CN214782102U

CN214782102U - Arc ion plating equipment for improving film deposition quality

Info

Publication number: CN214782102U
Application number: CN202023094148.6U
Authority: CN
Inventors: 刘若岚
Original assignee: Yunnan Jiutong Power Equipment Co ltd
Current assignee: Yunnan Jiutong Power Equipment Co ltd
Priority date: 2020-12-21
Filing date: 2020-12-21
Publication date: 2021-11-19
Anticipated expiration: 2030-12-21

Abstract

The utility model discloses an improve electric arc ion plating equipment of film deposition quality, including equipment principal, equipment principal's inside is provided with the motor, the upper end surface of motor is provided with the revolving stage, the upper end surface of revolving stage is provided with hydraulic column and base. Through the upper end surface at the revolving stage is provided with the hydraulic column, the connecting plate passes through hydraulic column and revolving stage swing joint, be provided with the slide rail between the fixed plate of connecting plate No. one, connecting plate and fixed plate pass through slide rail swing joint, the hydraulic column stretches out and lifts up fixed plate and stand etc., outside pull-out equipment main part with fixed plate and stand etc. rethread slide rail, the user's of expansion activity space, thereby be convenient for the blowing with get the material, set up the couple through the side surface at the stand, not only be favorable to the hook work piece, still be favorable to the installation charging tray, the charging tray passes through-hole and couple swing joint, through the interval of putting between the couple adjustment charging tray, make the charging tray be convenient for bear the work piece of various shapes difference and variation in size.

Description

Arc ion plating equipment for improving film deposition quality

Technical Field

The utility model relates to an electric arc ion plating equipment field, in particular to improve electric arc ion plating equipment of film deposition quality.

Background

The arc ion plating technique belongs to cold field arc discharge, and the technical process of the arc ion plating is as follows. Baking and heating the workpiece and carrying out ammonia ion counterattack purification; cleaning the workpiece in a furnace and then vacuumizing; when the vacuum degree reaches 6X10-3Pa, a baking heating power supply is started to heat the workpiece; introducing ammonia gas after a certain temperature is reached, reducing the vacuum degree to 2-3 Pa, switching on a workpiece bias power supply, and adjusting the voltage to 800-1000V; glow discharge is generated at the moment, and argon ions are obtained; and the argon ions bombard and purify the workpiece under the action of the negative bias electric field. In the use process of the existing arc ion plating equipment, because the material rest is positioned in the equipment main body, the material is inconvenient to discharge and take, the use range of the material rest is limited, and the material rest is not suitable for workpieces of various types and shapes, so that the arc ion plating equipment for improving the film deposition quality is provided.

SUMMERY OF THE UTILITY MODEL

The main object of the utility model is to provide an improve electric arc ion plating equipment of film deposition quality, can effectively solve the problem among the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides an improve electric arc ion plating equipment of film deposition quality, includes equipment principal, equipment principal's inside is provided with the motor, the upper end surface of motor is provided with the revolving stage, the upper end surface of revolving stage is provided with hydraulic pressure post and base, the upper end surface of hydraulic pressure post is provided with the connecting plate, the upper end surface of connecting plate is provided with the fixed plate, one side surface of fixed plate is provided with the stand, the side surface of stand is provided with the couple, the side surface of couple is provided with the charging tray, be provided with the slide rail between connecting plate and the fixed plate.

Preferably, the lower extreme surface of connecting plate is provided with the connecting piece, be fixed connection between connecting piece and the connecting plate, and with the base between be swing joint, the cross section's of connecting piece shape is the hexagon, be fixed connection between motor and the equipment main part.

By adopting the technical scheme, the following technical effects can be achieved: the connecting piece is favorable to blocking in the base to be convenient for the revolving stage to drive connecting plate and fixed plate rotatory.

Preferably, swing joint is used between revolving stage and the motor, hydraulic pressure post and base respectively with the revolving stage between be fixed connection, the quantity of hydraulic pressure post is two sets of, and be the symmetry and arrange, be fixed connection between connecting plate and the hydraulic pressure post.

By adopting the technical scheme, the following technical effects can be achieved: the hydraulic column stretches out to be favorable for lifting up stand and charging tray etc., and the slide rail is favorable for pulling out fixed plate and stand etc., and hydraulic column and slide rail cooperation are used, are convenient for the blowing with get the material.

Preferably, the fixed plate passes through slide rail and connecting plate swing joint, the quantity of slide rail is two sets of, and is the symmetry and arranges, be fixed connection between stand and the fixed plate, the quantity of fixed plate is two sets of, and is the symmetry and arranges.

By adopting the technical scheme, the following technical effects can be achieved: the fixed plate is convenient for mounting the upright post, and the upright post is favorable for mounting the hook.

Preferably, be fixed connection between couple and the stand, the quantity of stand is a plurality of groups, and is the array and arranges, the quantity of couple is a plurality of groups, and is the array and arranges, the charging tray is provided with the through-hole with the junction of couple.

By adopting the technical scheme, the following technical effects can be achieved: the hook can not only hook the workpiece, but also hook the material tray, thereby being beneficial to placing workpieces with different shapes on the material tray.

Preferably, the charging tray passes through-hole and couple swing joint, the quantity of through-hole is a plurality of groups, and is the array and arranges, the quantity of charging tray is a plurality of groups, and is the array and arranges.

By adopting the technical scheme, the following technical effects can be achieved: the material tray is movably connected with the hook through the through hole, so that the distance between the material trays can be adjusted, and the material tray can adapt to different sizes of workpieces conveniently.

Compared with the prior art, the utility model discloses following beneficial effect has: through the upper end surface at the revolving stage is provided with the hydraulic column, the connecting plate passes through hydraulic column and revolving stage swing joint, be provided with the slide rail between the fixed plate of connecting plate No. one, connecting plate and fixed plate pass through slide rail swing joint, the hydraulic column stretches out and lifts up fixed plate and stand etc., outside pull-out equipment main part with fixed plate and stand etc. rethread slide rail, the user's of expansion activity space, thereby be convenient for the blowing with get the material, set up the couple through the side surface at the stand, not only be favorable to the hook work piece, still be favorable to the installation charging tray, the charging tray passes through-hole and couple swing joint, through the interval of putting between the couple adjustment charging tray, make the charging tray be convenient for bear the work piece of various shapes difference and variation in size.

Drawings

FIG. 1 is a schematic view of the overall structure of an arc ion plating apparatus for improving the quality of thin film deposition according to the present invention;

FIG. 2 is a view showing the internal structure of an arc ion plating apparatus for improving the quality of thin film deposition according to the present invention;

FIG. 3 is a partially exploded view of an arc ion plating apparatus for improving film deposition quality in accordance with the present invention;

FIG. 4 is a partial view of an arc ion plating apparatus for improving the quality of thin film deposition according to the present invention.

In the figure: 1. an apparatus main body; 2. a motor; 3. a turntable; 4. a hydraulic column; 5. a base; 6. a connecting plate; 7. a fixing plate; 8. a column; 9. hooking; 10. a material tray; 11. a through hole; 12. a slide rail; 13. a connecting member.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

As shown in fig. 1-4, an arc ion plating apparatus for improving film deposition quality includes an apparatus main body 1, a motor 2 is disposed inside the apparatus main body 1, a turntable 3 is disposed on an upper end outer surface of the motor 2, a hydraulic column 4 and a base 5 are disposed on an upper end outer surface of the turntable 3, a connecting plate 6 is disposed on an upper end outer surface of the hydraulic column 4, a fixing plate 7 is disposed on an upper end outer surface of the connecting plate 6, a column 8 is disposed on an outer surface of one side of the fixing plate 7, a hook 9 is disposed on an outer surface of a side end of the column 8, a tray 10 is disposed on an outer surface of a side end of the hook 9, and a slide rail 12 is disposed between the connecting plate 6 and the fixing plate 7.

The lower extreme surface of connecting plate 6 is provided with connecting piece 13, is fixed connection between connecting piece 13 and the connecting plate 6, and with base 5 between be swing joint, the shape of the cross section of connecting piece 13 is the hexagon, be fixed connection between motor 2 and the equipment main part 1, connecting piece 13 is favorable to the card in base 5 to be convenient for revolving stage 3 drives connecting plate 6 and fixed plate 7 rotatory.

Be swing joint between revolving stage 3 and the motor 2, hydraulic pressure post 4 and base 5 respectively with revolving stage 3 between be fixed connection, the quantity of hydraulic pressure post 4 is two sets of, and be the symmetry and arrange, be fixed connection between connecting plate 6 and the hydraulic pressure post 4, hydraulic pressure post 4 stretches out and is favorable to lifting up stand 8 and charging tray 10 etc. slide rail 12 is favorable to pulling out fixed plate 7 and stand 8 etc. hydraulic pressure post 4 and slide rail 12 cooperation are used, the blowing of being convenient for and get the material.

Fixed plate 7 passes through

slide rail

12 and 6 swing joint of connecting plate, and the quantity of slide rail 12 is two sets of, and is the symmetry and arranges, is fixed connection between stand 8 and the fixed plate 7, and the quantity of fixed plate 7 is two sets of, and is the symmetry and arranges, and fixed plate 7 is convenient for install stand 8, and stand 8 is favorable to installing couple 9.

For fixed connection between couple 9 and the stand 8, the quantity of stand 8 is a plurality of groups, and is the array and arranges, and the quantity of couple 9 is a plurality of groups, and is the array and arranges, and charging tray 10 is provided with through-hole 11 with the junction of couple 9, and couple 9 not only can catch the work piece, still is favorable to catching charging tray 10 to be favorable to putting the work piece that the shape is different on charging tray 10.

Charging tray 10 passes through-hole 11 and couple 9 swing joint, and the quantity of through-hole 11 is a plurality of groups, and is the array and arranges, and the quantity of charging tray 10 is a plurality of groups, and is the array and arranges, and charging tray 10 is favorable to adjusting the interval between charging tray 10 through-hole 11 and couple 9 swing joint to be convenient for adapt to the not equidimension of work piece.

It is noted that the utility model relates to an arc ion plating device for improving the film deposition quality, when in use, a user firstly controls the hydraulic column 4 to extend out through the controller, the hydraulic column 4 extends out to enable the connecting plate 6, the upright post 8 and the like to rise, when the fixing plate 7 is higher than the threshold, the fixing plate 7, the upright post 8 and the like are pulled out through the slide rail 12, the fixing plate 7 and the upright post 8 are pulled out of the equipment main body 1 through the slide rail 12, which is beneficial to expanding the working space of the user, thereby convenient to use person's blowing or getting the material, the side surface of stand 8 is provided with couple 9, and couple 9 not only can hang foraminiferous work piece, still is favorable to installing charging tray 10, and the user judges the interval between charging tray 10 according to the size of work piece, and charging tray 10 is through-hole 11 and couple 9 swing joint, is favorable to the user to put charging tray 10 wantonly to be favorable to charging tray 10 to bear the work piece of various sizes.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. An arc ion plating apparatus for improving the quality of thin film deposition, comprising an apparatus main body (1), characterized in that: the inside of equipment main part (1) is provided with motor (2), the upper end surface of motor (2) is provided with revolving stage (3), the upper end surface of revolving stage (3) is provided with hydraulic pressure post (4) and base (5), the upper end surface of hydraulic pressure post (4) is provided with connecting plate (6), the upper end surface of connecting plate (6) is provided with fixed plate (7), one side surface of fixed plate (7) is provided with stand (8), the side surface of stand (8) is provided with couple (9), the side surface of couple (9) is provided with charging tray (10), be provided with slide rail (12) between connecting plate (6) and fixed plate (7).

2. The arc ion plating apparatus for improving the quality of thin film deposition according to claim 1, wherein: the lower extreme surface of connecting plate (6) is provided with connecting piece (13), be fixed connection between connecting piece (13) and connecting plate (6), and with base (5) between be swing joint, the cross section's of connecting piece (13) shape is the hexagon, be fixed connection between motor (2) and equipment main part (1).

3. The arc ion plating apparatus for improving the quality of thin film deposition according to claim 1, wherein: be swing joint between revolving stage (3) and motor (2), hydraulic pressure post (4) and base (5) respectively with revolving stage (3) between be fixed connection, the quantity of hydraulic pressure post (4) is two sets of, and is the symmetry and arranges, be fixed connection between connecting plate (6) and hydraulic pressure post (4).

4. The arc ion plating apparatus for improving the quality of thin film deposition according to claim 1, wherein: fixed plate (7) are through slide rail (12) and connecting plate (6) swing joint, the quantity of slide rail (12) is two sets of, and is the symmetry and arranges, be fixed connection between stand (8) and fixed plate (7), the quantity of fixed plate (7) is two sets of, and is the symmetry and arranges.

5. The arc ion plating apparatus for improving the quality of thin film deposition according to claim 1, wherein: be fixed connection between couple (9) and stand (8), the quantity of stand (8) is a plurality of groups, and is the array and arranges, the quantity of couple (9) is a plurality of groups, and is the array and arranges, the charging tray (10) is provided with through-hole (11) with the junction of couple (9).

6. The arc ion plating apparatus for improving the quality of thin film deposition according to claim 5, wherein: charging tray (10) are through-hole (11) and couple (9) swing joint, the quantity of through-hole (11) is a plurality of groups, and is the array and arranges, the quantity of charging tray (10) is a plurality of groups, and is the array and arranges.