CN214671828U - Macro-micro precision positioning platform based on combination of stick-slip inertia and magnetic suspension driving - Google Patents
Macro-micro precision positioning platform based on combination of stick-slip inertia and magnetic suspension driving Download PDFInfo
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- CN214671828U CN214671828U CN202121013655.4U CN202121013655U CN214671828U CN 214671828 U CN214671828 U CN 214671828U CN 202121013655 U CN202121013655 U CN 202121013655U CN 214671828 U CN214671828 U CN 214671828U
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Abstract
The utility model relates to a macro-micro precision positioning platform based on stick-slip inertia and magnetic suspension drive combine belongs to positioning platform technical field, and macro-motion position revolving stage passes through bolted connection on initiative pivot I, and macro-motion horizontal revolving stage passes through bolted connection on initiative pivot II, and micro-motion positioning platform passes through bolted connection on the U type workstation of macro-motion horizontal revolving stage. The mechanism adopts stacked piezoelectric ceramics and a motor as main power sources, the macro-motion horizontal turntable rotates and is powered by a hollow shaft motor, the micro-motion platform is driven by the stacked piezoelectric ceramics and is used as a displacement amplification mechanism through a bridge hinge to realize stick-slip inertial drive, meanwhile, the stick-slip inertia and the direct current motor are mutually matched to inhibit the backspacing displacement generated by the stick-slip driving, the motion continuity of the micro-motion positioning platform is kept, the positioning platforms in the X direction and the Y direction are positioned on the same plane, the performance is excellent, the coupling can be eliminated, the structure is compact, the volume is small, the continuous driving is realized, the magnetic suspension mechanism realizes the Z direction motion, the Z direction motion precision is higher, the controllability of the Z direction motion of the platform is increased, the purpose of large stroke and high precision is realized by combining the micro-motion positioning platform and the macro-motion two-dimensional rotary table, and the working effect of the positioning platform is obviously improved.
Description
Technical Field
The utility model relates to a precision machine structure technical field, in particular to macro-micro precision positioning platform based on stick-slip inertia and magnetic suspension drive combine.
Background
The turntable mechanism is widely applied to industry and military, has different purposes and different forms of the turntable, in order to improve various performances of the turntable, some students at home and abroad begin to pay attention to the research and application of the micro-motion positioning platform widely in recent years, and have researched the micro-motion positioning platform with good performance, in particular to a piezoelectric stick-slip driver which is developed rapidly in recent years, the piezoelectric driver based on the stick-slip driving principle is widely applied to micro-motion due to the advantages of simple structure, high precision, large stroke, electromagnetic interference resistance and the like, but the non-linear factors such as hysteresis and creep in the piezoelectric driving can cause unstable motion and low positioning precision, the open-loop stepping driving also has system errors, the positioning precision can be influenced, meanwhile, when a load is too heavy, the working efficiency of the stick-slip driving is seriously influenced, and the stick-slip driving can generate a section of negative displacement when backing back, thereby affecting the overall positioning accuracy.
For the reasons, the problems still faced by the existing two-dimensional rotary table and the micro-motion positioning platform are as follows: (1) most of the existing traditional two-dimensional rotary tables adopt two one-dimensional motion platforms vertically superposed to realize two-dimensional motion. However, the two-dimensional micro-motion platform adopting the connection mode has the defects of accumulated errors caused by superposition, large volume, incapability of continuous driving and the like, and the stick-slip driving applied by the two-dimensional turntable is mainly driven by the friction force generated by the mutual friction of two or more objects, but the backspacing displacement can be generated when the stick-slip movement is finished every time, so that the positioning precision and the efficiency of the whole micro-motion platform can be influenced. (2) Magnetic suspension carries out suspension and non-contact stroke motion by the principle of like poles repelling each other and opposite poles attracting each other, but the braking capability of the magnetic suspension is unreliable due to the non-contact motion, so that the working precision of the whole micro-motion positioning platform is influenced. (3) In the existing traditional two-dimensional rotary table, most of the rotary tables are large in stroke but low in precision, high in precision but small in stroke, and therefore the two-dimensional rotary table cannot meet the working requirements of large stroke and high precision at the same time.
Disclosure of Invention
The utility model provides a macro-micro precision positioning platform based on stick-slip inertia and magnetic suspension drive combine, be used for solving current traditional stick-slip driver to the regulation and control problem of frictional force, through in hinge fixing device department, including DC motor and linear guide, when taking place to roll back, DC motor makes the connecting block drive the hinge through linear guide and removes, realize continuous drive, act on X and Y through the magnetic suspension device to the drive arrangement below, coupling in the motion has been avoided, drive through pile type piezoceramics driver, realize accurate fine motion location, and utilize the bridge type hinge as power transmission and displacement amplification mechanism, the technical requirement of high accuracy and big stroke has been realized.
The technical scheme adopted by the utility model is as follows: the positioning device comprises a macro-motion azimuth turntable, a macro-motion horizontal turntable and a micro-motion positioning platform, wherein the macro-motion horizontal turntable is connected to the macro-motion azimuth turntable through a bolt, and the micro-motion positioning platform is connected to the macro-motion azimuth turntable through a bolt.
Macro-motion azimuth turntable comprising: hollow shaft motor I, subframe, initiative pivot I, encoder I and tapered roller bearing, hollow shaft motor I pass through bolted connection and be in the subframe on, initiative pivot I with the subframe pass through tapered roller bearing link to each other, encoder I link firmly in hollow shaft motor I on.
Macro-motion horizontal rotary table comprises: hollow shaft motor II, initiative pivot II, driven spindle, main frame, U type workstation, encoder II and angular contact ball bearing, hollow shaft motor II pass through bolted connection the main frame, initiative pivot II pass through angular contact ball bearing connect the main frame on, driven spindle pass through angular contact ball bearing connect the main frame on, U type workstation pass through bolted connection initiative pivot II with driven spindle between, encoder II link firmly driven spindle on.
The utility model discloses fine motion positioning platform includes: the X-Y-Z positioning device comprises an X-axis forward positioning platform, a Z-axis forward positioning platform, a Y-axis forward positioning platform, an X-axis backward positioning platform, a Z-axis backward positioning platform, a Y-axis backward positioning platform, a Z-axis backward positioning platform and a magnetic suspension bearing platform, wherein the four positioning platforms are distributed in a way that the magnetic suspension bearing platform rotates by 90 degrees at the center and are respectively connected onto the magnetic suspension bearing platform through bolts, the course axis positioning platform is glued onto the resetting platform, and the pitch axis positioning platform is connected onto the course axis positioning platform through bolts.
X axle forward to and Z to location platform include: the device comprises a magnetic suspension bearing platform, an electromagnet protection cover, a Z-direction displacement track, a Z-direction driving electromagnet, a permanent magnet, a positioning platform base, a displacement track, a guide rail groove, an electromagnet, a stick-slip inertia driving unit, a displacement slide block, a guide rail supporting plate and a Z-direction slide block. Electromagnet protective cover with magnetic suspension load-bearing platform pass through bolted connection, Z to displacement track pass through bolted connection magnetic suspension load-bearing platform on, Z to driving electromagnet pass through bolted connection magnetic suspension load-bearing platform on, the permanent magnet gluing at positioning platform base lower surface, the electromagnet pass through bolted connection displacement slider on, stick and slide inertia drive unit pass through bolted connection positioning platform base on, the displacement slider pass through the displacement track install the guide rail inslot, guide rail supporting plate with positioning platform base pass through bolted connection, positioning platform base with guide rail supporting plate pass through bolted connection, Z to the slider with positioning platform base pass through bolted connection, X axle after to and Z to positioning platform, The Y-axis forward positioning platform and the Z-axis backward positioning platform are the same as the X-axis forward positioning platform and the Z-axis forward positioning platform in structure and are only different in installation position, the four positioning platforms are rotationally distributed by 90 degrees at the center of the magnetic suspension bearing platform, when the platform needs to move in the Z direction, the Z-direction driving electromagnet is electrified to enable the electromagnet to be the same as the permanent magnet in magnetism, the permanent magnet pushes the positioning platform base to move in the Z-axis direction through the principle that opposite poles repel each other, the electromagnet is contacted below the course axis positioning platform, the Z-direction moving track ensures the accuracy of the Z-direction movement, the electromagnet is electrified and adsorbed below the course axis positioning platform to move the course axis positioning platform to the height required by working, and the Z-direction driving electromagnet controls the magnetic force through controlling the magnitude of current so as to control the movement of the course axis platform in the Z-axis direction And (2) displacing, wherein after the Z-direction movement of the course axis positioning platform is completed, when the horizontal direction movement is carried out, one direction electromagnet keeps an electrified state, the other three direction electromagnets are not electrified, the platform where the three electromagnets are positioned is descended under the control of the Z-direction magnetic suspension driving device, the displacement slide block is driven by the inertial stick-slip driver to move forwards along the displacement track in the horizontal direction, at the moment, the electromagnet drives the course axis positioning platform to move, and the X-axis forward direction positioning platform, the Z-axis backward direction positioning platform, the Y-axis backward direction positioning platform and the Z-axis backward direction positioning platform jointly control the X-direction movement, the Y-direction movement and the Z-direction movement of the course axis positioning platform.
Platform that resets include: go up reset platform, reset connecting block, X to spring, Y to spring, lower reset platform, magnet, split ring housing screw, Z to guide rail and Z to guide rail cover. The upper reset platform is connected with the course shaft positioning platform through a bolt, the reset connecting block is respectively fixedly connected with the X-direction spring and the Y-direction spring, the magnet is connected with the lower reset platform through a bolt, the split ring is fastened on the periphery of the Z-direction guide rail sleeve through the split ring compression screw, one end of the Z-direction guide rail is installed on the lower reset platform through a bolt, the other end of the Z-direction guide rail sleeve is installed in the Z-direction guide rail sleeve through a shaft hole in a matched mode, after the movement in the X direction and the Y direction is completed, the split ring compression screw is manually screwed down to lock the Z-direction sliding block, the magnet prevents the overlarge displacement and the track deviation under the action of magnetic force when the course shaft platform moves in the X direction and the Y direction, and after the movement of all devices is completed, the X-direction spring and the Y-direction spring restore under the action of elastic force, thereby driving the course axis positioning platform to recover to the initial position.
Course axle location platform include: the device comprises a course shaft base, a course shaft sleeve, a course shaft, deep groove ball bearings, a stick-slip inertia driving unit and a locking device, wherein the deep groove ball bearings and the course shaft sleeve are arranged on the course shaft base, the stick-slip inertia driving unit is arranged on the course shaft base through bolts, two of the stick-slip inertia driving unit are parallel to an X shaft and are symmetrically distributed with a Y shaft, and are respectively used for controlling the course shaft to rotate along the anticlockwise direction, the locking mechanism is connected on the course shaft base through bolts, 2 stick-slip inertia driving units are symmetrically distributed on a course shaft platform through the course shaft, when the course shaft positioning platform needs to move, the stick-slip inertia driving unit drives the course shaft to further rotate the course shaft so as to achieve the purpose of moving the course shaft positioning platform, and after the movement in the course shaft direction is finished, and manually operating the locking device to lock the course shaft.
Every single move axle positioning platform include: a pitch shaft positioning platform base, a pitch shaft supporting plate, a pitch shaft sleeve, a stick-slip inertia driving unit, a locking device, a pitch shaft locking device bearing plate, a tapered roller bearing and a clamping device, the pitch shaft supporting plate is connected on the pitch shaft positioning platform base through bolts, the stick-slip inertial driving unit has four pitch shafts, the two stick-slip inertia driving units for controlling clockwise rotation are distributed on one side, the two stick-slip inertia driving units for controlling anticlockwise rotation are distributed on the other side, the locking mechanism is connected to the pitch shaft locking device bearing plate through a bolt, the tapered roller bearing and the pitch shaft are mounted on the pitch shaft in a shaft sleeved mode, and the pitch shaft is connected with the clamping device through a bolt. When the pitching shaft positioning platform needs to move, the stick-slip inertia driving unit drives the pitching shaft, so that the pitching shaft rotates, the purpose of moving the pitching shaft positioning platform is achieved, and after the movement in the direction of the pitching shaft is finished, the locking device is manually operated to lock the pitching shaft.
Stick smooth inertia drive unit include: the device comprises a pre-tightening bolt, a stack type piezoelectric ceramic driver, a bridge type hinge, a first protective cover, a direct current motor, a second protective cover, a linear guide rail, a connecting block and a displacement monitor. The stacking type piezoelectric ceramic driver is fixed on the bridge type hinge through the pre-tightening bolt, the direct current motor is installed in the first protective cover and connected with the linear guide rail, the linear guide rail is connected with the bridge type hinge through the connecting block, the displacement monitor is connected with the connecting block, the connecting block is installed in the second protective cover, and the displacement monitor is fixedly connected with the connecting block. The stick-slip inertial driving unit mainly adopts asymmetric sawtooth waves to excite piezoelectric stacks slowly and quickly alternately in the working process, the inverse piezoelectric effect is utilized to excite the stator to generate slow and quick alternative motion deformation, so that the stator and the rotor are in two motion states of 'stick' and 'slip', mechanical motion output is realized under the action of friction force, one end of the bridge hinge is fixedly connected onto the connecting block, the long end of the bridge hinge extrudes the sliding block through the stack type piezoelectric ceramic driver, and meanwhile, the short end of the bridge hinge contracts towards the fixed end to drive the displacement sliding block to move forwards along the displacement track.
Locking device include: base, stud, spring, V type piece and snap ring, stud pass through bolted connection and be in the base upper end, the spring mounting be in the snap ring on, V type piece connect stud on, after the position motion of platform was accomplished, manual rotation stud, make stud on stop device, aim at the opening in base the place ahead, at this moment the spring will stud pass through the snap ring pop out, make V type piece will course axle or pitch axis lock.
Clamping device include: the clamp comprises a clamp connecting frame, a clamp adjusting column, a clamp clamping jaw and a clamp frame, wherein the clamp connecting frame is connected onto the clamp frame through a bolt, the clamp adjusting column is connected onto the clamp frame through a bolt, and the clamping device is used for clamping a measuring object to be measured.
Compared with the prior art, the utility model has the advantages that: (1) the utility model discloses a fine motion positioning platform, X is to the positioning platform to with Y at the coplanar, superior performance, can eliminate the coupling and compact structure, small, when the precision is high, continuous drive has been realized, direct current motor has been combined on the basis of adopting tradition stick-slip on the motion of X and Y platform, in the position of fixed bridge type hinge, with direct current motor and linear guide and displacement monitor, when taking place to roll back, direct current motor makes the connecting block drive bridge type hinge removal through linear guide, make bridge type hinge and displacement slider separately, the phenomenon that the drive of traditional stick-slip rolled back has been avoided producing. (2) The utility model discloses a fine motion positioning platform adopts the magnetic suspension technique in Z to the aspect of moving, restricts with the track again, makes its Z higher to the precision of motion, has increased the controllability of platform Z to the motion. (3) The utility model discloses a revolving stage device, position revolving stage and horizontal rotary table use macro-motion technique to carry out stroke motion by a wide margin, and fine motion positioning platform carries out high accurate motion, adopts macro-motion and fine motion's combination technique for this revolving stage device can also keep the operating requirement of high accuracy when obtaining the stroke by a wide margin.
Drawings
Fig. 1 and 2 are schematic structural diagrams of the overall device of the present invention;
fig. 3 is a schematic structural view of the macro-motion device of the present invention;
fig. 4 is a schematic diagram of the overall structure of the XYZ positioning platform of the present invention;
FIG. 5 is a schematic structural view of the X-axis forward and Z-axis positioning platform of the present invention;
fig. 6 is a schematic structural view of the reduction platform of the present invention;
FIG. 7 is a schematic structural diagram of the stick-slip inertial drive unit of the present invention;
FIG. 8 is a schematic structural view of the course axis positioning platform of the present invention;
fig. 9 and 10 are schematic structural views of the pitch axis positioning platform of the present invention;
fig. 11 and 12 are schematic structural views of the locking device of the present invention;
fig. 13 is a schematic structural view of the holding device of the present invention;
description of reference numerals: the device comprises a macro-motion device 1, an XYZ positioning platform 2, a resetting device 3, a stick-slip inertial driving unit 4, a course axis positioning platform 5, a pitching axis positioning platform 6, a locking device 7 and a clamping device 8. The device comprises a hollow shaft motor I1-1, a subframe 1-2, a driving rotating shaft I1-3, an encoder I1-4, a tapered roller bearing 1-5, a hollow shaft motor II 1-6, a driving rotating shaft II 1-7, a deep groove ball bearing 1-8, a driven rotating shaft 1-9, a main frame 1-10, a U-shaped worktable 1-11, an encoder II 1-12, angular contact ball bearings 1-13, an X-axis forward and Z-direction positioning platform 2-1, a Y-axis forward and Z-direction positioning platform 2-2, an X-axis backward and Z-direction positioning platform 2-3, a Y-axis backward and Z-direction positioning platform 2-4, a magnetic suspension bearing platform 2-5, an electromagnet protective cover 2-1-1, a Z-direction displacement rail 2-1-2, a Z-direction driving electromagnet 2-1-3, 2-1-4 parts of positioning platform base, 2-1-5 parts of permanent magnet, 2-1-6 parts of displacement slider, 2-1-7 parts of displacement track, 2-1-8 parts of guide rail support plate, 2-1-9 parts of electromagnet, 2-1-10 parts of Z-direction slider, 3-1 parts of upper reset platform, 3-2 parts of reset connecting block, 3-3 parts of X-direction spring, 3-4 parts of Y-direction spring, 3-5 parts of lower reset platform, 3-6 parts of Z-direction guide rail, 3-7 parts of split ring, 3-8 parts of Z-direction guide rail sleeve, 3-9 parts of split ring compression screw, 3-10 parts of magnet, 4-1 parts of pre-tightening bolt, 4-2 parts of stacked piezoelectric ceramic driver, 4-3 parts of bridge hinge, 4-4 parts of first protective cover, 4-5 parts of direct current motor, 4-6 parts of a second protective cover, 4-7 parts of a linear guide rail, 4-8 parts of a connecting block, 4-9 parts of a displacement monitor, 5-1 parts of a course shaft base, 5-2 parts of a course shaft sleeve, 5-3 parts of a deep groove ball bearing, 5-4 parts of a course shaft, 6-1 parts of a pitching shaft supporting plate, 6-2 parts of a pitching shaft, 6-3 parts of a tapered roller bearing, 6-4 parts of a pitching shaft sleeve, 6-5 parts of a pitching shaft positioning platform base, 6-6 parts of a pitching shaft locking device bearing plate, 7-1 parts of a base, 7-2 parts of a spring, 7-3 parts of a double-end stud, 7-4 parts of a V-shaped block, 7-5 parts of a clamping ring, 8-1 parts of a clamp adjusting column, 8-2 parts of a clamp clamping jaw, 8-3 parts of a clamp frame and 8-4 parts of a clamp connecting frame.
Detailed Description
As shown in fig. 1 and fig. 2, the overall device of the present invention has a schematic structural diagram: the device comprises a macro-motion device 1, an XYZ positioning platform 2, a resetting device 3, a stick-slip inertial driving unit 4, a course axis positioning platform 5, a pitching axis positioning platform 6, a locking device 7 and a clamping device 8. The macro-motion device 1 is placed on the ground, the XYZ positioning platform 2 is connected with the macro-motion device 1 through bolts, the lower end of the resetting device 3 is connected with the XYZ positioning platform 2 through a bolt, the stick-slip inertial drive 4 is provided with a stick-slip inertial drive of an X axis and a Y axis and a stick-slip inertial drive of a pitch axis and a course axis, the course shaft positioning platform 5 is arranged in the respective platform through bolts, the upper end of the resetting device 3 is connected with the course shaft positioning platform 5 through bolts, the locking device 7 is divided into a locking device for controlling the course axis to move and a locking device for controlling the pitching axis to move, and is respectively connected on the course axis positioning platform 5 and the pitching axis positioning platform 6 through bolts, the pitching shaft positioning platform 6 is arranged on the course shaft positioning platform 5, and the clamping device 8 is connected with the shaft of the pitching shaft positioning platform 6 through a bolt.
As shown in fig. 3, the utility model discloses macro-motion device's structural schematic: the device comprises a hollow shaft motor I1-1, a subframe 1-2, a driving rotating shaft I1-3, an encoder I1-4, a tapered roller bearing 1-5, a hollow shaft motor II 1-6, a driving rotating shaft II 1-7, a deep groove ball bearing 1-8, a driven rotating shaft 1-9, a main frame 1-10, a U-shaped worktable 1-11, an encoder II 1-12 and an angular contact ball bearing 1-13. The hollow shaft motor I1-1 is connected to the subframe 1-2 through bolts, the driving rotating shaft I1-3 is connected with the subframe 1-2 through the tapered roller bearing 1-5, the encoder I1-4 is fixedly connected to the hollow shaft motor I1-6, the hollow shaft motor II 1-6 is connected to the main frame 1-10 through bolts, the driving rotating shaft II 1-7 is connected to the main frame 1-10 through the deep groove ball bearing 1-8, the driven rotating shaft 1-9 is connected to the main frame 1-10 through the angular contact ball bearing 1-13, the U-shaped worktable 1-11 is connected between the driving rotating shaft II 1-7 and the driven rotating shaft 1-9 through bolts, the encoders II 1-12 are fixedly connected to the driven rotating shafts 1-9. The macro-motion device takes the hollow shaft motor I1-1 and the hollow shaft motor II as power sources and respectively controls the macro-motion device to move in a macroscopic manner and rotate in the horizontal direction.
As shown in fig. 4, the utility model discloses XYZ location platform's overall structure schematic diagram: the magnetic suspension bearing platform comprises an X-axis forward positioning platform 2-1, a Y-axis forward positioning platform 2-2, an X-axis backward positioning platform 2-3, a Y-axis backward positioning platform 2-4 and a magnetic suspension bearing platform 2-5, wherein the four positioning platforms are rotationally arranged at 90 degrees from the center of the magnetic suspension bearing platform 2-5 and are connected to the magnetic suspension bearing platform 2-5 through bolts. The X-axis forward and Z-direction positioning platform 2-1 controls the course axis positioning platform 5 to move in the X-axis forward direction and the Z direction, the Y-axis forward and Z-direction positioning platform 2-2 controls the course axis positioning platform 5 to move in the Y-axis forward direction and the Z direction, the X-axis backward and Z-direction positioning platform 2-3 controls the course axis positioning platform 5 to move in the X-axis backward direction and the Z direction, and the Y-axis backward and Z-direction positioning platform 2-4 controls the course axis positioning platform 5 to move in the Y-axis backward direction and the Z direction.
As shown in fig. 5, the utility model discloses it is preceding to the X axle and Z to location platform structure sketch: the device comprises an electromagnet protective cover 2-1-1, a Z-direction displacement track 2-1-2, a Z-direction driving electromagnet 2-1-3, a positioning platform base 2-1-4, a permanent magnet 2-1-5, a displacement slide block 2-1-6, a displacement track 2-1-7, a guide rail supporting plate 2-1-8, an electromagnet 2-1-9, a Z-direction slide block 2-1-10 and an inertial stick-slip driver 4. The Z-direction displacement track 2-1-2 is connected to an electromagnet protective cover 2-1-1 through bolts, the Z-direction driving electromagnet 2-1-3 is connected to the electromagnet protective cover 2-1-1 through bolts, the permanent magnet 2-1-5 is glued to the lower surface of the positioning platform base 2-1-4, the displacement track 2-1-7 is connected with the guide rail supporting plate 2-1-8 through bolts, the stick-slip inertia driving unit 4 is connected to the positioning platform base 2-1-4 through bolts, the displacement slide block 2-1-6 is installed in the guide rail groove through the displacement track 2-1-7, and the guide rail supporting plate 2-1-8 is communicated with the positioning platform base 2-1-4 The electromagnets 2-1-9 are connected with the displacement slide blocks 2-1-6 through bolts, and the Z-direction slide blocks 2-1-10 are connected with the positioning platform bases 2-1-4 through bolts. When the course axis positioning platform 5 needs to move in the Z direction, the Z direction driving electromagnet 2-1-3 is electrified, the magnetism of the Z direction driving electromagnet is the same as that of the permanent magnet 2-1-5, the permanent magnet 2-1-5 pushes the course axis positioning platform 5 to move in the Z direction through the principle of opposite poles repulsion, the X axis forward direction positioning platform 2-1, the Y axis forward direction positioning platform 2-2, the X axis backward direction positioning platform 2-3, the Y axis backward direction positioning platform 2-4 and the Z direction positioning platform 2-4 are contacted with the lower part of the course axis positioning platform 5, the course axis positioning platform 5 is moved to the height required by work, the Z direction driving electromagnet 2-1-3 controls the magnetic force through controlling the magnitude of the current so as to control the movement displacement of the course axis positioning platform 5 in the Z direction, after the Z-direction movement of the course axis positioning platform 5 is completed, when the X-direction forward direction movement is carried out, the electromagnets 2-1-9 are kept in an electrified state, the electromagnets in the other three directions are not electrified, the platform where the electromagnets are located is lowered under the control of the Z-direction driving electromagnet 2-1-3, the displacement slide block 2-1-6 is driven to move forwards along the displacement track 2-1-7 by the inertial stick-slip driver 4 in the horizontal direction, at the moment, the electromagnets 2-1-9 drive the course axis positioning platform 5 above to move, the X-axis forward and Z-direction positioning platform 2-1 and the Y-axis forward and Z-direction positioning platform 2-2, and the X-axis backward and Z-direction positioning platforms 2-3, The Y-axis backward and Z-axis positioning platforms 2-4 have the same structure and are different only in installation position, and the four positioning platforms control the movement of the course axis positioning platform 5 in the X-axis Y-axis Z-axis direction together.
As shown in fig. 6, the utility model discloses platform that resets's structural schematic: the device comprises an upper reset platform 3-1, a reset connecting block 3-2, an X-direction spring 3-3, a Y-direction spring 3-4, a lower reset platform 3-5, a Z-direction guide rail 3-6, a split ring 3-7, a Z-direction guide rail sleeve 3-8, a split ring compression screw 3-9 and a magnet 3-10. The upper reset platform 3-1 is connected with the course shaft positioning platform 5 through a bolt, the reset connecting block 3-2 is respectively fixedly connected with the X-direction spring 3-3 and the Y-direction spring 3-4, the split ring 3-7 is fastened on the periphery of the Z-direction guide rail sleeve 3-8 through the split ring compression screw 3-9, the upper end of the Z-direction guide rail 3-6 is installed on the lower reset platform 3-5 through a bolt, the lower end of the Z-direction guide rail sleeve 3-8 is installed on the Z-direction guide rail sleeve 3-8 through a shaft hole in a matched mode, the Z-direction guide rail sleeve 3-8 is connected on the magnetic suspension bearing platform 2-5 through a bolt, and the magnet 3-10 is connected on the lower reset platform 3-5 through a bolt. The reset device 3 can prevent the overlarge displacement and the deviation of a motion track of the course shaft positioning 5 in the X-direction and Y-direction motions, after all the devices complete the motions, other constraint forces are removed, and the X-direction spring 3-3 and the Y-direction spring 3-4 are elastically deformed under the compression, so that the X-direction spring 3-3 and the Y-direction spring 3-4 are restored under the action of elastic force, and the course shaft positioning platform 6 is driven to restore to the initial position.
As shown in fig. 7, the structure of the stick-slip inertia driving unit of the present invention is schematically illustrated: the device comprises a pre-tightening bolt 4-1, a stack type piezoelectric ceramic driver 4-2, a bridge type hinge 4-3, a first protective cover 4-4, a direct current motor 4-5, a second protective cover 4-6, a linear guide rail 4-7, a connecting block 4-8 and a displacement monitor 4-9. The pre-tightening bolt 4-1 fixes the stacked piezoelectric ceramic driver 4-2 on the bridge hinge 4-3, the stacked piezoelectric ceramic driver 4-2 is electrified to extend to drive the bridge hinge 4-3 to move, the direct current motor 4-5 is installed in the first protective cover 4-4 and connected with the linear guide rail 4-7, the linear guide rail 4-7 is connected with the connecting block 4-8, the connecting block 4-8 is connected with the bridge hinge 4-3 through a bolt to prevent the bridge hinge 4-3 from returning back during displacement, the connecting block 4-8 is installed in the second protective cover 4-6, and the displacement monitor 4-9 is installed on the connecting block 4-8, when the connection piece is retracted, the direct current motor 4-5 drives the bridge type hinge 4-3 to extend through the linear guide rail 4-7 by the connecting block 4-8, so that continuous driving is realized, and the displacement monitor 4-9 is used for monitoring the displacement of the connecting block in real time.
As shown in fig. 8, the utility model discloses course axle location platform's structural schematic: the device comprises a stick-slip inertial drive 4, a course shaft base 5-1, a course shaft sleeve 5-2, a deep groove ball bearing 5-3, a course shaft 5-4 and a locking device 7. The deep groove ball bearing 5-3 and the course shaft sleeve 5-2 are arranged on the course shaft base 5-1, the stick-slip inertial driver 4 is connected to the course axis base 5-1 through a bolt, the locking device 7 is connected on the course shaft base 5-1 through bolts, the stick-slip inertial drive 4 is 4 on the course shaft positioning platform, wherein 2 are a group for controlling the clockwise rotation of the course shaft 5-4, the other 2 are a group for controlling the counterclockwise rotation of the course shaft 5-4, the two groups are mutually and vertically distributed by taking the course shaft 5-4 as the center, and when the course shaft 5-4 is moved, manually operating a locking device 7 to lock the course shaft positioning platform 5.
As shown in fig. 9 and 10, the structure of the pitch axis positioning platform of the present invention is schematically illustrated: the device comprises a stick-slip inertial driver 4, a locking device 7, a pitch shaft supporting plate 6-1, a pitch shaft 6-2, a tapered roller bearing 6-3, a pitch shaft sleeve 6-4, a pitch shaft positioning platform base 6-5, a pitch shaft locking device bearing plate 6-6 and a clamping device 8. The stick-slip inertial drive 4 is connected to the pitch shaft support plate 6-1 through bolts, the tapered roller bearing 6-3 and the pitch shaft sleeve 6-4 are sleeved on the pitch shaft 6-2 together, the pitch shaft support plate 6-1 is connected to the pitch shaft positioning platform base 6-5 through bolts, the pitch shaft locking device bearing plate 6-6 is connected to the pitch shaft support plate 6-1 through bolts, the mirror clamping device 8 is connected to the pitch shaft 6-2 through bolts, the stick-slip inertial drive 4 drives the pitch shaft 6-2 to rotate, the stick-slip inertial drive 4 has 4 pieces on the pitch shaft positioning platform 6, wherein 2 pieces are distributed on the pitch shaft support plate 6-1 in a group, the pitch shaft 6-2 is controlled to rotate clockwise, the other 2 pitch shafts are distributed on the other pitch shaft supporting plate to control the pitch shaft 6-2 to rotate anticlockwise, and after the pitch shaft positioning platform 6 finishes moving, the locking device 7 is manually operated to lock the pitch shaft positioning platform 6.
As shown in fig. 11 and 12, the structure of the locking device of the present invention is schematically illustrated: the novel double-end bolt comprises a base 7-1, a spring 7-2, a double-end bolt 7-3, a V-shaped block 7-4 and a clamping ring 7-5, wherein the double-end bolt 7-3 is connected to the upper end of the base 7-1 through a bolt, the spring 7-2 is installed on the double-end bolt 7-3, the V-shaped block 7-4 is connected to the double-end bolt 7-3, and the clamping ring 7-5 is sleeved on the double-end bolt 7-3. The course shaft positioning platform 5 and the pitching shaft positioning platform 6 are both provided with the locking device 7 with the same structure, when the course shaft positioning platform 5 finishes moving, the locking device 7 is manually operated to lock the course shaft 5-4, and when the pitching shaft positioning platform 6 finishes moving, the locking device 7 is manually operated to lock the pitching shaft 6-2.
As shown in fig. 13, the structure of the clamping device of the present invention is schematically illustrated: comprises a clamp adjusting column 8-1, a clamp claw 8-2, a clamp frame 8-3 and a clamp connecting frame 8-4. The clamp adjusting column 8-1 is connected to the clamp frame 8-3 through a bolt, the clamp jaws 8-2 are installed on the clamp frame 8-3 through holes, the clamp connecting frame 8-4 is connected to the clamp frame 8-3 through a bolt, and the clamp connecting frame 8-4 is connected to the pitching shaft 6-2 through a bolt. At the beginning of the experiment, the required mirror was placed in the middle of the 4 fixture jaws 8-2 and locked by the fixture adjustment posts 8-1. The clamping device 8 is used for clamping a measured object to be measured.
Claims (10)
1. A macro-micro precision positioning platform based on combination of stick-slip inertia and magnetic suspension driving is characterized by comprising: the positioning device comprises a macro-motion azimuth turntable, a macro-motion horizontal turntable and a micro-motion positioning platform, wherein the macro-motion horizontal turntable is connected to the macro-motion azimuth turntable through a bolt, and the micro-motion positioning platform is connected to the macro-motion azimuth turntable through a bolt.
2. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 1, wherein the macro motion azimuth turntable comprises: hollow shaft motor I, subframe, initiative pivot I, encoder I and tapered roller bearing, hollow shaft motor I pass through bolted connection and be in the subframe on, initiative pivot I with the subframe pass through tapered roller bearing link to each other, encoder I link firmly in hollow shaft motor I on.
3. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 1, wherein the macro motion horizontal turntable comprises: hollow shaft motor II, initiative pivot II, driven spindle, main frame, U type workstation, encoder II and angular contact ball bearing, hollow shaft motor II pass through bolted connection the main frame, initiative pivot II pass through angular contact ball bearing connect the main frame on, driven spindle pass through angular contact ball bearing connect the main frame on, U type workstation pass through bolted connection initiative pivot II with driven spindle between, the encoder link firmly driven spindle on.
4. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 1, wherein the micro positioning platform comprises: the X-Y-Z positioning device comprises an X-axis forward positioning platform, a Z-axis forward positioning platform, a Y-axis forward positioning platform, an X-axis backward positioning platform, a Z-axis backward positioning platform, a Y-axis backward positioning platform, a Z-axis backward positioning platform and a magnetic suspension bearing platform, wherein the four positioning platforms are distributed in a way of rotating by 90 degrees in the center of the magnetic suspension bearing platform and are respectively connected onto the magnetic suspension bearing platform through bolts, the course axis positioning platform is glued onto the resetting platform, and the pitch axis positioning platform is connected onto the course axis positioning platform through bolts.
5. The combined stick-slip inertia and magnetic levitation based macro and micro precision positioning platform as claimed in claim 4, wherein said X-axis forward and Z-axis positioning platform comprises: electromagnet protective cover, Z-direction displacement track, Z-direction driving electromagnet, positioning platform base, permanent magnet, displacement track, guide rail groove, electromagnet, stick-slip inertia driving unit, displacement slider, guide rail supporting plate and Z-direction slider, wherein the electromagnet protective cover is connected with the magnetic suspension bearing platform through bolts, the Z-direction displacement track is connected in the electromagnet protective cover through bolts, the Z-direction driving electromagnet is connected on the electromagnet protective cover through bolts, the permanent magnet is glued on the lower surface of the positioning platform base, the electromagnet is connected on the displacement slider through bolts, the stick-slip inertia driving unit is connected on the positioning platform base through bolts, the displacement track is connected with the guide rail supporting plate through bolts, the displacement slider is arranged in the guide rail groove through the displacement track, the guide rail supporting plate is connected with the positioning platform base through a bolt, and the Z-direction sliding block is connected with the positioning platform base through a bolt.
6. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 4, wherein the reset platform comprises: the device comprises an upper reset platform, a reset connecting block, an X-direction spring, a Y-direction spring, a lower reset platform, a magnet, a split ring compression screw, a Z-direction guide rail and a Z-direction guide rail sleeve, wherein the upper reset platform is connected with the course shaft positioning platform through a bolt, the reset connecting block is respectively fixedly connected with the X-direction spring and the Y-direction spring, the magnet is connected on the lower reset platform through a bolt, the split ring is fastened on the periphery of the Z-direction guide rail sleeve through the split ring compression screw, one end of the Z-direction guide rail is installed on the lower reset platform through a bolt, and the other end of the Z-direction guide rail sleeve is installed in the Z-direction guide rail sleeve through a shaft hole in a matched mode.
7. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 4, wherein the course axis positioning platform comprises: the device comprises a course shaft base, a course shaft sleeve, a course shaft, a deep groove ball bearing, a stick-slip inertial driving unit and a locking mechanism, wherein the deep groove ball bearing and the course shaft sleeve are arranged on the course shaft base, the stick-slip inertial driving unit is connected to the course shaft base through a bolt, and the locking mechanism is connected to the course shaft base through a bolt.
8. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic levitation driving as claimed in claim 4, wherein said pitch axis positioning platform comprises: the fixture comprises a pitching shaft positioning platform base, a pitching shaft supporting plate, a pitching shaft sleeve, a stick-slip inertia driving unit, a locking mechanism, a pitching shaft locking device bearing plate, a tapered roller bearing, a fixture connecting frame, a fixture adjusting column, a fixture clamping jaw and a fixture frame, wherein the pitching shaft supporting plate is connected to the pitching shaft positioning platform base through a bolt, the stick-slip inertia driving unit is connected to the pitching shaft supporting plate through a bolt, the locking mechanism is connected to the pitching shaft locking device bearing plate through a bolt, the tapered roller bearing is sleeved on the pitching shaft with the pitching shaft sleeve, the fixture connecting frame is connected to the fixture frame through a bolt, the fixture connecting frame is connected with the pitching shaft through a bolt, the fixture adjusting column is connected to the fixture frame through a bolt, the clamp jaws are mounted on the clamp frame through the holes.
9. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 5, wherein the stick-slip inertia driving unit comprises: pretension bolt, pile type piezoceramics driver, bridge type hinge, a safety cover, DC motor, No. two safety covers, linear guide, connecting block and displacement monitor, pile type piezoceramics driver pass through pretension bolt link firmly the bridge type hinge on, DC motor install a safety cover in and with linear guide link to each other, linear guide with the bridge type hinge pass through the connecting block connect, the connecting block install No. two safety covers in, the displacement monitor with the connecting block link firmly.
10. The combined macro and micro precision positioning platform based on stick-slip inertia and magnetic suspension driving as claimed in claim 7, wherein the locking mechanism comprises: base, stud, spring, V type piece and snap ring, stud install base upper end, spring mounting be in stud on, V type piece connect stud on, the snap ring cover in stud on.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121013655.4U CN214671828U (en) | 2021-05-13 | 2021-05-13 | Macro-micro precision positioning platform based on combination of stick-slip inertia and magnetic suspension driving |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121013655.4U CN214671828U (en) | 2021-05-13 | 2021-05-13 | Macro-micro precision positioning platform based on combination of stick-slip inertia and magnetic suspension driving |
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| CN214671828U true CN214671828U (en) | 2021-11-09 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114670321A (en) * | 2022-03-04 | 2022-06-28 | 刁阿喜 | Multi-angle ceramic glazing machine |
| CN115331727A (en) * | 2022-09-14 | 2022-11-11 | 日照阿米精控科技有限公司 | High-speed accurate revolving stage of many modes of motion of establishing ties |
| CN116922072A (en) * | 2023-09-18 | 2023-10-24 | 广东全丰智能装备有限公司 | Rotation amount monitoring and adjusting device and method for turntable type screw locking device |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
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2021
- 2021-05-13 CN CN202121013655.4U patent/CN214671828U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114670321A (en) * | 2022-03-04 | 2022-06-28 | 刁阿喜 | Multi-angle ceramic glazing machine |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
| CN115331727A (en) * | 2022-09-14 | 2022-11-11 | 日照阿米精控科技有限公司 | High-speed accurate revolving stage of many modes of motion of establishing ties |
| CN115331727B (en) * | 2022-09-14 | 2023-11-03 | 阿米精控科技(山东)有限公司 | High-speed precise turntable with multiple serially connected movement modes |
| CN116922072A (en) * | 2023-09-18 | 2023-10-24 | 广东全丰智能装备有限公司 | Rotation amount monitoring and adjusting device and method for turntable type screw locking device |
| CN116922072B (en) * | 2023-09-18 | 2023-11-17 | 广东全丰智能装备有限公司 | Rotation amount monitoring and adjusting device and method for turntable type screw locking device |
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