CN214718029U

CN214718029U - Spin coating equipment convenient to clean

Info

Publication number: CN214718029U
Application number: CN202120607328.5U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2021-03-25
Filing date: 2021-03-25
Publication date: 2021-11-16
Anticipated expiration: 2031-03-25

Abstract

The utility model discloses a convenient spin coating equipment of clearance, detachable spin coating cavity unit is installed in the outside of rotary unit, and rotary unit fixed mounting is in the inside bottom of spin coating cavity unit, rotary unit and spin coating cavity unit's lower extreme fixed mounting has the discharge unit. The waste liquid that produces when spin coating cavity unit can effectively be retrieved the spin coating, and the spin coating cavity can be pulled down from equipment, and convenient thorough clearance spin coating chamber sets up colloid sputtering at the substrate back when anti-splash plate prevents the spin coating, pollutes the substrate, has optimized spin coating equipment's exhaust system, and exhaust system inhales toxic gas in spin coating chamber below, waste gas resorption in the time of avoiding artifical point to glue.

Description

Spin coating equipment convenient to clean

Technical Field

The utility model relates to a spin coating equipment technical field specifically is a spin coating equipment of convenient clearance.

Background

In the field of semiconductor manufacturing and nano-imprinting, a layer of colloid is coated on the surface of a substrate to form a film, and then a subsequent photoetching or imprinting process is carried out to form a preset pattern layer. The spin coating methods commonly used at present include static dispensing spin coating and dynamic dispensing spin coating. No matter the static dispensing spin coating or the dynamic dispensing spin coating, the redundant glue solution is thrown out of the rotating substrate.

The colloid that throws away remains in spin coating equipment's spin coating intracavity, and viscosity is big, difficult clearance. The colloid can volatilize a plurality of gases harmful to human bodies and affect the health of the human bodies. A spin coating apparatus may spin on multiple colloids, and different colloids may cross react in the spin coating chamber. The colloid remained in the spin coating cavity is effectively and timely recovered and cleaned, and the problem needs to be solved when spin coating equipment is designed.

Most of the existing spin-coating equipment is provided with a spin-coating cavity for recovering waste liquid, but the spin-coating cavity is generally fixed on the equipment and is inconvenient to clean.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a spin coating equipment of convenient clearance to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a convenient spin coating equipment of clearance, includes the rotary unit, detachable spin coating cavity unit is installed in the outside of rotary unit, and rotary unit fixed mounting is in the inside bottom of spin coating cavity unit, the lower extreme fixed mounting of rotary unit and spin coating cavity unit has the discharge unit.

Preferably, the rotary unit includes sucking disc, substrate locating lever, vacuum groove, vacuum hole, locating pin groove, bracing piece, locating pin, rotating electrical machines and vacuum pump, sucking disc upper surface edge is equipped with the substrate locating lever, sucking disc upper surface center department is equipped with vacuum groove and vacuum hole, the lower extreme of sucking disc is equipped with the locating pin groove, vacuum hole and bracing piece intercommunication, the locating pin is installed to the fit inside of locating pin groove, the lower extreme fixedly connected with rotating electrical machines of bracing piece, rotating electrical machines's lower extreme fixedly connected with vacuum pump.

Preferably, spin coating cavity unit includes apron, handle, rotatory piece, sealing strip, basin body retainer plate, the basin body, collecting tank, prevent the dish that splashes back, waste liquid mouth and supporting shoe, the upper surface of apron is equipped with the handle, one side of apron is equipped with rotatory piece, the apron lower surface is equipped with the sealing strip, the lower extreme of sealing strip is closely laminated has the basin body retainer plate, the outside fixed mounting of basin body retainer plate has the basin body, basin body center department is coniform, and the bracing piece can pass basin body middle zone, rotatory piece snap-on is on equipment housing, the below of the basin body is equipped with the round collecting tank, fixed mounting has the dish that splashes back in the coniform zone of basin body center, and is located the below of sucking disc, the waste liquid mouth in the bottom of collecting tank, the basin body is supported by the supporting shoe with the opposite side of waste liquid mouth.

Preferably, the emission unit includes waste liquid collecting pipe, level filtering valve, exhaust pipe, exhaust fan, second grade filter valve, waste liquid container and waste liquid discharge valve, the lower extreme fixedly connected with waste liquid collecting pipe of waste liquid mouth, and the waste liquid collecting pipe is the Z type, the intermediate part left end fixedly connected with level filtering valve of waste liquid collecting pipe, the left end fixedly connected with exhaust pipe of level filtering valve, the left end fixedly connected with exhaust fan of exhaust pipe, the left end fixedly connected with second grade filter valve of exhaust fan, the bottom fixed mounting of waste liquid collecting pipe has the waste liquid container, the bottom fixed mounting of waste liquid container has the waste liquid discharge valve.

Compared with the prior art, the beneficial effects of the utility model are that: this spin coating equipment of convenient clearance reasonable in design, the waste liquid that produces when spin coating cavity unit can effectively retrieve the spin coating, the spin coating cavity can be pulled down from equipment, convenient thorough clearance spin coating chamber, colloid sputtering is at the substrate back when setting up and preventing the splash back dish from preventing the spin coating, pollute the substrate, the exhaust system of spin coating equipment has been optimized, exhaust system is in spin coating chamber below, waste gas absorbs downwards, inhale toxic gas when avoiding artifical point to glue, it puts forward spin coating or dynamic point to have solved no matter static point is glued spin coating or dynamic point is glued spin coating, all can have unnecessary glue solution to throw away from rotatory substrate, the colloid of throwing away remains in spin coating cavity of spin coating equipment, viscosity is big, difficult clearance. The colloid can volatilize a plurality of gases harmful to human body, which affects the health of human body, and the spin coating cavity is generally fixed on the equipment, which is inconvenient to clean.

Drawings

FIG. 1 is a schematic structural view of the apparatus of the present invention;

FIG. 2 is a top view of the apparatus of the present invention;

in the figure: 1 rotary unit, 11 suckers, 111 substrate positioning rods, 112 vacuum grooves, 113 vacuum holes, 114 positioning pin grooves, 12 support rods, 13 positioning pins, 14 rotary motors, 15 vacuum pumps, 2 spin coating cavity units, 21 cover plates, 211 handles, 212 rotary blocks, 213 sealing strips, 22 basin fixing rings, 23 basins, 231 liquid collecting grooves, 24 anti-back-splash disks, 25 waste liquid ports, 26 support blocks, 3 discharge units, 31 waste liquid collecting pipes, 32 primary filter valves, 33 waste gas pipelines, 34 exhaust fans, 35 secondary filter valves, 36 waste liquid containers and 37 waste liquid discharge valves.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a convenient spin coating equipment of clearance, includes rotary unit 1, and detachable spin coating cavity unit 2 is installed in rotary unit 1's the outside, and rotary unit 1 fixed mounting is in spin coating cavity unit 2's inside bottom, and rotary unit 1 and spin coating cavity unit 2's lower extreme fixed mounting has discharge unit 3.

The rotating unit 1 comprises a suction cup 11, a substrate positioning rod 111, a vacuum groove 112, a vacuum hole 113, a positioning pin groove 114, a support rod 12, a positioning pin 13, a rotating motor 14 and a vacuum pump 15, the substrate positioning rod 111 is arranged at the edge of the upper surface of the suction cup 11, the vacuum groove 112 and the vacuum hole 113 are arranged at the center of the upper surface of the suction cup 11, the positioning pin groove 114 is arranged at the lower end of the suction cup 11, the vacuum hole 113 is communicated with the support rod 12, the positioning pin 13 is installed inside the positioning pin groove 114 in a matched mode, the rotating motor 14 is fixedly connected to the lower end of the support rod 12, the vacuum pump 15 is fixedly connected to the lower end of the rotating motor 14, the substrate positioning rod 111 is used for positioning the center of a substrate, the substrate is prevented from flying when rotating at a high speed, the support rod 12 is hollow and is communicated with the vacuum pump 15, and a negative pressure adsorption fixed substrate is formed in the vacuum groove 112 of the suction cup 11.

The spin coating cavity unit 2 comprises a cover plate 21, a handle 211, a rotating block 212, a sealing strip 213, a basin body fixing ring 22, a basin body 23, a liquid collecting tank 231, a back splash prevention plate 24, a waste liquid port 25 and a supporting block 26, wherein the handle 211 is arranged on the upper surface of the cover plate 21, the rotating block 212 is arranged on one side of the cover plate 21, the sealing strip 213 is arranged on the lower surface of the cover plate 21, the basin body fixing ring 22 is tightly attached to the lower end of the sealing strip 213, the basin body 23 is fixedly installed on the outer side of the basin body fixing ring 22, the center of the basin body 23 is conical, the supporting rod 12 can penetrate through the middle area of the basin body 23, the rotating block 212 is directly fixed on the equipment shell, the circle of liquid collecting tank 231 is arranged below the basin body 23, the back splash prevention plate 24 is fixedly installed in the conical area in the center of the basin body 23 and is positioned below the sucking disc 11, the waste liquid port 25 is arranged at the bottom of the liquid collecting tank 231, and the other side of the basin body 23 opposite to the waste liquid port 25 is supported by the supporting block 26, the middle of the cover plate 21 is made of glass, the spin coating condition is convenient to observe, the sealing strip 213 is tightly attached to the pot body fixing ring 22, waste gas is prevented from being discharged, and the back splash prevention disc 24 prevents colloid sputtering on the back of the substrate during spin coating and pollutes the substrate.

Discharge unit 3 includes waste liquid collecting pipe 31, one-level filtering valve 32, exhaust duct 33, exhaust fan 34, second grade filtering valve 35, waste liquid container 36 and waste liquid discharge valve 37, the lower extreme fixedly connected with waste liquid collecting pipe 31 of waste liquid mouth 25, and waste liquid collecting pipe 31 is the Z type, waste liquid collecting pipe 31's mid portion left end fixedly connected with one-level filtering valve 32, one-level filtering valve 32's left end fixedly connected with waste gas pipe 33, waste gas pipe 33's left end fixedly connected with exhaust fan 34, exhaust fan 34's left end fixedly connected with second grade filtering valve 35, waste liquid collecting pipe 31's bottom fixed mounting has waste liquid container 36, waste liquid container 36's bottom fixed mounting has waste liquid discharge valve 37, the waste liquid that the spin-coating chamber was collected flows into waste liquid collecting pipe 31 along waste liquid mouth 25, flow into waste liquid container 36 along waste liquid collecting pipe 31 again. After the waste liquid container 36 is full of liquid, the waste liquid discharge valve 27 is opened to discharge the waste liquid, the primary filter valve 32 is arranged in the middle of the waste liquid collecting pipe 31, the waste liquid can flow along the lower surface of the waste liquid collecting pipe 31, and a large amount of colloid is prevented from flowing into the waste gas pipeline 33. The exhaust fan 34 is used for pumping the waste gas in the spin coating cavity and the waste liquid collecting pipe 31 into the filter valve for filtering, so that the waste gas is prevented from volatilizing upwards and being sucked by a human body.

The working principle is as follows: the bowl 23 is placed in the spin coating apparatus, the support rod 12 passes through the central region of the bowl 23, and the waste liquid port 25 is connected to the waste liquid collecting pipe 31. The other end of the tub 23 is supported by a support block 26. The central area of the back splash guard 24 passes through the central area of the pot body 23, the back splash guard 24 is clamped on the pot body 23, the suction cup 11 is installed, and the positioning pin slot 114 of the suction cup is clamped with the positioning pin 13. A vacuum groove 112 and a vacuum hole 113 are formed at the center of the upper surface of the suction cup 11, and the vacuum hole 113 is communicated with the support rod 12. The support rod 12 is hollow and is communicated with the vacuum pump 15, a negative pressure is formed in a vacuum groove 112 of the sucker 11 to adsorb and fix the substrate, a substrate positioning rod 111 is arranged at the edge of the upper surface of the sucker 11 to position the center of the substrate, the substrate is prevented from flying when rotating at a high speed, after the substrate is adsorbed and fixed by the vacuum pump 15, the adhesive is dispensed at the center of the substrate, and the rotating motor 14 drives the support rod 12 to rotate so as to drive the sucker 11 and the substrate to rotate. The waste liquid generated by rotation flows into the liquid collecting tank 231 along the inner wall of the pot body 23 and then flows into the waste liquid collecting pipe 31 through the waste liquid port 25, and the waste liquid flows into the waste liquid container 36 along the lower surface of the waste liquid collecting pipe 31. After 36 liquid in the waste liquid container is full, open waste liquid discharge valve 37 and get rid of the waste liquid, at the in-process of spin coating, exhaust fan 34 is with the waste gas suction one-level in spin coating chamber and the waste liquid collecting pipe 31, filter in the secondary filter valve, avoid waste gas upwards volatilizing, the human body inhales, clear up the work to equipment after the work is accomplished, at first pull down sucking disc 11 from bracing piece 12, again with anti-splash back dish 24 from the basin body 23 pull down, then pull down basin body retainer plate 22 from equipment, pull down basin body 23 at last, later with sucking disc 11, bracing piece 12, basin body retainer plate 22, basin body 23 and anti-splash back dish 24 clear up can.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a convenient spin-coating equipment of clearance, includes rotation unit (1), its characterized in that, detachable spin-coating cavity unit (2) are installed in the outside of rotation unit (1), and rotation unit (1) fixed mounting is in the inside bottom of spin-coating cavity unit (2), the lower extreme fixed mounting of rotation unit (1) and spin-coating cavity unit (2) has emission unit (3).

2. The spin coating apparatus convenient for cleaning according to claim 1, wherein the spin unit (1) comprises a suction cup (11), a substrate positioning rod (111), a vacuum groove (112), a vacuum hole (113), a positioning pin groove (114), a support rod (12), a positioning pin (13), a rotation motor (14), and a vacuum pump (15), a substrate positioning rod (111) is arranged at the edge of the upper surface of the sucker (11), a vacuum groove (112) and a vacuum hole (113) are arranged at the center of the upper surface of the sucker (11), the lower end of the sucker (11) is provided with a positioning pin groove (114), the vacuum hole (113) is communicated with the support rod (12), a positioning pin (13) is arranged in the positioning pin groove (114) in a matching way, the lower end of the supporting rod (12) is fixedly connected with a rotating motor (14), the lower end of the rotating motor (14) is fixedly connected with a vacuum pump (15).

3. The spin coating device convenient to clean as claimed in claim 2, wherein the spin coating chamber unit (2) comprises a cover plate (21), a handle (211), a rotating block (212), a sealing strip (213), a basin body fixing ring (22), a basin body (23), a liquid collecting tank (231), a back splash prevention disc (24), a waste liquid port (25) and a supporting block (26), the handle (211) is arranged on the upper surface of the cover plate (21), the rotating block (212) is arranged on one side of the cover plate (21), the sealing strip (213) is arranged on the lower surface of the cover plate (21), the basin body fixing ring (22) is tightly attached to the lower end of the sealing strip (213), the basin body (23) is fixedly mounted on the outer side of the basin body fixing ring (22), the center of the basin body (23) is conical, the supporting rod (12) can penetrate through the middle area of the basin body (23), and the rotating block (212) is directly fixed on the device shell, the improved flowerpot is characterized in that a circle of liquid collecting groove (231) is arranged below the flowerpot body (23), a back splash prevention disc (24) is fixedly mounted in the central conical area of the flowerpot body (23) and is located below the sucker (11), a waste liquid opening (25) is formed in the bottom of the liquid collecting groove (231), and the other side, opposite to the waste liquid opening (25), of the flowerpot body (23) is supported by a supporting block (26).

4. The spin coating equipment convenient to clean as claimed in claim 3, wherein the discharge unit (3) comprises a waste liquid collecting pipe (31), a primary filtering valve (32), a waste gas pipeline (33), an exhaust fan (34), a secondary filtering valve (35), a waste liquid container (36) and a waste liquid discharge valve (37), the lower end of the waste liquid port (25) is fixedly connected with the waste liquid collecting pipe (31), the waste liquid collecting pipe (31) is Z-shaped, the left end of the middle part of the waste liquid collecting pipe (31) is fixedly connected with the primary filtering valve (32), the left end of the primary filtering valve (32) is fixedly connected with the waste gas pipeline (33), the left end of the waste gas pipeline (33) is fixedly connected with the exhaust fan (34), the left end of the exhaust fan (34) is fixedly connected with the secondary filtering valve (35), the bottom end of the waste liquid collecting pipe (31) is fixedly mounted with the waste liquid container (36), and a waste liquid discharge valve (37) is fixedly arranged at the bottom end of the waste liquid container (36).