CN214736203U

CN214736203U - Single crystal furnace with temperature-resistant and energy-saving characteristics

Info

Publication number: CN214736203U
Application number: CN202120345881.6U
Authority: CN
Inventors: 不公告发明人
Original assignee: Guangdong Zhuhai Xiangzhou Gaojing Solar Energy Technology Co ltd; Guangdong Jinwan Gaojing Solar Energy Technology Co ltd; Guangdong Gaojing Solar Energy Technology Co Ltd
Current assignee: Gaojing Solar Co ltd; Guangdong Jinwan Gaojing Solar Energy Technology Co ltd
Priority date: 2021-02-05
Filing date: 2021-02-05
Publication date: 2021-11-16
Anticipated expiration: 2031-02-05

Abstract

The utility model provides a single crystal growing furnace with temperature resistant energy-conserving characteristic, including a heat preservation section of thick bamboo, heat preservation felt, shell and drain pan, a heat preservation section of thick bamboo, shell respectively fixed connection with on the drain pan, the shell is located a heat preservation section of thick bamboo is peripheral, the shell with be equipped with the heat preservation clearance between the heat preservation section of thick bamboo, heat preservation felt zonulae occludens in the outer wall of a heat preservation section of thick bamboo, the shell internal surface is equipped with high temperature resistant coating. The utility model discloses well heat preservation felt zonulae occludens in the temperature in a heat preservation section of thick bamboo is guaranteed to the outer wall of a heat preservation section of thick bamboo, and the high temperature resistant coating of even coating in shell inside can damage after avoiding the shell to receive high temperature, need not lead to the cooling water and cool off, and the production is made the energy consumption and is descended by a wide margin, reduces and draws single crystal power, improves production economic benefits.

Description

Single crystal furnace with temperature-resistant and energy-saving characteristics

Technical Field

The utility model belongs to the technical field of monocrystalline silicon production, especially, relate to a single crystal growing furnace with temperature resistant energy-conserving characteristic.

Background

Monocrystalline silicon is generally used for manufacturing integrated circuits and other electronic components as a semiconductor material, and in the production of monocrystalline silicon, a monocrystalline furnace is mainly used for manufacturing by using the czochralski method, during the production process, a great amount of heat is generated by pulling the monocrystalline silicon, the temperature can reach over 1000 ℃, if cooling measures are not applied, a furnace barrel, a furnace cover and a furnace bottom of the monocrystalline furnace can be damaged, so that cooling water is introduced into the monocrystalline furnace at present, the heat released in the furnace is removed by the cooling water, and the furnace barrel, the furnace cover and the furnace bottom of the monocrystalline furnace can be ensured not to be damaged. However, the heat is taken away by cooling water, which means that the energy consumption is increased, that is, after the safety is improved, the energy saving performance is reduced to some extent, and the production economic benefit is not high.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome the not enough of above-mentioned prior art existence, provide a single crystal growing furnace with temperature resistant energy-conserving characteristic, solved among the prior art in the single crystal growing furnace need lead to the energy consumption height that the cooling water leads to, it is poor to produce economic benefits, problem that energy-conservation nature is not good.

The utility model provides a single crystal growing furnace with temperature resistant energy-conserving characteristic, including a heat preservation section of thick bamboo, heat preservation felt, shell and drain pan, a heat preservation section of thick bamboo, shell respectively fixed connection with on the drain pan, the shell is located a heat preservation section of thick bamboo is peripheral, the shell with be equipped with the heat preservation clearance between the heat preservation section of thick bamboo, heat preservation felt zonulae occludens in the outer wall of a heat preservation section of thick bamboo, the shell internal surface is equipped with high temperature resistant coating.

Further, the material of the high-temperature resistant coating is graphite powder.

Further, the thickness of the high-temperature-resistant coating is 1-5 mm.

Further, the thickness of the high-temperature resistant coating is 2 mm.

Further, the housing is made of a stainless steel material.

Further, a heat preservation section of thick bamboo includes a first heat preservation section of thick bamboo and a second heat preservation section of thick bamboo, the diameter of a first heat preservation section of thick bamboo is greater than the diameter of a second heat preservation section of thick bamboo, a first heat preservation section of thick bamboo with the drain pan is connected, a second heat preservation section of thick bamboo connect in a first heat preservation section of thick bamboo upper portion, a step is formed to the junction of a first heat preservation section of thick bamboo and a second heat preservation section of thick bamboo.

Further, the heat preservation device also comprises a cylinder cover, and the cylinder cover is connected to the top of the second heat preservation cylinder.

Further, the thickness of the heat preservation felt is 10-50 mm.

The utility model has the advantages that:

the utility model provides a single crystal growing furnace with temperature resistant energy-conserving characteristic, heat preservation felt zonulae occludens in the temperature in a heat preservation section of thick bamboo is guaranteed to the outer wall of a heat preservation section of thick bamboo, and in the inside high temperature resistant coating of even coating of shell, can harm after avoiding the shell to receive high temperature, need not lead to the cooling water and cool off, and the manufacturing energy consumption descends by a wide margin, reduces and draws single crystal power, improves production economic benefits.

Drawings

The present invention is further explained by using the drawings, but the embodiments in the drawings do not constitute any limitation to the present invention, and for those skilled in the art, other drawings can be obtained according to the following drawings without any inventive work.

FIG. 1 is a top view of a single crystal furnace of this example 1 with temperature resistance and energy saving features.

Fig. 2 is a sectional view taken along line a-a in fig. 1.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Example 1:

referring to fig. 1 to 2, embodiment 1 provides a single crystal growing furnace with temperature resistant and energy saving characteristics, including a heat preservation section of thick bamboo 1, heat preservation felt 2, shell 3 and drain pan 4, heat preservation section of thick bamboo 1, shell 3 respectively fixed connection with on the drain pan 4, shell 3 locates heat preservation section of thick bamboo 1 is peripheral, shell 3 with be equipped with heat preservation clearance 5 between the heat preservation section of thick bamboo 1, heat preservation felt 2 zonulae occludens in the outer wall of heat preservation section of thick bamboo 1, the thickness of heat preservation felt 2 is 10 ~ 50mm, the internal surface of shell 3 is equipped with high temperature resistant coating 6, shell 3 is made by stainless steel material.

It should be noted that the heat preservation felt 2 carries out the first layer of heat preservation on the heat preservation cylinder 1, seals and locks the high temperature in the heat preservation cylinder 1, ensures the temperature in the heat preservation cylinder 1, and for the heat leaked out, the shell 3 made of stainless steel material is prevented from being damaged after being subjected to high temperature through the high temperature resistant coating 6 uniformly coated in the shell 3, the high temperature resistant coating 6 improves the high temperature resistant characteristic of the shell 3, and under the condition that cooling water is not used for cooling, the temperature of the outer surface of the shell 3 is 60 ℃; compared with the traditional production mode, under the condition that cooling water is introduced for cooling, and when the shell of the stainless steel material is not provided with the high-temperature-resistant coating, cooling water with the temperature of 30 ℃ needs to be introduced, the water outlet temperature is 35 ℃, the temperature of the outer surface of the shell can be controlled to be about 25 ℃, and a better production state can be achieved, so that the obstructed cooling water is realized, the single crystal pulling power is reduced by 5kW, the production state is stable and reliable, the energy consumption for production and manufacturing is greatly reduced, the single crystal pulling power is reduced, and the production economic benefit is improved.

In this embodiment, the material of the high temperature resistant coating 6 is graphite powder, the graphite powder includes resin powder and high temperature glue, the graphite powder and alcohol are mixed according to a mass ratio of 1:3 to form a viscous liquid mixture, the liquid mixture is uniformly coated on the inner surface of the shell 3, and after the coating is naturally dried, the high temperature resistant coating 6 is formed.

As a preferable mode, the thickness of the high-temperature resistant coating 6 is 1-5 mm. In the embodiment, the thickness of the high-temperature resistant coating 6 is 2mm, the heat preservation performance and the energy saving performance are both considered, and the optimal economic effect is achieved.

In this embodiment, the heat-insulating cylinder 1 includes a first heat-insulating cylinder 11 and a second heat-insulating cylinder 12, the diameter of the first heat-insulating cylinder 11 is greater than the diameter of the second heat-insulating cylinder 12, the first heat-insulating cylinder 11 is connected with the bottom casing 4, the second heat-insulating cylinder 12 is connected to the upper portion of the first heat-insulating cylinder 11, a step is formed at the joint of the first heat-insulating cylinder 11 and the second heat-insulating cylinder 12, and the step is contracted from bottom to top, and correspondingly, heat-insulating felts 2 are tightly connected to the outside of the first heat-insulating cylinder 11 and the second heat-insulating cylinder 12; the heat preservation cylinder 1 further comprises a cylinder cover 13, the cylinder cover 13 is connected to the top of the second heat preservation cylinder 12, and correspondingly, the cylinder cover 13 is also pasted with a heat preservation felt 2.

Compared with the prior art, the utility model provides a single crystal growing furnace with temperature resistant energy-conserving characteristic, heat preservation felt 2 zonulae occludens in the outer wall of a heat preservation section of thick bamboo 1 guarantees the temperature in the heat preservation section of thick bamboo 1, and at the inside high temperature resistant coating 6 of evenly coating of shell 3, avoids shell 3 to receive can damage after the high temperature, need not lead to the cooling water and cools off, and the manufacturing energy consumption descends by a wide margin, reduces and draws single crystal power, improves production economic benefits.

Finally, it should be emphasized that the present invention is not limited to the above-described embodiments, but only to the preferred embodiments of the invention, and is not limited to the embodiments, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.

Claims

1. The single crystal furnace with the temperature-resistant and energy-saving characteristics is characterized by comprising a heat-preserving cylinder, a heat-preserving felt, a shell and a bottom shell, wherein the heat-preserving cylinder and the shell are respectively and fixedly connected with the bottom shell, the shell is arranged on the periphery of the heat-preserving cylinder, a heat-preserving gap is formed between the shell and the heat-preserving cylinder, the heat-preserving felt is tightly connected with the outer wall of the heat-preserving cylinder, and a high-temperature-resistant coating is arranged on the inner surface of the shell.

2. A single crystal growing furnace with temperature and energy saving characteristics as claimed in claim 1, wherein the material of the high temperature resistant coating is graphite powder.

3. A temperature-resistant energy-saving single crystal furnace as claimed in claim 2, wherein the thickness of the high-temperature-resistant coating is 1-5 mm.

4. A single crystal growing furnace with temperature and energy saving characteristics as claimed in claim 3, wherein the thickness of the high temperature resistant coating is 2 mm.

5. A single crystal growing furnace having temperature and energy saving characteristics as claimed in any one of claims 1 to 4, wherein said enclosure is made of stainless steel.

6. The single crystal growing furnace with temperature resistance and energy saving characteristics according to claim 5, wherein the heat-preserving cylinder comprises a first heat-preserving cylinder and a second heat-preserving cylinder, the diameter of the first heat-preserving cylinder is larger than that of the second heat-preserving cylinder, the first heat-preserving cylinder is connected with the bottom shell, the second heat-preserving cylinder is connected to the upper portion of the first heat-preserving cylinder, and a step is formed at the joint of the first heat-preserving cylinder and the second heat-preserving cylinder.

7. A temperature-resistant energy-saving single crystal growing furnace according to claim 6, further comprising a cylinder cover connected to the top of the second heat-preserving cylinder.

8. A temperature-resistant energy-saving single crystal furnace as claimed in claim 7, wherein the thickness of the heat-insulating felt is 10-50 mm.