CN214792487U - Five-zone heating chamber structure of large-scale high-temperature vacuum furnace - Google Patents

Five-zone heating chamber structure of large-scale high-temperature vacuum furnace Download PDF

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Publication number
CN214792487U
CN214792487U CN202121165537.5U CN202121165537U CN214792487U CN 214792487 U CN214792487 U CN 214792487U CN 202121165537 U CN202121165537 U CN 202121165537U CN 214792487 U CN214792487 U CN 214792487U
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temperature
heating
temperature measuring
zone
temperature control
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郑辉
徐松林
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Nanjing V2 Vacuum Technology Co ltd
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Nanjing V2 Vacuum Technology Co ltd
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Abstract

The utility model discloses a five-zone heating chamber structure of a large-scale high-temperature vacuum furnace, which comprises a hollow horizontal barrel, wherein a front-end heating zone, a first heating zone, a second heating zone, a third heating zone and a rear-end heating zone are sequentially arranged in the barrel from front to back, a heating element and a temperature measuring element are respectively arranged in each heating zone, and each temperature measuring element is respectively connected with each temperature control meter; the heating power supply of a group of temperature measuring elements, temperature control meters and heating elements which are correspondingly arranged form a closed control loop, the temperature measuring elements feed back measured temperature values to the temperature control meters, and the temperature control meters control the voltage output of the heating power supply. This novel temperature value that can improve terminal surface around the barrel, and do not influence the setting of middle part temperature, solved because of the terminal surface temperature cross low around, the technical problem that both ends work piece welding is not last.

Description

Five-zone heating chamber structure of large-scale high-temperature vacuum furnace
Technical Field
The utility model relates to a vacuum heat treatment furnace, in particular to a five-zone heating chamber structure of a large-scale high-temperature vacuum furnace.
Background
The vacuum high-temperature brazing refers to a process for welding and forming materials in two modes of brazing filler metal and brazing filler metal under the condition of no atmosphere. Copper and stainless steel are heated evenly, the welding seam is even, the uniformity is good, a plurality of assemblies can be welded simultaneously according to the preset process curve, and the brazing efficiency is high.
The requirement of the vacuum high-temperature brazing furnace on the uniformity of the internal temperature and the external temperature is particularly high, the welding heat is insufficient due to the low temperature, the welding is not performed, and the flowing of the solder can be caused due to the high temperature. The existing large-scale high-temperature vacuum furnace usually adopts an annular 360-degree radiation heating mode, and gas air outlet heat dissipation holes are formed in the front and the back of the furnace, so that the temperature is too low due to the fact that the front end face and the back end face cannot radiate, the welding temperature of workpieces is too low, and the workpieces cannot be welded. The temperature of the front end face and the rear end face is increased blindly, and the temperature of the middle part is overhigh.
SUMMERY OF THE UTILITY MODEL
For solving the unreasonable technical problem of heating structure that current large-scale high temperature vacuum furnace exists, the utility model provides a five district heating chamber structures of large-scale high temperature vacuum furnace.
The utility model adopts the technical proposal that:
a five-zone heating chamber structure of a large-scale high-temperature vacuum furnace comprises a hollow horizontal cylinder body and end covers fixed at two ends of the cylinder body, wherein the front end cover and the rear end cover are respectively provided with a ventilation cooling port; a front heating area, a first heating area, a second heating area, a third heating area and a rear heating area are sequentially arranged in the barrel from front to back, a first heating element, a second heating element and a third heating element are respectively arranged in the first heating area, the second heating area and the third heating area, a front heating element is arranged in the front heating area, and a rear heating element is arranged in the rear heating area; a first temperature measuring element, a second temperature measuring element and a third temperature measuring element are respectively arranged in the first heating area, the second heating area and the third heating area, and the first temperature measuring element, the second temperature measuring element and the third temperature measuring element are respectively connected with a first temperature control meter, a second temperature control meter and a third temperature control meter; a front-end temperature measuring element is arranged in the front-end heating zone and is connected with a front-end temperature control meter; a rear-end temperature measuring element is arranged in the rear-end heating zone and is connected with a rear-end temperature control meter; the heating power supply of a group of temperature measuring elements, temperature control meters and heating elements which are correspondingly arranged form a closed control loop, the temperature measuring elements feed back measured temperature values to the temperature control meters, and the temperature control meters control the voltage output of the heating power supply.
Furthermore, a front end heat shield is arranged on the front side of the cylinder body and is arranged on the outer side of the front end ventilation and heat dissipation port; the rear side of the barrel is provided with a rear end heat shield, and the rear end heat shield is arranged on the outer side of the rear end ventilation and heat dissipation opening.
Further, the front end heat shield and the rear end heat shield are both made of mirror surface stainless steel materials, and the two mirror surfaces of the front end heat shield and the rear end heat shield are opposite and face the heating chamber.
Further, the first heating element, the second heating element and the third heating element are all arranged along the axial direction of the cylinder body and surround the inner wall of the cylinder body.
Furthermore, the front end heating element and the rear end heating element are arranged along the radial direction of the cylinder body and are fully distributed in the front end surface and the rear end surface of the cylinder body.
Furthermore, the front heating element and the rear heating element are formed by coiling molybdenum-lanthanum alloy strips in a plane.
The utility model has the advantages that:
1. through adopting five district heating chamber structures, every zone of heating is by temperature element measurement inside temperature alone, feed back the control by temperature change table simultaneously, by the control by temperature change table to every district accuse temperature heating alone, the heating element at both ends sets up two miniwatt heating power before and after, by independent temperature element and control by temperature change table control to two terminal surfaces heat before and after, the temperature value of terminal surface around improving, it crosses lowly to compensate the terminal surface temperature before and after, thereby solve the technical problem that the both ends work piece can not weld, and do not influence the setting of middle part temperature.
2. By adopting the five-zone heating chamber structure, the temperature uniformity of the high-temperature vacuum furnace in the vacuum heating process is improved, the temperature uniformity of large-temperature-zone large workpieces is improved, the phenomenon that the local temperature is too low or too high in the vacuum heating process is avoided, the product qualification rate of large-size workpieces with dense furnace loading capacity processed by the large-size high-temperature vacuum furnace can be improved, and the rejection rate is reduced.
Drawings
FIG. 1 is a schematic view of a five-zone heating chamber structure of a large high-temperature vacuum furnace according to the present invention.
Fig. 2 is a left side view of fig. 1 with the rear end cap removed.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings and a preferred embodiment.
Referring to fig. 1 and 2, the embodiment discloses a five-zone heating chamber structure of a large-scale high-temperature vacuum furnace, which includes a hollow horizontal cylinder 10, and a front end cover 12 and a rear end cover 11 fixed at two ends of the cylinder 10, wherein the front end cover 12 and the rear end cover 11 are both provided with ventilation and heat dissipation ports. A front heating area, a first heating area, a second heating area, a third heating area and a rear heating area are sequentially arranged in the barrel from front to back, a first heating element 9, a second heating element 8 and a third heating element 7 are respectively arranged in the first heating area, the second heating area and the third heating area, a front heating element 3 is arranged in the front heating area, and a rear heating element 2 is arranged in the rear heating area; a first temperature measuring element 55, a second temperature measuring element 54 and a third temperature measuring element 53 are respectively arranged in the first heating zone, the second heating zone and the third heating zone, and the first temperature measuring element 55, the second temperature measuring element 54 and the third temperature measuring element 53 are respectively connected with a first temperature control meter 65, a second temperature control meter 64 and a third temperature control meter 63; a front temperature measuring element 52 is arranged in the front heating zone and is connected with a front temperature control meter 62; a rear end temperature measuring element 51 is arranged in the rear end heating zone, and the rear end temperature measuring element 51 is connected with a rear end temperature control meter 61; the heating power supply of a group of temperature measuring elements, temperature control meters and heating elements which are correspondingly arranged form a closed control loop, the temperature measuring elements feed back measured temperature values to the temperature control meters, and the temperature control meters control the voltage output of the heating power supply.
In this embodiment, the front side of the cylinder 10 is further provided with a front end heat shield 4, the rear side of the cylinder 10 is provided with a rear end heat shield 1, the front end heat shield 4 is fixedly arranged outside the front end ventilation and heat dissipation opening through screws 22, and the rear end heat shield 1 is fixedly arranged outside the rear end ventilation and heat dissipation opening through screws. The front end heat shield 4 and the rear end heat shield 1 are both made of mirror surface stainless steel materials, and the two mirror surfaces of the front end heat shield 4 and the rear end heat shield 1 are opposite and face towards a heating chamber. The front end heat shield 4 and the rear end heat shield 1 are arranged to reflect external radiation heat back to the heating chamber, thereby further reducing the heat loss of the front end face and the rear end face in the heating process. The mirror surface stainless steel has high strength, is not easy to deform and has good reflection effect.
In the present embodiment, the first heating element 9, the second heating element 8 and the third heating element 7 are all disposed along the axial direction of the cylinder 10, and are fixed around the inner wall of the cylinder 10 by screws 71. The first heating element 9, the second heating element 8 and the third heating element 7 can be annularly heated for 360 degrees, a closed loop is formed by the independent temperature measuring element, the heating power supply and the temperature control meter, the temperature value measured by the temperature measuring element is fed back to the temperature control meter, the temperature control meter controls the voltage output of the heating power supply, the output power is adjusted, and the heating temperature of each zone is adjusted.
In the present embodiment, the front end heating element 3 and the rear end heating element 2 are made of molybdenum-lanthanum alloy strips coiled in a plane, the front end heating element 3 is vertically fixed on the inner wall of the front end cover 12 through a screw 21, and the rear end heating element 2 is vertically fixed on the inner wall of the rear end cover 11 through a screw 21. Preferably, the front-end heating element 3 and the rear-end heating element 2 are wound into a left-right symmetrical labyrinth shape by adopting wide high-temperature molybdenum-lanthanum alloy coils and are fully distributed. The structural design of the front-end heating element 3 and the rear-end heating element 2 can increase the radiation area of the heating elements, a closed loop is formed by the independent temperature measuring element, the heating power supply and the temperature control meter, the temperature value measured by the temperature measuring element is fed back to the temperature control meter, the temperature control meter controls the voltage output of the heating power supply, the power output is adjusted to be respectively fed to the front-end heating element 3 and the rear-end heating element 2, the front end face and the rear end face are heated, and the phenomenon that the temperature of the front end face and the rear end face is too low before and after compensation.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and the improvements and modifications are also within the protection scope of the present invention.

Claims (6)

1. A five-zone heating chamber structure of a large-scale high-temperature vacuum furnace comprises a hollow horizontal cylinder body and end covers fixed at two ends of the cylinder body, wherein the front end cover and the rear end cover are respectively provided with a ventilation heat dissipation port; a first temperature measuring element, a second temperature measuring element and a third temperature measuring element are respectively arranged in the first heating area, the second heating area and the third heating area, and the first temperature measuring element, the second temperature measuring element and the third temperature measuring element are respectively connected with a first temperature control meter, a second temperature control meter and a third temperature control meter; a front-end temperature measuring element is arranged in the front-end heating zone and is connected with a front-end temperature control meter; a rear-end temperature measuring element is arranged in the rear-end heating zone and is connected with a rear-end temperature control meter; the heating power supply of a group of temperature measuring elements, temperature control meters and heating elements which are correspondingly arranged form a closed control loop, the temperature measuring elements feed back measured temperature values to the temperature control meters, and the temperature control meters control the voltage output of the heating power supply.
2. The structure of the five-zone heating chamber of the large-scale high-temperature vacuum furnace as claimed in claim 1, wherein the front side of the cylinder body is provided with a front heat shield which is arranged outside the front ventilation and heat dissipation port; the rear side of the barrel is provided with a rear end heat shield, and the rear end heat shield is arranged on the outer side of the rear end ventilation and heat dissipation opening.
3. The structure of a five-zone heating chamber of a large-sized high-temperature vacuum furnace according to claim 2, wherein the front heat shield and the rear heat shield are made of mirror stainless steel material, and the front heat shield and the rear heat shield are opposite to each other in mirror surface and face the heating chamber.
4. The structure of the five-zone heating chamber of the large-scale high-temperature vacuum furnace according to claim 1, wherein the first heating element, the second heating element and the third heating element are all arranged along the axial direction of the cylinder body and surround the inner wall of the cylinder body.
5. The structure of a five-zone heating chamber of a large-scale high-temperature vacuum furnace according to claim 1, wherein the front-end heating element and the rear-end heating element are arranged along the radial direction of the cylinder and are fully distributed in the front end surface and the rear end surface of the cylinder.
6. The structure of a five-zone heating chamber of a large-sized high-temperature vacuum furnace as claimed in claim 5, wherein the front heating element and the rear heating element are made of molybdenum lanthanum alloy strips coiled in a plane.
CN202121165537.5U 2021-05-27 2021-05-27 Five-zone heating chamber structure of large-scale high-temperature vacuum furnace Active CN214792487U (en)

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Application Number Priority Date Filing Date Title
CN202121165537.5U CN214792487U (en) 2021-05-27 2021-05-27 Five-zone heating chamber structure of large-scale high-temperature vacuum furnace

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Application Number Priority Date Filing Date Title
CN202121165537.5U CN214792487U (en) 2021-05-27 2021-05-27 Five-zone heating chamber structure of large-scale high-temperature vacuum furnace

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116437507A (en) * 2023-06-13 2023-07-14 江苏微导纳米科技股份有限公司 Heating equipment, semiconductor coating equipment and heating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116437507A (en) * 2023-06-13 2023-07-14 江苏微导纳米科技股份有限公司 Heating equipment, semiconductor coating equipment and heating method
CN116437507B (en) * 2023-06-13 2023-09-22 江苏微导纳米科技股份有限公司 Heating equipment for semiconductor, semiconductor coating equipment and heating method

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