CN214701732U - High temperature furnace - Google Patents

High temperature furnace Download PDF

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Publication number
CN214701732U
CN214701732U CN202023284656.0U CN202023284656U CN214701732U CN 214701732 U CN214701732 U CN 214701732U CN 202023284656 U CN202023284656 U CN 202023284656U CN 214701732 U CN214701732 U CN 214701732U
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China
Prior art keywords
camera
air
lens
temperature furnace
air duct
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CN202023284656.0U
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Chinese (zh)
Inventor
汪佳
苗江涛
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Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
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Xuzhou Jingrui Semiconductor Equipment Technology Co ltd
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Abstract

The utility model discloses a high temperature furnace, include: the furnace body is provided with a view window, and a transparent piece is arranged at the view window to seal the view window; the camera assembly is arranged outside the furnace body and comprises a camera, and a lens of the camera is opposite to the view window; the heat insulation guide plate is arranged outside the furnace body and between the camera assembly and the transparent piece, the heat insulation guide plate is provided with an avoiding hole, and at least part of the lens is positioned in the avoiding hole. According to the utility model discloses a high temperature furnace, through set up thermal-insulated guide plate between camera subassembly and transparency, and set up on thermal-insulated guide plate and dodge the hole, make the at least part of the camera lens of camera be located dodge downtheholely, can keep apart most to the thermal radiation of camera except that the camera lens part, avoid the camera overheated, reduce the number of times that the camera is down, guarantee the reliability of camera work, the camera lens that can also guarantee the camera can shoot the environment of the interior chamber of furnace body, realize the function of camera, guarantee the photographic effect of camera.

Description

High temperature furnace
Technical Field
The utility model relates to a technical field of high temperature furnace especially relates to a high temperature furnace.
Background
In the related art, a high temperature furnace generates high temperature in the working process, the temperature in a heating cavity exceeds 1300 ℃, and a camera lens of a camera system is exposed in a visible area of a thermal field to shoot the environment in the cavity, so that the temperature of the camera system, especially a front-section lens, is increased along with the temperature, although the temperature is shielded by a filter set, the camera system often cannot achieve good thermal radiation isolation in order to realize the function of the camera, and the camera is overheated and crashed.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a high temperature furnace, high temperature furnace can reduce the temperature of camera, reduces the number of times that the camera is shut down, can also realize the function of camera.
According to the utility model discloses high temperature furnace, include: the furnace body is provided with a view window, and a transparent piece is arranged at the view window to seal the view window; the camera assembly is arranged outside the furnace body and comprises a camera, and a lens of the camera is opposite to the view window; the thermal-insulated guide plate is established the external and being located of furnace the camera subassembly with between the transparency, be equipped with on the thermal-insulated guide plate and dodge the hole, at least part of camera lens is located dodge downtheholely.
According to the utility model discloses high temperature furnace, through set up thermal-insulated guide plate between camera subassembly and transparency, and set up on thermal-insulated guide plate and dodge the hole, make the at least part of the camera lens of camera be located dodge downtheholely, not only can keep apart the thermal radiation of most part except that the camera lens to the camera, reduce the temperature of camera, avoid the camera overheated, reduce the number of times that the camera is shut down, guarantee the reliability of camera work, the camera lens that can also guarantee the camera can shoot the environment of cavity in the furnace body, realize the function of camera, guarantee the shooting effect of camera.
According to some embodiments of the utility model, the camera is a plurality of, every the camera all has the camera lens, it is a plurality of, a plurality of to dodge the hole and a plurality of the camera lens one-to-one.
According to the utility model discloses a some embodiments, the outside of furnace body is equipped with ring baffle, ring baffle centers on the sight window sets up, thermal-insulated guide plate is established in the ring baffle and with the transparency is spaced apart, thermal-insulated guide plate ring baffle's internal perisporium with the transparency is injectd the air current and is flowed the cavity jointly, the camera lens with it has the clearance to dodge between the internal perisporium in hole, be equipped with the gas outlet on the thermal-insulated guide plate, high temperature furnace still includes: and the fan assembly is used for driving airflow to flow to the clearance between the lens and the avoiding hole and then to be discharged from the air outlet after the airflow flows in the chamber.
In some embodiments of the present invention, the annular baffle plate is provided with an air inlet penetrating through the annular baffle plate, the air inlet is along the circumferential direction of the annular baffle plate extends, the air inlet is communicated with the airflow flowing chamber, and the fan assembly further drives the airflow to flow from the air outlet after flowing through the airflow flowing chamber.
In some embodiments of the present invention, the air inlet is a plurality of air inlets spaced apart along a circumferential direction of the annular baffle.
In some embodiments of the present invention, the high temperature furnace further comprises: the air duct piece is arranged on the heat insulation guide plate, the air duct piece limits an air outlet, one end of the air duct is communicated with the air outlet, and the other end of the air duct faces away from the camera and extends in the direction of the camera.
In some embodiments of the present invention, the fan assembly is disposed within the air duct.
In some embodiments of the present invention, the air duct member includes: the camera comprises a first section and a second section, wherein the first section defines a first air duct, one end of the first air duct is connected with the air outlet, the first section is perpendicular to the heat insulation guide plate, the second section defines a second air duct, one end of the second air duct is communicated with the other end of the first air duct, and the second section is perpendicular to the first section and far away from the one end of the first section towards the direction far away from the camera.
The utility model discloses an in some embodiments, the camera subassembly still includes the mounting panel, the mounting panel with ring baffle connects, be equipped with on the mounting panel and dodge the breach, the camera is established dodge in the breach.
In some embodiments of the present invention, the air outlet is provided with a temperature sensor, and the temperature sensor is connected to the control module of the high temperature furnace.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is an exploded view of a high temperature furnace according to an embodiment of the present invention;
fig. 2 is a schematic view showing the simulation of the airflow of the high temperature furnace according to the embodiment of the present invention.
Reference numerals:
the high-temperature furnace 100 is a furnace for heating,
a furnace body 1, a viewing window 11, a transparent piece 12, an annular baffle 13, an air inlet 131,
the camera module 2, the camera 21, the lens 211, the mounting plate 22, the avoidance notch 221,
a heat insulation guide plate 3, a avoidance hole 31, an air outlet 32,
air duct member 4, first section 41, second section 42, air duct 43.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A high temperature furnace 100 according to an embodiment of the present invention is described below with reference to fig. 1 and 2. The high temperature furnace 100 may be a czochralski crystal growing furnace, a sapphire crystal growing furnace, or the like, or a high temperature furnace in other fields.
As shown in fig. 1, a high temperature furnace 100 according to an embodiment of the present invention includes a furnace body 1, a camera assembly 2, and a heat insulation baffle 3.
Specifically, be equipped with on the furnace body 1 and look window 11, look window 11 department and be equipped with transparent 12 with shutoff window 11, can see the environment in the 1 cavity of furnace body through window 11 from the outside of furnace body 1, transparent 12 shutoff window 11 not only can guarantee to observe the environment in the 1 cavity of furnace body through window 11 from the furnace body 1 outward, can also completely cut off the environment in the 1 interior of furnace body. Alternatively, the transparent member 12 may be glass. The camera assembly 2 is arranged outside the furnace body 1, the camera assembly 2 comprises a camera 21, a lens 211 of the camera 21 is opposite to the view window 11, and the camera 21 can shoot the environment in the cavity of the furnace body 1 through the lens 211, so that the high-temperature furnace 100 can be controlled conveniently, and the working reliability of the high-temperature furnace 100 is ensured. It can be understood that the heat received by the camera 21 mainly comes from the heat source inside the chamber of the furnace body 1, and is transmitted to the camera 21 through the transparent member 12 by radiation, convection, etc.
The heat insulation guide plate 3 is arranged outside the furnace body 1 and positioned between the camera component 2 and the transparent part 12, the heat insulation guide plate 3 is provided with an avoiding hole 31, and at least part of the lens 211 is positioned in the avoiding hole 31. The heat insulation guide plate 3 is arranged between the camera component 2 and the transparent part 12, so that the heat radiation of the camera 21 except the lens 211 can be effectively blocked, the temperature of the camera 21 is reduced, the working reliability of the camera 21 is ensured, and the downtime frequency of the camera 21 is reduced. In addition, the heat insulation guide plate 3 is provided with an avoiding hole 31, at least part of the lens 211 is positioned in the avoiding hole 31 to photograph the environment in the cavity of the furnace body 1, so that the normal visual angle of the lens 211 of the camera 21 can be ensured, and the photographing effect of the camera 21 can be ensured.
Optionally, the relief hole 31 is a circular hole. Of course, the present invention is not limited thereto, and the avoiding hole 31 may also be a hole structure with other shapes, such as a square hole.
According to the utility model discloses high temperature furnace 100, through set up thermal-insulated guide plate 3 between camera subassembly 2 and transparency 12, and set up on thermal-insulated guide plate 3 and dodge hole 31, make at least part of camera 21's camera lens 211 be located dodge hole 31, not only can keep apart most thermal radiation to camera 21 except that camera lens 211 part, reduce camera 21's temperature, avoid camera 21 overheated, reduce the number of times that camera 21 is down, guarantee the reliability of camera 21 work, the environment of cavity in furnace body 1 can be shot to camera lens 211 that can also guarantee camera 21, realize camera 21's function, guarantee camera 21's shooting effect.
Further, as shown in fig. 1, there are a plurality of cameras 21, each camera 21 has a lens 211, there are a plurality of avoiding holes 31, and the plurality of avoiding holes 31 correspond to the plurality of lenses 211 one to one. Therefore, the environment in the cavity of the furnace body 1 can be shot from different angles, and the shooting range of the camera assembly 2 can be enlarged, so that the real situation in the furnace body 1 can be more accurately reflected, and the work of the high-temperature furnace 100 can be better and more accurately controlled.
For example, in the example shown in fig. 1, there are two cameras 21, two avoidance holes 31, and the lenses 211 of the two cameras 21 respectively extend into the two avoidance holes 31, so as to photograph the environment in the chamber of the furnace body 1 through the avoidance holes 31 and the transparent member 12, respectively.
In some embodiments of the utility model, as shown in fig. 1, the outside of furnace body 1 is equipped with ring baffle 13, and ring baffle 13 sets up around viewing window 11, and thermal-insulated guide plate 3 establishes in ring baffle 13 and separates apart with transparent 12, can avoid the quick transmission of heat on the transparent 12 to thermal-insulated guide plate 3 for thermal-insulated guide plate 3 better keeps apart the heat radiation, in addition, has the air bed between thermal-insulated guide plate 3 and the transparent 12, can further keep apart the heat radiation.
The airflow flowing chamber is defined by the inner peripheral walls of the heat insulation guide plate 3 and the annular baffle plate 13 and the transparent piece 12 together, a gap is formed between the lens 211 and the inner peripheral wall of the avoiding hole 31, the air outlet 32 is formed in the heat insulation guide plate 3, the high-temperature furnace 100 further comprises a fan assembly, and the fan assembly is used for driving airflow to flow into the airflow flowing chamber from the lens 211 and the clearance between the avoiding holes 31 and then is discharged from the air outlet 32. A cooling air duct is formed between the inner peripheral wall of the avoiding hole 31 and the outer peripheral wall of the lens 211 to accelerate heat dissipation at the end of the lens 211. In addition, as shown in fig. 2, the airflow entering the airflow flowing chamber from the gap between the lens 211 and the avoiding hole 31 is discharged from the air outlet 32, and in the process of flowing the airflow, the airflow firstly flows into the airflow flowing chamber in the direction of the transparent member 12, and after impacting the transparent member 12, the airflow is discharged from the air outlet 32 in the opposite direction, so as to form a complete turbulent flow structure. The overheated position of camera subassembly 2 can be cooled off at the in-process that flows to the air current can take away partial heat, thereby reduces the heat that transmits to on camera lens 211 and the other positions of camera 21, realizes the cooling protection of camera 21, avoids camera 21 overheated, reduces the number of times that camera 21 shut down, guarantees the reliability of camera 21 work.
Alternatively, as shown in fig. 1, the air outlet 32 is a rectangular opening, and the air outlet 32 is spaced apart from the avoidance hole 31, as shown in fig. 1, the two avoidance holes 31 are both located on the same side of the air outlet 32 and are spaced apart along the length direction of the air outlet 32, thereby facilitating the flow of the air flow. Of course, the present invention is not limited thereto, and the air outlet 32 may have other shapes, such as a circle, an ellipse, etc.
Further, as shown in fig. 1, an air inlet 131 penetrating through the annular baffle 13 is disposed on the annular baffle 13, the air inlet 131 extends along the circumferential direction of the annular baffle 13, the air inlet 131 is communicated with the airflow flowing chamber, and the fan assembly further drives the airflow to flow from the air inlet 131 to the airflow flowing chamber and then to be discharged from the air outlet 32. As shown in fig. 2, the airflow entering the airflow flowing chamber from the air inlet 131 and the airflow entering the airflow flowing chamber from the gap between the outer peripheral wall of the lens 211 and the inner peripheral wall of the avoiding hole 31 converge, after heat exchange by turbulent flow, the airflow is discharged to the air environment through the air outlet 32, which is beneficial to improving the cooling effect of the lens 211 of the camera 21, heat of the lens 211 of the camera 21 is prevented from being transferred to other parts of the camera 21, the cooling protection of the camera 21 is realized, the overheating of the camera 21 is prevented, the number of times of downtime of the camera 21 is reduced, and the reliability of the work of the camera 21 is ensured.
Alternatively, the air inlet 131 is plural, and the plural air inlets 131 are spaced apart in the circumferential direction of the annular barrier 13. The air intake area of the air current can be increased, the air intake quantity of the air current can be increased, the cooling effect of the lens 211 of the camera 21 is improved, heat of the lens 211 of the camera 21 is prevented from being transferred to other parts of the camera 21, cooling protection of the camera 21 is achieved, overheating of the camera 21 is avoided, the number of times of downtime of the camera 21 is reduced, and the working reliability of the camera 21 is guaranteed.
In some embodiments of the present invention, as shown in fig. 1, the high temperature furnace 100 further includes: air duct piece 4, air duct piece 4 establishes on thermal-insulated guide plate 3, and air duct piece 4 prescribes a limit to out tuber pipe 43, and the one end and the gas outlet 32 intercommunication of wind duct 43, the other end orientation of wind duct 43 extend far away from the direction of camera 21. The air duct member 4 can guide the air flow discharged from the air outlet 32 to a position away from the camera module 2 and then discharge the air to the air environment, thereby preventing the discharged hot air from contacting the camera module 2 again to exchange heat, and improving the cooling effect of the camera module 2.
Alternatively, the cross-sectional area of the end of the air chute 43 remote from the air outlet 32 is larger than the cross-sectional area of the end of the air chute 43 near the air outlet 32, thereby facilitating the discharge of the air flow.
Alternatively, a fan assembly is disposed in the air duct 43, and the fan assembly generates negative pressure, so that the airflow can enter the airflow flowing chamber from a gap between the outer peripheral wall of the lens 211 and the inner peripheral wall of the avoiding hole 31, and simultaneously, the airflow can enter the airflow flowing chamber from the air inlet 131, so that the two airflows are converged and disturbed, and then are discharged from the air outlet 32 through the air duct 43. Of course, the utility model discloses be not limited to this, the periphery wall of camera lens 211 with dodge between the internal perisporium of hole 31 and air inlet 131 department can be equipped with the fan subassembly respectively, the fan subassembly produces the malleation, blows the outside air current to the air current flow chamber, then discharges through wind channel 43 from gas outlet 32.
Further, as shown in fig. 1, the air duct member 4 includes a first section 41 and a second section 42, the first section 41 defines a first air duct, one end of the first air duct is connected to the air outlet 32, the first section 41 is perpendicular to the heat insulation baffle 3, the first section 41 is connected to the heat insulation baffle 3, the second section 42 defines a second air duct, one end of the second air duct is communicated with the other end of the first air duct, the second section 42 is perpendicular to the first section 41, and one end of the second section 42, which is far away from the first section 41, extends toward a direction far away from the camera 21. The first air duct and the second air duct are configured as the air duct 43, whereby it is possible to guide and discharge the hot air discharged from the air outlet 32 toward a direction away from the camera assembly 2, avoid the discharged hot air from coming into contact with the camera assembly 2 again, and improve the cooling effect on the camera assembly 2.
Optionally, as shown in fig. 1, the joint of the first section 41 and the second section 42 has a rounded corner, so that the air duct 43 can be smoother, the air flow can be facilitated, and the noise can be reduced.
In addition, when the fan assembly is disposed in the air duct 43, the fan assembly may be disposed in the first air duct or the second air duct, which is not limited herein. In addition, the fan assembly is driven by clean power resources, so that the cleanliness of the environment of the high-temperature furnace 100 is effectively ensured.
Optionally, can also be equipped with the filter screen in the wind channel 43, the filter screen can filter dust, avoids blowing dust to the air circumstance, effectively guarantees the environment cleanliness factor of high temperature furnace 100, improves the reliability of high temperature furnace 100 work. For example, the filter screen may be disposed at an end of the air duct member 4 far from the air outlet 32, that is, at an end of the air duct 43 far from the air outlet 32, specifically, the filter screen may be disposed at an end of the second section 42 far from the first section 41, that is, at an end of the second air duct far from the first air duct.
In some embodiments of the utility model, as shown in fig. 1, the camera assembly 2 further includes a mounting plate 22, the mounting plate 22 is connected with the annular baffle 13, the mounting plate 22 is provided with an avoiding notch 221, the camera 21 is arranged in the avoiding notch 221, and the air duct member 4 is also arranged in the avoiding notch 221. Thereby facilitating the mounting of the camera 21. In the working process of the fan assembly, the air flow enters from the avoiding notch 221, then enters the air flow chamber through the gap between the lens 211 and the avoiding hole 31, and finally is discharged to the air environment from the air outlet 32.
In some embodiments of the present invention, a temperature sensor is disposed at the gas outlet 32, and the temperature sensor and the fan assembly are connected to the control module of the high temperature furnace 100. Temperature sensor can detect the temperature of the air current of flowing through it, thereby the side reflects camera subassembly 2's temperature, when temperature sensor detection temperature is higher, it is higher to explain camera subassembly 2 temperature, the risk of bringing down appears easily, it carries out cooling treatment to camera subassembly 2 through the air current to open the fan subassembly, when temperature sensor detection temperature is lower, it is not very high to explain camera subassembly 2 temperature, the risk of bringing down is difficult to appear in camera 21, can close the fan subassembly this moment, thereby save the cost, thereby can make camera subassembly 2 keep in certain temperature range, realize camera subassembly 2's temperature protect function.
In addition, a temperature control switch can be arranged on the fan assembly and connected with the control module, and the control module controls the start and stop of the fan assembly by controlling the start and stop of the temperature control switch.
The utility model discloses an in some embodiments, wind channel spare 4, thermal-insulated guide plate 3 are the assembled structure, and thermal-insulated guide plate 3 is installed in ring baffle 13, and wind channel spare 4 assembles on thermal-insulated guide plate 3, and mounting panel 22 assembles on ring baffle 13, and the camera subassembly 2's of being convenient for dismantlement and installation, the camera subassembly 2 calibration of being convenient for.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A high temperature furnace, comprising:
the furnace body is provided with a view window, and a transparent piece is arranged at the view window to seal the view window;
the camera assembly is arranged outside the furnace body and comprises a camera, and a lens of the camera is opposite to the view window;
the thermal-insulated guide plate is established the external and being located of furnace the camera subassembly with between the transparency, be equipped with on the thermal-insulated guide plate and dodge the hole, at least part of camera lens is located dodge downtheholely.
2. The high-temperature furnace according to claim 1, wherein the number of the cameras is plural, each of the cameras has a lens, the number of the avoiding holes is plural, and the plurality of the avoiding holes correspond to the plurality of lenses one to one.
3. The high-temperature furnace of claim 1, wherein an annular baffle is disposed outside the furnace body, the annular baffle is disposed around the viewing window, the heat insulation baffle is disposed in the annular baffle and spaced apart from the transparent member, the heat insulation baffle, an inner peripheral wall of the annular baffle and the transparent member define an airflow flowing chamber together, a gap is formed between the lens and the inner peripheral wall of the avoiding hole, an air outlet is disposed on the heat insulation baffle, and the high-temperature furnace further comprises:
and the fan assembly is used for driving airflow to flow to the clearance between the lens and the avoiding hole and then to be discharged from the air outlet after the airflow flows in the chamber.
4. The high temperature furnace of claim 3, wherein the annular baffle plate is provided with an air inlet extending through the annular baffle plate, the air inlet extends in a circumferential direction of the annular baffle plate, the air inlet is communicated with the airflow flowing chamber, and the fan assembly further drives airflow to flow from the air inlet to the airflow flowing chamber and then to be discharged from the air outlet.
5. The furnace of claim 4, wherein the plurality of air inlets are spaced apart in a circumferential direction of the annular baffle.
6. The high temperature furnace of any one of claims 3 to 5, further comprising:
the air duct piece is arranged on the heat insulation guide plate, the air duct piece limits an air outlet, one end of the air duct is communicated with the air outlet, and the other end of the air duct faces away from the camera and extends in the direction of the camera.
7. The high temperature furnace of claim 6, wherein the fan assembly is disposed within the air chute.
8. The high temperature furnace of claim 6, wherein the air duct member comprises:
the camera comprises a first section and a second section, wherein the first section defines a first air duct, one end of the first air duct is connected with the air outlet, the first section is perpendicular to the heat insulation guide plate, the second section defines a second air duct, one end of the second air duct is communicated with the other end of the first air duct, and the second section is perpendicular to the first section and far away from the one end of the first section towards the direction far away from the camera.
9. The high temperature furnace of claim 3, wherein the camera assembly further comprises a mounting plate, the mounting plate is connected to the annular baffle, the mounting plate is provided with an avoidance notch, and the camera is arranged in the avoidance notch.
10. The high-temperature furnace as claimed in claim 3, wherein a temperature sensor is arranged at the air outlet, and the temperature sensor and the fan assembly are both connected with a control module of the high-temperature furnace.
CN202023284656.0U 2020-12-29 2020-12-29 High temperature furnace Active CN214701732U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202023284656.0U CN214701732U (en) 2020-12-29 2020-12-29 High temperature furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202023284656.0U CN214701732U (en) 2020-12-29 2020-12-29 High temperature furnace

Publications (1)

Publication Number Publication Date
CN214701732U true CN214701732U (en) 2021-11-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202023284656.0U Active CN214701732U (en) 2020-12-29 2020-12-29 High temperature furnace

Country Status (1)

Country Link
CN (1) CN214701732U (en)

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