CN214791892U - Temperature control and heating device - Google Patents
Temperature control and heating device Download PDFInfo
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- CN214791892U CN214791892U CN202120506745.0U CN202120506745U CN214791892U CN 214791892 U CN214791892 U CN 214791892U CN 202120506745 U CN202120506745 U CN 202120506745U CN 214791892 U CN214791892 U CN 214791892U
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Abstract
The utility model relates to a accuse temperature and firing equipment, include: the device comprises a liquid container, a heating unit controller, a temperature control unit, a non-contact temperature measurement unit, a signal processing unit and a temperature measurement unit bracket; wherein the heating unit is disposed below the liquid container; the heating unit controller is connected with the heating unit at one end and connected with the temperature control unit at the other end; the non-contact temperature measuring unit is detachably connected with the temperature measuring unit bracket; the temperature measuring unit bracket is configured to enable the temperature measuring surface of the non-contact temperature measuring unit to face the liquid in the liquid container and keep the temperature measuring surface not to be in contact with the liquid; the signal processing unit is connected with the non-contact temperature measuring unit at one end and connected with the temperature control unit at the other end. The temperature control and heating device measures the temperature of the liquid in a non-contact mode and has the characteristic of no pollution to the liquid.
Description
Technical Field
The utility model relates to a accuse temperature and firing equipment especially relate to one kind and be used for the liquid medicine, accuse temperature and firing equipment including non-contact temperature measurement unit.
Background
During semiconductor wafer production, it is necessary to clean the wafer during which certain cleaning solutions are maintained in a particular temperature range. In order to keep the temperature of the liquid medicine constant, it is common in the prior art to use temperature control and heating equipment. The temperature control and heating device typically comprises a thermal resistor or thermocouple wrapped in teflon material, a temperature controller, a thyristor, and a heating unit. In the using process, the thermal resistor or the thermocouple wrapped by the Teflon material is directly immersed in the liquid medicine as a temperature measuring unit, namely, the temperature of the liquid medicine is measured in a contact mode. However, the teflon material soaked for a long time may cause a certain pollution to the liquid medicine, thereby causing a reduction in the yield of the product.
Therefore, it is necessary to develop a temperature control and heating device for measuring temperature in a non-contact manner. The temperature measuring unit of the equipment is in a non-contact type, so that the pollution to the liquid medicine is avoided, and the yield is improved.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a accuse temperature and firing equipment to overcome prior art's problem.
Therefore, the utility model provides a accuse temperature and firing equipment, include:
a liquid container for containing a liquid to be injected,
a heating unit for heating the substrate to be heated,
a controller of the heating unit is arranged on the heating unit,
a temperature control unit for controlling the temperature of the liquid crystal,
a non-contact temperature measuring unit, a temperature measuring unit,
a signal processing unit, and
a temperature measuring unit bracket;
wherein the heating unit is disposed below the liquid container; the heating unit controller is connected with the heating unit at one end and connected with the temperature control unit at the other end; the non-contact temperature measuring unit is detachably connected with the temperature measuring unit bracket; the temperature measuring unit bracket is configured to enable the temperature measuring surface of the non-contact temperature measuring unit to face the liquid in the liquid container and keep the temperature measuring surface not to be in contact with the liquid; the signal processing unit is connected with the non-contact temperature measuring unit at one end and connected with the temperature control unit at the other end.
It will be understood that the references herein to "horizontal, vertical, above and below" are to be divided in the orientation of the temperature control and heating apparatus shown in figure 1, i.e. in the orientation of the apparatus when in use.
Before the temperature control and heating device works, firstly, the liquid medicine to be heated is injected into the liquid container, and then the temperature control and heating device is started. The non-contact temperature measuring unit receives a thermal radiation signal from the liquid medicine through a temperature measuring surface. This signal is then converted by the signal processing unit into a voltage signal that can be read by the thermostat. Subsequently, the temperature controller compares the obtained voltage signal with a program set in the temperature controller, and sends a signal to a heating unit controller based on the comparison result, and the heating unit controller controls the on/off of the heating unit or adjusts the power of the heating unit based on the received signal. The whole system is in a closed-loop control system form, and realizes temperature control and heating of the liquid medicine. Compared with the prior art, accuse temperature and firing equipment adopted non-contact's temperature measurement mode, prevented the liquid medicine pollution, improved the yields.
Drawings
The advantages, features of the present invention will now be described in detail with reference to the accompanying drawings, in which the components are not necessarily drawn to scale, and wherein:
fig. 1 shows a front view of an embodiment of a temperature control and heating device 100, wherein a cylindrical container 101 is sectioned along a horizontal plane through its central axis.
Fig. 2 shows a front view of the temperature control and heating device 100 according to fig. 1 in an operating state.
Fig. 3 shows a front view of another embodiment of the temperature control and heating device 100, wherein the cylindrical container 101 is sectioned along a horizontal plane through its central axis.
Fig. 4 shows a front view of the temperature control and heating device 100 according to fig. 3 in an operating state.
It is to be understood that the drawings are drawn for purposes of illustration only and are not to be construed as limiting the invention.
Detailed Description
The utility model discloses a accuse temperature and firing equipment includes:
a liquid container for containing a liquid to be injected,
a heating unit for heating the substrate to be heated,
a controller of the heating unit is arranged on the heating unit,
a temperature control unit for controlling the temperature of the liquid crystal,
a non-contact temperature measuring unit, a temperature measuring unit,
a signal processing unit, and
a temperature measuring unit bracket;
wherein the heating unit is disposed below the liquid container; the heating unit controller is connected with the heating unit at one end and connected with the temperature control unit at the other end; the non-contact temperature measuring unit is detachably connected with the temperature measuring unit bracket; the temperature measuring unit bracket is configured to enable the temperature measuring surface of the non-contact temperature measuring unit to face the liquid in the liquid container and keep the temperature measuring surface not to be in contact with the liquid; the signal processing unit is connected with the non-contact temperature measuring unit at one end and connected with the temperature control unit at the other end.
In the present invention, the broad sense should be understood that the "temperature measuring surface faces the liquid in the liquid container", that is, the temperature measuring surface directly faces the liquid level, and the temperature measuring surface is outside the container and the side wall of the container faces the liquid.
The utility model is not only suitable for cleaning the liquid medicine of the semiconductor wafer, but also suitable for any other liquid.
According to accuse temperature and firing equipment, preferably, the liquid container integration has and is used for observing the dipstick of liquid level height.
Temperature control and heating apparatus according to the utility model discloses, preferably, the heating unit is electric heating unit. Because the electrical heating unit is easier to control than other forms of heating units.
Temperature control and heating device according to the utility model discloses, preferably, the heating unit controller is the silicon controlled rectifier (thyristor). The controllable silicon can control the on-off or power of the electric heating unit after receiving the control signal.
Temperature control and heating apparatus according to the utility model discloses, preferably, the liquid container is the cylindrical container of top open-ended.
According to accuse temperature and firing equipment, preferably, non-contact temperature measurement unit is infrared temperature sensor. The signal processing unit is used for converting the temperature signal measured by the infrared temperature sensor into a voltage signal.
According to accuse temperature and firing equipment, preferably, the temperature measurement unit support is located the adjustable support in the cylindrical container outside. The adjustable support is adjustable in the horizontal direction and the vertical direction. The temperature measuring surface of the infrared temperature sensor always faces the side surface of the cylindrical container, the highest point of the temperature measuring surface is always lower than the liquid level of liquid contained in the cylindrical container, and meanwhile, the distance between the temperature measuring surface of the infrared temperature sensor and the measuring surface of the cylindrical container is guaranteed to be constant. More preferably, the adjustable bracket comprises a base, a vertical rod and a sensor rod; the infrared temperature sensor comprises a base, a vertical rod, a sensor rod, a shaft clasping seat, an infrared temperature sensor, a sensor rod and a vertical rod, wherein the vertical rod is connected with the base at one end and vertically stands on the base, the vertical rod is connected with the sensor rod in an adjustable mode through the shaft clasping seat at one end, and the sensor rod is detachably connected with the infrared temperature sensor through the shaft clasping seat at the other end.
According to accuse temperature and firing equipment, preferably, the temperature measurement unit support add hold in adjustable support on the top opening edge of cylindrical container. The adjustable bracket is clamped at any position on the edge of the upper opening of the cylindrical container, and the adjustable bracket is adjusted in the horizontal direction and the vertical direction. The temperature measuring surface of the infrared temperature sensor is always positioned above the liquid in the cylindrical container and faces the liquid level of the liquid, and the constant distance between the temperature measuring surface and the liquid level is ensured. More preferably, the adjustable bracket comprises a clamping seat, a vertical rod, a horizontal rod and a sensor rod; the infrared temperature sensor comprises a vertical rod, a horizontal rod, a sensor rod, a shaft clasping seat, a sensor rod, an infrared temperature sensor, a clamping seat, a sensor rod and a shaft clasping seat, wherein one end of the vertical rod is connected with the clamping seat and vertically stands on the clamping seat, one end of the horizontal rod is adjustably connected with one end of the vertical rod through the shaft clasping seat, the other end of the horizontal rod is adjustably connected with the sensor rod through the shaft clasping seat, and the infrared temperature sensor is detachably connected with the sensor rod through the shaft clasping seat; the whole adjustable bracket is in a frame shape.
Before the temperature control and heating device works, firstly, the liquid medicine to be heated is injected into the liquid container, and then the temperature control and heating device is started. The specific principle of the temperature control and heating equipment is as follows: the non-contact temperature measuring unit receives a thermal radiation signal from the liquid medicine through a temperature measuring surface. This signal is then converted by the signal processing unit into a voltage signal that can be read by the thermostat. Subsequently, the temperature controller compares the obtained voltage signal with a program set in the temperature controller, and sends a signal to a heating unit controller based on the comparison result, and the heating unit controller controls the on/off of the heating unit or adjusts the power of the heating unit based on the received signal. The whole system is in a closed-loop control system form, and realizes temperature control and heating of the liquid medicine.
It should be understood that since the non-contact thermometric units measure temperature by receiving a thermal radiation signal, the thermal radiation attenuates with distance. Therefore, when the non-contact temperature measuring unit is used, in order to ensure the accuracy of the measuring result, the distance between the temperature measuring surface of the non-contact temperature measuring unit and the radiation source (i.e. the liquid medicine) should be ensured to be constant. In the simplest case, however, the temperature measuring unit support is a stationary support. In this case, if the liquid level of the liquid medicine is too low, the distance between the temperature measuring surface and the radiation source (i.e. the liquid medicine) will exceed a reasonable value, and the temperature measuring result will be affected.
In order to overcome the above technical problems, the present invention proposes two preferred embodiments. The first preferred embodiment proposes the following improvements: firstly, the temperature measuring unit bracket is an adjustable bracket positioned outside the cylindrical container. The adjustable support is adjustable in the horizontal direction and the vertical direction. The temperature measuring surface of the infrared temperature sensor faces the side surface of the cylindrical container all the time, and the highest point of the temperature measuring surface is lower than the liquid level of liquid contained in the cylindrical container all the time. Thus, the distance between the temperature measuring surface of the infrared temperature sensor and the radiation source (namely the liquid medicine) can be ensured to be constant.
The second preferred embodiment proposes the following improvements: firstly, the temperature measuring unit bracket is an adjustable bracket which is clamped on the edge of an upper opening of the cylindrical container. The adjustable bracket is clamped at any position on the edge of the upper opening of the cylindrical container, and the adjustable bracket is adjusted in the horizontal direction and the vertical direction. The temperature measuring surface of the infrared temperature sensor is always positioned above the liquid in the cylindrical container and faces the liquid level of the liquid. Thus, the distance between the temperature measuring surface of the infrared temperature sensor and the radiation source (namely the liquid medicine) can be ensured to be constant.
The invention is described below by way of example with reference to the accompanying drawings.
Fig. 1 shows a front view of an embodiment of a temperature control and heating device 100, wherein a cylindrical container 101 is sectioned along a horizontal plane through its central axis. The temperature control and heating device, indicated as a whole with the reference 100, comprises: a cylindrical container 101 with an upper opening, an electric heating unit 102, a silicon controlled rectifier 103, a temperature control unit 104, a signal processing unit 105, an infrared temperature sensor 106 and an adjustable bracket 107 positioned outside the cylindrical container 101. Wherein the electric heating unit 102 is disposed below the cylindrical container 101; the controllable silicon 103 is connected with the electric heating unit 102 at one end and connected with the temperature control unit 104 at the other end; the signal processing unit 105 is connected to the infrared temperature sensor 106 at one end and to the temperature control unit 104 at the other end. The adjustable support 107 is located outside the cylindrical container 101 and comprises: a base 107A, a vertical rod 107B, and a sensor rod 107C; the vertical rod 107B is connected with the base 107A at one end and vertically stands on the base 107A, the vertical rod 107B and the sensor rod 107C are adjustably connected with each other at one end through the shaft clasping seat 107D, and the sensor rod 107C is detachably connected with the infrared temperature sensor 107 at the other end through the shaft clasping seat 107D.
Fig. 2 shows a front view of the temperature control and heating device 100 according to fig. 1 in an operating state. As shown in fig. 2, before the temperature control and heating apparatus 100 is operated, a certain amount of the liquid medicine 108 to be heated is first injected into the cylindrical container 101, and then the temperature control and heating apparatus 100 is turned on. The adjustable bracket 107 is adjustable in the horizontal direction and the vertical direction. In this way, the adjusting bracket 107 can be adjusted so that the temperature measuring surface of the infrared temperature sensor 106 always faces the side surface of the cylindrical container 101 and the highest point of the temperature measuring surface is always lower than the liquid surface of the chemical liquid 108 contained in the cylindrical container 101. Meanwhile, the distance between the temperature measuring surface of the infrared temperature sensor 106 and the measuring surface of the cylindrical container 101 can be made constant by adjusting the adjusting bracket 107.
Fig. 3 shows a front view of another embodiment of the temperature control and heating device 100, wherein the cylindrical container 101 is sectioned along a horizontal plane through its central axis. The temperature control and heating device, indicated as a whole with the reference 100, comprises: an upper opening cylindrical container 101, an electric heating unit 102, a silicon controlled rectifier 103, a temperature control unit 104, a signal processing unit 105, an infrared temperature sensor 106 and an adjustable bracket 107 added on the upper opening edge of the cylindrical container 101. Wherein the electric heating unit 102 is disposed below the cylindrical container 101; the controllable silicon 103 is connected with the electric heating unit 102 at one end and connected with the temperature control unit 104 at the other end; the signal processing unit 105 is connected to the infrared temperature sensor 106 at one end and to the temperature control unit 104 at the other end. The adjustable support 107 is clamped on the upper opening edge of the cylindrical container 101 and comprises: a grip holder 107A, a vertical rod 107B, a horizontal rod 107E, and a sensor rod 107C; the infrared temperature sensor 106 is detachably connected with the sensor rod 107C through the shaft clasping seat 107D; the whole adjustable bracket is in a frame shape.
Fig. 4 shows a front view of the temperature control and heating device 100 according to fig. 3 in an operating state. As shown in fig. 4, before the mild heating apparatus 100 is operated, a certain amount of the medical fluid 108 to be heated is first injected into the cylindrical container 101, and then the temperature control and heating apparatus 100 is turned on. The adjustable bracket 107 is attached to an arbitrary position on the upper opening edge of the cylindrical container 101, and the adjustable bracket 107 is adjusted in the horizontal direction and the vertical direction. Thus, the temperature measuring surface of the infrared temperature sensor 106 can be always positioned above the liquid medicine 108 in the cylindrical container and directed to the liquid surface of the liquid medicine by adjusting the adjusting bracket 107. Meanwhile, the distance between the temperature measuring surface of the infrared temperature sensor 106 and the liquid surface of the liquid medicine 108 can be kept constant by adjusting the adjusting bracket 107.
Claims (10)
1. A temperature control and heating apparatus, comprising:
a liquid container for containing a liquid to be injected,
a heating unit for heating the substrate to be heated,
a controller of the heating unit is arranged on the heating unit,
a temperature control unit for controlling the temperature of the liquid crystal,
a non-contact temperature measuring unit, a temperature measuring unit,
a signal processing unit, and
a temperature measuring unit bracket;
the heating unit is arranged below the liquid container; the heating unit controller is connected with the heating unit at one end and connected with the temperature control unit at the other end; the non-contact temperature measuring unit is detachably connected with the temperature measuring unit bracket; the temperature measuring unit bracket is configured to enable the temperature measuring surface of the non-contact temperature measuring unit to face the liquid in the liquid container and keep the temperature measuring surface not to be in contact with the liquid; the signal processing unit is connected with the non-contact temperature measuring unit at one end and connected with the temperature control unit at the other end.
2. The temperature control and heating apparatus of claim 1, wherein the liquid container is integrated with a dipstick for observing liquid level.
3. The temperature control and heating apparatus of claim 1, wherein the heating unit is an electrical heating unit.
4. The temperature control and heating apparatus of claim 3, wherein the heating unit controller is a thyristor.
5. The temperature control and heating apparatus according to any one of claims 1 to 4, wherein the liquid container is a cylindrical container with an upper opening.
6. The temperature control and heating apparatus of claim 5, wherein the non-contact temperature measuring unit is an infrared temperature sensor; the signal processing unit is used for converting the temperature signal measured by the infrared temperature sensor into a voltage signal.
7. The temperature control and heating apparatus of claim 6, wherein the temperature cell holder is an adjustable holder located outside the cylindrical vessel; the adjustable bracket is adjusted in the horizontal direction and the vertical direction; the temperature measuring surface of the infrared temperature sensor always faces the side surface of the cylindrical container, the highest point of the temperature measuring surface is always lower than the liquid level of liquid contained in the cylindrical container, and meanwhile, the distance between the temperature measuring surface of the infrared temperature sensor and the measuring surface of the cylindrical container is guaranteed to be constant.
8. The temperature control and heating apparatus of claim 7, wherein the adjustable support comprises a base, a vertical rod, and a sensor rod; the infrared temperature sensor is characterized in that one end of the vertical rod is connected with the base, the vertical rod is vertically arranged on the base, the vertical rod is connected with the sensor rod in an adjustable mode through the shaft holding seat at one end, and the sensor rod is detachably connected with the infrared temperature sensor through the shaft holding seat at the other end.
9. The temperature control and heating apparatus according to claim 6, wherein the temperature measuring unit holder is an adjustable holder which is clamped on the upper opening edge of the cylindrical container; the adjustable bracket is clamped at any position on the edge of the upper opening of the cylindrical container, and the adjustable bracket is adjusted in the horizontal direction and the vertical direction; the temperature measuring surface of the infrared temperature sensor is always positioned above the liquid in the cylindrical container and faces the liquid level of the liquid, and the constant distance between the temperature measuring surface and the liquid level is ensured.
10. The temperature control and heating apparatus of claim 9, wherein the adjustable support comprises a clamping base, a vertical rod, a horizontal rod, and a sensor rod; the infrared temperature sensor comprises a vertical rod, a horizontal rod, a sensor rod, a shaft clasping seat, a sensor rod, a vertical rod, a shaft clasping seat, a sensor rod and an infrared temperature sensor, wherein the vertical rod is connected with the clamping seat at one end and vertically stands on the clamping seat, the horizontal rod and the vertical rod are adjustably connected at one end through the shaft clasping seat, the horizontal rod is adjustably connected with the sensor rod at the other end through the shaft clasping seat, and the infrared temperature sensor is detachably connected with the sensor rod through the shaft clasping seat; the whole adjustable bracket is in a frame shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120506745.0U CN214791892U (en) | 2021-03-10 | 2021-03-10 | Temperature control and heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120506745.0U CN214791892U (en) | 2021-03-10 | 2021-03-10 | Temperature control and heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214791892U true CN214791892U (en) | 2021-11-19 |
Family
ID=78756135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120506745.0U Active CN214791892U (en) | 2021-03-10 | 2021-03-10 | Temperature control and heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214791892U (en) |
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2021
- 2021-03-10 CN CN202120506745.0U patent/CN214791892U/en active Active
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