CN214680586U - Dust removal system and single crystal furnace equipment - Google Patents

Abstract

The utility model discloses a dust pelletizing system and single crystal growing furnace equipment, dust pelletizing system, include: the first vacuum dust removal tank is provided with a first air inlet pipe and a first air outlet pipe; the first vacuum dust removal tank is provided with a first air inlet pipe and a first air outlet pipe, the first air inlet pipe and the first air inlet pipe are both communicated with the air inlet pipe, and the first air outlet pipe and the second air outlet pipe are both communicated with the air outlet pipe; the one end and the first vacuum dust removal jar intercommunication of balance pipe, the other end and the second vacuum dust removal jar intercommunication of balance pipe are equipped with first valve on the balance pipe. According to the utility model discloses a dust pelletizing system can reduce the pressure fluctuation of first vacuum cleaning jar and second vacuum cleaning jar when the dust removal switches, guarantees the reliability of vacuum pump and dust pelletizing system work to it is stable to guarantee the stove pressure.

Description

Dust removal system and single crystal furnace equipment

Technical Field

The utility model belongs to the technical field of single crystal growing furnace dust removal technology and specifically relates to a dust pelletizing system and single crystal growing furnace equipment are related to.

Background

The dust removal tank is an important component of the single crystal furnace equipment, and has the functions of maintaining the vacuum pressure stable, filtering oxides generated in the production process, isolating vacuum pump pollution and playing a vital role in long-time high-efficiency operation of the single crystal furnace. In the long-time crystal pulling process, too much oxide is accumulated to cause the blockage of a filter element in a filter removing tank, so that the furnace pressure cannot be controlled in negative pressure work for a long time, and large fluctuation is easily caused. And the existing dust removal tank can not work during the process of cleaning and replacing the filter element, so that the operation of single crystal furnace equipment is stopped, and the production efficiency is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a dust pelletizing system under the condition of not stopping the stove, in time clears up the oxide, improves production efficiency, maintains that the stove pressure is stable just dust pelletizing system's first vacuum dust removal jar and second vacuum dust removal jar pressure fluctuation when switching is little, and the reliability is high.

The utility model also provides a single crystal growing furnace equipment, single crystal growing furnace equipment includes above-mentioned dust pelletizing system.

According to the utility model discloses dust pelletizing system, include: the first vacuum dust removal tank is provided with a first dust removal device and is provided with a first air inlet pipe and a first air outlet pipe; the second vacuum dust removal tank is provided with a second dust removal device and a second air inlet pipe and a second air outlet pipe, the first air inlet pipe and the second air inlet pipe are both communicated with the inlet pipe, and the first air outlet pipe and the second air outlet pipe are both communicated with the outlet pipe; the balance pipe, the one end of balance pipe with first vacuum dust removal jar intercommunication, the other end of balance pipe with second vacuum dust removal jar intercommunication, be equipped with control on the balance pipe the first valve of balance pipe break-make, first vacuum dust removal jar with second vacuum dust removal jar all removes dust to the internal gas of furnace, through the switching of first valve makes in at least one in first vacuum dust removal jar and the second vacuum dust removal jar is in operating condition.

According to the utility model discloses dust pelletizing system is through setting up the balance pipe between first vacuum cleaning jar and second vacuum cleaning jar to set up the first valve that is used for controlling the break-make of balance pipe on the balance pipe, and combine the control to first valve, can reduce the pressure fluctuation of first vacuum cleaning jar and second vacuum cleaning jar when removing dust and switching, guarantee the reliability of vacuum pump and dust pelletizing system work, and then guarantee the reliability of single crystal growing furnace equipment work.

According to the utility model discloses a some embodiments, be equipped with control in the first intake pipe the second valve of first intake pipe break-make, be equipped with control in the second intake pipe the third valve of second intake pipe break-make, be equipped with control on the first outlet duct the fourth valve of first outlet duct break-make, be equipped with control on the second outlet duct the fifth valve of second outlet duct break-make.

According to some embodiments of the utility model, the first dust collector includes: a filter screen provided in the first vacuum dust-removing tank, the filter screen being formed in a ring shape extending in a circumferential direction of the first vacuum dust-removing tank; a spray bar, the spray bar is located in the annular space of filter screen, the spray bar is followed the radial direction of filter screen extends, the spray bar has the first runner that extends along its length direction, spray bar length direction's both ends have with the nozzle of first runner intercommunication, the spray bar is followed the axis of filter screen is rotatable and is followed the axis direction of filter screen is portable, dust pelletizing system still includes: and the atomizing device is used for generating high-pressure atomized water vapor and is connected with the first flow channel.

Further, the first dust removing device further comprises: the clearance pole, the clearance pole is in extend in the axial direction of filter screen, the spray lance is connected the one end of clearance pole, keeping away from of clearance pole the one end of spray lance is stretched out first vacuum cleaner jar, the clearance pole has the second runner that extends along its length direction, first runner with second runner intercommunication, keeping away from of second runner the one end of first runner with atomizing device connects.

In some embodiments of the present invention, the dust removing system further comprises: the water-gas separation device is used for separating water from gas, the water-gas separation device is connected with the first vacuum dust removal tank through a first separation pipe, and a sixth valve used for controlling the connection and disconnection of the first separation pipe is arranged on the first separation pipe.

Optionally, the first dust removal device and the second dust removal device have the same structure, the second vacuum dust removal tank is connected with the water-gas separation device through a second separation pipe, and a seventh valve for controlling the second separation pipe to be turned on and off is arranged on the second separation pipe.

In some embodiments of the present invention, the water-gas separating device has a gas outlet, the gas outlet is provided with an eighth valve for controlling the on-off of the gas outlet, the dust removing system further includes: and the air inlet of the power evacuation pipeline device is communicated with the gas outlet and is used for pumping out the gas in the water-gas separation device.

In some embodiments of the present invention, the water-gas separating device further has a water outlet, the water outlet is located below the gas outlet, and the water outlet is provided with a ninth valve for controlling the on-off of the water outlet.

In some embodiments of the present invention, the first air inlet pipe and the first air outlet pipe are both disposed on the peripheral wall of the first vacuum dust removing tank, and the first air inlet pipe is located below the first air outlet pipe; or the second air inlet pipe and the second air outlet pipe are both arranged on the peripheral wall of the second vacuum dust removal tank, and the second air inlet pipe is positioned below the second air outlet pipe.

According to the utility model discloses single crystal growing furnace equipment, include: a furnace body having an outlet; in the dust removing system, the outlet is communicated with the inlet pipe; and the inlet of the vacuum pump is communicated with the outlet pipe.

According to the utility model discloses single crystal growing furnace equipment is through setting up the balance pipe between first vacuum cleaning jar and second vacuum cleaning jar to set up the first valve that is used for controlling the break-make of balance pipe on the balance pipe, and combine the control to first valve, can reduce the pressure fluctuation of first vacuum cleaning jar and second vacuum cleaning jar when removing dust and switching, guarantee the reliability of vacuum pump and dust pelletizing system work, and then guarantee the reliability of single crystal growing furnace equipment work.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic structural view of a dust removal system according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a dust removal system according to another embodiment of the present invention.

Reference numerals:

the dust-removal system 100 is provided with a dust-removal system,

a first vacuum dust-removing tank 1, a first air inlet pipe 11, a second valve 111, a first air outlet pipe 12, a fourth valve 121, a first separation pipe 13, a sixth valve 131, an inlet pipe 14 and an outlet pipe 15

The first dust removing device 2, the filter screen 21, the spray rod 221, the cleaning rod 222,

a second vacuum dust removing tank 3, a second air inlet pipe 31, a third valve 311, a second air outlet pipe 32, a fifth valve 321, a second separating pipe 33, a seventh valve 331,

the second dust-removing device 4 is provided with a dust-removing device,

the balance pipe 5, the first valve 51,

a water-gas separating device 6, a gas outlet 61, an eighth valve 611, a water outlet 62, a ninth valve 621,

atomizing device 7, power evacuation pipe device 8.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

A single crystal furnace apparatus and a dust removal system 100 according to an embodiment of the present invention will be described below with reference to fig. 1 and 2.

According to the utility model discloses single crystal growing furnace equipment includes furnace body, dust pelletizing system 100 and vacuum pump, and the furnace body has the export, and the gas that produces in the furnace body is discharged from the export, and dust pelletizing system 100 advances the exit linkage of pipe 14 and furnace body, and the import of vacuum pump is connected with dust pelletizing system 100's exit tube 15. Under the action of the vacuum pump, gas generated in the furnace body enters the dust removal system 100 for dust removal treatment, so that the dust removal treatment of the gas in the single crystal furnace is realized.

As shown in fig. 1, a dust removing system 100 according to an embodiment of the present invention includes a first vacuum dust removing tank 1, a second vacuum dust removing tank 3, and a balance pipe 5.

Specifically, first vacuum dust removal jar 1 has first dust collector 2, and first vacuum dust removal jar 1 has first intake pipe 11 and first outlet duct 12, and first dust collector 2 can carry out the dust removal to the gas that gets into first vacuum dust removal jar 1 from first intake pipe 11 and handle, and the gas after the dust removal is discharged from first outlet duct 12. The second vacuum dust removing tank 3 is provided with a second dust removing device 4, the second vacuum dust removing tank 3 is provided with a second air inlet pipe 31 and a second air outlet pipe 32, the second dust removing device 4 can remove dust from the gas entering the second vacuum dust removing tank 3 from the second air inlet pipe 31, and the gas after dust removal is discharged from the second air outlet pipe 32.

The first inlet pipe 11 and the second inlet pipe 31 are both communicated with the inlet pipe 14, and the first outlet pipe 12 and the second outlet pipe 32 are both communicated with the outlet pipe 15. It can be understood that, under the action of the vacuum pump, the gas generated in the furnace body of the single crystal furnace equipment can enter the first gas inlet pipe 11 through the gas inlet pipe 14, and can also enter the second gas inlet pipe 31 through the gas inlet pipe 14, the gas exhausted from the furnace body can be dedusted by the first vacuum dedusting tank 1 and the second vacuum dedusting tank 3, and the gas dedusted by the first vacuum dedusting tank 1 and the gas dedusted by the second vacuum dedusting tank 3 enter the gas outlet pipe 15 through the first gas outlet pipe 12 and the second gas outlet pipe 32 respectively for further processing.

When the dust removal system 100 is used for dust removal, at least one of the first vacuum dust removal tank 1 and the second vacuum dust removal tank 3 can be controlled to participate in the work, when the dust removal system 100 needs to be cleaned, one of the first vacuum dust removal tank 1 and the second vacuum dust removal tank 3 can be controlled to work, and the other one can be used for corresponding cleaning or filter element replacement and the like.

Preferably, the dust exhaust system 100 is started to operate, so that the first vacuum dust exhaust tank 1 is operated and the second vacuum dust exhaust tank 3 is not operated. Specifically, under the action of the vacuum pump, gas enters the first air inlet pipe 11 from the inlet pipe 14, dust removal treatment is performed in the first vacuum dust removal tank 1, and the gas is sucked out from the first air outlet pipe 12 after dust removal is finished, so that the core components of the vacuum pump can be protected from being polluted, and the service life of the vacuum pump is prolonged. After a set time of operation (e.g., 12h), the first vacuum cleaner tank 1 may be deactivated and the second vacuum cleaner tank 3 may be activated. Specifically, under the action of the vacuum pump, gas enters the second air inlet pipe 31 from the inlet pipe 14, dust removal treatment is performed in the second vacuum dust removal tank 3, the gas is sucked out from the second air outlet pipe 32 after dust removal is finished, the core components of the vacuum pump can be protected from being polluted, the service life of the vacuum pump is prolonged, and corresponding cleaning or filter element replacement and other operations can be performed on the first vacuum dust removal tank 1 at the moment.

After the dust removal operation of second vacuum dust removal jar 3 sets for the time, can be so that first vacuum dust removal jar 1 carries out dust removal work, clear up or the change of filter core etc. second vacuum dust removal jar 3, first vacuum dust removal jar 1 and second vacuum dust removal jar 3 remove dust and clear up and switch over each other, can guarantee the normal work of dust pelletizing system 100 when clearing up or changing the filter core at first vacuum dust removal jar 1 and second vacuum dust removal jar 3, reduce the number of times that single crystal growing furnace equipment shut down, be favorable to improving production efficiency, it is stable to maintain the furnace pressure.

In addition, one end of the balance pipe 5 is communicated with the first vacuum dust removal tank 1, the other end of the balance pipe 5 is communicated with the second vacuum dust removal tank 3, the balance pipe 5 is provided with a first valve 51 for controlling the on-off of the balance pipe 5, the first valve 51 is opened, the first vacuum dust removal tank 1 can be communicated with the second vacuum dust removal tank 3, and the pressure in the first vacuum dust removal tank 1 and the pressure in the second vacuum dust removal tank 3 can be gradually balanced. When the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are switched, the first valve 51 can be opened firstly, so that the pressure in the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 is substantially balanced, then the states of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are changed, the pressure fluctuation in the switching process of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 can be reduced, and the working reliability of the vacuum pump, the dust removing system 100 and the single crystal furnace equipment is ensured.

For example, the dust exhaust system 100 may be started up to operate the first vacuum cleaner tank 1 and the second vacuum cleaner tank 3. Specifically, under the action of the vacuum pump, gas enters the first air inlet pipe 11 from the inlet pipe 14, dust removal treatment is performed in the first vacuum dust removal tank 1, and the gas is sucked out from the first air outlet pipe 12 after dust removal is finished, so that the core components of the vacuum pump can be protected from being polluted, and the service life of the vacuum pump is prolonged. After the operation is performed for a set time (for example, 12 hours), the first valve 51 may be opened first, so that the pressures in the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are slowly balanced, when the vacuum pressure values in the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are different by 0.5Torr, the states of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are changed, so that the second vacuum dust removing tank 3 independently performs dust removing operation, specifically, under the action of the vacuum pump, the gas enters the second air inlet pipe 31 from the inlet pipe 14, the dust removing process is performed in the second vacuum dust removing tank 3, and after the dust removing operation is completed, the gas is sucked out from the second air outlet pipe 32, so that the core components of the vacuum pump can be protected from being polluted, the service life of the vacuum pump is prolonged, and at this time, the first vacuum dust removing tank 1 can perform the work of cleaning, filter element replacement, and the like.

According to the utility model discloses dust pelletizing system 100, through set up balance pipe 5 between first vacuum dust removal jar 1 and second vacuum dust removal jar 3, and set up the first valve 51 that is used for controlling 5 break-make of balance pipe on balance pipe 5, combine the control to first valve 51, can reduce the pressure fluctuation of first vacuum dust removal jar 1 and second vacuum dust removal jar 3 when the dust removal switches, guarantee the reliability of vacuum pump and the 100 work of dust pelletizing system, and then guarantee the reliability of single crystal growing furnace equipment work.

Furthermore, a second valve 111 for controlling the on-off of the first air inlet pipe 11 is arranged on the first air inlet pipe 11, a third valve 311 for controlling the on-off of the second air inlet pipe 31 is arranged on the second air inlet pipe 31, a fourth valve 121 for controlling the on-off of the first air outlet pipe 12 is arranged on the first air outlet pipe 12, and a fifth valve 321 for controlling the on-off of the second air outlet pipe 32 is arranged on the second air outlet pipe 32. Thereby facilitating control of whether the first vacuum cleaner tank 1 and the second vacuum cleaner tank 3 participate in dust removal. For example, when the second valve 111, the third valve 311, the fourth valve 121 and the fifth valve 321 are opened, the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 both participate in dust removing work, so that the dust removing efficiency can be improved; in addition, the second valve 111 and the fourth valve 121 are opened, the third valve 311 and the fifth valve 321 are closed, only the first vacuum dust-removing tank 1 participates in dust-removing operation, the third valve 311 and the fifth valve 321 are opened, the second valve 111 and the fourth valve 121 are closed, and only the second vacuum dust-removing tank 3 participates in dust-removing operation.

When the dust removing system 100 performs dust removing operation, at least one of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 can be controlled to participate in the operation, when the dust removing system 100 needs to perform cleaning, one of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 can be controlled to operate through the states of the second valve 111, the third valve 311, the fourth valve 121 and the fifth valve 321, and the other one performs corresponding cleaning or filter element replacement, etc.

Preferably, when the dust removing system 100 starts to operate, the second valve 111 and the fourth valve 121 may be opened, the third valve 311 and the fifth valve 321 may be closed, the first vacuum dust removing tank 1 may be operated, and the second vacuum dust removing tank 3 may not be operated. Specifically, under the action of the vacuum pump, gas enters the first air inlet pipe 11 from the inlet pipe 14, dust removal treatment is performed in the first vacuum dust removal tank 1, and the gas is sucked out from the first air outlet pipe 12 after dust removal is finished, so that the core components of the vacuum pump can be protected from being polluted, and the service life of the vacuum pump is prolonged. After the operation for a set time (for example, 12h), the second valve 111 and the fourth valve 121 may be closed, and the third valve 311 and the fifth valve 321 may be opened, so that the first vacuum dust removing tank 1 is not operated and the second vacuum dust removing tank 3 is operated. Specifically, under the action of the vacuum pump, gas enters the second air inlet pipe 31 from the inlet pipe 14, dust removal treatment is performed in the second vacuum dust removal tank 3, the gas is sucked out from the second air outlet pipe 32 after dust removal is finished, the core components of the vacuum pump can be protected from being polluted, the service life of the vacuum pump is prolonged, and corresponding cleaning or filter element replacement and other operations can be performed on the first vacuum dust removal tank 1 at the moment.

After the dust removal operation of the second vacuum dust removal tank 3 is set for a set time, the second valve 111 and the fourth valve 121 can be opened, the third valve 311 and the fifth valve 321 are closed, the first vacuum dust removal tank 1 performs dust removal operation, the second vacuum dust removal tank 3 is cleaned or replaced by a filter element, and the like, the first vacuum dust removal tank 1 and the second vacuum dust removal tank 3 perform dust removal and cleaning switching with each other, so that the normal operation of the dust removal system 100 when the filter element is cleaned or replaced in the first vacuum dust removal tank 1 and the second vacuum dust removal tank 3 can be ensured, the shutdown times of the single crystal furnace equipment are reduced, and the improvement of the production efficiency is facilitated.

In addition, one end of the balance pipe 5 is communicated with the first vacuum dust removal tank 1, the other end of the balance pipe 5 is communicated with the second vacuum dust removal tank 3, the balance pipe 5 is provided with a first valve 51 for controlling the on-off of the balance pipe 5, the first valve 51 is opened, the first vacuum dust removal tank 1 can be communicated with the second vacuum dust removal tank 3, and the pressure in the first vacuum dust removal tank 1 and the pressure in the second vacuum dust removal tank 3 can be gradually balanced. When the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are switched, the first valve 51 can be opened firstly, so that the pressure in the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 is substantially balanced, and then the states of the second valve 111, the third valve 311, the fourth valve 121 and the fifth valve 321 are changed, the pressure fluctuation in the switching process of the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 can be reduced, and the working reliability of the vacuum pump, the dust removing system 100 and the single crystal furnace equipment is ensured.

For example, when the dust removing system 100 starts to operate, the second valve 111 and the fourth valve 121 may be opened, the first valve 51, the third valve 311, and the fifth valve 321 may be closed, the first vacuum dust removing tank 1 may be operated, and the second vacuum dust removing tank 3 may not be operated. Specifically, under the action of the vacuum pump, gas enters the first air inlet pipe 11 from the inlet pipe 14, dust removal treatment is performed in the first vacuum dust removal tank 1, and the gas is sucked out from the first air outlet pipe 12 after dust removal is finished, so that the core components of the vacuum pump can be protected from being polluted, and the service life of the vacuum pump is prolonged. After the operation is performed for a set time (for example, 12 hours), the first valve 51 may be opened first, so that the pressures in the first vacuum dust collecting tank 1 and the second vacuum dust collecting tank 3 are slowly balanced, when the vacuum pressure values in the first vacuum dust collecting tank 1 and the second vacuum dust collecting tank 3 are different by 0.5Torr, the first valve 51 is closed, at this time, the third valve 311 may be slowly opened, and when the third valve 311 is fully opened, the total proportion of the opening degrees of the fourth valve 121 and the fifth valve 321 is controlled to be 100% (for example, the opening degree of the fourth valve 121 is 80%, the opening degree of the fifth valve 321 is 20%, until the fourth valve 121 is fully closed, and the fifth valve 321 is fully opened), so as to reduce the pressure fluctuation during the switching process of the first vacuum dust collecting tank 1 and the second vacuum dust collecting tank 3. When fourth valve 121 closes completely, close second valve 111 rapidly, make second vacuum dust removal jar 3 independently carry out dust removal work, it is specific, under the effect of vacuum pump, make gas get into second intake pipe 31 from advancing pipe 14, remove dust in second vacuum dust removal jar 3 and handle, after the dust removal is finished, by the suction from second outlet duct 32, can protect the vacuum pump core part not to pollute, the life of extension vacuum pump, work such as first vacuum dust removal jar 1 can be cleared up or the filter core is changed this moment.

In some embodiments of the present invention, the first dust collector 2 and the second dust collector 4 have the same structure, so that the first vacuum dust collecting tank 1 and the second vacuum dust collecting tank 3 have the same structure, thereby reducing the number of the components of the dust collecting system 100 and simplifying the structure of the dust collecting system 100.

Specifically, as shown in fig. 1, the first dust removing device 2 includes a filter screen 21 and a spray rod 221, the filter screen 21 is disposed in the first vacuum dust removing tank 1, the gas entering the first vacuum dust removing tank 1 is filtered by the filter screen 21, and the oxide carried in the gas can be adsorbed on the filter screen 21, so as to achieve the gas filtering effect, ensure that the core component of the vacuum pump is not polluted, and prolong the service life of the vacuum pump. Correspondingly, the second dust removing device 4 comprises a filter screen 21, the filter screen 21 is arranged in the second vacuum dust removing tank 3, gas entering the second vacuum dust removing tank 3 is filtered by the filter screen 21, and oxides carried in the gas can be adsorbed on the filter screen 21, so that the gas filtering effect is achieved, the core component of the vacuum pump is prevented from being polluted, and the service life of the vacuum pump is prolonged.

Further, as shown in fig. 1 and 2, the screen 21 is formed such that an annular nozzle bar 221 extending in the circumferential direction of the first vacuum cleaner canister 1 is located in the annular space of the screen 21, the nozzle bar 221 extends in the radial direction of the screen 21, the nozzle bar 221 has a first flow passage extending in the length direction thereof, both ends in the length direction of the nozzle bar 221 have nozzles communicating with the first flow passage, and the nozzle bar 221 is rotatable along the axis of the screen 21 and movable in the axis direction of the screen 21. The dust removing system 100 further comprises an atomizing device 7, the atomizing device 7 is used for generating high-pressure atomized water vapor, and the atomizing device 7 is connected with the first flow passage.

When first vacuum cleaner jar 1 cleared up, spray lance 221 along the axial direction reciprocating motion of filter screen 21 and accompanying 360 rotations, high pressure atomizing water that atomizing device 7 produced gets into first flow path, and the nozzle will high pressure atomizing aqueous vapor sandblast on filter screen 21, will adsorb the oxide on filter screen 21 and fall, realize the washing to filter screen 21. After the operation is performed for a preset time, for example, ten minutes, the water inlet part in the atomizing device 7 is closed, the compressed air is still in an open state, the spray rod 221 continues to reciprocate along the axial direction of the filter screen 21 and rotates 360 degrees, the filter screen 21 is dehydrated under the action of the compressed air, and the filter screen 21 completes the dehydration within a certain time, for example, ten minutes, so that the cleaning operation of the first vacuum dust removing tank 1 is completed. The application of first dust collector 2 is in clearance work in-process self-cleaning and stoving, need not to unpack first vacuum cleaning jar 1 apart and carry out the secondary clean, and the overlength time does not need the clearance of human intervention, and the performance promotes, and the manpower reduces, and efficiency improves.

Accordingly, the screen 21 in the second vacuum cleaner tank 3 is formed in an annular shape extending in the circumferential direction of the second vacuum cleaner tank 3, the second dust removing device 4 further includes a spray bar 221, the spray bar 221 is located in the annular space of the screen 21, the spray bar 221 extends in the radial direction of the screen 21, the spray bar 221 has a first flow passage extending in the length direction thereof, both ends in the length direction of the spray bar 221 have nozzles communicating with the first flow passage, and the spray bar 221 is rotatable along the axis of the screen 21 and movable in the axis direction of the screen 21. The first flow channel is connected with an atomizing device 7, and the atomizing device 7 is used for generating high-pressure atomized water vapor.

When the second vacuum dust removing tank 3 is cleaned, the spray rod 221 reciprocates along the axial direction of the filter screen 21 and rotates by 360 degrees, high-pressure atomized water vapor generated by the atomizing device 7 enters the first flow channel, the nozzle sprays the high-pressure atomized water vapor onto the filter screen 21, oxides adsorbed on the filter screen 21 are washed off, and the filter screen 21 is cleaned. After the operation is performed for a preset time, for example, ten minutes, the water inlet part in the atomizing device 7 is closed, the compressed air is still in an open state, the spray rod 221 continues to reciprocate along the axial direction of the filter screen 21 and rotates 360 degrees, the filter screen 21 is dehydrated under the action of the compressed air, and the filter screen 21 completes the dehydration within a certain time, for example, ten minutes, so that the cleaning operation of the second vacuum dust removing tank 3 is completed. The second dust collector 4 of this application need not to unpack apart second vacuum cleaning jar 3 and carry out the secondary clean at clearance work in-process self-cleaning and stoving, and the overlength time does not need the human intervention to clear up, and the performance promotes, and the manpower reduces, and efficiency improves.

Further, as shown in fig. 1, the first dust removing device 2 further includes a cleaning rod 222, the cleaning rod 222 extends in the axial direction of the filter screen 21, the spray rod 221 is connected to one end of the cleaning rod 222, which is far away from the spray rod 221, extends out of the first vacuum dust removing tank 1, the cleaning rod 222 has a second flow passage extending along the length direction thereof, the first flow passage is communicated with the second flow passage, and one end of the second flow passage, which is far away from the first flow passage, is connected with the atomizing device 7. Thereby, the atomizing device 7 can be arranged outside the first vacuum dust collecting tank 1, and the arrangement of the atomizing device 7 is convenient. Optionally, cleaning rod 222 extends along a straight line, however, the present invention is not limited thereto, and cleaning rod 222 may also extend along an axial direction spiral of filter screen 21, etc.

In addition, a magnetic fluid sealing device 9 is arranged in the second flow channel, so that the second flow channel can be sealed when the first vacuum dust removal tank 1 performs dust removal, and the vacuum environment of the first vacuum dust removal tank 1 is ensured.

Correspondingly, the second dust removing device 4 further comprises a cleaning rod 222, the cleaning rod 222 extends in the axial direction of the filter screen 21, the spray rod 221 is connected to one end of the cleaning rod 222, one end, far away from the spray rod 221, of the cleaning rod 222 extends out of the second vacuum dust removing tank 3, the cleaning rod 222 is provided with a second flow channel extending in the length direction of the cleaning rod, the first flow channel is communicated with the second flow channel, and one end, far away from the first flow channel, of the second flow channel is connected with the atomizing device 7. Thereby, the atomizing device 7 can be arranged outside the second vacuum cleaner tank 3, and the arrangement of the atomizing device 7 is convenient. Optionally, cleaning rod 222 extends along a straight line, however, the present invention is not limited thereto, and cleaning rod 222 may also extend along an axial direction spiral of filter screen 21, etc. In addition, a magnetic fluid sealing device 9 is arranged in the second flow channel, so that the second flow channel can be sealed when the second vacuum dust removal tank 3 performs dust removal, and the vacuum environment of the first vacuum dust removal tank 1 is ensured.

In some embodiments of the present invention, the dust removing system 100 further includes a water-gas separating device 6, the water-gas separating device is used for separating water from gas, the water-gas separating device 6 is connected to the first vacuum dust removing tank 1 through the first separating pipe 13, and the first separating pipe 13 is provided with a sixth valve 131 for controlling the on-off of the first separating pipe 13.

When the first vacuum dust removal tank 1 is cleaned, the sixth valve 131 is opened, the spray rod 221 reciprocates along the axial direction of the filter screen 21 and rotates by 360 degrees, high-pressure atomized water generated by the atomizing device 7 enters the first flow channel, the nozzle sprays high-pressure atomized water onto the filter screen 21 to flush oxides adsorbed on the filter screen 21, and the mixed oxide water in the first vacuum dust removal tank 1 is brought into the water-gas separation device 6 for separation. After the operation is performed for a preset time, for example, ten minutes, the water inlet part in the atomizing device 7 is closed, the compressed air is still in an open state, the spray rod 221 continues to reciprocate along the axial direction of the filter screen 21 and rotates 360 degrees, the filter screen 21 is dehydrated under the action of the compressed air, and the filter screen 21 completes the dehydration within a certain time, for example, ten minutes, so that the cleaning operation of the first vacuum dust removing tank 1 is completed.

Correspondingly, the second vacuum dust removing tank 3 is connected with the water-gas separating device 6 through the second separating pipe 33, the second separating pipe 33 is provided with a seventh valve 331 for controlling the on-off of the second separating pipe 33, when the second vacuum dust removing tank 3 is cleaned, the seventh valve 331 is opened, the spray rod 221 reciprocates along the axial direction of the filter screen 21 and rotates along with 360 degrees, high-pressure atomized water gas generated by the atomizing device 7 enters the first flow passage, the nozzle sprays the high-pressure atomized water gas on the filter screen 21 to flush oxide adsorbed on the filter screen 21, and oxide mixed water in the second vacuum dust removing tank 3 is brought into the water-gas separating device 6 for separation. After the operation is performed for a preset time, for example, ten minutes, the water inlet part in the atomizing device 7 is closed, the compressed air is still in an open state, the spray rod 221 continues to reciprocate along the axial direction of the filter screen 21 and rotates 360 degrees, the filter screen 21 is dehydrated under the action of the compressed air, and the filter screen 21 completes the dehydration within a certain time, for example, ten minutes, so that the cleaning operation of the second vacuum dust removing tank 3 is completed.

Further, as shown in fig. 1 and fig. 2, the water-gas separation device 6 has a gas outlet 61, and an eighth valve 611 for controlling the on-off of the gas outlet 61 is disposed at the gas outlet 61. When the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 are cleaned, the eighth valve 611 can be opened, so that the separated gas can be discharged, and the normal operation of the cleaning work is ensured. Further, the dust removing system 100 further comprises a power evacuation pipe device 8, and an air inlet of the power evacuation pipe device 8 is communicated with the gas outlet 61 for extracting the gas in the water-gas separating device 6. Therefore, the gas in the water-gas separation device 6 can be conveniently pumped out, and the working reliability of the water-gas separation device 6 is ensured. In addition, when first vacuum dust removal jar 1 and second vacuum dust removal jar 3 carry out the cleaning work, under the negative pressure effect of power evacuation pipe device 8, the separation can be carried out in the easier flow direction aqueous vapor separator 6 to the oxide mixed water in first vacuum dust removal jar 1 and the second vacuum dust removal jar 3, and in the stoving stage, under the convection action of the negative pressure of power evacuation pipe device 8 and the malleation of compressed air, carry out dehydration to filter screen 21 more easily, thereby the casing improves the clearance effect to first vacuum dust removal jar 1 and second vacuum dust removal jar 3.

Optionally, the gas outlet of the power evacuation pipe device 8 is connected with the atomization device 7, so that the gas after water-gas separation can enter the atomization device 7 again to be compressed for reuse, and the utilization rate is improved.

In some embodiments of the present invention, as shown in fig. 1 and fig. 2, the water-gas separation device 6 further has a water outlet 62, the water outlet 62 is located below the gas outlet 61, and a ninth valve 621 for controlling the on-off of the water outlet 62 is disposed at the water outlet 62. After the first vacuum dust removing tank 1 and the second vacuum dust removing tank 3 complete the dehydration treatment, the ninth valve 621 can be opened to discharge the water in the water-gas separating device 6 under the action of gravity, and the ninth valve 621 is closed after the water discharge is finished.

In some embodiments of the present invention, as shown in fig. 1, the first air inlet pipe 11 and the first air outlet pipe 12 are both disposed on the peripheral wall of the first vacuum dust collecting tank 1, and the first air inlet pipe 11 is located below the first air outlet pipe 12, so that the gas can enter the first vacuum dust collecting tank 1 from below, and is discharged from the first air outlet pipe 12 above, which is beneficial to the deposition of the oxide, and can improve the dust collecting effect of the first vacuum dust collecting tank 1.

The second air inlet pipe 31 and the second air outlet pipe 32 are both arranged on the peripheral wall of the second vacuum dust removing tank 3, and the second air inlet pipe 31 is positioned below the second air outlet pipe 32. Therefore, the gas enters the second vacuum dust removing tank 3 from the lower part and is discharged from the second gas outlet pipe 32 from the upper part, the deposition of oxides is facilitated, and the dust removing effect of the second vacuum dust removing tank 3 can be improved.

The single crystal furnace apparatus according to an embodiment of the present invention is described in detail below.

The furnace body has an outlet which is communicated with an inlet pipe 14, and an inlet of the vacuum pump is communicated with an outlet pipe 15. Under the action of the vacuum pump, gas generated in the furnace body enters the dust removal system 100 for dust removal treatment, so that the dust removal treatment of the gas in the single crystal furnace is realized.

According to the utility model discloses single crystal growing furnace equipment, through set up balance pipe 5 between first vacuum dust removal jar 1 and second vacuum dust removal jar 3, and set up the first valve 51 that is used for controlling the break-make of balance pipe 5 on balance pipe 5, and combine the control to second valve 111, third valve 311, fourth valve 121 and fifth valve 321, the pressure fluctuation of first vacuum dust removal jar 1 and second vacuum dust removal jar 3 when the dust removal switches can be reduced, guarantee the reliability of vacuum pump and dust pelletizing system 100 work, and then guarantee the reliability of single crystal growing furnace equipment work.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A dust extraction system, comprising:

the first vacuum dust removal tank is provided with a first dust removal device and is provided with a first air inlet pipe and a first air outlet pipe;

the second vacuum dust removal tank is provided with a second dust removal device and a second air inlet pipe and a second air outlet pipe, the first air inlet pipe and the second air inlet pipe are both communicated with the inlet pipe, and the first air outlet pipe and the second air outlet pipe are both communicated with the outlet pipe; one end of the balance pipe is communicated with the first vacuum dust removal tank, the other end of the balance pipe is communicated with the second vacuum dust removal tank, a first valve for controlling the on-off of the balance pipe is arranged on the balance pipe,

and the first vacuum dust removal tank and the second vacuum dust removal tank both remove dust from gas in the furnace body, and at least one of the first vacuum dust removal tank and the second vacuum dust removal tank is in a working state through switching of the first valve.

2. The dedusting system according to claim 1, wherein a second valve for controlling the on-off of the first air inlet pipe is arranged on the first air inlet pipe, a third valve for controlling the on-off of the second air inlet pipe is arranged on the second air inlet pipe, a fourth valve for controlling the on-off of the first air outlet pipe is arranged on the first air outlet pipe, and a fifth valve for controlling the on-off of the second air outlet pipe is arranged on the second air outlet pipe.

3. The dust removal system of claim 2, wherein the first dust removal device comprises:

a filter screen provided in the first vacuum dust-removing tank, the filter screen being formed in a ring shape extending in a circumferential direction of the first vacuum dust-removing tank;

a spray bar located within the annular space of the filter screen, the spray bar extending in a radial direction of the filter screen, the spray bar having a first flow passage extending in a length direction thereof, both ends of the spray bar in the length direction having nozzles communicating with the first flow passage, the spray bar being rotatable along an axis of the filter screen and movable along the axis direction of the filter screen,

the dust removal system further includes:

and the atomizing device is used for generating high-pressure atomized water vapor and is connected with the first flow channel.

4. The dust extraction system of claim 3, wherein the first dust extraction device further comprises:

the clearance pole, the clearance pole is in extend in the axial direction of filter screen, the spray lance is connected the one end of clearance pole, keeping away from of clearance pole the one end of spray lance is stretched out first vacuum cleaner jar, the clearance pole has the second runner that extends along its length direction, first runner with second runner intercommunication, keeping away from of second runner the one end of first runner with atomizing device connects.

5. The dusting system of claim 3, further comprising:

the water-gas separating device is used for separating water from gas, the water-gas separating device is connected with the first vacuum dust removal tank through a first separating pipe, and a sixth valve used for controlling the on-off of the first separating pipe is arranged on the first separating pipe.

6. The dust removal system of claim 5, wherein the first dust removal device and the second dust removal device have the same structure, the second vacuum dust removal tank is connected with the water-gas separation device through a second separation pipe, and a seventh valve for controlling the on-off of the second separation pipe is arranged on the second separation pipe.

7. The dust removal system of claim 5 or 6, wherein the water-gas separation device has a gas outlet, and an eighth valve for controlling the on-off of the gas outlet is arranged at the gas outlet, and the dust removal system further comprises:

and the air inlet of the power evacuation pipeline device is communicated with the gas outlet and is used for pumping out the gas in the water-gas separation device.

8. The dedusting system according to claim 7, wherein the water-gas separation device further comprises a water outlet, the water outlet is located below the gas outlet, and a ninth valve for controlling the on-off of the water outlet is arranged at the water outlet.

9. The dust removal system of claim 1, wherein the first inlet pipe and the first outlet pipe are both disposed on a peripheral wall of the first vacuum dust collection tank, and the first inlet pipe is located below the first outlet pipe;

or the second air inlet pipe and the second air outlet pipe are both arranged on the peripheral wall of the second vacuum dust removal tank, and the second air inlet pipe is positioned below the second air outlet pipe.

10. A single crystal furnace apparatus, comprising:

a furnace body having an outlet;

the dusting system of any of claims 1-9, the outlet in communication with the inlet pipe;

and the inlet of the vacuum pump is communicated with the outlet pipe.

Images