CN214750745U - Orthogonal adjusting device and detection equipment - Google Patents

Abstract

The utility model relates to a detection area discloses an orthogonal adjusting device and check out test set. The orthogonal adjusting device is provided with a first guide rail, a second guide rail and a bearing platform on a base platform; one end of the gantry is arranged on the first base plate through a first adjusting mechanism, the first base plate is connected with the first guide rail in a sliding mode, and the other end of the gantry is matched with the second guide rail; the calibration camera which is slidably mounted on the third guide rail can acquire the vertical mark of the bearing platform, so that an adjustment scheme is provided, the bearing platform is driven by the driving mechanism to act to enable the first direction to be parallel to the extending direction of the first guide rail, the calibration of the first direction of the vertical mark is realized, the angle between the extending direction of the gantry and the second direction is adjusted by the first adjustment mechanism, the extending direction of the third guide rail is parallel to the second direction, and the calibration of the third guide rail is realized; and because the first direction is perpendicular to the second direction, the third guide rail is guaranteed to be perpendicular to the first guide rail and the second guide rail.

Description

Orthogonal adjusting device and detection equipment

Technical Field

The utility model relates to a detect technical field, in particular to quadrature adjusting device and check out test set.

Background

In the equipment for detecting the open circuit and short circuit defects of the glass substrate circuit, two detection devices need to perform a discharge test on the same circuit of a substrate to detect the open circuit and short circuit defects of the substrate circuit, and in order to ensure that the two detection devices can perform discharge detection on two ends of the same circuit of the glass substrate all the time in the detection process, the X axis and the Y axis of the equipment need to be ensured to be orthogonal and vertical to each other. Therefore, an adjusting mechanism is needed to be designed to adjust the X, Y axes of the device to be orthogonal to each other.

SUMMERY OF THE UTILITY MODEL

The utility model discloses an orthogonal adjusting device and check out test set for the orthogonal vertical adjustment at realization base plate check out test set longmen.

In order to achieve the above purpose, the utility model provides the following technical scheme:

in a first aspect, the present invention provides an orthogonal adjustment device, including: the system comprises a base station, a gantry, a bearing platform, a driving mechanism and a calibration camera;

the base station is provided with a first guide rail and a second guide rail which are arranged in parallel; a first base plate is arranged on the first guide rail in a sliding mode, one end of the gantry is connected with the first base plate through a first adjusting mechanism, and the other end of the gantry is matched with the second guide rail, so that the angle between the extending direction of the gantry and the extending direction of the first guide rail can be adjusted; the first adjusting mechanism has an adjusting state and a locking state, and when the first adjusting mechanism is in the adjusting state, the gantry can move relative to the first base plate to adjust an angle between the extending direction of the gantry and the extending direction of the first guide rail; when the first adjusting mechanism is in the locking state, the gantry is relatively fixed with the first substrate through the first adjusting mechanism;

the gantry is provided with a third guide rail extending along the length direction of the gantry;

the bearing platform is arranged on the base platform and is positioned between the first guide rail and the second guide rail, an alignment surface is arranged on one side, away from the base platform, of the bearing platform, and a vertical mark is arranged on the alignment surface; the vertical mark is used for calibrating a first direction and a second direction which are vertical to each other;

the calibration camera is slidably mounted on the third guide rail, and the acquisition direction of the calibration camera faces the alignment surface;

the driving mechanism is in transmission connection with the bearing platform and is used for driving the bearing platform to move relative to the base platform;

the calibration camera, the vertical mark and the driving mechanism are matched to enable the first direction to be parallel to the extending direction of the first guide rail;

the calibration camera, the vertical mark and the first adjusting mechanism are matched to enable the extending direction of the third guide rail to be parallel to the second direction.

The orthogonal adjusting device is characterized in that a first guide rail, a second guide rail and a bearing platform are arranged on a base platform, and a vertical mark is arranged on an alignment surface of the bearing platform; one end of the gantry is arranged on the first base plate through a first adjusting mechanism, the first base plate is connected with the first guide rail in a sliding mode, the other end of the gantry is matched with the second guide rail, and the matching comprises that the other end of the gantry can slide along the second guide rail; the calibration camera is slidably mounted on a third guide rail of the gantry, can acquire a vertical mark on the alignment surface and provides an adjustment scheme, so that the bearing platform is driven by the driving mechanism to act to enable the first direction to be parallel to the extending direction of the first guide rail or the second guide rail, the calibration of the first direction of the vertical mark is realized by taking the first guide rail or the second guide rail as a reference, and then the angle between the extending direction of the gantry and the second direction is adjusted by the first adjustment mechanism to enable the extending direction of the third guide rail to be parallel to the second direction, so that the calibration of the third guide rail is realized; and because the first direction is perpendicular to the second direction, the third guide rail is guaranteed to be perpendicular to the first guide rail and the second guide rail.

Therefore, the utility model discloses a mark the camera and shoot the perpendicular sign on the load-bearing platform, can realize the vertical adjustment at base plate check out test set longmen, can be with base plate check out test set's diaxon (be first guide rail and third guide rail) straightness adjustment to the angular deviation precision of micron order to solved two detection device and can't be carried out the technical problem who receives the discharge detection at glass substrate's same circuit both ends all the time.

Optionally, the calibration camera is a CCD camera.

Optionally, the vertical marker comprises a first cross mark, a second cross mark and a third cross mark, the first cross mark and the second cross mark are arranged along the first direction, and the second cross mark and the third cross mark are arranged along the second direction.

Optionally, the vertical marker further comprises a fortieth character mark, the fortieth character mark and the third cross mark are arranged along the first direction, and the fortieth character mark and the first cross mark are arranged along the second direction.

Optionally, the first adjustment mechanism comprises: the first adjusting bolt and the first mounting seat are fixed relative to the first base plate; one end of the first adjusting bolt is connected with the first mounting seat through a first nut, and the other end of the first adjusting bolt is connected with the gantry through threads.

Optionally, the first mounting seat includes a first connecting portion and a second connecting portion, the second connecting portion is connected to the first substrate through the first connecting portion, the gantry is matched with the first connecting portion and the second connecting portion to form a U-shaped groove structure, and the second connecting portion is provided with a first mounting hole for mounting the first adjusting bolt.

Optionally, a second base plate is slidably mounted on the second guide rail, and the gantry is connected to the second base plate through a second adjusting mechanism;

the second adjusting mechanism has an adjusting state and a locking state, and when the second adjusting mechanism is in the adjusting state, the gantry can move relative to the second base plate to adjust an angle between the extending direction of the gantry and the extending direction of the second guide rail; when the second adjusting mechanism is in the locking state, the gantry is relatively fixed with the second substrate through the second adjusting mechanism.

Optionally, the second adjustment mechanism comprises: the second adjusting bolt and the second mounting seat are fixed relative to the second base plate;

one end of the second adjusting bolt is connected with the second mounting seat through a second nut, and the other end of the second adjusting bolt is in threaded connection with the gantry.

Optionally, the second mounting seat includes a third connecting portion and a fourth connecting portion, the fourth connecting portion is connected to the second substrate through the third connecting portion, the gantry is matched with the third connecting portion and the fourth connecting portion to form a U-shaped groove structure, and a second mounting hole for mounting the second adjusting bolt is formed in the fourth connecting portion.

Optionally, a recessed portion is disposed on one side of the base platform facing the bearing platform, and the driving mechanism includes a rotating motor located in the recessed portion.

Optionally, the driving mechanism further includes a connecting plate in transmission connection with the rotating electrical machine, and the connecting plate is in transmission connection with the bearing platform.

In a second aspect, the present invention further provides a detection apparatus, comprising a first detection device, a second detection device and an orthogonality adjustment device as described in any one of the above;

the first detection device is slidably mounted on the third guide rail through a calibration camera;

the second detection device is slidably mounted on the third guide rail.

Drawings

Fig. 1 is a three-dimensional perspective view of an orthogonal adjustment apparatus according to an embodiment of the present invention;

fig. 2 is a schematic diagram of a vertical mark in an orthogonal adjustment apparatus according to an embodiment of the present invention;

fig. 3 is a top view of an orthogonal adjustment apparatus according to an embodiment of the present invention;

FIG. 4 is an enlarged view taken at A in FIG. 3;

fig. 5 is a front view of an orthogonal adjustment apparatus according to an embodiment of the present invention;

FIG. 6 is an enlarged view of FIG. 5 at B;

fig. 7 is a left side view of an orthogonal adjustment apparatus according to an embodiment of the present invention;

FIG. 8 is an enlarged view at C of FIG. 7;

FIG. 9 is an adjustment schematic of a first adjustment step;

FIG. 10 is a schematic diagram of the adjustment of the second adjustment step;

fig. 11 is a three-dimensional perspective view of a detection apparatus provided by an embodiment of the present invention.

Icon: 1-base station; 10-a recess; 11-a first guide rail; 12-a second guide rail; 2-gantry; 21-a third guide rail; 3-a load-bearing platform; 31-an alignment face; 32-vertical marking; 321-first cross mark; 322-second cross mark; 323-thirty-first word mark; 324-forty-th word mark; 4-a drive mechanism; 41-a rotating electrical machine; 42-a connecting plate; 5-calibrating the camera; 61-a first substrate; 62-a second substrate; 71-a first adjustment mechanism; 711-first adjusting bolt; 712-a first mount; 713-a first nut; 7121-a first connection; 7122-a second connecting portion; 72-a second adjustment mechanism; 721-a second adjusting bolt; 722-a second mount; 723-a second nut; 7221-a third connection; 7222-a fourth connection; 8-a first detection device; 9-second detection means.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In a first aspect, as shown in fig. 1 to 8, an embodiment of the present invention provides an orthogonal adjustment apparatus, including: the device comprises a base platform 1, a gantry 2, a bearing platform 3, a driving mechanism 4 and a calibration camera 5; a first guide rail 11 and a second guide rail 12 which are arranged in parallel (along an X axis) are arranged on the base platform 1; a first base plate 61 is slidably mounted on the first guide rail 11, one end of the gantry 2 is connected with the first base plate 61 through a first adjusting mechanism 71, and the other end of the gantry 2 is matched with the second guide rail 12, so that the angle between the extension direction (along the Y axis) of the gantry 2 and the extension direction of the first guide rail 11 is adjustable; the first adjusting mechanism 71 has an adjusting state and a locking state, when the first adjusting mechanism 71 is in the adjusting state, the gantry 2 can move relative to the first base plate 61 to adjust the angle between the extending direction of the gantry 2 and the extending direction of the first guide rail 11; when the first adjusting mechanism 71 is in a locked state, the gantry 2 is relatively fixed with the first substrate 61 through the first adjusting mechanism 71; the gantry 2 is provided with a third guide rail 21 extending along the length direction of the gantry 2; the bearing platform 3 is installed on the base platform 1 and located between the first guide rail 11 and the second guide rail 12, and one side, away from the base platform 1, of the bearing platform 3 is provided with an alignment surface 31, and the alignment surface 31 is provided with a vertical mark 32; the vertical marks 32 are used for marking a first direction (such as the X direction in FIG. 2) and a second direction (such as the Y direction in FIG. 2) which are perpendicular to each other; the calibration camera 5 is slidably mounted on the third guide rail 21, and the acquisition direction of the calibration camera 5 faces the alignment surface 31; the driving mechanism 4 is in transmission connection with the bearing platform 3 and is used for driving the bearing platform 3 to move relative to the base platform 1; the calibration camera 5, the vertical marker 32 and the drive mechanism 4 cooperate to have a first direction parallel to the extension direction of the first rail 11; the calibration camera 5, the vertical marking 32 and the first adjustment mechanism 71 cooperate to make the extension direction of the third rail 21 parallel to the second direction.

The orthogonal adjusting device uses marble as a base station 1, a first guide rail 11, a second guide rail 12 (the first guide rail 11 and the second guide rail 12 can be called as X-axis guide rails together) and a bearing platform 3 are arranged on the base station 1, and a vertical mark 32 is arranged on an alignment surface 31 of the bearing platform 3; one end of the gantry 2 is arranged on the first base plate 61 through a first adjusting mechanism 71, the first base plate 61 is connected with the first guide rail 11 in a sliding mode, the other end of the gantry 2 is matched with the second guide rail 12, and the matching comprises the fact that the other end of the gantry 2 can slide along the second guide rail 12; the calibration camera 5 is slidably mounted on the third guide rail 21 of the gantry 2, the calibration camera 5 can acquire the vertical mark 32 on the alignment surface 31 and provide an adjustment scheme, so that the bearing platform 3 is driven by the driving mechanism 4 to act to enable the first direction to be parallel to the extending direction of the first guide rail 11 or the second guide rail 12, calibration of the first direction is achieved by taking the first guide rail 11 or the second guide rail 12 as a reference, an angle between the extending direction of the gantry 2 and the second direction is adjusted by the first adjusting mechanism 71, and the extending direction of the third guide rail 21 is parallel to the second direction, so that calibration of the third guide rail 21 is achieved; moreover, since the first direction is perpendicular to the second direction, it is ensured that the third guide rail 21 is perpendicular to both the first guide rail 11 and the second guide rail 12.

Therefore, the utility model discloses a mark camera 5 and shoot perpendicular sign 32 on the load-bearing platform 3, can realize the perpendicular regulation of base plate check out test set longmen 2, can be with the diaxon (being first guide rail 11 and third guide rail 21) straightness adjustment to the angular deviation precision of micron order of base plate check out test set to solved two detection device and can't carried out the technical problem who receives the detection of discharging at glass substrate's same circuit both ends all the time.

Optionally, the calibration camera 5 is a CCD (charge coupled device) camera. The CCD camera is mounted on a third base plate by a camera attachment plate 42, which is in sliding engagement with the third guide rail 21.

In a possible implementation manner, the third substrate is moved to the position of the vertical mark 32 along the X-axis guide rail and the third guide rail 21 (which may be called as a Y-axis guide rail) so that the center cross line of the field of view of the CCD camera is aligned with the center of the vertical mark 32 on the carrying platform 3, then the gantry 2 is moved along the X-axis guide rail, the CCD camera determines the deflection angle between the moving track of the center cross line of the field of view of the CCD camera and the first direction (i.e., the X direction) marked by the vertical mark 32 on the carrying platform 3 in the moving process, and the driving mechanism 4 drives the carrying platform 3 to act to compensate the deflection angle so that the X direction of the carrying platform 3 is parallel to the X-axis (i.e., the X-axis guide rail) of the device; after the deflection angle is compensated, the third substrate is moved to the position of the vertical mark 32 along the X, Y-axis guide rail, so that the center cross line of the CCD camera view is aligned with the center of the vertical mark 32 on the bearing platform 3, then the third substrate is moved along the Y-axis guide rail, the deflection angle between the moving track of the center cross line of the CCD camera view and the second direction marked by the vertical mark 32 on the bearing platform 3, namely the Y direction, is judged in the moving process, the position of the gantry 2 in the X direction is adjusted through the first adjusting mechanism 71, so that the Y-axis guide rail is parallel to the Y direction of the bearing platform 3, and the orthogonal vertical adjustment of the gantry 2 can be completed, so that the X, Y axes of the equipment are orthogonal and vertical to each other, and the precision of the orthogonal vertical adjustment can reach the micron level.

It should be noted that the main function of the vertical mark 32 is to mark a first direction and a second direction perpendicular to each other, and thus any structure capable of achieving the above functions can be referred to as the vertical mark 32 in this embodiment, for example: a rectangular frame, at least three anchor points (the connecting lines can form a right angle), a cross line or at least three cross marks (the connecting lines can form a right angle).

In a first mode, the vertical marks 32 include a first cross mark 321, a second cross mark 322, and a third cross mark 323, the first cross mark 321 and the second cross mark 322 are arranged along a first direction, and the second cross mark 322 and the third cross mark 323 are arranged along a second direction.

In this embodiment, in the first adjustment step, the third substrate is moved along the X, Y axis guide rail to the position of the first cross mark 321, so that the center cross line of the CCD camera view is aligned with the center of the first cross mark 321 on the carrying platform 3, then the gantry 2 is moved to the position of the second cross mark 322 along the X-axis guide rail, so that the cross line of the center of the vision field of the CCD camera is aligned with the center of the second cross mark 322 on the bearing platform 3 in the X-axis direction, the third substrate is moved along the Y-axis guide rail, the moving distance is a, so that the camera view center cross line is aligned with the center of the second cross mark 322 on the carrying platform 3 in the Y-axis direction, b is the distance between the first cross mark 321 and the second cross mark 322, then θ is arctan (a/b), the driving mechanism 4 drives the bearing platform 3 to act and compensate the theta angle, so that the X direction of the bearing platform 3 is parallel to the X axis of the equipment; and a second adjusting step, after the theta angle is compensated, aligning the center cross line of the camera view with the center of a second cross mark 322 on the bearing platform 3, then moving the third substrate along the Y-axis guide rail to align the center cross line of the CCD camera view with the center of a third cross mark 323 on the bearing platform 3 in the Y-axis direction, adjusting the position of the gantry 2 in the X-axis direction through the first adjusting mechanism 71 to align the center cross line of the CCD camera view with the center of the third cross mark 323 on the bearing platform 3 in the X-axis direction, and then locking the gantry 2 and the first substrate 61, so that orthogonal vertical adjustment of the gantry 2 can be completed, the X, Y axes of the equipment are orthogonal, and the precision of the orthogonal vertical adjustment can reach micron level.

In the second mode, on the basis of the first mode, the vertical mark 32 further includes a fortieth mark 324, the fortieth mark 324 and the thirty-first mark 323 are arranged along the first direction, and the fortieth mark 324 and the first cross mark 321 are arranged along the second direction.

In this embodiment, as shown in fig. 9 and 10, in the first adjustment step, the third substrate is moved along the X, Y axis guide rail to the position of the first cross mark 321, so that the center cross line of the CCD camera view is aligned with the center of the first cross mark 321 on the carrying platform 3, then the gantry 2 is moved to the position of the second cross mark 322 along the X-axis guide rail, so that the cross line of the center of the vision field of the CCD camera is aligned with the center of the second cross mark 322 on the bearing platform 3 in the X-axis direction, the third substrate is moved along the Y-axis guide rail, the moving distance is a, so that the camera view center cross line is aligned with the center of the second cross mark 322 on the carrying platform 3 in the Y-axis direction, b is the distance between the first cross mark 321 and the second cross mark 322, then θ is arctan (a/b), the driving mechanism 4 drives the bearing platform 3 to act and compensate the theta angle, so that the X direction of the bearing platform 3 is parallel to the X axis of the equipment; and a second adjusting step, after the theta angle is compensated, moving the third substrate to the position of the first cross mark 321 along the X, Y-axis guide rail so that the center cross line of the CCD camera view is aligned with the center of the first cross mark 321 on the bearing platform 3, then moving the third substrate along the Y-axis guide rail so that the center cross line of the CCD camera view is aligned with the center of the forty-shaped mark 324 on the bearing platform 3 in the Y-axis direction, adjusting the position of the gantry 2 in the X-axis direction through the first adjusting mechanism 71 so that the center cross line of the CCD camera view is aligned with the center of the forty-shaped mark 324 on the bearing platform 3 in the X-axis direction, and locking the gantry 2 and the first substrate 61, thereby completing the orthogonal vertical adjustment of the gantry 2, enabling the X, Y axes of the equipment to be orthogonal and vertical to each other, and enabling the precision to reach micron level.

In the second adjustment step, when the position of the gantry 2 in the X-axis direction is adjusted, only one end of the gantry 2 near the first guide rail 11 may be adjusted, or both ends of the gantry 2 may be adjusted at the same time. The specific manner for matching the gantry 2 with the first guide rail 11 and the second guide rail 12 is as follows:

in the first mode, one end of the gantry 2 is connected with the first substrate 61 through the first adjusting mechanism 71, and the other end is directly fixed relative to the second substrate 62, wherein the first substrate 61 is in sliding fit with the first guide rail 11, and the second substrate 62 is in sliding fit with the second guide rail 12; specifically, the first substrate 61 is slidably connected to the first guide rail 11 through a sliding groove structure formed by combining two sliding blocks and a cushion block; the second base plate 62 is slidably connected to the second guide rail 12 through a sliding groove structure formed by combining two sliding blocks and a cushion block.

In a second mode, one end of the gantry 2 is connected with the first substrate 61 through a first adjusting mechanism 71, and the other end is connected with the second substrate 62 through a second adjusting mechanism 72, wherein the first substrate 61 is in sliding fit with the first guide rail 11, and the second substrate 62 is in sliding fit with the second guide rail 12; specifically, the first substrate 61 is slidably connected to the first guide rail 11 through a sliding groove structure formed by combining two sliding blocks and a cushion block; the second base plate 62 is slidably connected to the second guide rail 12 through a sliding groove structure formed by combining two sliding blocks and a cushion block. It should be noted that the second adjusting mechanism 72 has an adjusting state and a locking state, and when the second adjusting mechanism 72 is in the adjusting state, the gantry 2 can move relative to the second base plate 62 to adjust the angle between the extending direction of the gantry 2 and the extending direction of the second guide rail 12; when the second adjusting mechanism 72 is in a locked state, the gantry 2 is fixed relative to the second base plate 62 by the second adjusting mechanism 72. Specifically, the specific structure of the second adjustment mechanism 72 may be the same as the first adjustment mechanism 71, or may be different from the first adjustment mechanism 71.

In one possible implementation, referring to fig. 3-6, the specific structure of the second adjustment mechanism 72 may be the same as the first adjustment mechanism 71.

Referring to fig. 4, the first adjustment mechanism 71 includes: a first adjusting bolt 711 and a first mounting seat 712, wherein the first mounting seat 712 is fixed relative to the first substrate 61; one end of the first adjusting bolt 711 is connected to the first mounting base 712 via a first nut 713, and the other end is threadedly connected to the gantry 2. The first adjustment mechanism 71 further includes screws for locking the gantry 2 and the first base plate 61. Optionally, the first mounting seat 712 includes a first connecting portion 7121 and a second connecting portion 7122, the second connecting portion 7122 is connected to the first substrate 61 through the first connecting portion 7121, the gantry 2 cooperates with the first connecting portion 7121 and the second connecting portion 7122 to form a U-shaped groove structure, and a first mounting hole for mounting the first adjusting bolt 711 is disposed on the second connecting portion 7122. The second adjustment mechanism 72 includes: a second adjusting bolt 721 and a second mounting seat 722, wherein the second mounting seat 722 is fixed relative to the second substrate 62; one end of the second adjusting bolt 721 is connected to the second mounting base 722 through the second nut 723, and the other end is in threaded connection with the gantry 2. The second adjusting mechanism 72 further includes screws for locking the gantry 2 and the second base plate 62. Optionally, the second mounting seat 722 includes a third connecting portion 7221 and a fourth connecting portion 7222, the fourth connecting portion 7222 is connected to the second base plate 62 through the third connecting portion 7221, the gantry 2 cooperates with the third connecting portion 7221 and the fourth connecting portion 7222 to form a U-shaped groove structure, and a second mounting hole for mounting the second adjusting bolt 721 is formed in the fourth connecting portion 7222.

Specifically, the first mounting hole (or the second mounting hole) may be a slot hole, an opening direction of the slot hole is away from the bearing platform 3, and referring to fig. 4 and 6, the first nut 713 (or the second nut 723) presses the first adjusting bolt 711 (or the second adjusting bolt 721) into the slot hole through a bolt head of the first adjusting bolt 711 (or the second adjusting bolt 721).

In the second adjusting step, when the gantry 2 is adjusted in the X-axis direction, the connecting screw between the gantry 2 and the first substrate 61 is loosened, the position of the gantry 2 in the X-axis direction is adjusted by the first adjusting bolt 711 and/or the second adjusting bolt 721, and the screw is tightened after the adjustment.

Optionally, the base 1 is provided with a recess 10 on a side facing the carrying platform 3, and the driving mechanism 4 includes a rotating motor 41, and the rotating motor 41 is located in the recess 10.

In the first adjustment step, the angle θ is compensated by the rotating motor 41 so that the X axis of the device is parallel to the direction of the carrying platform 3X.

Optionally, the driving mechanism 4 further includes a connecting plate 42 in transmission connection with the rotating motor 41, and the connecting plate 42 is in transmission connection with the carrying platform 3. Referring to fig. 7 and 8, the carrying platform 3 is connected to the rotating motor 41 through a connecting plate 42, and the carrying platform 3 can rotate synchronously with the rotating motor 41.

In the embodiment, four high-precision cross marks which are orthogonal and vertical to each other are engraved on the bearing platform 3 to serve as reference objects for adjustment, and the rotating motor 41 is matched with an adjusting bolt to achieve orthogonal and vertical adjustment of the axis of the device X, Y.

In a second aspect, as shown in fig. 11, an embodiment of the present invention further provides a detection apparatus, including a first detection device 8 and a second detection device 9, and an orthogonality adjustment device as any one of the above; the first detection device 8 is slidably mounted on the third guide rail 21 through the calibration camera 5; the second detection device 9 is slidably mounted on the third rail 21.

An X-axis guide rail and a rotating motor 41 are arranged on a marble base 1, a bearing platform 3 is connected with the rotating motor 41 through a connecting plate 42, the bearing platform 3 can synchronously rotate along with the rotating motor 41, 1X-axis cushion block is arranged on each 2X-axis slide blocks, 1X-axis base plate (comprising a first base plate 61 and a second base plate 62) is arranged on each 2X-axis cushion blocks, a gantry 2 is connected on the X-axis base plate through screws, a Y-axis guide rail is arranged on the gantry 2, 1Y-axis cushion plate is arranged on each 2Y-axis slide blocks, a third base plate and a fourth base plate are respectively arranged on the Y-axis cushion plates, a first detection device 8 and a CCD camera are arranged on the third base plate, the CCD camera is arranged on the third base plate through a camera connecting plate 42, a second detection device 9 is arranged on the fourth base plate, a first mounting seat 712 is arranged on the first base plate 61, a second mounting seat 722 is arranged on the second base plate 62, the first adjustment bolt 711 is installed on the first installation base 712, and the second adjustment bolt 721 is installed on the second installation base 722 and connected to the gantry 2. The gantry 2 can slide along an X-axis guide rail, and the detection device on the gantry 2 can move along a Y-axis guide rail.

The cross mark on bearing platform 3 is shot through the CCD camera to this embodiment, can realize the orthogonal vertical adjustment of base plate check out test set longmen 2, can adjust the X, Y axle straightness that hangs down of base plate check out test set to the angular deviation precision of micron order to it is the technical problem who has solved first detection device 8 and second detection device 9 and can't receive the discharge detection at the same circuit both ends of glass substrate all the time.

It will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments of the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (10)

1. A quadrature adjustment arrangement, comprising: the system comprises a base station, a gantry, a bearing platform, a driving mechanism and a calibration camera;

the base station is provided with a first guide rail and a second guide rail which are arranged in parallel; a first base plate is arranged on the first guide rail in a sliding mode, one end of the gantry is connected with the first base plate through a first adjusting mechanism, and the other end of the gantry is matched with the second guide rail, so that the angle between the extending direction of the gantry and the extending direction of the first guide rail can be adjusted; the first adjusting mechanism has an adjusting state and a locking state, and when the first adjusting mechanism is in the adjusting state, the gantry can move relative to the first base plate to adjust an angle between the extending direction of the gantry and the extending direction of the first guide rail; when the first adjusting mechanism is in the locking state, the gantry is relatively fixed with the first substrate through the first adjusting mechanism;

the gantry is provided with a third guide rail extending along the length direction of the gantry;

the bearing platform is arranged on the base platform and is positioned between the first guide rail and the second guide rail, an alignment surface is arranged on one side, away from the base platform, of the bearing platform, and a vertical mark is arranged on the alignment surface; the vertical mark is used for calibrating a first direction and a second direction which are vertical to each other;

the calibration camera is slidably mounted on the third guide rail, and the acquisition direction of the calibration camera faces the alignment surface;

the driving mechanism is in transmission connection with the bearing platform and is used for driving the bearing platform to move relative to the base platform;

the calibration camera, the vertical mark and the driving mechanism are matched to enable the first direction to be parallel to the extending direction of the first guide rail;

the calibration camera, the vertical mark and the first adjusting mechanism are matched to enable the extending direction of the third guide rail to be parallel to the second direction.

2. The quadrature adjustment apparatus of claim 1 wherein said vertical markings comprise a first cross marking, a second cross marking and a third cross marking, said first cross marking and said second cross marking being aligned along said first direction, said second cross marking and said third cross marking being aligned along said second direction.

3. The quadrature adjustment apparatus of claim 2 wherein said vertical marker further comprises a fortieth indicia, said fortieth indicia and said thirty-third indicia being aligned in said first direction, said fortieth indicia and said first cross indicia being aligned in said second direction.

4. The quadrature adjustment device of claim 1 wherein said first adjustment mechanism comprises: the first adjusting bolt and the first mounting seat are fixed relative to the first base plate; one end of the first adjusting bolt is connected with the first mounting seat through a first nut, and the other end of the first adjusting bolt is connected with the gantry through threads.

5. The orthogonal adjustment apparatus as claimed in claim 4, wherein the first mounting base comprises a first connection portion and a second connection portion, the second connection portion is connected to the first substrate through the first connection portion, the gantry is matched with the first connection portion and the second connection portion to form a U-shaped groove structure, and the second connection portion is provided with a first mounting hole for mounting the first adjustment bolt.

6. The quadrature adjustment device of claim 1 or 4 wherein a second base plate is slidably mounted on the second rail, and the gantry is connected to the second base plate via a second adjustment mechanism;

the second adjusting mechanism has an adjusting state and a locking state, and when the second adjusting mechanism is in the adjusting state, the gantry can move relative to the second base plate to adjust an angle between the extending direction of the gantry and the extending direction of the second guide rail; when the second adjusting mechanism is in the locking state, the gantry is relatively fixed with the second substrate through the second adjusting mechanism.

7. The quadrature adjustment device of claim 6 wherein said second adjustment mechanism comprises: the second adjusting bolt and the second mounting seat are fixed relative to the second base plate;

one end of the second adjusting bolt is connected with the second mounting seat through a second nut, and the other end of the second adjusting bolt is in threaded connection with the gantry.

8. The orthogonal adjustment apparatus as claimed in claim 7, wherein the second mounting base comprises a third connection portion and a fourth connection portion, the fourth connection portion is connected to the second base plate through the third connection portion, the gantry, the third connection portion and the fourth connection portion cooperate to form a U-shaped groove structure, and a second mounting hole for mounting the second adjustment bolt is formed in the fourth connection portion.

9. The quadrature adjustment apparatus of claim 1 wherein said base is provided with a recess on a side thereof facing said load-bearing platform, and said drive mechanism comprises a rotary motor, said rotary motor being located in said recess.

10. A detection apparatus comprising first and second detection means and a quadrature adjustment means as claimed in any one of claims 1 to 9;

the first detection device is slidably mounted on the third guide rail through a calibration camera;

the second detection device is slidably mounted on the third guide rail.

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