CN214748506U - Temperature measuring device for ultrahigh vacuum heating furnace - Google Patents
Temperature measuring device for ultrahigh vacuum heating furnace Download PDFInfo
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- CN214748506U CN214748506U CN202121152005.8U CN202121152005U CN214748506U CN 214748506 U CN214748506 U CN 214748506U CN 202121152005 U CN202121152005 U CN 202121152005U CN 214748506 U CN214748506 U CN 214748506U
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Abstract
The utility model discloses a temperature measuring device for an ultrahigh vacuum heating furnace, which comprises a lifting mechanism, a temperature measuring mechanism and a signal acquisition mechanism, wherein the lifting mechanism can perform lifting motion in the vertical direction, and the temperature measuring mechanism is connected with the lifting mechanism and moves in the vertical direction based on the lifting motion of the lifting mechanism; the temperature measuring mechanism is communicated with the inner vacuum, and a temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and used for detecting the temperature in the inner crucible; the temperature measurement component is also connected with the signal acquisition mechanism, and the signal acquisition mechanism is used for acquiring and displaying the signals acquired by the temperature measurement component. The temperature data obtained by the temperature measuring device of the utility model can truly reflect the temperature inside the inner crucible; by measuring the temperature data at different heights in the inner crucible, the temperature field distribution in the inner crucible can be obtained, and the actual temperature distribution in the vertical direction in the inner crucible is reflected.
Description
Technical Field
The utility model relates to a temperature monitoring technology field of super high vacuum heating furnace especially relates to a temperature measuring device for super high vacuum heating furnace.
Background
The ultra-high vacuum heating furnace is used together with a mass spectrometer and can be used for measuring rare gas in a sample. Fig. 1 shows a schematic structural view of a conventional ultra-high vacuum heating furnace. As shown in figure 1, the heating element of the ultra-high vacuum heating furnace is a resistance load 2 wrapped around a tantalum crucible 1, the resistance load 2 is made of graphite, the resistance load 2 is powered by a low-voltage large-current transformer to be heated, and the temperature can be raised from room temperature to 1800 ℃. The tantalum crucible 1 is also referred to as an outer crucible. A vacuum structure, called external vacuum, is formed between the outer wall of the outer crucible and the graphite resistive load 2. A cylindrical crucible made of tantalum-molybdenum material, with the diameter of 17mm, the wall thickness of 1mm and the bottom sealed, is placed in the outer crucible. The cylindrical crucible inside the outer crucible is also referred to as the inner crucible. A vacuum structure is formed between the outer wall of the inner crucible and the outer crucible, and the vacuum structure is called as inner vacuum. The inner vacuum and the outer vacuum are isolated by a metal gasket on the flange plate, and the inner vacuum is ultrahigh vacuum, specifically 10-7-10-9Torr; the external vacuum is high vacuum, specifically 10-6-10-7And (5) Torr. This ultra-high vacuum heating furnace structure is called a double vacuum structure.
In the experiment, the sample placed in the glass tree structure 3 above the ultrahigh vacuum heating furnace was charged into the inner crucible in the heating furnace immediately below. The graphite resistance load 2 outside the outer crucible is controlled by the outside to appoint output power or target temperature to realize temperature rise, and the outside heat is transferred to the sample in the inner crucible through heat radiation in vacuum. During the experiment, the temperature inside the inner crucible was monitored by measuring the temperature at the bottom of the tantalum crucible 1 in the prior art. Along with the rise of the temperature, gas in the sample is separated out and enters a purification system and a magnetic mass spectrometer, and then the measurement work of the rare gas is completed.
The applicant finds that the temperature measuring device for the ultra-high vacuum heating furnace in the prior art has at least the following defects: (1) in the prior art, a temperature measuring device for an ultrahigh vacuum heating furnace is a first thermocouple 4 arranged outside the ultrahigh vacuum furnace, and the real-time temperature of the bottom of a tantalum crucible 1 is reflected by the fact that the first thermocouple 4 is infinitely close to the bottom of the tantalum crucible 1 (the first thermocouple 4 cannot be in direct contact with the bottom of the tantalum crucible and can be influenced by direct contact with the bottom of the tantalum crucible, so that the temperature measured by the first thermocouple 4 is actually the temperature of the bottom of the tantalum crucible 1, is different from the actual temperature inside the inner crucible, and cannot really reflect the temperature inside the inner crucible; (2) during the experiment, a plurality of samples are placed in the glass tree-shaped structure 3, but only one sample can be put into the inner crucible during each measurement, so that the plurality of samples are not all positioned at the bottom of the inner crucible, the later-put samples are distributed at higher positions in the inner crucible, and the first thermocouple 4 in the prior art is fixed and cannot move, the measured temperature is always the temperature at the bottom of the tantalum crucible 1, and the actual temperature distribution in the vertical direction in the inner crucible cannot be truly reflected; (3) the first thermocouple 4 is a tungsten-rhenium thermocouple, but the temperature linearity of the thermocouple is poor and the accuracy is low under the condition that the temperature is lower than 600 ℃.
Therefore, it is an urgent technical problem to be solved by those skilled in the art to improve a temperature measuring device in the prior art and provide a temperature measuring device capable of truly reflecting the temperature distribution in the vertical direction inside the inner crucible.
SUMMERY OF THE UTILITY MODEL
The utility model discloses an one of them purpose is to provide a temperature measuring device for super high vacuum heating furnace, has solved the temperature that thermocouple measured in the prior art and the inside actual temperature of interior crucible have difference and the temperature that thermocouple measured in the prior art can not really reflect the inside vertical direction's of interior crucible actual temperature distribution's of technical problem. The technical effects that the preferred technical scheme of the utility model can produce are explained in detail in the following.
In order to achieve the above purpose, the utility model provides a following technical scheme:
the utility model discloses a temperature measuring device for ultra-high vacuum heating furnace, including elevating system, temperature measurement mechanism and signal acquisition mechanism, wherein, elevating system can go on the elevating movement in the vertical direction, temperature measurement mechanism with elevating system is connected and based on the elevating movement of elevating system moves in the vertical direction; the temperature measuring mechanism is communicated with the inner vacuum, and a temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and used for detecting the temperature in the inner crucible; the temperature measurement component is also connected with the signal acquisition mechanism, and the signal acquisition mechanism is used for acquiring and displaying the signals acquired by the temperature measurement component.
According to a preferred embodiment, the lifting mechanism comprises a driving device, a coupler, an adjusting screw rod and a guide rod, wherein the adjusting screw rod and the guide rod are arranged on a first mounting plate and a second mounting plate which are parallel to each other, the adjusting screw rod and the guide rod are arranged in parallel to each other, and the adjusting screw rod and the guide rod are fixed on the top of the ultrahigh vacuum heating furnace; the first mounting plate and the second mounting plate are fixedly connected with the temperature measuring device, the adjusting screw is further connected with the driving device through the coupler, and the driving device is used for driving the adjusting screw to move in the vertical direction and driving the temperature measuring mechanism to move in the vertical direction.
According to a preferred embodiment, the range of movement of the lifting mechanism in the vertical direction is 0-50 mm.
According to a preferred embodiment, the temperature measuring mechanism comprises a metal corrugated pipe, a compression nut, a fluororubber sealing element and a second thermocouple, wherein two ends of the metal corrugated pipe are fixedly connected with a first mounting plate and a second mounting plate through flanges and are fixed on the top of the ultrahigh vacuum heating furnace; the metal corrugated pipe is communicated with the inner vacuum, and the second thermocouple is arranged in the compression nut and extends into the inner crucible through the metal corrugated pipe to be used for detecting the temperature in the inner crucible; one side of the compression nut, which is close to the metal corrugated pipe, is provided with a fluorine rubber sealing element, and a vacuum environment is kept in the metal corrugated pipe.
According to a preferred embodiment, the inside of the metal bellows is 10-7～10-9Vacuum environment of Torr.
According to a preferred embodiment, the second thermocouple is a type K thermocouple when the temperature inside the inner crucible is less than 600 ℃; and when the temperature in the inner crucible is 600-1800 ℃, the second thermocouple is a tungsten-rhenium thermocouple.
According to a preferred embodiment, the temperature measuring mechanism further comprises a heat insulation assembly and a temperature reduction assembly, the heat insulation assembly and the temperature reduction assembly are respectively arranged below and above the metal corrugated pipe, the heat insulation assembly and the temperature reduction assembly are further communicated with the metal corrugated pipe and the inner vacuum, and the second thermocouple passes through the temperature reduction assembly, the metal corrugated pipe and the heat insulation assembly and extends into the inner crucible.
According to a preferred embodiment, the heat insulation assembly comprises a plurality of heat insulation sheets and a round tube, wherein the plurality of heat insulation sheets are spaced from each other and arranged in parallel, the heat insulation sheets are also perpendicular to the metal corrugated tube, the round tube is connected with the plurality of heat insulation sheets, and the round tube is communicated with the metal corrugated tube and the inner vacuum.
According to a preferred embodiment, the cooling assembly comprises a cooling water jacket, the cooling water jacket is a double-layer stainless steel water cooling structure, the cooling water jacket is communicated with the metal corrugated pipe and the inner vacuum, and a water inlet and a water outlet for cooling circulating water to enter and exit are formed in the cooling water jacket.
The utility model discloses a temperature measuring device for ultra-high vacuum heating furnace has following beneficial technological effect at least:
the utility model is used for the temperature measuring device of the ultra-high vacuum heating furnace, the temperature measuring component of the temperature measuring mechanism is arranged in the inner crucible and is used for detecting the temperature in the inner crucible, and the obtained temperature data can truly reflect the temperature in the inner crucible; on the other hand, the utility model discloses a temperature measuring device for ultra-high vacuum heating furnace still includes elevating system, elevating system can carry out elevating movement in vertical direction, temperature measuring mechanism is connected with elevating system and moves in vertical direction based on elevating system's elevating movement, through elevating system's effect promptly, can drive temperature measuring mechanism and move in vertical direction to the temperature data of different height departments in the crucible in record, thereby obtain the temperature field distribution in the crucible, reflect the inside ascending actual temperature distribution in the vertical direction of interior crucible.
Namely the utility model is used for temperature measuring device of super high vacuum heating furnace has solved the temperature that the thermocouple measured in prior art and the inside actual temperature of interior crucible have the difference and the temperature that the thermocouple measured in prior art can not really reflect the problem of the inside vertical direction's of interior crucible actual temperature distribution.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a preferred embodiment of a prior art ultra-high vacuum furnace;
FIG. 2 is a first schematic view of a preferred embodiment of the temperature measuring device of the present invention;
FIG. 3 is a second schematic view of a preferred embodiment of the temperature measuring device of the present invention;
FIG. 4 is a partial schematic view of a preferred embodiment of the temperature measuring device of the present invention;
fig. 5 is a schematic view of the connection of the metal bellows with the first mounting plate and the second mounting plate according to the present invention.
FIG. 6 is a schematic view of a preferred embodiment of the first mounting plate of the present invention;
FIG. 7 is a first schematic view of a preferred embodiment of the insulation assembly of the present invention;
figure 8 is a second schematic view of a preferred embodiment of the insulation assembly of the present invention.
In the figure: 1. a tantalum crucible; 2. a resistive load; 3. a glass tree structure; 4. a first thermocouple; 101. a drive device; 102. a coupling; 103. adjusting the screw rod; 104. a guide bar; 105. a first mounting plate; 106. a second mounting plate; 201. a metal bellows; 202. a compression nut; 203. a fluororubber seal; 204. a flange; 205. a heat insulating sheet; 206. a circular tube; 207. and a cooling water jacket.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The following describes in detail the temperature measuring device and the temperature measuring method for the ultra-high vacuum heating furnace of the present invention with reference to the accompanying drawings 2 to 8 and embodiments 1 and 2 of the specification.
Example 1
This embodiment is right the utility model is used for the temperature measuring device of ultrahigh vacuum heating furnace to carry out the detailed description.
The temperature measuring device for the ultrahigh vacuum heating furnace comprises a lifting mechanism, a temperature measuring mechanism and a signal acquisition mechanism, and is shown in fig. 2. Preferably, the lifting mechanism can perform lifting motion in the vertical direction, and the temperature measuring mechanism is connected with the lifting mechanism and moves in the vertical direction based on the lifting motion of the lifting mechanism; the temperature measuring mechanism is communicated with the inner vacuum, and a temperature measuring part of the temperature measuring mechanism is placed in the inner crucible and used for detecting the temperature in the inner crucible; the temperature measurement component is also connected with a signal acquisition mechanism, and the signal acquisition mechanism is used for acquiring and displaying signals acquired by the temperature measurement component. More preferably, the signal acquisition mechanism is a temperature controller or other devices, the temperature measurement mechanism is connected with the temperature controller, and the temperature can be controlled and adjusted and displayed by the temperature controller. The temperature controller may be a prior art device. The temperature control precision of the temperature controller is +/-3-5 ℃.
In the temperature measuring device for the ultrahigh vacuum heating furnace, the temperature measuring component of the temperature measuring mechanism is placed in the inner crucible and used for detecting the temperature in the inner crucible, and the obtained temperature data can truly reflect the temperature in the inner crucible; on the other hand, this embodiment is used for temperature measuring device of ultrahigh vacuum heating furnace still includes elevating system, elevating system can go on elevating movement in vertical direction, and temperature measuring mechanism is connected with elevating system and moves in vertical direction based on elevating system's elevating movement, promptly through elevating system's effect, can drive temperature measuring mechanism and move in vertical direction to measure the temperature data of different height departments in the interior crucible of interior crucible, thereby obtain the temperature field distribution in the interior crucible, reflect the inside actual temperature distribution in the vertical direction of interior crucible. That is, the temperature measuring device for the ultrahigh vacuum heating furnace of the embodiment solves the problems that the temperature measured by the thermocouple in the prior art is different from the actual temperature inside the inner crucible, and the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible.
According to a preferred embodiment, the lifting mechanism comprises a drive means 101, a coupling 102, an adjusting screw 103 and a guide rod 104, as shown in fig. 2 or 3. Preferably, the adjusting screw 103 and the guide rod 104 are mounted on a first mounting plate 105 and a second mounting plate 106 which are parallel to each other, the adjusting screw 103 and the guide rod 104 are arranged parallel to each other, and the adjusting screw 103 and the guide rod 104 are fixed on the top of the ultra-high vacuum heating furnace; the first mounting plate 105 and the second mounting plate 106 are fixedly connected with the temperature measuring device, the adjusting screw 103 is further connected with the driving device 101 through the coupler 102, and the driving device 101 is used for driving the adjusting screw 103 to move in the vertical direction and driving the temperature measuring mechanism to move in the vertical direction, as shown in fig. 2 or 3. The driving device 101 is, for example, a stepping motor, and the power supply is controlled to adjust the rise and fall of the stepping motor. The adjusting screw 103 may be of a prior art construction. According to the preferable technical scheme, the first mounting plate 105 and the second mounting plate 106 are fixedly connected with the temperature measuring device, and when the driving device 101 drives the adjusting screw 103 to move in the vertical direction, the temperature measuring mechanism can be driven to move in the vertical direction, so that the temperature measuring device can measure temperature data of different heights in the inner crucible. On the other hand, the lifting mechanism of the preferred technical scheme of this embodiment further includes a guide rod 104, and the guide rod 104 can provide a guiding function for the movement of the temperature measuring mechanism in the vertical direction, so that the temperature measuring mechanism, the coupler 102 and the adjusting screw 103 can realize synchronous movement.
Preferably, the moving range of the lifting mechanism in the vertical direction is 0-50 mm. According to the preferable technical scheme, the moving range of the lifting mechanism in the vertical direction is 0-50 mm, namely the moving range of the second thermocouple in the vertical direction is 0-50 mm. As the inner crucible is a cylindrical crucible with the diameter of 17mm, the wall thickness of 1mm and the height of 130mm, and the moving range of the lifting mechanism in the vertical direction is 0-50 mm, the temperature distribution of the whole inner crucible in the vertical direction can be measured in a step-by-step test mode. Specifically, during the first installation, the second thermocouple is close to the bottom of the inner crucible, and the temperature distribution of the inner crucible at the height position of 0-50 mm is measured; during second installation, after the position of the second thermocouple is moved up to the position 50mm of the height of the inner crucible, the temperature distribution of the position 50-100 mm of the height of the inner crucible is measured; and repeating the steps until the temperature measurement of the position of 0-130 mm is completed.
According to a preferred embodiment, the thermometric mechanism comprises a metal bellows 201, a compression nut 202, a fluoroelastomer seal 203, and a second thermocouple, as shown in FIGS. 2-5. Preferably, two ends of the metal corrugated pipe 201 are fixedly connected with the first mounting plate 105 and the second mounting plate 106 through flanges 204 and are fixed on the top of the ultrahigh vacuum heating furnace; the metal corrugated pipe 201 is communicated with the inner vacuum, and the second thermocouple is arranged in the compression nut 202 and extends into the inner crucible through the metal corrugated pipe 201 to be used for detecting the temperature in the inner crucible; one side of the compression nut 202 close to the metal bellows 201 is provided with a fluorine rubber sealing member 203 and keeps the inside of the metal bellows 201 in a vacuum environment, as shown in fig. 2 to 5. More preferably, the inside of the metal bellows 201 is 10-7～10-9Vacuum environment of Torr. The metal bellows 201 may be a structure of the related art. The end parts of the first mounting plate 105 and the second mounting plate 106 of the preferred technical scheme of the embodiment are arc-shaped structures matched with the flange 204, and the first mounting plate and the second mounting plate are fixed by the flange 204The two ends of the metal bellows 201 can be fixedly connected with the first mounting plate 105 and the second mounting plate 106 respectively. A schematic view of the first mounting plate 105 and the second mounting plate 106 is shown in fig. 6. The metal bellows 201 of the preferred technical scheme of this embodiment is communicated with the inner vacuum, so that the second thermocouple can conveniently extend into the inner crucible through the metal bellows 201 to be used for detecting the temperature in the inner crucible, and data capable of truly reflecting the inner temperature of the inner crucible can be obtained. After the second thermocouple is inserted into the metal corrugated pipe 201, in the preferred embodiment, the upper end of the metal corrugated pipe 201 can be kept sealed by the action of the compression nut 202 and the fluororubber sealing piece 203, and the lower end of the metal corrugated pipe 201 is fixedly connected with the furnace body through the flange 204, so that the sealing performance of the metal corrugated pipe 201 can be kept, and the interior of the metal corrugated pipe is kept in a stable vacuum environment.
Preferably, the second thermocouple is a type K thermocouple when the temperature inside the inner crucible is less than 600 ℃; the second thermocouple is a tungsten-rhenium thermocouple when the temperature inside the inner crucible is 600-1800 ℃. Based on the temperature inside the inner crucible, the second thermocouple of the preferred technical scheme of the embodiment selects different types, and the thermocouples of different types are matched for use, so that an accurate temperature curve from room temperature to 1800 ℃ can be established, and the technical problems that in the prior art, the first thermocouple 4 adopts a tungsten-rhenium thermocouple, but the temperature linearity of the thermocouple is poor and the accuracy is low under the condition that the temperature is lower than 600 ℃ are solved. Specifically, when the temperature in the inner crucible is lower than 600 ℃, the second thermocouple is a K-type thermocouple, and a temperature curve of the inner crucible at room temperature to 600 ℃ is obtained; and when the temperature in the inner crucible rises to be higher than 600 ℃, taking out the second thermocouple and replacing the second thermocouple with a tungsten-rhenium thermocouple to obtain a temperature curve of the inner crucible at 600-1800 ℃.
Preferably, the temperature measuring mechanism further includes a heat insulation assembly and a temperature reduction assembly, the heat insulation assembly and the temperature reduction assembly are respectively disposed below and above the metal corrugated pipe 201, the heat insulation assembly and the temperature reduction assembly are further communicated with the metal corrugated pipe 201 and the inner vacuum, and the second thermocouple extends into the inner crucible through the temperature reduction assembly, the metal corrugated pipe 201 and the heat insulation assembly, as shown in fig. 2 or fig. 3. The ultrahigh vacuum heating furnace mainly transfers heat in a heat radiation mode at a high temperature stage, the temperature measuring mechanism of the preferred technical scheme of the embodiment is provided with the heat insulation component below the metal corrugated pipe 201, and the temperature measuring mechanism is separated from the ultrahigh vacuum heating furnace through the heat insulation component, so that the influence of high-temperature heat radiation in the furnace on the performance of the temperature measuring mechanism (such as a part sealed by fluororubber in the temperature measuring mechanism) can be blocked. The temperature measurement mechanism of the preferred technical scheme of this embodiment sets up the cooling subassembly in corrugated metal pipe 201 top, and through the effect of cooling subassembly, can reduce the influence that high temperature heat radiation in the stove caused to fluororubber sealing member 203, avoid fluororubber sealing member 203 sealing performance when the high temperature reduces and arouse the not tight condition of interior vacuum seal. More preferably, the temperature reduction assembly of the preferred technical scheme of the embodiment is activated under the condition of high temperature, for example, the temperature inside the inner crucible is activated when the temperature is higher than 600 ℃.
More preferably, the insulation assembly includes insulation sheets 205 and a tube 206, as shown in FIG. 7. The number of the heat insulation sheets 205 is plural, the plurality of heat insulation sheets 205 are spaced and arranged in parallel with each other, the heat insulation sheets 205 are also perpendicular to the metal bellows 201, the round tube 206 is connected to the plurality of heat insulation sheets 205, and the round tube 206 is communicated with the metal bellows 201 and the inner vacuum. The plurality of heat insulating sheets 205 and the round tube 206 are connected by welding. The heat insulation assembly of the preferred technical scheme of this embodiment includes heat insulating sheet 205 and pipe 206, through heat insulating sheet 205's effect, can play the effect of isolated high temperature thermal radiation, through pipe 206's effect, not only can connect a plurality of heat insulating sheets 205, still can be convenient for insert the second thermocouple, reduces the influence of the thermal radiation in the interior crucible to the second thermocouple. In the preferred technical scheme of this embodiment, the number of the heat insulation sheets 205 is multiple, for example, 5, and the plurality of heat insulation sheets 205 are spaced and arranged in parallel, so that the heat insulation effect can be enhanced; the number of tubes 206 may be one or more, for example 3; the height of the round tube 206 is 20-30 mm, the inner diameter is 3-5 mm, and the material is 304 stainless steel.
As shown in fig. 7 or 8, the insulation assembly includes 5 insulation sheets 205 and 3 round tubes 206. Preferably, the thermal shield 205 is in close proximity to the inner wall of the inner crucible. The diameter of the middle round tube 206 is 3mm, the wall thickness is 0.5mm, the height is 21mm, and the round tube 206 can be used for extracting vacuum at the bottom of the inner crucible, so that the inner crucible can reach ultrahigh vacuum more quickly, and the time for waiting for vacuum extraction is greatly reduced; the diameter of the round tube 206 on both sides is 5mm, the wall thickness is 0.5mm, the height is 21mm, and this round tube 206 is used for supplying the second thermocouple to pass, not only can effectively keep apart thermal interference, still can prevent that the lead wire of second thermocouple (the lead wire of second thermocouple has ceramic parcel outward) from taking place the short circuit with the pipe wall contact.
More preferably, the cooling assembly includes a cooling water jacket 207, the cooling water jacket 207 is a double-layer stainless steel water cooling structure, the cooling water jacket 207 is communicated with the metal corrugated pipe 201 and the inner vacuum, and a water inlet and a water outlet for the cooling circulating water are arranged on the cooling water jacket 207, as shown in fig. 2 or fig. 3. The cooling water jacket 207 of the preferred technical scheme of this embodiment can play a role in cooling through the entering and the outflow of the cooling circulating water.
Example 2
This embodiment is right the utility model is used for the temperature measurement method of ultrahigh vacuum heating furnace to carry out the detailed description.
The temperature measuring method for the ultrahigh vacuum heating furnace in the embodiment is realized by the temperature measuring device for the ultrahigh vacuum heating furnace in any one of the technical schemes in the embodiment 1. Preferably, the temperature measuring method comprises the following steps:
s1: the lifting mechanism and the temperature measuring mechanism are installed at the top of the ultrahigh vacuum heating furnace, and a second thermocouple of the temperature measuring mechanism extends into the inner crucible and is used for detecting the temperature of the bottom in the inner crucible to obtain first temperature data.
S2: the driving device 101 of the lifting mechanism drives the adjusting screw 103 to move upwards and drive the second thermocouple to move upwards, and the second thermocouple detects the temperature in the inner crucible and obtains second temperature data.
S3: and the driving device 101 of the lifting mechanism continues to drive the adjusting screw 103 to move upwards and drive the second thermocouple to move upwards, and the second thermocouple detects the temperature in the inner crucible and obtains third temperature data.
S4: in the same manner as described above, a plurality of temperature data at different heights within the inner crucible are obtained, and a temperature profile is established based on the plurality of temperature data obtained and the height of the inner crucible.
The temperature measuring method for the ultra-high vacuum heating furnace in the embodiment is carried out before an experiment, the glass tree structure 3 of the ultra-high vacuum heating furnace is taken down, the temperature measuring device in any technical scheme in the embodiment 1 is installed at the top of the ultra-high vacuum heating furnace, and an accurate temperature curve from room temperature to 1800 ℃ can be established by measuring a plurality of temperature data at different heights in the inner crucible.
In this embodiment, the temperature measuring method for the ultra-high vacuum heating furnace according to any one of the technical solutions in embodiment 1 is used, the temperature measuring device for the ultra-high vacuum heating furnace can obtain a plurality of temperature data at different heights in the inner crucible, and a temperature curve is established based on the obtained plurality of temperature data and the height of the inner crucible, so that the temperature field distribution in the inner crucible can be obtained, and the actual temperature distribution in the inner crucible in the vertical direction can be reflected. That is, the temperature measuring method for the ultrahigh vacuum heating furnace of the embodiment solves the problems that the temperature measured by the thermocouple in the prior art is different from the actual temperature inside the inner crucible, and the temperature measured by the thermocouple in the prior art cannot truly reflect the actual temperature distribution in the vertical direction inside the inner crucible.
In the description of the present invention, it is to be noted that, unless otherwise specified, "a plurality" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as the case may be, by those of ordinary skill in the art.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. The temperature measuring device for the ultrahigh vacuum heating furnace is characterized by comprising a lifting mechanism, a temperature measuring mechanism and a signal acquisition mechanism, wherein the lifting mechanism can perform lifting motion in the vertical direction, and the temperature measuring mechanism is connected with the lifting mechanism and moves in the vertical direction based on the lifting motion of the lifting mechanism; the temperature measuring mechanism is communicated with the inner vacuum, and a temperature measuring part of the temperature measuring mechanism is placed in the inner crucible and used for detecting the temperature in the inner crucible; the temperature measurement component is also connected with the signal acquisition mechanism, and the signal acquisition mechanism is used for acquiring and displaying the signals acquired by the temperature measurement component.
2. The temperature measuring device for the ultra-high vacuum heating furnace according to claim 1, wherein the lifting mechanism comprises a driving device (101), a coupler (102), an adjusting screw (103) and a guide rod (104), wherein the adjusting screw (103) and the guide rod (104) are mounted on a first mounting plate (105) and a second mounting plate (106) which are parallel to each other, the adjusting screw (103) and the guide rod (104) are arranged in parallel to each other, and the adjusting screw (103) and the guide rod (104) are fixed on the top of the ultra-high vacuum heating furnace; the first mounting plate (105) and the second mounting plate (106) are fixedly connected with the temperature measuring device, the adjusting screw (103) is further connected with the driving device (101) through the coupler (102), and the driving device (101) is used for driving the adjusting screw (103) to move in the vertical direction and driving the temperature measuring mechanism to move in the vertical direction.
3. The temperature measuring device for the ultrahigh vacuum heating furnace according to claim 1 or 2, wherein the range of movement of the lifting mechanism in the vertical direction is 0-50 mm.
4. The temperature measuring device for the ultrahigh vacuum heating furnace according to claim 1, wherein the temperature measuring mechanism comprises a metal corrugated pipe (201), a compression nut (202), a fluororubber sealing member (203) and a second thermocouple, wherein two ends of the metal corrugated pipe (201) are fixedly connected with the first mounting plate (105) and the second mounting plate (106) through flanges (204) and are fixed on the top of the ultrahigh vacuum heating furnace; the metal corrugated pipe (201) is communicated with the inner vacuum, and the second thermocouple is installed in the compression nut (202) and extends into the inner crucible through the metal corrugated pipe (201) to be used for detecting the temperature in the inner crucible; one side of the compression nut (202) close to the metal corrugated pipe (201) is provided with a fluorine rubber sealing piece (203) and enables the metal corrugated pipe (201) to keep a vacuum environment.
5. The temperature measuring device for ultra-high vacuum heating furnace according to claim 4, wherein the inside of the metal bellows (201) is 10%-7～10-9Vacuum environment of Torr.
6. The temperature measuring device for an ultra-high vacuum heating furnace according to claim 4, wherein the second thermocouple is a K-type thermocouple when the temperature inside the inner crucible is less than 600 ℃; and when the temperature in the inner crucible is 600-1800 ℃, the second thermocouple is a tungsten-rhenium thermocouple.
7. The temperature measuring device for the ultrahigh vacuum heating furnace according to claim 4, wherein the temperature measuring mechanism further comprises a heat insulation component and a temperature reduction component, the heat insulation component and the temperature reduction component are respectively arranged below and above the metal corrugated pipe (201), the heat insulation component and the temperature reduction component are further communicated with the metal corrugated pipe (201) and the inner vacuum, and the second thermocouple extends into the inner crucible through the temperature reduction component, the metal corrugated pipe (201) and the heat insulation component.
8. The temperature measuring device for the ultra-high vacuum heating furnace according to claim 7, wherein the heat insulation assembly comprises a plurality of heat insulation sheets (205) and a round tube (206), wherein the number of the heat insulation sheets (205) is plural, the plurality of heat insulation sheets (205) are spaced apart from each other and arranged in parallel, the heat insulation sheets (205) are also perpendicular to the metal bellows (201), the round tube (206) is connected with the plurality of heat insulation sheets (205), and the round tube (206) is communicated with the metal bellows (201) and the inner vacuum.
9. The temperature measuring device for the ultrahigh vacuum heating furnace according to claim 7, wherein the temperature reducing component comprises a cooling water jacket (207), the cooling water jacket (207) is a double-layer stainless steel water cooling structure, the cooling water jacket (207) is communicated with the metal corrugated pipe (201) and the inner vacuum, and a water inlet and a water outlet for circulating cooling water to enter and exit are arranged on the cooling water jacket (207).
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| CN113176005A (en) * | 2021-05-26 | 2021-07-27 | 中国地震局地质研究所 | Temperature measuring device and temperature measuring method for ultrahigh vacuum heating furnace |
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