin post use in coordination, make unblock round pin post and tool to lock accurate cooperation, adopt lead screw transmission structure again to drive the unblock revolving stage and deflect, make tool to lock locking or unblock, the simple operation, the operation is stable, be favorable to promoting work efficiency.
Description
Technical Field
The utility model relates to a semiconductor production equipment especially relates to a 8 cun wafer box door body release mechanism.
Background
In the production process of a wafer, a standard closed box, namely a wafer box, is required to be adopted to store the wafer, the wafer box is provided with a locking structure, an unlocking mechanism is adopted to unlock the wafer box during use, the wafer box is transferred between the wafer box and a processing device by taking and placing equipment, the unlocking operation of the commonly used unlocking mechanism is inconvenient, the wafer box is easy to break down, and the smooth production is influenced. Therefore, there is a need for a wafer cassette unlocking device of this type which is structurally optimized to overcome the above-mentioned drawbacks.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an 8 cun wafer box door body release mechanism to in unblock the wafer box.
The utility model discloses a solve the technical scheme that its technical problem adopted and be:
a8 cun wafer box door body release mechanism, includes:
a bearing assembly having an installation space thereon;
the matching positioning component is arranged on the supporting assembly component, is matched with the matching structure of the wafer box and is used for matching and positioning the supporting assembly component and the wafer box;
the matched connection unlocking assembly is arranged on the supporting assembly and is matched with the locking structure of the wafer box, and the matched connection unlocking assembly locks or unlocks the locking structure;
the switching transmission assembly is arranged on the supporting assembly and is connected with the matched unlocking assembly, and the matched unlocking assembly is driven by the switching transmission assembly to switch a locking or unlocking state;
and the power driving and rotating assembly is arranged on the support assembly and is connected with the switching transmission assembly, and the power driving and rotating assembly drives the switching transmission assembly to operate.
Further, the bearing assembly includes:
the power driving assembly and the switching transmission assembly are arranged on the back surface of the supporting substrate, the matching and positioning assembly is arranged on the front surface of the supporting substrate, the matching and unlocking assembly is arranged in the assembling through hole, the transmission end of the matching and unlocking assembly is connected with the switching transmission assembly on the back surface of the supporting substrate, and the unlocking end of the matching and positioning assembly extends to the front surface of the supporting substrate.
Further, join in marriage and connect locating component and include:
and the positioning pin columns are provided with a pair of positioning pin columns, each positioning pin column is respectively fixed on the supporting substrate and protrudes outwards from the front surface of the supporting substrate, the shape of each positioning pin column is matched with the positioning pin hole in the wafer box base, and when the positioning pin columns extend into the positioning pin holes, the supporting substrate is attached to the wafer box base.
Further, the adaptor unlocking assembly comprises:
the unlocking rotary table is arranged in the assembling through hole and can deflect in the assembling through hole;
the unlocking pin column is arranged on the unlocking rotary table, protrudes outwards from the front surface of the supporting substrate, is matched with a lock in the wafer box base in shape, extends into the lock when the supporting substrate is attached to the wafer box base, and drives the unlocking pin column to lock or unlock the lock when the unlocking rotary table deflects.
Further, the shift transmission assembly includes:
a transmission screw rod which is mounted on the supporting substrate through the assembly base and can rotate on the supporting substrate;
the transmission slide block is arranged on the transmission screw rod, and the transmission screw rod drives the transmission slide block to move along the axial direction of the transmission screw rod when rotating;
and one end of the transmission connecting rod is connected with the transmission sliding block, so that the transmission connecting rod can move along with the transmission sliding block, and the other end of the transmission connecting rod is connected to the edge of the unlocking rotary table, so that the transmission connecting rod can drive the unlocking rotary table to deflect when moving.
Further, the power drive assembly includes:
and the driving motor is arranged on the supporting substrate, a power output shaft of the driving motor is connected with the transmission screw rod, and the driving motor drives the transmission screw rod to operate.
In an embodiment of the present invention, the unlocking pin is provided in a pair, and each unlocking pin is installed at the edge of the unlocking turntable and located on the same diameter line.
The utility model has the advantages that:
the unlocking mechanism is provided with the positioning pin column matched with the positioning pin hole in the wafer box base on the supporting substrate, and the unlocking pin column matched with the lock in the wafer box base, wherein the positioning pin column and the unlocking pin column are used in a cooperative mode, so that the unlocking pin column is accurately matched with the lock, and then the lead screw transmission structure is adopted to drive the unlocking rotary table to deflect, so that the lock is locked or unlocked, the operation is convenient and fast, the operation is stable, and the work efficiency is favorably improved.
Drawings
Fig. 1 is a schematic back structure view of an 8 inch wafer cassette door unlocking mechanism provided by the present invention;
fig. 2 is a schematic front structural view of the door unlocking mechanism of the 8 inch wafer cassette.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 and 2, the 8 inch wafer cassette door unlocking mechanism provided by the present invention comprises a supporting assembly, a positioning assembly, an unlocking assembly, a switching transmission assembly and a power driving assembly, wherein the supporting assembly has an installation space, the positioning assembly is installed on the supporting assembly and is adapted to the adapting structure of the wafer cassette, the supporting assembly is positioned to the wafer cassette by the positioning assembly, the unlocking assembly is installed on the supporting assembly and is adapted to the locking structure of the wafer cassette, the locking structure is locked or unlocked by the unlocking assembly, the switching transmission assembly is installed on the supporting assembly and is connected to the unlocking assembly, the switching transmission assembly drives the unlocking assembly to switch the locking or unlocking state, the power driving assembly is installed on the supporting assembly and is connected to the switching transmission assembly, the power driving component drives the switching transmission component to operate. In this embodiment, the supporting assembly includes a supporting substrate 100, the supporting substrate has an assembly through hole, the power driving assembly and the switching transmission assembly are mounted on the back surface of the supporting substrate, the adaptive positioning assembly is mounted on the front surface of the supporting substrate, the adaptive unlocking assembly is mounted in the assembly through hole, the transmission end thereof is engaged with the switching transmission assembly on the back surface of the supporting substrate, and the unlocking end thereof extends to the front surface of the supporting substrate. In this embodiment, the adaptive positioning assembly includes a pair of positioning pins 200, each of which is fixed on the supporting substrate and protrudes outward from the front surface of the supporting substrate, and has a shape adapted to the positioning pin hole in the wafer cassette base, and when the positioning pin extends into the positioning pin hole, the supporting substrate is attached to the wafer cassette base. In this embodiment, the adaptive unlocking assembly includes an unlocking turntable 310 and an unlocking pin 320, the unlocking turntable is installed in the assembling through hole and can deflect in the assembling through hole, the unlocking pin is installed on the unlocking turntable and protrudes outwards from the front surface of the supporting substrate, the shape of the unlocking pin is matched with that of a lock in the wafer cassette base, when the supporting substrate is attached to the wafer cassette base, the unlocking pin extends into the lock, and when the unlocking turntable deflects, the unlocking pin is driven to lock or unlock the lock. In this embodiment, the switching transmission assembly includes a transmission screw 410, a transmission slider 420 and a transmission link 430, the transmission screw is mounted on the supporting substrate through the mounting base and can rotate on the supporting substrate, the transmission slider is mounted on the transmission screw, the transmission screw drives the transmission slider to move along the axial direction of the transmission screw when rotating, one end of the transmission link is connected with the transmission slider, so that the transmission link can move along with the transmission slider, and the other end of the transmission link is connected to the edge of the unlocking turntable, so that the transmission link can drive the unlocking turntable to deflect when moving. In this embodiment, the power driving assembly includes a driving motor 500, the driving motor is mounted on the supporting substrate, and a power output shaft of the driving motor is connected to the transmission screw, so that the driving motor drives the transmission screw to operate. In this embodiment, the unlocking pin columns are provided in a pair, and each unlocking pin column is respectively installed on the edge of the unlocking turntable and located on the same diameter line. The unlocking mechanism is provided with the positioning pin column matched with the positioning pin hole in the wafer box base on the supporting substrate, and the unlocking pin column matched with the lock in the wafer box base, wherein the positioning pin column and the unlocking pin column are used in a cooperative mode, so that the unlocking pin column is accurately matched with the lock, and then the lead screw transmission structure is adopted to drive the unlocking rotary table to deflect, so that the lock is locked or unlocked, the operation is convenient and fast, the operation is stable, and the work efficiency is favorably improved.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, or orientations or positional relationships that are conventionally placed when the products of the present invention are used, or orientations or positional relationships that are conventionally understood by those skilled in the art, and are only for convenience of description of the present invention and simplification of description, but do not indicate or imply that the designated devices or elements must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be further noted that, unless explicitly stated or limited otherwise, the terms "disposed" and "connected" are to be interpreted broadly, and for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Claims (7)
1. The utility model provides an 8 cun wafer box door body release mechanism which characterized in that includes:
a bearing assembly;
the matching positioning component is arranged on the supporting assembly component and is matched with the matching structure of the wafer box;
the matched connection unlocking assembly is arranged on the supporting assembly and is matched with the locking structure of the wafer box;
the switching transmission assembly is arranged on the support assembly and is connected with the matched unlocking assembly;
and the power driving and rotating assembly is arranged on the bearing assembly and is connected with the switching transmission assembly.
2. The door unlocking mechanism for 8-inch crystal round boxes according to claim 1, wherein the supporting and assembling assembly comprises:
the power driving assembly and the switching transmission assembly are arranged on the back surface of the supporting substrate, the matching and positioning assembly is arranged on the front surface of the supporting substrate, the matching and unlocking assembly is arranged in the assembling through hole, the transmission end of the matching and unlocking assembly is connected with the switching transmission assembly on the back surface of the supporting substrate, and the unlocking end of the matching and positioning assembly extends to the front surface of the supporting substrate.
3. The door unlocking mechanism for 8-inch crystal round box according to claim 2, wherein the adaptive positioning assembly comprises:
and a pair of positioning pin columns, wherein each positioning pin column is fixed on the supporting substrate and protrudes outwards from the front surface of the supporting substrate, and the shape of each positioning pin column is matched with the positioning pin hole in the wafer box base.
4. The door unlocking mechanism for 8-inch crystal round boxes according to claim 2, wherein the adaptive unlocking assembly comprises:
an unlocking turntable, which is installed in the assembly through hole;
and the unlocking pin column is arranged on the unlocking rotary table, protrudes outwards from the front surface of the supporting substrate and is matched with the lock in the wafer box base in shape.
5. The door unlocking mechanism for 8-inch wafer cassettes according to claim 4, wherein the switching transmission assembly comprises:
a transmission screw rod mounted on the support base plate through the mounting base;
the transmission sliding block is arranged on the transmission screw rod;
and one end of the transmission connecting rod is connected with the transmission sliding block, and the other end of the transmission connecting rod is connected to the edge of the unlocking rotary table.
6. The door unlocking mechanism for 8-inch wafer cassettes according to claim 1, wherein the power-driven rotation assembly comprises:
and the driving motor is arranged on the supporting base plate, and a power output shaft of the driving motor is connected with the transmission screw rod.
7. The unlocking mechanism for the door body of an 8-inch wafer cassette according to claim 4, wherein:
the unlocking pin columns are provided with a pair, and each unlocking pin column is respectively arranged on the edge of the unlocking rotary table and is positioned on the same diameter line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120696687.2U CN214848528U (en) | 2021-04-07 | 2021-04-07 | Door unlocking mechanism for 8-inch wafer box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120696687.2U CN214848528U (en) | 2021-04-07 | 2021-04-07 | Door unlocking mechanism for 8-inch wafer box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214848528U true CN214848528U (en) | 2021-11-23 |
Family
ID=78762142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120696687.2U Expired - Fee Related CN214848528U (en) | 2021-04-07 | 2021-04-07 | Door unlocking mechanism for 8-inch wafer box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214848528U (en) |
-
2021
- 2021-04-07 CN CN202120696687.2U patent/CN214848528U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220908 Address after: 201611 zone F, building 1, No. 120, Rongjiang Road, Songjiang District, Shanghai Patentee after: SHANGHAI BESTITY SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Address before: 314100 No.18 Guigu 2nd Road, Luoxing street, Jiashan County, Jiaxing City, Zhejiang Province Patentee before: Jiaxing Weituo Electronic Technology Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20211123 |