CN214768923U - Degreasing furnace suitable for rotating target material - Google Patents
Degreasing furnace suitable for rotating target material Download PDFInfo
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- CN214768923U CN214768923U CN202120285874.1U CN202120285874U CN214768923U CN 214768923 U CN214768923 U CN 214768923U CN 202120285874 U CN202120285874 U CN 202120285874U CN 214768923 U CN214768923 U CN 214768923U
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- degreasing
- target material
- rotary target
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- workpiece table
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Abstract
The utility model discloses a degrease stove suitable for rotatory target, it is main including the degrease room, work piece platform and swing mechanism, wherein, through the installation position that sets up and rotatory target adaptation at the work piece bench crouches and puts rotatory target, can avoid the tip pressurized fracture of rotatory target like this through horizontal degreasing method, and simultaneously, drive the reciprocal swing of work piece platform through the swing mechanism that sets up at work piece platform lower extreme, and utilize the wobbling mode to improve row's glue and degreasing effect, thereby finally reach the purpose that improves degreasing efficiency.
Description
Technical Field
The utility model relates to a degreasing equipment, in particular to degrease stove suitable for rotatory target.
Background
The rotary target has the advantages of high thermal shock resistance, high sputtering utilization rate and the like, and is frequently used as a sputtering film material for surface coating, vacuum coating and the like of workpieces. The rotary target is mostly cylindrical, the production process mainly involves the process steps of thermal spraying, hot isostatic pressing, degreasing sintering and the like, and the cracking of the target is prevented from appearing in the whole production process. The existing degreasing and sintering process mostly adopts a vertical degreasing method, namely, a rotary target material is vertically and vertically placed in a degreasing furnace for normal-pressure degreasing and temperature-rising sintering, the rotary target material has the phenomenon of length increase in the degreasing process, so that the lower end of the rotary target material is pressed to be increased and is easy to crack, and meanwhile, the degreasing method also has the defects of insufficient glue discharge and long production period.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a degrease stove suitable for rotatory target can fully guarantee the degrease effect and avoid the emergence of fracture phenomenon.
According to the utility model discloses degrease stove suitable for rotatory target, include:
a degreasing chamber;
the workpiece table is arranged in the degreasing chamber in a swinging manner and is provided with an installation position matched with the length of the rotary target material;
and the swinging mechanism is arranged at the lower end of the workpiece platform and is used for controlling the workpiece platform to swing.
According to the utility model discloses degrease stove suitable for rotatory target has following technological effect at least:
the utility model provides a degrease stove suitable for rotatory target, it is main including the degrease room, work piece platform and swing mechanism, wherein, through the installation position that sets up and rotatory target adaptation at the work piece bench crouches and puts rotatory target, can avoid the tip pressurized fracture of rotatory target like this through horizontal degreasing method, and simultaneously, drive the reciprocal swing of work piece platform through the swing mechanism that sets up at work piece platform lower extreme, and utilize the wobbling mode to improve row's glue and degreasing effect, thereby finally reach the purpose that improves degreasing efficiency.
According to the utility model discloses a some embodiments, the degreasing chamber corresponds the work piece platform is provided with from bottom to top's steam system, can further improve steam cycle efficiency through the self come-up effect by from lower to top steam cycle mode make full use of circulation steam, and then the swing effect of cooperation swing mechanism fully reduces the degreasing cycle and improves the effect of binder removal.
According to some embodiments of the utility model, hot gas system is including setting up exhaust duct, the admission line of lower part on the upper portion of degrease room, just exhaust duct intercommunication the port of degrease room is located the top of work piece platform, the admission line intercommunication the port of degrease room is located the below of work piece platform to be used for forming the efficient and improve degreasing efficiency by lower up hot gas circulation system.
According to some embodiments of the present invention, the length of the mounting position can be adjusted to be suitable for degreasing operations of rotary targets of different sizes (mainly length).
According to some embodiments of the utility model, the installation position is for seting up the spout of the up end of work piece platform, the width of spout is greater than the diameter of rotatory target, it is provided with two clamping structure to remove in the spout, rotatory target centre gripping is two between the clamping structure, the interval through adjusting clamping structure can be applicable to the centre gripping operation of the rotatory target of different length, and utilizes the spout to place rotatory target and also can make to arrange to glue and can fully discharge via the spout.
According to some embodiments of the present invention, each of the clamping structures is provided with an elastic supporting portion for supporting the rotary target material so as to prevent the hard contact from causing the rotary target material to be damaged and broken.
According to the utility model discloses a few embodiments, the bottom of spout seted up with the draw-in groove of rotatory target adaptation, through the draw-in groove chucking the lower part of rotatory target, and make the biggest outside of rotatory target with leave the clearance between the spout, like this, can make full use of draw-in groove cooperation clamping structure realize that the centre gripping of rotatory target is fixed, and can improve the binder removal effect through the clearance between rotatory target and the spout to reach the purpose that further improves degreasing efficiency.
According to some embodiments of the present invention, the edge of the slot is provided with an elastic material to fully avoid hard contact between the rotary target and the slot, thereby avoiding the occurrence of cracking of the rotary target.
According to the utility model discloses a some embodiments, swing mechanism is provided with drive shaft and swinging arms, the one end of swinging arms is connected the drive shaft, the other end of swinging arms is connected the work piece platform is through rotating the drive shaft and driving the swinging arms swing, and then drive the work piece platform swing, like this can realize the swing control of work piece platform through swing mechanism.
According to some embodiments of the utility model, the swinging arms is connected the one end of work piece platform is provided with the free bearing, the lower extreme of work piece platform corresponds the free bearing is provided with the connector, the connector rotates the setting and is in on the free bearing, through rotating the connector with the free bearing and being connected the flexible swing control that can realize the work piece platform, can make earlier one step earlier when the swinging arms swings and rotate relatively between connector and the free bearing promptly, then progressively drive the work piece platform swing, can fully avoid opening suddenly like this and stop the swinging arms and cause the damage to the pairing rotation target.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic overall structure diagram of a degreasing furnace suitable for a rotary target according to an embodiment of the present invention;
fig. 2 is a schematic view of an installation structure of a rotary target according to an embodiment of the present invention;
reference numerals:
a degreasing chamber 100, an air inlet pipeline 101, a workpiece table 102, an exhaust pipeline 103 and a swing mechanism 104;
the device comprises a rotary target 200, a sliding chute 201, a clamping groove 202, a clamping structure 203 and an elastic jacking part 204.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases for a worker of ordinary skill in the art.
Referring to fig. 1 and 2, the utility model provides a degreasing furnace suitable for rotary target, including:
a degreasing chamber 100;
a workpiece table 102 which is swingably provided in the degreasing chamber 100, the workpiece table 102 being provided with a mounting position adapted to the length of the rotary target 200;
and a swing mechanism 104 provided at a lower end of the workpiece table 102, the swing mechanism 104 controlling the workpiece table 102 to swing.
According to the above structure, the utility model provides a degrease stove suitable for rotatory target, mainly include degrease room 100, work piece platform 102 and swing mechanism 104, wherein, through set up on work piece platform 102 with the installation position of rotatory target 200 adaptation crouch put rotatory target 200, can avoid the tip pressurized fracture of rotatory target 200 through horizontal degreasing method like this, and simultaneously, swing mechanism 104 through setting up at work piece platform 102 lower extreme drives work piece platform 102 reciprocating swing, and utilize the wobbling mode to improve row's glue and degreasing effect, thereby finally reach the purpose that improves degreasing efficiency.
In some embodiments of the present invention, as shown in fig. 1, the degreasing chamber 100 is provided with a bottom-up hot gas system corresponding to the workpiece table 102, and the self-floating effect of the circulating hot gas can be fully utilized to further improve the hot gas circulation efficiency through a bottom-up hot gas circulation mode, so that the swing action of the swing mechanism 104 is fully reduced in the degreasing period and improved in the glue discharging effect.
In some embodiments of the present invention, as shown in fig. 1, the hot gas system includes an exhaust duct 103 disposed on the upper portion of the degreasing chamber 100, and an air inlet duct 101 disposed on the lower portion of the degreasing chamber 100, and a port of the exhaust duct 103 communicating with the degreasing chamber 100 is located above the workpiece stage 102, and a port of the air inlet duct 101 communicating with the degreasing chamber 100 is located below the workpiece stage 102, so as to form an efficient hot gas circulation system from bottom to top to improve the degreasing efficiency.
In some embodiments of the present invention, as shown in fig. 2, the length of the mounting position can be adjusted to be suitable for degreasing operations of the rotating target 200 with different sizes (mainly, lengths).
In some embodiments of the present invention, as shown in fig. 2, the mounting position is a chute 201 provided on the upper end surface of the workpiece stage 102, the width of the chute 201 is greater than the diameter of the rotating target 200, two clamping structures 203 are provided in the chute 201, the rotating target 200 is clamped between the two clamping structures 203, the distance between the clamping structures 203 is adjusted to be suitable for the clamping operation of the rotating target 200 with different lengths, and the chute 201 is utilized to place the rotating target 200, so that the glue can be sufficiently discharged through the chute 201.
In some embodiments of the present invention, as shown in fig. 2, each of the clamping structures 203 is provided with an elastic supporting portion 204 for supporting the rotating target 200, so as to prevent the rotating target 200 from being damaged and broken due to hard contact.
In some embodiments of the utility model, as shown in fig. 2, the draw-in groove 202 with rotatory target 200 adaptation is seted up to the bottom of spout 201, through the lower part of the rotatory target 200 of draw-in groove 202 chucking to make and leave the clearance between the biggest outside of rotatory target 200 and spout 201, like this, can make full use of draw-in groove 202 cooperation clamping structure 203 realize that the centre gripping of rotatory target 200 is fixed, and can improve the row's of gluing effect through the clearance between rotatory target 200 and the spout 201, thereby reach the purpose that further improves degreasing efficiency.
In some embodiments of the present invention, the edge of the slot 202 is provided with an elastic material to sufficiently avoid the hard contact between the rotary target 200 and the slot 202, thereby avoiding the cracking phenomenon of the rotary target 200.
The utility model discloses a in some embodiments, the both sides parallel arrangement of spout 201 has the mounting groove, and the both sides of clamping structure 203 correspond the mounting groove and are provided with the card strip, and clamping structure 203 is through card strip slidable mounting in the mounting groove and slidable mounting in spout 201.
The utility model discloses an in some embodiments, the lower extreme of work piece platform 102 all is provided with the bleeder vent of a plurality of intercommunication spouts 201 and draw-in groove, and the bleeder vent here is on the one hand for improving the binder removal effect, and on the other hand also can wear to establish the bolt or the screw of connecting clamping structure 203 through the bleeder vent and realize that the interval between two clamping structure 203 is fixed.
In some embodiments of the present invention, as shown in fig. 1, the swing mechanism 104 is provided with a driving shaft and a swing rod, the driving shaft is connected to one end of the swing rod, the workpiece table 102 is connected to the other end of the swing rod, the swing rod is driven to swing by rotating the driving shaft, and then the workpiece table 102 is driven to swing, so that the swing control of the workpiece table 102 can be realized by the swing mechanism 104.
The utility model discloses an in some embodiments, the one end that the swinging arms connects work piece platform 102 is provided with the free bearing, the lower extreme of work piece platform 102 corresponds the free bearing and is provided with the connector, the connector rotates and sets up on the free bearing, through rotating the connector with the free bearing and being connected the flexible swing control that can realize work piece platform 102, can make earlier one step when the swinging arms swings and rotate relatively between connector and the free bearing, then progressively drive work piece platform 102 swing, can fully avoid opening suddenly like this and stop the swinging arms and cause the damage to rotation target 200.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A degreasing furnace suitable for rotating a target material is characterized by comprising:
a degreasing chamber;
the workpiece table is arranged in the degreasing chamber in a swinging manner and is provided with an installation position matched with the length of the rotary target material;
and the swinging mechanism is arranged at the lower end of the workpiece platform and is used for controlling the workpiece platform to swing.
2. The degreasing furnace for the rotary target material according to claim 1, wherein the degreasing chamber is provided with a bottom-up hot gas system corresponding to the workpiece table.
3. The degreasing furnace for the rotary target material of claim 2, wherein the hot gas system comprises an exhaust duct arranged at an upper part of the degreasing chamber and an air inlet duct arranged at a lower part of the degreasing chamber, a port of the exhaust duct communicated with the degreasing chamber is located above the workpiece table, and a port of the air inlet duct communicated with the degreasing chamber is located below the workpiece table.
4. The degreasing furnace for the rotary target material of claim 1, wherein the length of the mounting position is adjustable.
5. The degreasing furnace for the rotary target material as claimed in claim 4, wherein the mounting position is a sliding groove formed in an upper end surface of the workpiece table, the sliding groove has a width larger than a diameter of the rotary target material, two clamping structures are disposed in the sliding groove, and the rotary target material is clamped between the two clamping structures.
6. The degreasing furnace for rotary targets according to claim 5, wherein each clamping structure is provided with an elastic supporting portion for supporting the rotary target.
7. The degreasing furnace suitable for the rotary target material as claimed in claim 6, wherein a slot adapted to the rotary target material is formed at the bottom of the chute, and the lower portion of the rotary target material is clamped by the slot, so that a gap is left between the maximum outer edge of the rotary target material and the chute.
8. The degreasing furnace for the rotary target material as claimed in claim 7, wherein the edge of the slot is provided with an elastic material.
9. The degreasing furnace for rotary targets of claim 1, wherein the swing mechanism is provided with a driving shaft and a swing rod, one end of the swing rod is connected to the driving shaft, the other end of the swing rod is connected to the workpiece table, and the swing rod is driven to swing by rotating the driving shaft, so as to drive the workpiece table to swing.
10. The degreasing furnace suitable for rotating a target material as claimed in claim 9, wherein an end of the swing rod connected to the workpiece table is provided with a hinged support, a lower end of the workpiece table is provided with a connector corresponding to the hinged support, and the connector is rotatably disposed on the hinged support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120285874.1U CN214768923U (en) | 2021-02-01 | 2021-02-01 | Degreasing furnace suitable for rotating target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120285874.1U CN214768923U (en) | 2021-02-01 | 2021-02-01 | Degreasing furnace suitable for rotating target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214768923U true CN214768923U (en) | 2021-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120285874.1U Active CN214768923U (en) | 2021-02-01 | 2021-02-01 | Degreasing furnace suitable for rotating target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214768923U (en) |
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2021
- 2021-02-01 CN CN202120285874.1U patent/CN214768923U/en active Active
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