CN214799875U - Optical microphone - Google Patents

Optical microphone Download PDF

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Publication number
CN214799875U
CN214799875U CN202121097289.5U CN202121097289U CN214799875U CN 214799875 U CN214799875 U CN 214799875U CN 202121097289 U CN202121097289 U CN 202121097289U CN 214799875 U CN214799875 U CN 214799875U
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China
Prior art keywords
signal
piezoelectric
layer
optical
optical microphone
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CN202121097289.5U
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Chinese (zh)
Inventor
魏状状
刘端
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Anhui Aofei Acoustics Technology Co ltd
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Anhui Aofei Acoustics Technology Co ltd
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Abstract

The application discloses optical microphone includes: the piezoelectric transducer is used for receiving sound energy, driving the piezoelectric composite vibration layer of the piezoelectric transducer to vibrate and converting the sound energy into a piezoelectric signal; the control circuit receives the piezoelectric signal and sends out a starting signal when the piezoelectric signal is greater than a set threshold value; the light source receives the starting signal and emits a light signal; a reflective layer for receiving and reflecting the optical signal; a photodetector that receives the reflected light signal. The optical microphone provided by the application measures the vibration of the piezoelectric composite vibration layer by using an optical method, so that the optical microphone with low standby power consumption and high signal-to-noise ratio is obtained.

Description

Optical microphone
Technical Field
The present application relates to the field of microphone technology, and in particular, to an optical microphone.
Background
The piezoelectric microphone vibrates the piezoelectric diaphragm by using sound waves, and the piezoelectric diaphragm generates output voltage to realize sound-electricity energy conversion. Compared with a capacitive microphone, the piezoelectric microphone has better waterproof, dustproof and low power consumption performances.
With the increasing demands of consumers on low power consumption and high signal-to-noise ratio of microphones, there is a need to provide a microphone with low standby power consumption and high signal-to-noise ratio.
SUMMERY OF THE UTILITY MODEL
To solve the problems in the related art, the application provides an optical microphone which has the characteristics of low standby power consumption and high signal-to-noise ratio.
The technical scheme of the application is realized as follows:
according to an aspect of the present application, there is provided an optical microphone including:
the piezoelectric transducer is used for receiving sound energy, driving the piezoelectric composite vibration layer of the piezoelectric transducer to vibrate and converting the sound energy into a piezoelectric signal;
the control circuit receives the piezoelectric signal and sends out a starting signal when the piezoelectric signal is greater than a set threshold value;
the light source receives the starting signal and emits a light signal;
a reflective layer for receiving and reflecting the optical signal;
a photodetector that receives the reflected light signal.
When the piezoelectric signal is smaller than the set threshold value, the control circuit stops sending the starting signal.
Wherein the control circuit, the light source and the light detector form a photoelectric module.
The optical microphone also comprises a shell and a substrate, wherein the shell and the substrate form an accommodating cavity; the control circuit, the light source and the light detector are located within the receiving cavity.
Wherein the piezoelectric transducer includes:
a substrate having a cavity;
a support layer formed over the substrate and covering the cavity;
a first electrode layer formed over the support layer;
a piezoelectric layer formed over the first electrode layer;
a second electrode layer formed over the piezoelectric layer;
wherein the piezoelectric composite vibration layer includes the support layer, the first electrode layer, the piezoelectric layer, and the second electrode layer.
Wherein the reflective layer is formed over the second electrode layer, and the reflective layer vibrates with vibration of the piezoelectric composite vibration layer.
Wherein the support layer serves as the reflective layer, the support layer receiving and reflecting the optical signal.
Wherein the second electrode layer serves as the reflective layer, the second electrode layer receiving and reflecting the optical signal.
Wherein the optical microphone further comprises a grating disposed between the reflective layer and the light source.
The optical microphone provided by the application measures the vibration of the piezoelectric composite vibration layer by using an optical method, so that the optical microphone with low standby power consumption and high signal-to-noise ratio is obtained.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 illustrates a schematic diagram of an optical microphone module provided in accordance with some embodiments;
FIG. 2 illustrates a schematic structural diagram of an optical microphone provided in accordance with some embodiments;
fig. 3 shows a schematic diagram of a piezoelectric transducer provided in accordance with some embodiments;
FIG. 4 illustrates a schematic diagram of a grating provided in accordance with some embodiments.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments that can be derived from the embodiments given herein by a person of ordinary skill in the art are intended to be within the scope of the present disclosure.
Referring to fig. 1 and 2, according to an embodiment of the present application, an optical microphone having low standby power consumption and high signal-to-noise ratio is provided. The optical microphone comprises a piezoelectric transducer 10, control circuitry 20, a light source 30, a reflective layer 40, a light detector 50, a housing 60, a substrate 70 and a grating 80. The structure and principle of the optical microphone will be described in detail below.
The piezoelectric transducer 10 includes a piezoelectric MEMS (Micro-Electro-Mechanical System) microphone. The piezoelectric transducer 10 is used for receiving sound energy, driving the piezoelectric composite vibration layer of the piezoelectric transducer 10 to vibrate, and converting the piezoelectric composite vibration layer into a piezoelectric signal.
As shown in fig. 3, in some embodiments, the piezoelectric transducer 10 includes a substrate 11 having a cavity, a support layer 12 formed over the substrate 11 and covering the cavity, a first electrode layer 13 formed over the support layer 12, a piezoelectric layer 14 formed over the first electrode layer 13, and a second electrode layer 15 formed over the piezoelectric layer 14. The piezoelectric composite vibration layer includes a support layer 12, a first electrode layer 13, a piezoelectric layer 14, and a second electrode layer 15. Specifically, the piezoelectric layer 14 is deformed by acoustic energy to generate a piezoelectric signal, and the piezoelectric signal is transmitted to the subsequent control circuit 20 through the first electrode layer 13 and the second electrode layer 15.
The control circuit 20 receives the piezoelectric signal. When the piezoelectric signal is greater than a set threshold value, sending a starting signal; when the piezoelectric signal is less than the set threshold, the control circuit 20 stops sending the start signal.
The light source 30 receives the activation signal and emits a light signal.
The reflective layer 40 is used to receive and reflect optical signals. In some embodiments, the reflective layer 40 is formed over the second electrode layer 15, and the reflective layer 40 vibrates with the vibration of the piezoelectric composite vibration layer. In some embodiments, the support layer 12 serves as the reflective layer 40, and the support layer 12 receives and reflects optical signals. In some embodiments, the second electrode layer 15 serves as the reflective layer 40, and the second electrode layer 15 receives and reflects the optical signal.
The optical detector 50 receives the reflected optical signal. In some embodiments, the control circuit 20, the light source 30, and the light detector 50 comprise an optoelectronic module 90.
The housing 60 and the base plate 70 constitute a housing chamber. The case 60 and the substrate 70 serve as an electromagnetic shield. The control circuit 20, the light source 30 and the light detector 50 are located within the receiving cavity. The piezoelectric transducer 10 is also located within the receiving cavity.
As shown in FIG. 4, in some embodiments, a grating 80 is disposed between the reflective layer 40 and the light source 30.
In summary, with the above technical solution of the present application, the optical microphone provided by the present application measures the vibration of the piezoelectric composite vibration layer by using an optical method. The specific principle is as follows: the piezoelectric composite vibrating layer receives acoustic energy and vibrates, thereby generating a piezoelectric signal. The control circuit 20 receives the piezoelectric signal and transmits an activation signal based on the piezoelectric signal. When the piezoelectric signal is greater than a set threshold value, sending a starting signal; when the piezoelectric signal is less than the set threshold, the control circuit 20 stops sending the start signal. When the control circuit 20 stops sending the start signal, the control circuit 20 still continuously listens for the piezoelectric signal, thereby reducing standby power consumption. On the other hand, the light source 30 receives the activation signal and emits a light signal, the reflective layer 40 receives and reflects the light signal, and minute vibration of the piezoelectric composite vibration layer changes the intensity and phase of the reflected light. The optical detector 50 receives the reflected optical signal and then enables detection and analysis of the optical signal. Thus, the optical microphone improves the signal-to-noise ratio compared to a piezoelectric MEMS microphone.
The present invention is not intended to be limited to the particular embodiments shown and described, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. An optical microphone, comprising:
the piezoelectric transducer is used for receiving sound energy, driving the piezoelectric composite vibration layer of the piezoelectric transducer to vibrate and converting the sound energy into a piezoelectric signal;
the control circuit receives the piezoelectric signal and sends out a starting signal when the piezoelectric signal is greater than a set threshold value;
the light source receives the starting signal and emits a light signal;
a reflective layer for receiving and reflecting the optical signal;
a photodetector that receives the reflected light signal.
2. The optical microphone of claim 1, wherein the control circuit stops issuing the activation signal when the piezoelectric signal is less than the set threshold.
3. The optical microphone of claim 1, wherein the control circuit, the light source, and the light detector comprise an optoelectronic module.
4. The optical microphone of claim 1, further comprising a housing and a substrate, the housing and the substrate forming a receiving cavity; the control circuit, the light source and the light detector are located within the receiving cavity.
5. The optical microphone of claim 1, wherein the piezoelectric transducer comprises:
a substrate having a cavity;
a support layer formed over the substrate and covering the cavity;
a first electrode layer formed over the support layer;
a piezoelectric layer formed over the first electrode layer;
a second electrode layer formed over the piezoelectric layer;
wherein the piezoelectric composite vibration layer includes the support layer, the first electrode layer, the piezoelectric layer, and the second electrode layer.
6. The optical microphone according to claim 5, wherein the reflection layer is formed over the second electrode layer, and the reflection layer vibrates with the vibration of the piezoelectric composite vibration layer.
7. The optical microphone of claim 5, wherein the supporting layer serves as the reflective layer, the supporting layer receiving and reflecting the optical signal.
8. The optical microphone of claim 5, wherein the second electrode layer serves as the reflective layer, the second electrode layer receiving and reflecting the optical signal.
9. The optical microphone of claim 1, further comprising a grating disposed between the reflective layer and the light source.
CN202121097289.5U 2021-05-21 2021-05-21 Optical microphone Active CN214799875U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121097289.5U CN214799875U (en) 2021-05-21 2021-05-21 Optical microphone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121097289.5U CN214799875U (en) 2021-05-21 2021-05-21 Optical microphone

Publications (1)

Publication Number Publication Date
CN214799875U true CN214799875U (en) 2021-11-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121097289.5U Active CN214799875U (en) 2021-05-21 2021-05-21 Optical microphone

Country Status (1)

Country Link
CN (1) CN214799875U (en)

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