CN214830651U

CN214830651U - Cooling device for chemical vapor deposition diamond

Info

Publication number: CN214830651U
Application number: CN202121346608.1U
Authority: CN
Inventors: 曹晓君
Original assignee: Hunan Liangcheng New Material Technology Co ltd
Current assignee: Hunan Liangcheng New Material Technology Co ltd
Priority date: 2021-06-17
Filing date: 2021-06-17
Publication date: 2021-11-23
Anticipated expiration: 2031-06-17

Abstract

The utility model discloses a cooling device for chemical vapor deposition diamond, which comprises a preparation tank body, wherein the shell of the preparation tank body is connected with a liquid storage tank through two connecting pipes, one of the connecting pipes is provided with a circulating pump in the middle, the middle of the liquid storage tank is fixedly connected with a first filter screen, a plurality of air holes are arranged at the top end of the liquid storage tank, the inner wall of the air holes is fixedly connected with a plurality of connecting blocks, a plurality of the connecting blocks are fixedly connected with a radiating pipe together, the inner wall of the radiating pipe is fixedly connected with a plurality of radiating rods together, the radiating rods are fixedly connected with an inner pipe together, and the two ends of the inner wall of the radiating pipe are respectively fixedly connected with a second filter screen and a third filter screen, the third filter screen is arranged to better isolate dust falling from the standing exhaust pump.

Description

Cooling device for chemical vapor deposition diamond

Technical Field

The utility model relates to a diamond processing equipment technical field especially relates to a chemical vapor deposition diamond's cooling device.

Background

The method of chemical vapour deposition of diamond is generally as follows: hydrogen, carbon-containing gases (such as methane), etc. are passed through a high temperature activation source and dissociated into hydrogen atoms, carbon atoms, and various hydrocarbon groups. When the gas stream encounters a substrate at a lower temperature, carbon atoms are deposited as diamond under the influence of hydrogen atoms. At present, there are three main methods for preparing diamond by chemical vapor deposition according to different activation sources: microwave, hot wire and dc arc spray. At present, microwave plasma chemical vapor deposition apparatuses install a water-cooled duct in a furnace to adjust the temperature in the furnace. After the coolant in the water cooling pipeline is heated in the vapor deposition furnace, a large amount of heat is carried, but the heat cannot be fully released generally, so that the cooling device for the chemical vapor deposition diamond is designed.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a cooling device for chemical vapor deposition diamond.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a cooling device for chemical vapor deposition diamond comprises a preparation tank body, wherein a shell of the preparation tank body is connected with a liquid storage tank through two connecting pipes, a circulating pump is arranged in the middle of one connecting pipe, a first filter screen is fixedly connected in the middle of the liquid storage tank, a plurality of air holes are formed in the top end of the liquid storage tank, the inner wall of each air hole is fixedly connected with a plurality of connecting blocks, a radiating pipe is fixedly connected to the plurality of connecting blocks, a plurality of radiating rods are fixedly connected to the inner wall of the radiating pipe, an inner pipe is fixedly connected to the radiating rods, a second filter screen and a third filter screen are fixedly connected to the two ends of the inner wall of the radiating pipe respectively, a plurality of sealing plates are fixedly connected to the top end of the radiating pipe, a guide pipe is fixedly connected to one end of each sealing plate, which is far away from the radiating pipe, a connecting cover is fixedly connected to the outer wall of the guide pipe, and an exhaust pump is fixedly connected to the top end of the connecting cover, and a heat inlet pipe communicated with the deposition table is connected to the upper part of the liquid storage tank corresponding to the upper part of the first filter screen.

Preferably, the connecting pipe end is located between this internal jar of preparation jar and the shell, all be equipped with the coolant liquid in preparation jar body, connecting pipe and the liquid storage pot, the coolant liquid level in the liquid storage pot is located first filter screen below, the one end that the preparation jar body was kept away from to the connecting pipe runs through the liquid storage pot lateral wall and extends to its inside, the liquid storage pot is made for stainless steel.

Further preferably, the outer side wall of the radiating pipe is welded with the connecting block, the other end of the connecting block is bonded with the inner wall of the air hole, and the section of the air hole is circular.

Further preferably, the radiating pipe is made of stainless steel, the section of the radiating pipe is circular, the length of the radiating pipe is not less than ten centimeters, and the inner wall of the radiating pipe is bonded with the radiating rod.

Further preferably, the cross-section of inner tube is circular, the length of inner tube is not less than eight centimetres, the inner tube outer wall bonds with the heat dissipation rod, and is a plurality of the heat dissipation rod is that cyclic annular array distributes in inner tube week side.

Preferably, the exhaust pump and the circulating pump are electrically connected with an external power supply, and the air inlet end of the exhaust pump is bonded with the top end of the connecting cover.

Further preferably, the first filter screen is made of stainless steel, and the thickness of the first filter screen is not less than one millimeter.

The utility model discloses following beneficial effect has: the utility model discloses a set up first filter screen, second filter screen and third filter screen, the setting of first filter screen is convenient for better carry out check to the coolant liquid and is kept off, be convenient for better use, the setting of second filter screen is convenient for better check and keeps off the coolant liquid, the setting of third filter screen is convenient for better isolated dust that comes from the air pump when stewing, through setting up cooling tube and gas pocket, the setting of gas pocket is convenient for better messenger's outside gas to get into inside the stock solution pipe, and be favorable to the heat that the effluvium coolant liquid produced, the device easy operation, be convenient for better use.

Drawings

Fig. 1 is a perspective view of the present invention;

FIG. 2 is a schematic view of the heat pipe and the conduit of the present invention;

fig. 3 is a top view of the middle heat pipe and the guiding pipe of the present invention.

Illustration of the drawings:

1. preparing a tank body; 2. a liquid storage tank; 3. a circulation pump; 4. a connecting pipe; 5. a first filter screen; 6. connecting blocks; 7. a radiating pipe; 8. a conduit; 9. a connecting cover; 10. an inner tube; 11. a second filter screen; 12. a sealing plate; 13. a third filter screen; 14. a heat dissipation rod; 15. an exhaust pump; 16. air holes; 17. and a heat inlet pipe.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Referring to fig. 1-3, the present invention provides an embodiment: a cooling device for chemical vapor deposition diamond comprises a preparation tank body 1, wherein the shell of the preparation tank body 1 is connected with a liquid storage tank 2 through two connecting pipes 4, the middle part of one connecting pipe 4 is provided with a circulating pump 3, the middle part of the liquid storage tank 2 is fixedly connected with a first filter screen 5, the top end of the liquid storage tank 2 is provided with a plurality of air holes 16, the inner walls of the air holes 16 are fixedly connected with a plurality of connecting blocks 6, the plurality of connecting blocks 6 are fixedly connected with a radiating pipe 7 together, the inner wall of the radiating pipe 7 is fixedly connected with a plurality of radiating rods 14, the radiating rods 14 are fixedly connected with an inner pipe 10 together, the two ends of the inner wall of the radiating pipe 7 are respectively fixedly connected with a second filter screen 11 and a third filter screen 13, the top end of the radiating pipe 7 is fixedly connected with a plurality of sealing plates 12, one end of the plurality of sealing plates 12 far away from the radiating pipe 7 is fixedly connected with a guide pipe 8, the outer wall of the guide pipe 8 is fixedly connected with a connecting cover 9, and the top end of the connecting cover 9 is fixedly connected with an exhaust pump 15, and a heat inlet pipe 17 communicated with the deposition table is connected to the upper part of the liquid storage tank 2 corresponding to the upper part of the first filter screen 5.

The end of the connecting pipe 4 is positioned between the inner tank and the outer shell of the preparation tank body 1, the cooling liquid is arranged in the preparation tank body 1, the connecting pipe 4 and the liquid storage tank 2, the liquid level of the cooling liquid in the liquid storage tank 2 is positioned below the first filter screen 5, one end of the connecting pipe 4, which is far away from the preparation tank body 1, penetrates through the side wall of the liquid storage tank 2 and extends towards the inner part of the liquid storage tank, and the liquid storage tank 2 is made of stainless steel. The outer side wall of the radiating pipe 7 is welded with the connecting block 6, the other end of the connecting block 6 is bonded with the inner wall of the air hole 16, and the section of the air hole 16 is circular. The radiating pipe 7 is made of stainless steel, the section of the radiating pipe 7 is circular, the length of the radiating pipe 7 is not less than ten centimeters, and the inner wall of the radiating pipe 7 is bonded with the radiating rod 14. The cross section of the inner tube 10 is circular, the length of the inner tube 10 is not less than eight centimeters, the outer wall of the inner tube 10 is bonded with the heat dissipation rods 14, and the heat dissipation rods 14 are distributed on the periphery of the inner tube 10 in an annular array. The exhaust pump 15 and the circulating pump 3 are both electrically connected with an external power supply, and the air inlet end of the exhaust pump 15 is bonded with the top end of the connecting cover 9. First filter screen 5 is stainless steel material, and first filter screen 5's thickness is not less than a millimeter, avoids the coolant liquid in the liquid storage pot 2 to discharge from gas pocket 16 because of excessively surging, is convenient for better dispel the heat to preparation jar body 1 to the inside temperature of better regulation preparation jar body 1, above-mentioned air discharge pump 15 is prior art with circulating pump 3, and it has not been repeated here for one's time.

The working principle is as follows: after advancing heat pipe 17 and carrying the 2 upper portions of liquid storage tanks with the heat in the deposit platform, circulating pump 3 drives preparation jar body 1, connecting pipe 4, the coolant liquid circulation in circulating pump 3 and the liquid storage tanks 2 flows, air in air pump 15 with the liquid storage tanks 2 is through cooling tube 7, connecting cover 9, air pump 15 discharges, first filter screen 5 avoids in the coolant liquid gets into cooling tube 7, third filter screen 13 avoids in outside dust gets into liquid storage tanks 2, heat dissipation rod 14, the setting of inner tube 10 and cooling tube 7 is convenient for the better heat that absorbs the coolant liquid top, be convenient for better dispel the heat to the coolant liquid, cooling tube 7 outer wall and outside air contact, be convenient for better dispel the heat, do benefit to the quick deposit of diamond.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a cooling device of chemical vapor deposition diamond, includes preparation jar body, its characterized in that: the shell of the preparation tank body is connected with a liquid storage tank through two connecting pipes, wherein the middle part of one connecting pipe is provided with a circulating pump, the middle part of the liquid storage tank is fixedly connected with a first filter screen, the top end of the liquid storage tank is provided with a plurality of air holes, the inner wall of the air hole is fixedly connected with a plurality of connecting blocks, the connecting blocks are jointly and fixedly connected with a radiating pipe, the inner wall of the radiating pipe is fixedly connected with a plurality of radiating rods which are jointly and fixedly connected with the inner pipe, a second filter screen and a third filter screen are respectively and fixedly connected with the two ends of the inner wall of the radiating pipe, a plurality of sealing plates are fixedly connected with the top end of the radiating pipe, one ends of the sealing plates far away from the radiating pipe are fixedly connected with a guide pipe, the outer wall of the conduit is fixedly connected with a connecting cover, the top end of the connecting cover is fixedly connected with an exhaust pump, and a heat inlet pipe communicated with the deposition table is connected to the upper part of the liquid storage tank corresponding to the upper part of the first filter screen.

2. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the connecting pipe end is located between this internal jar of preparation jar and the shell, all be equipped with the coolant liquid in preparation jar body, connecting pipe and the liquid storage pot, the coolant liquid level in the liquid storage pot is located first filter screen below, the one end that the preparation jar body was kept away from to the connecting pipe runs through the liquid storage pot lateral wall and extends to its inside, the liquid storage pot is made for stainless steel.

3. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the radiating tube lateral wall welds with the connecting block, the connecting block other end bonds with the gas pocket inner wall, the section of gas pocket is circular.

4. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the cooling tube is stainless steel, the section of cooling tube is circular, the length of cooling tube is not less than ten centimetres, the cooling tube inner wall bonds with the heat dissipation pole.

5. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the section of inner tube is circular, the length of inner tube is not less than eight centimetres, the inner tube outer wall bonds with the heat dissipation rod, and is a plurality of the heat dissipation rod is that cyclic annular array distributes in inner tube week side.

6. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the exhaust pump and the circulating pump are both electrically connected with an external power supply, and the air inlet end of the exhaust pump is bonded with the top end of the connecting cover.

7. A chemical vapor deposition diamond cooling apparatus as set forth in claim 1, wherein: the first filter screen is made of stainless steel, and the thickness of the first filter screen is not less than one millimeter.