CN214699642U - Valve sealing connecting device for semiconductor manufacturing - Google Patents
Valve sealing connecting device for semiconductor manufacturing Download PDFInfo
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- CN214699642U CN214699642U CN202120978100.7U CN202120978100U CN214699642U CN 214699642 U CN214699642 U CN 214699642U CN 202120978100 U CN202120978100 U CN 202120978100U CN 214699642 U CN214699642 U CN 214699642U
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Abstract
The utility model provides a valve seal connecting device for semiconductor manufacturing, including valve body and first flange, valve body left side surface is provided with second flange, first flange pastes at second flange left side surface, first flange left side surface is provided with first connecting pipe, valve body right side surface is provided with third flange, third flange right side surface has pasted fourth flange, compares with prior art, the utility model discloses following beneficial effect has: seal preliminary when being connected valve body and first connecting pipe and second connecting pipe through the seal ring that sets up, first inside seal circle and second inside seal circle, seal once more when the sealing ring through setting up, taper seal circle and edge seal circle can be connected valve body and first connecting pipe and second connecting pipe, and double-deck sealed setting can guarantee that this device is inside can not produce and reveals, is convenient for its long-time work.
Description
Technical Field
The utility model belongs to the valve field, in particular to valve seal connecting device for semiconductor manufacturing.
Background
At present, the valve is a control part in a fluid conveying system, has the functions of stopping, adjusting, guiding, preventing counter flow, stabilizing pressure, shunting or overflowing and relieving pressure and the like, is used for a valve of a fluid control system, has quite a plurality of varieties and specifications from the simplest stop valve to various valves used in a very complicated automatic control system, and can be used for controlling the flow of various types of fluids such as air, water, steam, various corrosive media, slurry, oil products, liquid metal, radioactive media and the like.
However, the conventional valve pipe connection sealing structure is relatively simple, side leakage still occurs in the pipe after the pipe is used for a period of time, and once the side leakage occurs, the old connecting device needs to be directly replaced, so that the cost is high.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a not enough to prior art exists, the utility model provides a valve seal connecting device for semiconductor manufacturing through increasing valve body, first flange, sealing ring and sealing connection circle to solve the problem that proposes among the above-mentioned background art.
The technical scheme of the utility model is realized like this: a valve sealing connection device for semiconductor manufacture comprises a valve body, a first connection flange, a sealing ring and a sealing connection ring, the left side surface of the valve body is provided with a second connecting flange, the first connecting flange is attached to the left side surface of the second connecting flange, a first connecting pipe is arranged on the left side surface of the first connecting flange, a third connecting flange is arranged on the right side surface of the valve body, a fourth connecting flange is pasted on the right side surface of the third connecting flange, two sealing rings are arranged, edge sealing rings are arranged at the edges of the inner side surfaces of the two sealing rings, a conical sealing ring is arranged in the middle of the inner side surfaces of the two sealing rings, the sealing connection ring is provided with two, two the sealing connection ring upper surface is provided with first inside seal circle, two the sealing connection ring lower surface is provided with second inside seal circle.
In a preferred embodiment, each of the plurality of fastening assemblies is composed of a plurality of bolts and a plurality of nuts, the second connecting flange and the first connecting flange are fixed together by the fastening assemblies, the fourth connecting flange and the third connecting flange are fixed together by the fastening assemblies, and the second connecting pipe is arranged on the right side surface of the fourth connecting flange.
As a preferred embodiment, an external annular groove is formed at the external connection position of the first connecting flange and the second connecting flange, an external annular groove is formed at the external connection position of the third connecting flange and the fourth connecting flange, two sealing rings are sleeved in the two external annular grooves, and both the two external annular grooves are formed by an annular through groove and a tapered through groove.
As a preferred embodiment, an internal annular groove is formed at the internal connection position of the first connecting flange and the second connecting flange, an internal annular groove is formed at the internal connection position of the third connecting flange and the fourth connecting flange, and the sealing gaskets are arranged in the two internal annular grooves.
In a preferred embodiment, the second inner seal ring, the first inner seal ring and the seal connecting ring are all positioned in the inner annular groove and are attached to the seal gasket.
In a preferred embodiment, the second inner seal ring has a larger diameter than the first inner seal ring.
After the technical scheme is adopted, the beneficial effects of the utility model are that: seal preliminary when being connected valve body and first connecting pipe and second connecting pipe through the seal ring that sets up, first inside seal circle and second inside seal circle, seal once more when the sealing ring through setting up, taper seal circle and edge seal circle can be connected valve body and first connecting pipe and second connecting pipe, and double-deck sealed setting can guarantee that this device is inside can not produce and reveals, is convenient for its long-time work.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic view of the overall structure of a valve sealing connection device for semiconductor manufacturing according to the present invention.
Fig. 2 is a schematic diagram illustrating the position of an internal annular groove of the valve seal connecting device for semiconductor manufacturing according to the present invention.
Fig. 3 is a three-dimensional connection diagram of the sealing connection ring of the valve sealing connection device for semiconductor manufacturing according to the present invention.
Fig. 4 is a schematic perspective view of a sealing ring of the valve sealing connection device for semiconductor manufacturing according to the present invention.
In the figure, 1-valve body, 2-first connecting pipe, 3-second connecting pipe, 4-first connecting flange, 5-second connecting flange, 6-third connecting flange, 7-fourth connecting flange, 8-sealing ring, 801-conical sealing ring, 802-edge sealing ring, 9-external annular groove, 10-fastening component, 11-internal annular groove, 12-sealing ring, 13-first internal sealing ring, 14-sealing connecting ring and 15-second internal sealing ring.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1 to 4, the present invention provides a technical solution: a valve sealing connection device for semiconductor manufacture comprises a valve body 1, a first connection flange 4, sealing ring 8 and sealing connection circle 14, 1 left surface of valve body is provided with second flange 5, first flange 4 pastes at 5 left surface of second flange, 4 left surface of first flange is provided with first connecting pipe 2, 1 right surface of valve body is provided with third flange 6, fourth flange 7 has been pasted on 6 right surface of third flange, sealing ring 8 is provided with two, 8 interior side surface edges of two sealing rings all are provided with marginal sealing washer 802, all be provided with taper seal ring 801 in the middle of 8 interior side surfaces of two sealing rings, sealing connection circle 14 is provided with two, 14 upper surfaces of two sealing connection circles are provided with first inside seal ring 13, 14 lower surfaces of two sealing connection circles are provided with second inside seal ring 15.
A plurality of fastening components 10 constitute by a plurality of bolts and a plurality of nut combination, and it is together fixed through fastening components 10 between second flange 5 and the first flange 4, and it is together fixed through fastening components 10 between fourth flange 7 and the third flange 6, and second connecting pipe 3 sets up on fourth flange 7 right side surface, and the people of being convenient for install this device.
The external connection part of the first connecting flange 4 and the second connecting flange 5 is provided with an external annular groove 9, the external connection part of the third connecting flange 6 and the fourth connecting flange 7 is provided with an external annular groove 9, two sealing rings 8 are sleeved in the two external annular grooves 9, and the two external annular grooves 9 are formed by annular through grooves and conical through grooves and can seal the external connection part of the device.
Inside annular groove 11 has been seted up with second flange 5 internal connection department to first flange 4, and inside annular groove 11 has been seted up with fourth flange 7 internal connection department to third flange 6, and seal ring 12 sets up in two inside annular grooves 11, can seal this device inside junction.
The second inner sealing ring 15, the first inner sealing ring 13 and the sealing connecting ring 14 are all located in the inner annular groove 11 and attached to the sealing gasket 12, so that the first connecting flange 4 and the second connecting flange 5, and the third connecting flange 6 and the fourth connecting flange 7 are conveniently sealed.
The diameter of the second inner seal ring 15 is larger than that of the first inner seal ring 13, so that people can distinguish and use the inner seal ring conveniently.
As an embodiment of the present invention: in actual use, the first connecting flange 4 and the second connecting flange 5 are connected together, so that the sealing gaskets 12 inside the first connecting flange 4 and the second connecting flange 5 are respectively attached to a second inner sealing ring 15, a first inner sealing ring 13 and a sealing connecting ring 14, the first connecting flange 4 and the second connecting flange 5 are fastened together by using the fastening assembly 10, then a sealing ring 8 is sleeved in an outer annular groove 9 formed in the outer connecting position of the first connecting flange 4 and the second connecting flange 5, the sealing connection between the first connecting pipe 2 and the valve body 1 can be completed, and the connection between the valve body 1 and the second connecting pipe 3 is the same as the steps; through the seal ring 12 that sets up, first inside seal circle 13 and second inside seal circle 15 can carry out preliminary sealing when being connected valve body 1 with first connecting pipe 2 and second connecting pipe 3, sealing ring 8 through setting up, taper seal ring 801 and edge seal circle 802 can seal once more when being connected valve body 1 with first connecting pipe 2 and second connecting pipe 3, the inside can not produce of this device and reveal of double-deck sealed setting assurance, be convenient for its long-time stable work.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a valve seal connecting device for semiconductor manufacturing, includes valve body (1), first flange (4), sealing ring (8) and sealing connection circle (14), its characterized in that: a second connecting flange (5) is arranged on the left side surface of the valve body (1), the first connecting flange (4) is attached to the left side surface of the second connecting flange (5), a first connecting pipe (2) is arranged on the left side surface of the first connecting flange (4), a third connecting flange (6) is arranged on the right side surface of the valve body (1), a fourth connecting flange (7) is pasted on the right side surface of the third connecting flange (6), two sealing rings (8) are arranged, edge sealing rings (802) are arranged at the edges of the inner side surfaces of the two sealing rings (8), conical sealing rings (801) are arranged in the middle of the inner side surfaces of the two sealing rings (8), the sealing connection ring (14) is provided with two, two the sealing connection ring (14) upper surface is provided with first inside sealing washer (13), two sealing connection ring (14) lower surface is provided with second inside sealing washer (15).
2. The valve-sealing connecting device for semiconductor manufacture according to claim 1, wherein: the connecting structure is characterized in that the first connecting flange (4) and the second connecting flange (5) and the third connecting flange (6) and the fourth connecting flange (7) are fixed together through a plurality of fastening components (10), the fastening components (10) are formed by combining a plurality of bolts and a plurality of nuts, and the second connecting pipe (3) is arranged on the right side surface of the fourth connecting flange (7).
3. The valve-sealing connecting device for semiconductor manufacture according to claim 1, wherein: external ring grooves (9) are formed in the external connection positions of the first connecting flange (4) and the second connecting flange (5), the external connection positions of the third connecting flange (6) and the fourth connecting flange (7), the sealing rings (8) are sleeved in the two external ring grooves (9), and the external ring grooves (9) are formed by annular through grooves and conical through grooves.
4. The valve-sealing connecting device for semiconductor manufacture according to claim 1, wherein: inside ring channel (11) have all been seted up with second flange (5) internal connection department, third flange (6) and fourth flange (7) internal connection department in first flange (4), two all be provided with seal ring (12) in inside ring channel (11).
5. The valve-sealing connecting device for semiconductor manufacturing according to claim 1 or claim 4, wherein: the first inner sealing ring (13), the sealing connecting ring (14) and the second inner sealing ring (15) are all located in the inner annular groove (11) and attached to the sealing washer (12).
6. The valve-sealing connecting device for semiconductor manufacture according to claim 1, wherein: the diameter of the first inner sealing ring (13) is smaller than that of the second inner sealing ring (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120978100.7U CN214699642U (en) | 2021-05-10 | 2021-05-10 | Valve sealing connecting device for semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120978100.7U CN214699642U (en) | 2021-05-10 | 2021-05-10 | Valve sealing connecting device for semiconductor manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214699642U true CN214699642U (en) | 2021-11-12 |
Family
ID=78551329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120978100.7U Active CN214699642U (en) | 2021-05-10 | 2021-05-10 | Valve sealing connecting device for semiconductor manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214699642U (en) |
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2021
- 2021-05-10 CN CN202120978100.7U patent/CN214699642U/en active Active
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